JP3820589B2 - 液体吐出ヘッドとその製造方法及びインクジェット記録装置 - Google Patents
液体吐出ヘッドとその製造方法及びインクジェット記録装置 Download PDFInfo
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- JP3820589B2 JP3820589B2 JP2003336239A JP2003336239A JP3820589B2 JP 3820589 B2 JP3820589 B2 JP 3820589B2 JP 2003336239 A JP2003336239 A JP 2003336239A JP 2003336239 A JP2003336239 A JP 2003336239A JP 3820589 B2 JP3820589 B2 JP 3820589B2
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- diaphragm
- pressure chamber
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- discharge port
- piezoelectric element
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- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 239000007788 liquid Substances 0.000 title description 22
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- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
Description
Claims (4)
- 液滴を吐出する吐出口が形成される吐出口形成基板、前記吐出口に連通する圧力室の隔壁を形成する流路形成基板、及び振動板を積層して、圧力室を形成する際、前記振動板自体の表面に凹凸構造を形成し、前記振動板表面に形成された凹凸構造に沿って電極を形成し、さらにその上に、前記振動板が厚い部分では薄く、前記振動板が薄い部分では厚く、かつその表面が平坦面となるように、前記圧力室内に圧力変化を生じさせる圧電体をエアロゾル法で形成するようにしたことを特徴とする液滴吐出ヘッドの製造方法。
- 前記吐出口形成基板、前記流路形成基板及び振動板を積層する際、ガラス溶着接合または金属拡散接合によって接合することを特徴とする請求項1に記載の液滴吐出ヘッドの製造方法。
- 液滴を吐出する吐出口が形成される吐出口形成基板と、前記吐出口に連通する圧力室の隔壁を形成する流路形成基板と、振動板を積層して圧力室を形成する際、前記振動板自体の表面に凹凸構造を形成し、前記振動板表面に形成された凹凸構造に沿って電極を形成し、さらにその上に、前記振動板が厚い部分では薄く、前記振動板が薄い部分では厚く、かつその表面が平坦面となるように、前記圧力室内に圧力変化を生じさせる圧電体をエアロゾル法で形成したことを特徴とする液滴吐出ヘッド。
- 液滴を吐出する吐出口が形成される吐出口形成基板と、前記吐出口に連通する圧力室の隔壁を形成する流路形成基板と、振動板を積層して圧力室を形成する際、前記振動板自体の表面に凹凸構造を形成し、前記振動板表面に形成された凹凸構造に沿って電極を形成し、さらにその上に、前記振動板が厚い部分では薄く、前記振動板が薄い部分では厚く、かつその表面が平坦面となるように、前記圧力室内に圧力変化を生じさせる圧電体をエアロゾル法で形成した液滴吐出ヘッドを有して構成されることを特徴とするインクジェット記録装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003336239A JP3820589B2 (ja) | 2003-09-26 | 2003-09-26 | 液体吐出ヘッドとその製造方法及びインクジェット記録装置 |
US10/948,181 US20050068378A1 (en) | 2003-09-26 | 2004-09-24 | Liquid discharge head, manufacturing method thereof, and inkjet recording apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003336239A JP3820589B2 (ja) | 2003-09-26 | 2003-09-26 | 液体吐出ヘッドとその製造方法及びインクジェット記録装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005103772A JP2005103772A (ja) | 2005-04-21 |
JP3820589B2 true JP3820589B2 (ja) | 2006-09-13 |
Family
ID=34373233
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003336239A Expired - Fee Related JP3820589B2 (ja) | 2003-09-26 | 2003-09-26 | 液体吐出ヘッドとその製造方法及びインクジェット記録装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US20050068378A1 (ja) |
JP (1) | JP3820589B2 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4306611B2 (ja) * | 2004-12-28 | 2009-08-05 | ブラザー工業株式会社 | インクジェットヘッドの製造方法 |
JP4800666B2 (ja) * | 2005-05-27 | 2011-10-26 | 富士フイルム株式会社 | 液体吐出ヘッド及びその製造方法 |
US7625073B2 (en) * | 2005-06-16 | 2009-12-01 | Canon Kabushiki Kaisha | Liquid discharge head and recording device |
JP4829692B2 (ja) * | 2005-06-16 | 2011-12-07 | キヤノン株式会社 | 液体吐出ヘッドおよび記録装置 |
JP2006347056A (ja) * | 2005-06-17 | 2006-12-28 | Ricoh Printing Systems Ltd | インクジェットプリントヘッド |
ATE496772T1 (de) * | 2006-03-20 | 2011-02-15 | Brother Ind Ltd | Verfahren zur herstellung eines piezoelektrischen aktors, tintenstrahlkopf und tintenstrahldrucker mit aerosolablagerungsverfahren, piezoelektrischer aktor, tintenstrahlkopf und tintenstrahldrucker |
EP1837181A3 (en) * | 2006-03-20 | 2009-04-29 | Brother Kogyo Kabushiki Kaisha | Method for producing piezoelectric actuator, method for producing liquid droplet jetting apparatus, piezoelectric actuator, and liquid droplet jetting apparatus |
JP5128981B2 (ja) * | 2007-07-25 | 2013-01-23 | 日本碍子株式会社 | 圧電/電歪アクチュエータ及び圧電/電歪アクチュエータの製造方法 |
JP6878824B2 (ja) * | 2016-10-18 | 2021-06-02 | ブラザー工業株式会社 | 液体吐出装置、及び、液体吐出装置の製造方法 |
JP7259386B2 (ja) * | 2018-06-25 | 2023-04-18 | セイコーエプソン株式会社 | 液体噴射ヘッドおよび液体噴射装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5715976A (en) * | 1980-07-04 | 1982-01-27 | Hitachi Ltd | Jetting device for droplet |
JP3460218B2 (ja) * | 1995-11-24 | 2003-10-27 | セイコーエプソン株式会社 | インクジェットプリンタヘッドおよびその製造方法 |
JP3019845B1 (ja) * | 1997-11-25 | 2000-03-13 | セイコーエプソン株式会社 | インクジェット式記録ヘッド及びインクジェット式記録装置 |
US6616270B1 (en) * | 1998-08-21 | 2003-09-09 | Seiko Epson Corporation | Ink jet recording head and ink jet recording apparatus comprising the same |
JP3823567B2 (ja) * | 1998-10-20 | 2006-09-20 | 富士写真フイルム株式会社 | インクジェット記録ヘッド及びその製造方法及びプリンタ装置 |
JP2002103618A (ja) * | 2000-01-17 | 2002-04-09 | Seiko Epson Corp | インクジェット式記録ヘッド及びその製造方法並びにインクジェット式記録装置 |
US7427126B2 (en) * | 2004-08-31 | 2008-09-23 | Brother Kogyo Kabushiki Kaisha | Liquid transport device and method for manufacturing liquid transport device |
-
2003
- 2003-09-26 JP JP2003336239A patent/JP3820589B2/ja not_active Expired - Fee Related
-
2004
- 2004-09-24 US US10/948,181 patent/US20050068378A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
US20050068378A1 (en) | 2005-03-31 |
JP2005103772A (ja) | 2005-04-21 |
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