SG86983A1 - Manufacturing method of ink jet head - Google Patents

Manufacturing method of ink jet head

Info

Publication number
SG86983A1
SG86983A1 SG9610177A SG1996010177A SG86983A1 SG 86983 A1 SG86983 A1 SG 86983A1 SG 9610177 A SG9610177 A SG 9610177A SG 1996010177 A SG1996010177 A SG 1996010177A SG 86983 A1 SG86983 A1 SG 86983A1
Authority
SG
Singapore
Prior art keywords
ink
substrate
forming
flow path
supply port
Prior art date
Application number
SG9610177A
Other languages
English (en)
Inventor
Ohkuma Norio
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Publication of SG86983A1 publication Critical patent/SG86983A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
SG9610177A 1995-06-30 1996-06-28 Manufacturing method of ink jet head SG86983A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16579995A JP3343875B2 (ja) 1995-06-30 1995-06-30 インクジェットヘッドの製造方法

Publications (1)

Publication Number Publication Date
SG86983A1 true SG86983A1 (en) 2002-03-19

Family

ID=15819219

Family Applications (1)

Application Number Title Priority Date Filing Date
SG9610177A SG86983A1 (en) 1995-06-30 1996-06-28 Manufacturing method of ink jet head

Country Status (10)

Country Link
US (1) US6139761A (de)
EP (2) EP1184179A3 (de)
JP (1) JP3343875B2 (de)
KR (1) KR100230028B1 (de)
CN (1) CN1100674C (de)
AT (1) ATE218442T1 (de)
AU (1) AU5626996A (de)
CA (1) CA2179869C (de)
DE (1) DE69621520T2 (de)
SG (1) SG86983A1 (de)

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DK0841167T3 (da) 1996-11-11 2005-01-24 Canon Kk Fremgangsmåde til fremstilling af gennemgående hul og anvendelse af den nævnte fremgangsmåde til fremstilling af et siliciumsubstrat, der har et gennemgående hul, og en anordning, der anvender et sådant substrat, fremgangsmåde til fremstilling.....
KR100514711B1 (ko) 1997-05-14 2005-09-15 세이코 엡슨 가부시키가이샤 분사 장치의 노즐 형성 방법 및 잉크 젯 헤드의 제조 방법
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CN1080646C (zh) * 1997-10-21 2002-03-13 研能科技股份有限公司 形成喷墨头电阻层的方法
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US6450621B1 (en) 1998-09-17 2002-09-17 Canon Kabushiki Kaisha Semiconductor device having inkjet recording capability and method for manufacturing the same, inkjet head using semiconductor device, recording apparatus, and information-processing system
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JP3554782B2 (ja) 1999-02-01 2004-08-18 カシオ計算機株式会社 インクジェットプリンタヘッドの製造方法
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JP4298066B2 (ja) 1999-06-09 2009-07-15 キヤノン株式会社 インクジェット記録ヘッドの製造方法、インクジェット記録ヘッドおよびインクジェット記録装置
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JP4533522B2 (ja) * 1999-10-29 2010-09-01 ヒューレット・パッカード・カンパニー インクジェットのダイ用の電気的相互接続
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CN1111117C (zh) * 2000-01-12 2003-06-11 威硕科技股份有限公司 用于打印装置的喷墨头的制造方法
IT1320599B1 (it) 2000-08-23 2003-12-10 Olivetti Lexikon Spa Testina di stampa monolitica con scanalatura autoallineata e relativoprocesso di fabbricazione.
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US6818464B2 (en) * 2001-10-17 2004-11-16 Hymite A/S Double-sided etching technique for providing a semiconductor structure with through-holes, and a feed-through metalization process for sealing the through-holes
JP3734246B2 (ja) * 2001-10-30 2006-01-11 キヤノン株式会社 液体吐出ヘッド及び構造体の製造方法、液体吐出ヘッド並びに液体吐出装置
JP2003300323A (ja) 2002-04-11 2003-10-21 Canon Inc インクジェットヘッド及びその製造方法
JP3950730B2 (ja) 2002-04-23 2007-08-01 キヤノン株式会社 インクジェット記録ヘッドおよびインク吐出方法
JP2004001488A (ja) 2002-04-23 2004-01-08 Canon Inc インクジェットヘッド
JP2004001490A (ja) 2002-04-23 2004-01-08 Canon Inc インクジェットヘッド
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KR100425331B1 (ko) * 2002-06-26 2004-03-30 삼성전자주식회사 잉크 젯 프린트 헤드의 제조 방법
JP4217434B2 (ja) 2002-07-04 2009-02-04 キヤノン株式会社 スルーホールの形成方法及びこれを用いたインクジェットヘッド
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US6883903B2 (en) 2003-01-21 2005-04-26 Martha A. Truninger Flextensional transducer and method of forming flextensional transducer
CN100581824C (zh) * 2003-02-13 2010-01-20 佳能株式会社 喷墨记录喷头用基板的制造方法
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ATE551195T1 (de) * 2003-07-22 2012-04-15 Canon Kk Tintenstrahlkopf und dazugehöriges herstellungsverfahren
EP1646504B1 (de) * 2003-07-22 2010-04-21 Canon Kabushiki Kaisha Tintenstrahlkopf und herstellungsverfahren dafür
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JP4587157B2 (ja) 2003-10-23 2010-11-24 キヤノン株式会社 インクジェット記録ヘッドおよびインクジェット記録装置
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JP2005205721A (ja) 2004-01-22 2005-08-04 Sony Corp 液体吐出ヘッド及び液体吐出装置
US7681306B2 (en) * 2004-04-28 2010-03-23 Hymite A/S Method of forming an assembly to house one or more micro components
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JP5188049B2 (ja) 2006-09-13 2013-04-24 キヤノン株式会社 記録ヘッド
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JP4981491B2 (ja) * 2007-03-15 2012-07-18 キヤノン株式会社 インクジェットヘッド製造方法及び貫通電極の製造方法
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JP5355223B2 (ja) 2008-06-17 2013-11-27 キヤノン株式会社 液体吐出ヘッド
JP5279686B2 (ja) * 2009-11-11 2013-09-04 キヤノン株式会社 液体吐出ヘッドの製造方法
JP5393423B2 (ja) * 2009-12-10 2014-01-22 キヤノン株式会社 インク吐出ヘッド及びその製造方法
JP5693068B2 (ja) 2010-07-14 2015-04-01 キヤノン株式会社 液体吐出ヘッド及びその製造方法
KR101908758B1 (ko) 2011-09-28 2018-10-16 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. 유체 토출 장치에서 슬롯으로부터 슬롯으로의 순환
JP6025589B2 (ja) 2013-02-07 2016-11-16 キヤノン株式会社 インクジェット記録装置およびインクジェット記録方法
CN107303758B (zh) * 2016-04-18 2019-03-01 佳能株式会社 液体喷出头的制造方法
CN107399166B (zh) * 2016-05-18 2019-05-17 中国科学院苏州纳米技术与纳米仿生研究所 一种mems剪切式压电喷墨打印头及其制备方法
US10031415B1 (en) * 2017-08-21 2018-07-24 Funai Electric Co., Ltd. Method to taylor mechanical properties on MEMS devices and nano-devices with multiple layer photoimageable dry film
TW201924950A (zh) * 2017-11-27 2019-07-01 愛爾蘭商滿捷特科技公司 形成噴墨噴嘴腔室的方法
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JP7066418B2 (ja) 2018-01-17 2022-05-13 キヤノン株式会社 液体吐出ヘッドおよびその製造方法

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EP0609011A2 (de) * 1993-01-25 1994-08-03 Hewlett-Packard Company Verfahren zum Herstellen eines thermischen Farbstrahldruckkopfs
EP0609860A2 (de) * 1993-02-03 1994-08-10 Canon Kabushiki Kaisha Herstellungsverfahren für einen Tintenstrahlaufzeichnungskopf

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US4789425A (en) * 1987-08-06 1988-12-06 Xerox Corporation Thermal ink jet printhead fabricating process
EP0609011A2 (de) * 1993-01-25 1994-08-03 Hewlett-Packard Company Verfahren zum Herstellen eines thermischen Farbstrahldruckkopfs
EP0609860A2 (de) * 1993-02-03 1994-08-10 Canon Kabushiki Kaisha Herstellungsverfahren für einen Tintenstrahlaufzeichnungskopf

Also Published As

Publication number Publication date
CN1100674C (zh) 2003-02-05
AU5626996A (en) 1997-01-09
DE69621520T2 (de) 2003-07-24
KR100230028B1 (ko) 1999-11-15
US6139761A (en) 2000-10-31
CA2179869C (en) 2001-02-13
ATE218442T1 (de) 2002-06-15
EP0750992A3 (de) 1997-08-13
JP3343875B2 (ja) 2002-11-11
KR970000570A (ko) 1997-01-21
EP0750992A2 (de) 1997-01-02
EP0750992B1 (de) 2002-06-05
EP1184179A2 (de) 2002-03-06
DE69621520D1 (de) 2002-07-11
CN1145305A (zh) 1997-03-19
CA2179869A1 (en) 1996-12-31
JPH0911479A (ja) 1997-01-14
EP1184179A3 (de) 2002-07-03

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