DE10317667A1 - Optisches Element für ein Beleuchtungssystem - Google Patents

Info

Publication number

DE10317667A1

DE10317667A1 DE10317667A DE10317667A DE10317667A1 DE 10317667 A1 DE10317667 A1 DE 10317667A1 DE 10317667 A DE10317667 A DE 10317667A DE 10317667 A DE10317667 A DE 10317667A DE 10317667 A1 DE10317667 A1 DE 10317667A1

Authority

DE

Germany

Prior art keywords

field

optical element

lighting system

illumination

exit pupil

Prior art date

2003-04-17

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Withdrawn

Links

• Espacenet
• Global Dossier
• DPMA
• Discuss

• 230000003287 optical effect Effects 0.000 title claims abstract description 103
• 210000001747 pupil Anatomy 0.000 claims abstract description 77
• 238000005286 illumination Methods 0.000 claims description 40
• 238000003384 imaging method Methods 0.000 claims description 29
• 238000001900 extreme ultraviolet lithography Methods 0.000 claims description 6
• 230000010354 integration Effects 0.000 claims description 5
• 238000000034 method Methods 0.000 claims description 5
• 230000000694 effects Effects 0.000 claims description 3
• 238000004519 manufacturing process Methods 0.000 claims description 3
• 238000001393 microlithography Methods 0.000 claims description 2
• 238000004377 microelectronic Methods 0.000 claims 1
• 239000004065 semiconductor Substances 0.000 claims 1
• 230000009466 transformation Effects 0.000 description 16
• 230000005855 radiation Effects 0.000 description 9
• 238000001459 lithography Methods 0.000 description 8
• 238000007493 shaping process Methods 0.000 description 8
• 238000009826 distribution Methods 0.000 description 4
• 230000015572 biosynthetic process Effects 0.000 description 2
• 238000005530 etching Methods 0.000 description 2
• 238000009434 installation Methods 0.000 description 2
• 238000000465 moulding Methods 0.000 description 2
• 108700019404 Pro-Gly-Pro- ACTH (4-7) Proteins 0.000 description 1
• 238000004364 calculation method Methods 0.000 description 1
• 230000000052 comparative effect Effects 0.000 description 1
• 238000010276 construction Methods 0.000 description 1
• 230000007423 decrease Effects 0.000 description 1
• 230000001419 dependent effect Effects 0.000 description 1
• 230000008030 elimination Effects 0.000 description 1
• 238000003379 elimination reaction Methods 0.000 description 1
• 238000005516 engineering process Methods 0.000 description 1
• 210000003734 kidney Anatomy 0.000 description 1
• ORQBXQOJMQIAOY-UHFFFAOYSA-N nobelium Chemical compound [No] ORQBXQOJMQIAOY-UHFFFAOYSA-N 0.000 description 1
• 238000005457 optimization Methods 0.000 description 1
• 238000002310 reflectometry Methods 0.000 description 1
• AFEHBIGDWIGTEH-AQRCPPRCSA-N semax Chemical compound C([C@H](NC(=O)[C@H](CCC(O)=O)NC(=O)[C@@H](N)CCSC)C(=O)N[C@@H](CC=1C=CC=CC=1)C(=O)N1[C@@H](CCC1)C(=O)NCC(=O)N1[C@@H](CCC1)C(O)=O)C1=CNC=N1 AFEHBIGDWIGTEH-AQRCPPRCSA-N 0.000 description 1
• 230000001360 synchronised effect Effects 0.000 description 1
• 238000011426 transformation method Methods 0.000 description 1

Cited By (15)