ATE285331T1 - Tintenstrahlaufzeichnungskopf und tintenstrahlaufzeichnungsapparat - Google Patents

Tintenstrahlaufzeichnungskopf und tintenstrahlaufzeichnungsapparat

Info

Publication number
ATE285331T1
ATE285331T1 AT01124253T AT01124253T ATE285331T1 AT E285331 T1 ATE285331 T1 AT E285331T1 AT 01124253 T AT01124253 T AT 01124253T AT 01124253 T AT01124253 T AT 01124253T AT E285331 T1 ATE285331 T1 AT E285331T1
Authority
AT
Austria
Prior art keywords
piezoelectric
active portion
inkjet recording
ink
jet recording
Prior art date
Application number
AT01124253T
Other languages
English (en)
Inventor
Masato Shimada
Yoshinao Miyata
Hiroyuki Kamei
Tetsushi Takahashi
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Application granted granted Critical
Publication of ATE285331T1 publication Critical patent/ATE285331T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14241—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14419—Manifold
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Ink Jet (AREA)
AT01124253T 2000-10-16 2001-10-16 Tintenstrahlaufzeichnungskopf und tintenstrahlaufzeichnungsapparat ATE285331T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000315607A JP3491688B2 (ja) 2000-10-16 2000-10-16 インクジェット式記録ヘッド

Publications (1)

Publication Number Publication Date
ATE285331T1 true ATE285331T1 (de) 2005-01-15

Family

ID=18794687

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01124253T ATE285331T1 (de) 2000-10-16 2001-10-16 Tintenstrahlaufzeichnungskopf und tintenstrahlaufzeichnungsapparat

Country Status (5)

Country Link
US (2) US20020051040A1 (de)
EP (1) EP1199172B1 (de)
JP (1) JP3491688B2 (de)
AT (1) ATE285331T1 (de)
DE (1) DE60107917T2 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002248765A (ja) * 2000-12-19 2002-09-03 Fuji Xerox Co Ltd インクジェット式記録ヘッドおよびインクジェット式記録装置
JP2002331663A (ja) * 2001-03-08 2002-11-19 Seiko Epson Corp インクジェット式記録ヘッド及びインクジェット式記録装置
US7497962B2 (en) * 2004-08-06 2009-03-03 Canon Kabushiki Kaisha Method of manufacturing liquid discharge head and method of manufacturing substrate for liquid discharge head
JP4442689B2 (ja) * 2005-02-21 2010-03-31 株式会社村田製作所 圧電薄膜共振子
JP2006231678A (ja) * 2005-02-24 2006-09-07 Seiko Epson Corp 液体噴射ヘッドユニット及び液体噴射装置
JP4553130B2 (ja) * 2005-03-04 2010-09-29 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP2006321059A (ja) * 2005-05-17 2006-11-30 Fuji Xerox Co Ltd 液滴吐出ヘッド、インクジェットプリントヘッド及びインクジェットプリンタ
US7625073B2 (en) 2005-06-16 2009-12-01 Canon Kabushiki Kaisha Liquid discharge head and recording device
JP4321552B2 (ja) 2006-06-07 2009-08-26 セイコーエプソン株式会社 アクチュエータ装置及び液体噴射ヘッド
JP5522346B2 (ja) * 2009-03-09 2014-06-18 セイコーエプソン株式会社 液体噴射ヘッド及びその製造方法並びに液体噴射装置
US9157378B2 (en) * 2010-01-12 2015-10-13 Konica Minolta Holdings, Inc. Method for manufacturing piezoelectric element and piezoelectric element manufactured using same
JP5413598B2 (ja) 2010-03-11 2014-02-12 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP5626512B2 (ja) 2010-04-27 2014-11-19 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置および圧電素子
JP4935965B2 (ja) 2010-05-14 2012-05-23 コニカミノルタホールディングス株式会社 電気機械変換素子
JP2012016900A (ja) * 2010-07-08 2012-01-26 Seiko Epson Corp 液滴吐出ヘッド及び液滴吐出装置
JP5641207B2 (ja) * 2010-08-04 2014-12-17 セイコーエプソン株式会社 圧電素子の製造方法および液滴噴射ヘッドの製造方法
JP5724432B2 (ja) * 2011-02-17 2015-05-27 セイコーエプソン株式会社 圧電アクチュエーター、液体噴射ヘッド、および液体噴射装置
CN104708906B (zh) * 2013-12-17 2017-02-08 珠海赛纳打印科技股份有限公司 液体喷射装置和打印机
JP5874799B2 (ja) * 2014-10-01 2016-03-02 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置および圧電素子
JP6414434B2 (ja) * 2014-10-08 2018-10-31 ローム株式会社 インクジェット装置
JP6981000B2 (ja) * 2016-12-02 2021-12-15 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置及び圧電デバイス
JP6961976B2 (ja) * 2017-03-29 2021-11-05 ブラザー工業株式会社 液体噴射ヘッド

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05286131A (ja) 1992-04-15 1993-11-02 Rohm Co Ltd インクジェットプリントヘッドの製造方法及びインクジェットプリントヘッド
JP3890634B2 (ja) 1995-09-19 2007-03-07 セイコーエプソン株式会社 圧電体薄膜素子及びインクジェット式記録ヘッド
US6315400B1 (en) 1997-07-25 2001-11-13 Seiko Epson Corporation Ink jet recording head and ink jet recorder
JP3374900B2 (ja) 1997-11-26 2003-02-10 セイコーエプソン株式会社 インクジェット式記録ヘッド
DE69810215T2 (de) * 1997-09-01 2003-08-14 Seiko Epson Corp., Tokio/Tokyo Tintenstrahldrucker
US6209994B1 (en) 1997-09-17 2001-04-03 Seiko Epson Corporation Micro device, ink-jet printing head, method of manufacturing them and ink-jet recording device
ATE303250T1 (de) * 1998-06-08 2005-09-15 Seiko Epson Corp Tintenstrahlaufzeichnungskopf und tintenstrahlaufzeichnungsvorrichtung
JP2000272125A (ja) 1999-03-24 2000-10-03 Seiko Epson Corp アクチュエータ装置及びその製造方法並びにインクジェット式記録ヘッド及びインクジェット式記録装置
US6502928B1 (en) * 1998-07-29 2003-01-07 Seiko Epson Corporation Ink jet recording head and ink jet recording apparatus comprising the same

Also Published As

Publication number Publication date
US20020051040A1 (en) 2002-05-02
EP1199172A3 (de) 2003-04-09
US6764167B2 (en) 2004-07-20
EP1199172B1 (de) 2004-12-22
EP1199172A2 (de) 2002-04-24
JP2002120369A (ja) 2002-04-23
US20030214561A1 (en) 2003-11-20
DE60107917D1 (de) 2005-01-27
JP3491688B2 (ja) 2004-01-26
DE60107917T2 (de) 2005-12-08

Similar Documents

Publication Publication Date Title
ATE285331T1 (de) Tintenstrahlaufzeichnungskopf und tintenstrahlaufzeichnungsapparat
ATE298668T1 (de) Tintenstrahlaufzeichnungskopf und diesen kopf tragende tintenstrahlaufzeichnungsvorrichtung
DE60005111D1 (de) Tintenstrahldruckkopf und Tintenstrahlaufzeichnungsvorrichtung
ATE303250T1 (de) Tintenstrahlaufzeichnungskopf und tintenstrahlaufzeichnungsvorrichtung
KR19980018995A (ko) 잉크젯 프린트 헤드 장치(inkjet print head apparatus)
ATE295265T1 (de) Tintenstrahlaufzeichnungskopf und diesen enthaltendes tintenstrahlaufzeichnungsgerät
ATE339314T1 (de) Tintenstrahlaufzeichnungsgerät
DE60328271D1 (de) Flüssigkeitseinspritzkopf
ATE311292T1 (de) Tintenstrahlaufzeichnungskopf
EP1199171A3 (de) Tintenstrahlaufzeichnungskopf und Tintenstrahlaufzeichnungsapparat
DE60207621D1 (de) Tintenstrahlaufzeichnungskopf und Tintenstrahlaufzeichnungsapparat
DE60016478D1 (de) Herstellungsverfahren für einen Tintenstrahlaufzeichnungskopf
DE60323422D1 (de) Flüssigkeitsausstosskopf
DE60301028D1 (de) Flüssigkeitsausstosskopf
JPS6325944B2 (de)
JPH03175047A (ja) インクジェットプリンタ用の記録ヘッド
JPS6357250A (ja) インクジエツトヘツド
ATE452762T1 (de) Tintenstrahldruckkopf und dessen herstellungsverfahren
JP2729008B2 (ja) インクジェット記録ヘッド装置
JPH03227247A (ja) インクジェット記録装置
JPH01133752A (ja) インクジェット記録ヘッド
CN1914038A (zh) 液体喷头和液体喷射设备
JPH05345413A (ja) インクジェット記録ヘッド装置
JPH03197144A (ja) インクジェットヘッド
JP2000006399A (ja) インクジェット式記録ヘッド及びインクジェット式記録装置

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties