DE69332482T2 - Verfahren zur herstellung eines elektronischen schaltungsmoduls mit hoher integrationsdichte - Google Patents
Verfahren zur herstellung eines elektronischen schaltungsmoduls mit hoher integrationsdichteInfo
- Publication number
- DE69332482T2 DE69332482T2 DE69332482T DE69332482T DE69332482T2 DE 69332482 T2 DE69332482 T2 DE 69332482T2 DE 69332482 T DE69332482 T DE 69332482T DE 69332482 T DE69332482 T DE 69332482T DE 69332482 T2 DE69332482 T2 DE 69332482T2
- Authority
- DE
- Germany
- Prior art keywords
- circuit module
- producing
- electronic circuit
- high integration
- integration density
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000010354 integration Effects 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000010410 layer Substances 0.000 abstract 4
- 239000012790 adhesive layer Substances 0.000 abstract 2
- 239000010409 thin film Substances 0.000 abstract 1
Classifications
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/1262—Multistep manufacturing methods with a particular formation, treatment or coating of the substrate
- H01L27/1266—Multistep manufacturing methods with a particular formation, treatment or coating of the substrate the substrate on which the devices are formed not being the final device substrate, e.g. using a temporary substrate
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
- A61B3/10—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
- A61B3/113—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for determining or recording eye movement
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- G02B27/0093—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means for monitoring data relating to the user, e.g. head-tracking, eye-tracking
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- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136277—Active matrix addressed cells formed on a semiconductor substrate, e.g. of silicon
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- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/22—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources
- G09G3/30—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels
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- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
- G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
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- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
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- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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US07/834,849 US5258325A (en) | 1990-12-31 | 1992-02-13 | Method for manufacturing a semiconductor device using a circuit transfer film |
US07/874,588 US5376561A (en) | 1990-12-31 | 1992-04-24 | High density electronic circuit modules |
PCT/US1993/001322 WO1993016491A1 (en) | 1992-02-13 | 1993-02-12 | High density electronic circuit modules |
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Publication Number | Publication Date |
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DE69332482D1 DE69332482D1 (de) | 2002-12-19 |
DE69332482T2 true DE69332482T2 (de) | 2003-10-02 |
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DE69332482T Expired - Fee Related DE69332482T2 (de) | 1992-02-13 | 1993-02-12 | Verfahren zur herstellung eines elektronischen schaltungsmoduls mit hoher integrationsdichte |
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US (3) | US5376561A (de) |
EP (2) | EP0626099B1 (de) |
JP (1) | JPH07504782A (de) |
AT (1) | ATE227887T1 (de) |
CA (1) | CA2129123A1 (de) |
DE (1) | DE69332482T2 (de) |
WO (1) | WO1993016491A1 (de) |
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DE102014201095A1 (de) * | 2014-01-22 | 2015-07-23 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung mit einem mikromechanischen bauelement |
DE102014213375A1 (de) * | 2014-04-23 | 2015-10-29 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikroelektronisches system mit erhöhter sicherheit vor datenmissbrauch und produktmanipulation und verfahren zur herstellung desselben |
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DE102014201095A1 (de) * | 2014-01-22 | 2015-07-23 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung mit einem mikromechanischen bauelement |
DE102014201095B4 (de) | 2014-01-22 | 2023-05-17 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung mit einem mikromechanischen Bauelement |
DE102014213375A1 (de) * | 2014-04-23 | 2015-10-29 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikroelektronisches system mit erhöhter sicherheit vor datenmissbrauch und produktmanipulation und verfahren zur herstellung desselben |
Also Published As
Publication number | Publication date |
---|---|
EP1237191A2 (de) | 2002-09-04 |
JPH07504782A (ja) | 1995-05-25 |
DE69332482D1 (de) | 2002-12-19 |
US6424020B1 (en) | 2002-07-23 |
US5376561A (en) | 1994-12-27 |
EP0626099A1 (de) | 1994-11-30 |
CA2129123A1 (en) | 1993-08-19 |
WO1993016491A1 (en) | 1993-08-19 |
EP0626099B1 (de) | 2002-11-13 |
US5702963A (en) | 1997-12-30 |
ATE227887T1 (de) | 2002-11-15 |
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