DE68919570D1 - Dynamische Speicheranordnung mit wahlfreiem Zugriff vom Metall-Isolator-Halbleiter-Typ. - Google Patents
Dynamische Speicheranordnung mit wahlfreiem Zugriff vom Metall-Isolator-Halbleiter-Typ.Info
- Publication number
- DE68919570D1 DE68919570D1 DE68919570T DE68919570T DE68919570D1 DE 68919570 D1 DE68919570 D1 DE 68919570D1 DE 68919570 T DE68919570 T DE 68919570T DE 68919570 T DE68919570 T DE 68919570T DE 68919570 D1 DE68919570 D1 DE 68919570D1
- Authority
- DE
- Germany
- Prior art keywords
- insulator
- metal
- memory device
- random access
- access memory
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/03—Making the capacitor or connections thereto
- H10B12/033—Making the capacitor or connections thereto the capacitor extending over the transistor
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/31—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Semiconductor Memories (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63162189A JP2682021B2 (ja) | 1988-06-29 | 1988-06-29 | 半導体メモリ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68919570D1 true DE68919570D1 (de) | 1995-01-12 |
DE68919570T2 DE68919570T2 (de) | 1995-04-13 |
Family
ID=15749695
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE68919570T Expired - Fee Related DE68919570T2 (de) | 1988-06-29 | 1989-06-14 | Dynamische Speicheranordnung mit wahlfreiem Zugriff vom Metall-Isolator-Halbleiter-Typ. |
Country Status (5)
Country | Link |
---|---|
US (1) | US5025294A (de) |
EP (1) | EP0352893B1 (de) |
JP (1) | JP2682021B2 (de) |
KR (1) | KR920010193B1 (de) |
DE (1) | DE68919570T2 (de) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5216267A (en) * | 1989-05-10 | 1993-06-01 | Samsung Electronics Co., Ltd. | Stacked capacitor dynamic random access memory with a sloped lower electrode |
KR920007358B1 (ko) * | 1990-03-28 | 1992-08-31 | 금성일렉트론 주식회사 | 고집적 메모리 셀 및 코아 어레이 구조 |
JPH0834257B2 (ja) * | 1990-04-20 | 1996-03-29 | 株式会社東芝 | 半導体メモリセル |
KR920008294B1 (ko) * | 1990-05-08 | 1992-09-26 | 금성일렉트론 주식회사 | 반도체 장치의 제조방법 |
KR920009748B1 (ko) * | 1990-05-31 | 1992-10-22 | 삼성전자 주식회사 | 적층형 캐패시터셀의 구조 및 제조방법 |
JP2564972B2 (ja) * | 1990-06-18 | 1996-12-18 | 三菱電機株式会社 | 半導体記憶装置およびその製造方法 |
JPH07122989B2 (ja) * | 1990-06-27 | 1995-12-25 | 株式会社東芝 | 半導体記憶装置 |
JPH06112433A (ja) * | 1990-12-06 | 1994-04-22 | Nec Corp | 半導体メモリセルおよびその形成方法 |
JP2564046B2 (ja) * | 1991-02-13 | 1996-12-18 | 株式会社東芝 | 半導体記憶装置 |
JP2660111B2 (ja) * | 1991-02-13 | 1997-10-08 | 株式会社東芝 | 半導体メモリセル |
DE69222793T2 (de) * | 1991-03-14 | 1998-03-12 | Toshiba Kawasaki Kk | Halbleiterspeicheranordnung |
JP3181311B2 (ja) * | 1991-05-29 | 2001-07-03 | 株式会社東芝 | 半導体記憶装置 |
US5428235A (en) * | 1991-06-14 | 1995-06-27 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor memory device including improved connection structure to FET elements |
JP3464803B2 (ja) * | 1991-11-27 | 2003-11-10 | 株式会社東芝 | 半導体メモリセル |
JPH05218349A (ja) * | 1992-02-04 | 1993-08-27 | Sony Corp | 半導体記憶装置 |
JP3241106B2 (ja) * | 1992-07-17 | 2001-12-25 | 株式会社東芝 | ダイナミック型半導体記憶装置及びその製造方法 |
US5838038A (en) * | 1992-09-22 | 1998-11-17 | Kabushiki Kaisha Toshiba | Dynamic random access memory device with the combined open/folded bit-line pair arrangement |
EP0697735B1 (de) * | 1994-08-15 | 2002-03-27 | International Business Machines Corporation | Anordnung mit einem einzigen Verdrillungsgebiet und Verfahren für gepaarte linienförmige Leiter in integrierten Schaltungen |
US5866928A (en) * | 1996-07-16 | 1999-02-02 | Micron Technology, Inc. | Single digit line with cell contact interconnect |
JP4086926B2 (ja) * | 1997-01-29 | 2008-05-14 | 富士通株式会社 | 半導体装置及びその製造方法 |
DE10011672A1 (de) * | 2000-03-10 | 2001-09-20 | Infineon Technologies Ag | Integrierte DRAM-Speicherzelle sowie DRAM-Speicher |
JP4301227B2 (ja) * | 2005-09-15 | 2009-07-22 | セイコーエプソン株式会社 | 電気光学装置及びその製造方法、電子機器並びにコンデンサー |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3387286A (en) * | 1967-07-14 | 1968-06-04 | Ibm | Field-effect transistor memory |
JPS57201067A (en) * | 1981-06-04 | 1982-12-09 | Nec Corp | Semiconductor memory cell |
GB2143675B (en) * | 1983-07-11 | 1987-05-07 | Nat Semiconductor Corp | High efficiency dynamic random access memory cell and process for fabricating it |
JPS6070743A (ja) * | 1983-09-27 | 1985-04-22 | Fujitsu Ltd | 半導体装置の製造方法 |
JPS59210663A (ja) * | 1984-04-16 | 1984-11-29 | Hitachi Ltd | 半導体メモリ装置 |
JPS61140171A (ja) * | 1984-12-13 | 1986-06-27 | Toshiba Corp | 半導体記憶装置 |
JPS61183955A (ja) * | 1985-02-08 | 1986-08-16 | Nippon Telegr & Teleph Corp <Ntt> | 半導体記憶装置 |
JPS61183952A (ja) * | 1985-02-09 | 1986-08-16 | Fujitsu Ltd | 半導体記憶装置及びその製造方法 |
JPH0736437B2 (ja) * | 1985-11-29 | 1995-04-19 | 株式会社日立製作所 | 半導体メモリの製造方法 |
JPS62155558A (ja) * | 1985-12-27 | 1987-07-10 | Nec Corp | Mis型半導体記憶装置 |
-
1988
- 1988-06-29 JP JP63162189A patent/JP2682021B2/ja not_active Expired - Fee Related
-
1989
- 1989-06-07 US US07/362,222 patent/US5025294A/en not_active Expired - Lifetime
- 1989-06-14 EP EP89306004A patent/EP0352893B1/de not_active Expired - Lifetime
- 1989-06-14 DE DE68919570T patent/DE68919570T2/de not_active Expired - Fee Related
- 1989-06-29 KR KR1019890009096A patent/KR920010193B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP0352893A1 (de) | 1990-01-31 |
US5025294A (en) | 1991-06-18 |
EP0352893B1 (de) | 1994-11-30 |
JP2682021B2 (ja) | 1997-11-26 |
KR920010193B1 (ko) | 1992-11-19 |
KR910001758A (ko) | 1991-01-31 |
DE68919570T2 (de) | 1995-04-13 |
JPH0210867A (ja) | 1990-01-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |