Classifications

• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
  • C23C16/02—Pretreatment of the material to be coated
• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
  • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
  • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
  • C23C16/45523—Pulsed gas flow or change of composition over time
  • C23C16/45525—Atomic layer deposition [ALD]
  • C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
  • C23C16/45536—Use of plasma, radiation or electromagnetic fields
• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
  • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
  • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
  • C23C16/45523—Pulsed gas flow or change of composition over time
  • C23C16/45525—Atomic layer deposition [ALD]
  • C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
  • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
  • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
  • C23C16/45523—Pulsed gas flow or change of composition over time
  • C23C16/45525—Atomic layer deposition [ALD]
  • C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
  • C23C16/45548—Atomic layer deposition [ALD] characterized by the apparatus having arrangements for gas injection at different locations of the reactor for each ALD half-reaction
  • C23C16/45551—Atomic layer deposition [ALD] characterized by the apparatus having arrangements for gas injection at different locations of the reactor for each ALD half-reaction for relative movement of the substrate and the gas injectors or half-reaction reactor compartments
• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
  • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
  • C23C16/54—Apparatus specially adapted for continuous coating
  • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates

Definitions

• Barrier films have been included on or within the packaging associated with sensitive goods to prevent or limit the permeation of gases or liquids, such as oxygen and water, through the packaging during manufacturing, storage, or use of the goods.
• gases or liquids such as oxygen and water
• flexible barrier-coated polymer films have been used for electronic devices whose components are sensitive to the ingress of water vapor and oxygen.
• market applications for barrier film technology include, for example, flexible thin film and organic photovoltaic solar cells, organic light emitting diodes (OLED) used in displays and solid state lighting and other luminescent devices including quantum dots.
• a barrier film provides advantages over glass as it is flexible, light-weight, durable, and enables low cost continuous roll-to-roll processing. While the preparation of barrier layers effective against the penetration of air and moisture are known, there are needs for a better process and system to make the barrier film.
• the present disclosure relates to a roll-to-roll ALD system and a method of making a barrier film.
• the system and method of the current disclosure can enable a very high speed depositions on a wide variety of substrates and maintain barrier film's performance through wind-up and subsequent post processing.
• a method may include engaging a first edge region on a first surface of a substrate with a first support roller, wherein the first support roller is rotatable on a first end of a shaft, and wherein the web material has a length substantially greater than the width thereof; engaging a second edge region on the first surface of the substrate with a second support roller, wherein the second support roller is rotatable on a second end of the shaft opposite the first end thereof, and wherein a central region between the first roller and the second roller and comprising at least about 50% of a width of the substrate is free of support from a roller; transporting the substrate over the first and the second support rollers; repeating the following sequence of steps for a number of times sufficient to form a thin film on the substrate: (a) exposing the substrate to a first precursor; (b) supplying a reactive species to the substrate to react with the first precursor after exposing the substrate to the first precursor; wherein the thin film is formed as a reaction product of the first precursor with
• a system may include a first zone into which a first precursor is introduced; a second zone into which a second precursor s introduced; a third zone between the first zone and the second zone and in which a reactive species is generated; a substrate transport mechanism, comprising: at least two support rollers contacting a single major surface of the substrate, wherein the substrate has a first and a second edge, the support rollers comprising: a first support roller contacting a first edge region of the substrate, and a second support roller contacting a second edge region of the substrate, wherein the substrate includes an un-contacted region between the first and the second support roller including at least about 50% of the width of the substrate; and a vapor processing system comprising a vapor source for producing a vapor.
• FIG. 1 shows a schematic cross-sectional view of one embodiment, illustrating a system and method for roll-to-roll ALD
• FIG. 2 shows a schematic overhead view of an embodiment of a substrate transport mechanism.
• the figures are not necessarily to scale.
• Like numbers used in the figures refer to like components. However, it will be understood that the use of a number to refer to a component in a given figure is not intended to limit the component in another figure labeled with the same number.
• a viscosity of "about” 1 Pa-sec refers to a viscosity from 0.95 to 1.05 Pa- sec, but also expressly includes a viscosity of exactly 1 Pa-sec.
• a substrate that is “substantially” transparent refers to a substrate that transmits more radiation (e.g. visible light) than it fails to transmit (e.g. absorbs and reflects).
• a substrate that transmits more than 50% of the visible light incident upon its surface is substantially transparent, but a substrate that transmits 50% or less of the visible light incident upon its surface is not substantially transparent.
• FIG.1 is a diagram of a system 100, illustrating a process for making a barrier film.
• System 100 can be contained within an inert environment and can include an unwinder roller 110 for paying out a substrate 114 from an input roll of the substrate 114 and chilled drum 112 for receiving and moving providing a moving web.
• a substrate pretreating source 116 can provide a treatment of the surface the substrate 114, for example, supplying a plasma to substrate 114.
• a vapor processing system 118 includes a vapor source for producing a vapor and depositing the vapor on substrate 114, as substrate 114 is passed over chilled drum 112.
• a vapor can be deposited on the substrate 114 to form a coating on a first surface of the substrate 114, as substrate 114 is passed over chilled drum 112.
• the chilled drum 112 may be provided with a cooling system, for example, a heat transfer fluid circulation such that at least the surface of chilled drum 112 is temperature controlled, thereby promoting condensation, reaction, and/or other form of deposition of vapor onto the substrate 114.
• system 100 may further include one or more curing sources 120.
• Curing sources 120 can initiate polymerization of a liquid monomer or a liquid oligomer deposited from the vapor onto the substrate.
• Curing sources 120 useful in the systems of the present disclosure include one or more of, for example, heat sources, ultraviolet radiation sources, e-beam radiation sources, and plasma radiation sources.
• system 100 may further include a heating system 124 to heat the substrate 114 before the ALD deposition of a thin film onto the substrate.
• Heating system 124 useful in the systems of the present disclosure include one or more of, for example, an infrared radiation heating source, a heated drum, a conductive heating source and inductive heaters.
• the substrate 114 can be heated to a range of 50 to 150 °C.
• the substrate 114 can be heated to a range of 70 to 100 °C.
• the substrate 114 can be heated to 100 °C.
• the substrate 114 can be heated to 80 °C.
• ALD coating system 126 includes first and second precursor zones 128, 130, respectively, separated by a third zone 138 in which a reactive species is generated.
• reactive first and second precursor gases (Precursor 1 and Precursor 2) are introduced into the respective first and second precursor zones 12.8, 130 from first and second precursor deliver)' systems 132, 134.
• Precursor delivery systems 132, 134 may include precursor source containers (not shown) located outside or within precursor zones 128, 130.
• precursor delivery systems 132, 134 may include piping, pumps, valves, tanks, and other associated equipment for supplying precursor gases into precursor zones 128, 130.
• a compound deliver)' system 136 is similarly included for injecting a compound into a third zone 138 to generate reactive species.
• precursor zones 128, 130 and third zone 138 are defined and bordered by an outer reaction chamber housing or vessel 140, divided by first and second dividers 142, 144.
• ALD coating system 126 may include additional zones, for example, an isolation zone between precursor zone 128 and zone 138 and an isolation zone between precursor zone 130 and zone 138.
• a series of first passageways 146 through first divider 142 are spaced apart along a general direction of travel of substrate 1 14, and a corresponding series of second passageways 148 are provided through second divider 144.
• the passageways 146, 148 are arranged and configured for substrate 114 to be threaded therethrough back and form between first and second precursor zones 128, 130 multiple times, and each time through the third zone 138.
• passageways 146, 148 preferably comprise slits having a width (exaggerated in FIG. 1) that is slightly greater than the thickness of substrate 1 14 and a length (not shown) extending into the plane of FIG . 1 (i.e., normal to the page) and that is slightly greater than a width of the substrate.
• the third zone 138 is, thus, preferably separated (albeit imperfectly) from the first precursor zone 128 by first divider 142 and from second precursor zone 130 by second divider 144.
• a series of plasma or other free radical-generating generators 150 is operably associated with third zone 138, wherein the free radical generators 150 operating at 150W to 1500 W generate reactive species from the compound 136.
• Radical generators 150 may include a radio-frequency (RF) plasma generator, microwave plasma generator: direct-current (DC) plasma generator, or UV light source, and preferably continuously generates a population of radical species in-situ within third zone 138 by means of a plasma, for example, in some embodiments, radical generators 150 are positioned in third zone 138 so that only one surface of substrate 114 may contact reactive species.
• Reactive species can include, but is not limited to, activated oxygen, ozone, water, activated nitrogen, ammonia and activated hydrogen.
• reactive species can be generated by applying energy to chemical compound 136, for example, cracking a dry, oxygen-containing compound so as to generate the activated oxygen species.
• a plasma generator e.g., a DC plasma source, an RF plasma source, or an inductively-coupled plasma source
• may energize and decompose a dry gaseous oxygen-containing compound for example dry air, 0? rotate COj, CO, NO, NO?., or mixtures of two or more of the foregoing, with or without added nitrogen (N?) and/or another suitable inert carrier gas).
• an oxygen-containing compound for example, hydrogen peroxide, water, or a mixture thereof, may be decomposed or cracked via non-plasma activation (e.g., a thermal process).
• ozone may be generated (e.g., via corona discharge) remotely or proximal to the substrate or substrate path so that ozone is supplied to the substrate surface.
• reactive species can be generated by introducing a chemical compound into a plasma.
• a first precursor is supplied into precursor zone 128.
• the substrate 114 enters the first precursor zone 128, a surface 166 of the substrate 1 14 is exposed to the first precursor 132 so that the first precursor 132 is chemisorbed to the substrate surface, leaving a chemisorbed species at the surface that is reactive with reactive species.
• the substrate 1 14 then enters the third zone 138, which in some embodiments is supplied reactive species generated in a plasma formed from compound 136.
• a second precursor enters precursor zone 130.
• the substrate 1 14 enters precursor zone 130 and is exposed to the second precursor.
• the substrate 1 14 then traverses the third zone 138 and precursor zone 128 a predetermined number of additional times before a thin film is formed on the substrate 1 14.
• the substrate 1 14 then traverses the third zone 138 and precursor zone 128 between 2 or more additional times to form a thin film substrate 1 14. In some embodiments, the substrate 1 14 then traverses the third zone 138 and precursor zone 128 between 2 to 5 additional times to form a thin film substrate 1 14.
• the thin film may have a thickness of no more than 100 nm, no more than 80 nm, no more than 60 nm, no more than 50 nm, no more than 30 nm, or no more than 20 nm. In some embodiments, the thin film may have a thickness of at least lnm, at least 3nm, at least 5 nm or at least 10 nm.
• the thin film may have a thickness of 1 nm to 100 nm, 3 nm to 80 nm, 3 nm to 60 nm, 3 nm to 50 nm, 3 nm to 30 nm, or 3 nm to 20 nm.
• a substrate transport mechanism 151 of system 100 includes a carriage comprising multiple turning guides for guiding substrate 1 14, including a set of first support roller 152 and a set of second support roller 152a (not shown in FIG. 1) spaced apart along precursor zone 128.
• Substrate transport mechanism 150 may further include a set of idler rollers 154 that can be used to support the substrate during a change in the direction of motion of the substrate 114.
• System 100 may further include a substrate cooling system 156 to cool the substrate after the substrate 114 exits ALD coating system 126.
• System 100 may further include chilled drum 158 for receiving and moving cooled substrate 1 14.
• An additional vapor processing system 160 can be included in system 100, includes a vapor source for producing a vapor and depositing the vapor onto the thin film that is formed on the surface 166 of the substrate 1 14, as substrate 1 14 is passed over chilled drum 158.
• the chilled drum 158 may be provided with a substrate cooling system, for example, a heat transfer fluid circulation such that at least the surface of chilled drum 158 is temperature controlled, thereby promoting condensation, reaction, and/or other form of deposition of vapor onto the substrate 1 14.
• system 100 may further include one or more curing sources 162.
• Curing sources 162 can initiate polymerization of a liquid monomer or oligomer deposited from the vapor onto the thin film to form a coating.
• System 100 can include a winder roller 164 for receiving coated substrate 1 14 and coiling the substrate 1 14 into a take-up roll.
• a schematic overhead view of substrate transport mechanism 2.10 includes at least two support rollers 212, 214 that rotate about their respective shafts 216, 218.
• the support rollers 212, 214 may turn on roller bearings on the shafts 216, 218, or may be driven on the shafts 216, 218.
• the rollers may rotate about a single shaft 220.
• At least one of the support rollers 212, 214 in substrate transport mechanism 210 is "toed outward" and positioned at an angle ⁇ in a plane x-y with respect to a direction x normal to a longitudinal axis y of the shafts 216, 218.
• the roller 212 is angled at an angle ⁇ and the roller 214 is angled at an angle ⁇ 2 with respect to the direction x of motion of the substrate 222.
• a substrate 222 with a length / substantially longer than its width w moves along its length / in the direction of arrow A and traverses the support rollers 212, 214.
• the support rollers 212, 214 have widths wi, w2 that are each substantially smaller than the width w of the substrate 222.
• the support rollers 212, 214 contact a first surface 223 of the substrate 222, but in other embodiments may contact a second surface 225 opposed to the first surface 223 of the substrate 222.
• the support rollers 212, 214 may contact both sides 223, 225 of the substrate 222.
• the surfaces 21 1A, 21 IB of the support rollers 212, 214 contacting the substrate 222 can be independently selected from a wide range of materials including, but not limited to, natural and synthetic rubber, silicone, polymeric materials, metals, and the like.
• the surfaces 21 1A, 21 IB of the support rollers 212, 214 can include o-rings or sleeves to modify the coefficient of static friction at an interface with the substrate 222.
• the support rollers 212, 214 contact at least a portion of opposed edges 213, 215 of the first surface 223 of the substrate 222.
• a center region 227 of the first surface 223 of the substrate 222 does not contact the support rollers 12, 14 and remains unsupported by any roller.
• the opposed edges 213, 215 of the substrate 222 can be independently selected to be substantially the same width as the support rollers 212, 214 and, depending on the intended application, can be substantially wider.
• the center region of the first surface 223 of the substrate 222 is about
• Suitable substrates 1 14 for use in the system and method described herein include flexible materials capable of roll-to-roll processing, such as paper, polymeric materials, metal foils, and combinations thereof.
• Suitable polymeric substrates include various polyolefins, e.g. polypropylene, various polyesters (e.g. polyethylene terephthalate, fluorene polyester), polymethylmethacrylate and other polymers such as polyethylene naphthalate, polycarbonate, polymethylmethacrylate, polyethersulphone, polyestercarbonate, polyetherimide, polyarylate, polyimide, vinyls, cellulose acetates, and fluoropolymers.
• Suitable first precursor 132 and second precursor 134 can include those described in U.S. Pub. No. 2014/0242736.
• Non-limiting examples of first precursor 132 can include non-hydroxylated silicon- containing precursors including compounds such as tris(dimethy3amino)silane ( S i ⁇ I X ( C ⁇ ) - 1 ⁇ )
• Non-limiting examples of second precursor 134 can include metal-containing precursors, for example, metal haiide compounds (e.g., titanium tetrachloride,
• TDMASn tetrakis(dimethyamino)tin
• TDMASn zirconium tert-butoxide
• Titanium Tetraisopropoxide titanium Tetraisopropoxide
• TiCLj titanium Tetraisopropoxide
• metalorganic compounds e.g., diethylzinc ((DEZ) or Zn ⁇ Hs)? ⁇ and triraethylaluminum (TMA)
• vapor source of vapor processing system 118 and 160 may be configured as any device capable of vaporizing liquid. Suitable vapor sources may include, for example, heated baths, bubblers, atomizers, cyclone evaporators, ultrasonic evaporators, wiped-film evaporators, rolled film evaporators, spinning disk evaporators, rotary evaporators, porous frit evaporators, tubular evaporators, and the like. In various embodiments, the vapor source may include one or more of the vapor sources described in the following patents and publications, incorporated by reference herein in their entireties: U.S. Pub. No. 2008/0108180 (Charles, et al.); U.S. Pat. No.
• the vapor supplied by the vapor source may include monomers, oligomers, resins, waxes, solvents, organic compounds, organometallic compounds, metallic compounds, biologically active materials, and combinations thereof.
• suitable materials for vaporization include, but are not limited to, epoxies, vinyl ethers, (meth)acrylates, fluoro-containing polymers, styrene containing polymers, acetylenes, polyamides, acrylamides, parylenes, waxes, fluoropolyethers, polyamines, diallyldiphenylsilanes, metal alkoxides, metal alkyls, silicones, oils, dyes, proteins, peptides, polypeptides, lipids, carbohydrates, enzymes, nucleic acids, polynucleic acids, drugs, drug metabolites, and combinations thereof.
• the vapor supplied by the vapor source may include one or more additives to affect processing of the vapor and/or the properties and performance of a condensed or deposited material formed from the vapor, as is known in the art.
• one or more additives may be included to lower surface tension, reduce viscosity, inhibit thermally-induced reactions such as polymerization, prevent oxidation reactions, or combinations thereof.
• one or more additives may be included to absorb radiation (e.g., UV, visible wavelengths, IR, and microwave energy) and/or initiate reactions (e.g., photoinitiators, thermal initiators, and the like).
• radiation e.g., UV, visible wavelengths, IR, and microwave energy
• additives may include colorants, crosslinkers, or other materials known in the art. Following are a list of embodiments of the present disclosure.
• a method comprising:
• repeating step further comprises (c) after step (b), exposing the substrate to a second precursor and (d) supplying a reactive species to the substrate after exposing the substrate to the second precursor.
• a substrate transport mechanism comprising: at least two support rollers contacting a single major surface of the substrate, wherein the substrate has a first and a second edge, the support rollers comprising:
• a second support roller contacting a second edge region of the substrate, wherein the substrate comprises an un-contacted region between the first and the second support roller comprising at least about 50% of the width of the substrate;
• a vapor processing system comprising a vapor source for producing a vapor.

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• 2017
  • 2017-03-24 EP EP17715376.4A patent/EP3436620A1/en not_active Withdrawn
  • 2017-03-24 US US16/090,516 patent/US20190112711A1/en not_active Abandoned
  • 2017-03-24 KR KR1020187031466A patent/KR20180130548A/ko not_active Abandoned
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