WO2011027757A1 - セラミックス炭素複合材及びその製造方法並びにセラミックス被覆セラミックス炭素複合材及びその製造方法 - Google Patents
セラミックス炭素複合材及びその製造方法並びにセラミックス被覆セラミックス炭素複合材及びその製造方法 Download PDFInfo
- Publication number
- WO2011027757A1 WO2011027757A1 PCT/JP2010/064872 JP2010064872W WO2011027757A1 WO 2011027757 A1 WO2011027757 A1 WO 2011027757A1 JP 2010064872 W JP2010064872 W JP 2010064872W WO 2011027757 A1 WO2011027757 A1 WO 2011027757A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- ceramic
- carbon composite
- composite material
- coated
- layer
- Prior art date
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/52—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite
- C04B35/522—Graphite
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/628—Coating the powders or the macroscopic reinforcing agents
- C04B35/62802—Powder coating materials
- C04B35/62805—Oxide ceramics
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/628—Coating the powders or the macroscopic reinforcing agents
- C04B35/62802—Powder coating materials
- C04B35/62805—Oxide ceramics
- C04B35/62807—Silica or silicates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/628—Coating the powders or the macroscopic reinforcing agents
- C04B35/62802—Powder coating materials
- C04B35/62805—Oxide ceramics
- C04B35/62813—Alumina or aluminates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/628—Coating the powders or the macroscopic reinforcing agents
- C04B35/62802—Powder coating materials
- C04B35/62805—Oxide ceramics
- C04B35/62818—Refractory metal oxides
- C04B35/62821—Titanium oxide
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/628—Coating the powders or the macroscopic reinforcing agents
- C04B35/62802—Powder coating materials
- C04B35/62828—Non-oxide ceramics
- C04B35/62831—Carbides
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/628—Coating the powders or the macroscopic reinforcing agents
- C04B35/62802—Powder coating materials
- C04B35/62828—Non-oxide ceramics
- C04B35/62831—Carbides
- C04B35/62834—Silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/628—Coating the powders or the macroscopic reinforcing agents
- C04B35/62802—Powder coating materials
- C04B35/62828—Non-oxide ceramics
- C04B35/62836—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/628—Coating the powders or the macroscopic reinforcing agents
- C04B35/62897—Coatings characterised by their thickness
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
- C04B35/6303—Inorganic additives
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
- C04B35/645—Pressure sintering
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/001—Joining burned ceramic articles with other burned ceramic articles or other articles by heating directly with other burned ceramic articles
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/42—Non metallic elements added as constituents or additives, e.g. sulfur, phosphor, selenium or tellurium
- C04B2235/422—Carbon
- C04B2235/425—Graphite
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/54—Particle size related information
- C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
- C04B2235/5436—Particle size related information expressed by the size of the particles or aggregates thereof micrometer sized, i.e. from 1 to 100 micron
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
- C04B2235/9607—Thermal properties, e.g. thermal expansion coefficient
- C04B2235/9615—Linear firing shrinkage
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/34—Oxidic
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/34—Oxidic
- C04B2237/341—Silica or silicates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/34—Oxidic
- C04B2237/343—Alumina or aluminates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/34—Oxidic
- C04B2237/345—Refractory metal oxides
- C04B2237/348—Zirconia, hafnia, zirconates or hafnates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/36—Non-oxidic
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/36—Non-oxidic
- C04B2237/363—Carbon
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/36—Non-oxidic
- C04B2237/365—Silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/36—Non-oxidic
- C04B2237/368—Silicon nitride
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/249921—Web or sheet containing structurally defined element or component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
Definitions
- the present invention relates to a ceramic carbon composite material which is a composite material of graphite and ceramics, a method for producing the same, a ceramic-coated ceramic carbon composite material and a method for producing the same.
- carbon materials have low specific gravity, excellent heat resistance, corrosion resistance, slidability, electrical conductivity, thermal conductivity, and workability, and are used in a wide range of fields such as semiconductors, metallurgy, machinery, electricity, and nuclear power. ing.
- a SiC-coated graphite composite material obtained by coating a graphite base material with SiC or TaC by a gas phase reaction or a melt reaction is used as a susceptor for compound semiconductor manufacturing by chemical vapor deposition.
- these products have heat resistance and chemical stability and prevent the generation of graphite particles, they do not lead to improvement in strength and are high in production cost, and are limited to applications such as susceptors. Further, it is technically difficult to uniformly coat a three-dimensionally complicated graphite base material.
- SiC / carbon composite materials in which molten carbon is impregnated with porous carbon at a high temperature to excite the combustion synthesis reaction to convert the pores of the porous carbon into SiC have been developed (see Patent Document 1).
- This composite material can be formed into a near net product based on a porous carbon material processed into a relatively simple three-dimensional shape such as bolts and nuts, but lacks the denseness peculiar to impregnating materials, has a rough surface, and costs Is not used at present.
- Patent Document 2 a C—SiC sintered body in which SiC ultrafine powder having an average particle size of 10 to 100 nm and graphite particles are mixed and densified to a high density by plasma discharge sintering has been developed (see Patent Document 2). .
- This composite material contains 1 to 95% by weight of SiC, has a relative density of 70 to 99.5%, and a high bending strength of 100 to 350 MPa has been reported.
- it is a composite structure in which SiC particles and carbon particles are uniformly mixed, and is not based on the concept of separating and forming the interface between carbon particles with ceramics. Ceramics are limited to SiC.
- C / C composites obtained by impregnating carbon fiber fabrics with pitch impregnated and baked, and composite materials impregnated with resins are widely used. Has not been improved and its use at high temperatures in the air is limited. In addition, the surface is rough, processing is difficult, and production takes a long time.
- An object of the present invention is a ceramic carbon composite material that is lighter than ceramics and excellent in at least one of oxidation resistance, dust generation resistance, thermal conductivity, electrical conductivity, strength, denseness, and the like. It is in providing a manufacturing method, a ceramic covering ceramic carbon composite material, and its manufacturing method.
- the ceramic carbon composite material of the present invention is characterized in that a ceramic interface layer is formed between graphite or carbon particles containing graphite.
- the ceramic carbon composite material of the present invention is a composite material of graphite or carbon particles containing graphite and ceramics, it is lighter than a ceramic material.
- the ceramic interface layer is formed so as to cover the surface of graphite or carbon particles containing graphite, oxidation resistance, dust generation resistance, thermal conductivity, electrical conductivity, strength, denseness, etc. In at least one of the characteristics, it is superior to a composite material obtained by simply mixing carbon and ceramics.
- the ceramic interface layer preferably has a continuous three-dimensional network structure between graphite or carbon particles containing graphite.
- a continuous three-dimensional network structure of the ceramic interface layer it is possible to exhibit superior characteristics in terms of oxidation resistance, dust generation resistance, thermal conductivity, electrical conductivity, strength, and compactness. it can.
- the ceramic interface layer is at least selected from the group consisting of AlN, Al 2 O 3 , SiC, Si 3 N 4 , B 4 C, TaC, NbC, ZrC, ZnO, SiO 2 and ZrO 2, for example. It can be formed from one type.
- the thickness of the interface layer of the ceramic in the present invention can be, for example, 100 nm to 10 ⁇ m.
- the method for producing a ceramic carbon composite material of the present invention is a method by which the ceramic carbon composite material of the present invention can be produced. Ceramics in which a ceramic layer made of ceramic is coated on the surface of carbon particles containing graphite or graphite.
- the method includes a step of producing a coating powder, and a step of forming a molded body from the ceramic coated powder and sintering the molded body to produce a ceramic carbon composite material.
- the ceramics on the surface of the ceramic-coated powder are sintered to form a ceramic interface layer in the ceramic carbon composite material.
- the ceramic carbon composite material of the present invention can be efficiently produced.
- Examples of the method for forming the ceramic layer on the surface of the carbon particles include a gas phase method, a liquid phase method, a mechanical mixing method, or a combination of these methods.
- the ceramic particles are adhered to the surface of the carbon particles by adding carbon particles to the slurry of the ceramic particles to form a ceramic layer.
- the ceramic-coated ceramic carbon composite material of the present invention is characterized in that a ceramic coating layer is formed on at least a part of the surface of the ceramic carbon composite material of the present invention.
- the ceramic coating layer for example, at least one selected from the group consisting of AlN, Al 2 O 3 , MgO, SiC, Si 3 N 4 , B 4 C, TaC, NbC, ZrC, ZnO, SiO 2 and ZrO 2. Are formed.
- the composition of the ceramic coating layer may change from the inside toward the outside.
- the composition gradient structure is such that the composition of the ceramic material forming the ceramic interface layer is large and the components of the ceramic material forming the ceramic interface layer decrease toward the outside. You may have.
- the method for producing a ceramic-coated ceramic carbon composite material of the present invention is a method capable of producing the ceramic-coated ceramic carbon composite material of the present invention, and a step of forming a molded body of the ceramic carbon composite material before sintering.
- the step of providing a ceramic powder layer for forming a ceramic coating layer on at least a part of the surface of the molded body and the ceramic carbon composite formed body on which the ceramic powder layer is formed are integrally fired. And a step of tying.
- the ceramic coating layer is formed from a ceramic powder layer.
- the ceramic powder layer forming the ceramic coating layer may have a laminated structure in which a plurality of layers are laminated.
- the ceramic layers can be laminated by changing the composition of each layer so that the composition of the ceramic layer changes from the inside toward the outside.
- a ceramic material powder forming a ceramic interface layer in the ceramic carbon composite material may be mixed in a ceramic powder forming a ceramic coating layer. That is, as the ceramic powder for forming the ceramic coating layer, a ceramic material powder for forming the interface layer of the ceramic layer and another ceramic material may be mixed and used.
- a step of producing a sintered body of a ceramic carbon composite, and at least part of a surface of the sintered body of the ceramic carbon composite And a step of forming a ceramic coating layer by arranging and bonding a ceramic sintered plate or a single crystal plate.
- the ceramic coating layer is formed using a ceramic sintered body or a single crystal plate.
- the ceramic coating layer is formed on the surface of the ceramic carbon composite material by bonding such a ceramic sintered plate or single crystal plate to the sintered body of the ceramic carbon composite material.
- a ceramic-carbon composite material and ceramics that are lighter in weight and superior in at least one of oxidation resistance, dust generation resistance, thermal conductivity, electrical conductivity, strength, denseness, and the like as compared with ceramics. It can be set as a coated ceramic carbon composite.
- the ceramic carbon composite material or the ceramic-coated ceramic carbon composite material of the present invention can be efficiently produced.
- FIG. 1 is a schematic cross-sectional view showing a ceramic carbon composite material of one embodiment according to the present invention.
- FIG. 2 is a schematic cross-sectional view showing a ceramic-coated powder in one embodiment according to the present invention.
- FIG. 3 is a schematic cross-sectional view showing a ceramic-coated ceramic carbon composite material in one embodiment according to the present invention.
- FIG. 4 is a scanning electron micrograph showing Al 2 O 3 coated graphite particles in an example according to the present invention.
- FIG. 5 is a scanning electron micrograph showing a cross section of the ceramic carbon composite material in the example according to the present invention.
- FIG. 1 is a schematic cross-sectional view showing a ceramic carbon composite material in an embodiment according to the present invention.
- the ceramic carbon composite material 1 is formed by disposing a ceramic interface layer 3 between graphite or carbon particles 2 containing graphite.
- the ceramic interface layer 3 forms a continuous three-dimensional network structure between the carbon particles 2. Since the ceramic material constituting the ceramic interface layer 3 is excellent in oxidation resistance, heat resistance, wear resistance, strength, etc., the ceramic interface layer 3 forms a continuous three-dimensional network structure. These characteristics in the composite material 1 can be enhanced.
- the ceramic carbon composite material 1 can be improved in oxidation resistance, abrasion resistance, strength, bulk density and the like, and properties such as electrical conductivity and thermal conductivity can be controlled higher or lower than desired.
- the ceramic material constituting the ceramic interface layer 3 a material such as electrically insulating AlN, Al 2 O 3 , Si 3 N 4 , SiO 2 , ZrO 2 is used, and the carbon particles 2 are completely covered by the ceramic interface layer 3.
- the ceramic carbon composite material 1 can be electrically insulated.
- the ceramic material for forming the ceramic interface layer 3 SiC or ZnO is used, and when the ceramic interface layer 3 is made thin by several hundreds of nanometers, when a voltage higher than a certain level is applied, the ceramic interface layer 3 Further, a tunnel current or a Schottky current is generated, and a varistor effect showing a nonlinear current-voltage characteristic can be imparted to the ceramic carbon composite material 1.
- a ceramic carbon composite material 1 shown in FIG. 1 is formed by molding a molded body made of ceramic-coated powder in which a ceramic layer made of a ceramic material constituting the ceramic interface layer 3 is coated on carbon particles 2, and sintering the molded body. Can be manufactured.
- FIG. 2 is a schematic cross-sectional view showing the ceramic-coated powder 12. As shown in FIG. 2, the surface of the carbon particle 10 containing graphite or graphite is comprised by coat
- the carbon particles 10 are not particularly limited as long as they contain graphite or graphite.
- artificial graphite, natural graphite, mesophase, glassy carbon and the like can be used.
- These particle shapes are preferably spherical, but may be plate-like or columnar.
- the size of the carbon particles 10 is not particularly limited, and examples thereof include those having an average particle diameter of 1 to 30 ⁇ m.
- Examples of the ceramic material forming the ceramic layer 11 include oxides, carbides, and nitrides as described above.
- the thickness of the ceramic layer 11 can be variously selected in consideration of the thickness of the ceramic interface layer in the ceramic carbon composite material formed by sintering the ceramic-coated powder 12.
- the ceramic layer 11 may be formed by laminating a plurality of layers.
- the ceramic layer 11 may be formed by laminating different ceramics in order to ensure thermal stress of the carbon particles 10, bonding with the carbon particles 10, ensuring electrical insulation, and other function control.
- Examples of the method for forming the ceramic layer 11 on the surface of the carbon particles 10 include a gas phase method, a liquid phase method, a mechanical mixing method, or a method combining these as described above.
- a chemical vapor deposition method (CVD) method for depositing ceramics by a vapor phase reaction or a ceramic material is formed by reacting carbon on the surface of the carbon particles 10 with other components as a reaction source.
- the conversion method (CVR method) etc. are mentioned.
- a ceramic film is formed on the surface of carbon particles by a vapor phase method
- a carbon particle layer is disposed on a reaction gas supply source and heated in a vacuum or in an atmosphere of an inert gas such as Ar gas.
- an inert gas such as Ar gas.
- a ceramic layer can be formed on the surface of the carbon particles by a CVD method or a CVR method with a thickness in the range of, for example, 100 nm to 10 ⁇ m.
- carbon particles are added and mixed in a solution of a ceramic precursor material (for example, Al (OH) 3 ), the carbon particles are dried, and the precursor material is attached to the surface of the carbon particles. Then, the method of converting the precursor substance adhering to the surface into a predetermined ceramic material by heat-treating this is mentioned.
- a ceramic precursor material for example, Al (OH) 3
- mesographite powder As carbon particles, mesographite powder (average particle size 5 to 25 ⁇ m) was used, and after adding a small amount of water to this mesographite powder and mixing, NH 3 H 2 O was added dropwise to adjust the pH to about 11, The surface of the mesographite powder is positively charged. Next, an Al (NO 3 ) 3 solution is dropped and mixed to form a slurry. Further, NH 3 H 2 O is dropped in a sufficient amount so that all of Al (OH) 3 is precipitated, and then washed with water and methanol. Thereafter, it is dried at 110 ° C. for half a day, and the obtained powder is heat treated for 2 hours at 1500 ° C. in a nitrogen atmosphere. This heat treatment causes carbothermal reduction and nitriding reaction to form an AlN ceramic layer on the surface of the mesographite powder.
- the mechanical mixing method there is a method in which ceramic fine particles and carbon particles are mechanically mixed and coated.
- the size of the ceramic particles to be coated is preferably smaller than that of carbon particles, and examples thereof include an average particle diameter of 200 nm to 1 ⁇ m.
- the ceramic layer can be formed on the surface of the carbon particles by attaching the ceramic fine particles to the surface of the carbon particles.
- Specific examples of attaching the ceramic layer to the surface of the carbon particles by the mechanical mixing method include the following.
- Al 2 O 3 particles with an average particle size of 170 nm are mixed with meso-graphite particles with an average particle size of 5 to 20 ⁇ m by adding a small amount of binder and using an autorotation / revolution mixer to make the alumina particles uniform.
- the mesographite particles coated on the surface are formed.
- a slurry method may be used as a method for producing the ceramic-coated powder.
- the slurry method is a method in which a ceramic layer is formed by adhering ceramic particles to the surface of carbon particles by adding carbon particles to a slurry of ceramic particles.
- a binder may be added to the slurry of the ceramic particles.
- slurry method examples include, for example, a method in which carbon particles are added to a slurry containing AlN nanoparticles and a binder, mixed, and then dried.
- a ceramic carbon composite material can be produced by molding a molded body from the ceramic-coated powder obtained as described above and sintering the molded body.
- a sintering method a normal pressure sintering method, a hot press sintering method, a discharge plasma sintering method, or the like can be used.
- the discharge plasma sintering method is convenient because high-density sintering can be performed in a short time of 2 to 60 minutes.
- a sintering aid suitable for the selected ceramic can be mixed and sintered in the ceramic-coated powder in a proportion of 0.5 to 20% by weight of the whole.
- FIG. 3 is a schematic cross-sectional view showing the ceramic-coated ceramic carbon composite material of the present invention.
- the ceramic-coated ceramic carbon composite material 5 of the present embodiment is configured by providing a ceramic coating layer 4 on the surface of the ceramic carbon composite material 1.
- the ceramic coating layer 4 is provided on the entire surface of the ceramic carbon composite material 1.
- the ceramic coating layer 4 does not necessarily have to be provided on the entire surface. What is necessary is just to be provided on the surface of at least one part of the composite material 1.
- the ceramic carbon composite material 1 may be provided only on one of the upper surface, the lower surface, and the side surface.
- the ceramic coating layer 4 can be formed from ceramics such as oxides, carbides, and nitrides.
- the ceramic material forming the ceramic coating layer 4 may be the same as or different from the ceramic material forming the ceramic interface layer 3 in the ceramic carbon composite material 1.
- the composition of the ceramic coating layer 4 may be changed from the inside toward the outside.
- the composition inside the ceramic coating layer 4 can be a composition close to that of the ceramic interface layer 3, and can be gradually changed from the inside toward the outside.
- the ceramic coating layer 4 As a method for forming the ceramic coating layer 4, as described above, a molded body of the ceramic carbon composite material 1 before firing is molded, and the ceramic coating layer 4 is formed on at least a part of the surface of the molded body. There is a method in which a ceramic powder layer is provided and the ceramic carbon composite material 1 and the ceramic coating layer 4 are integrally sintered in this state.
- the ceramic coating layer 4 may be formed from a plurality of layers, and the composition may be changed in the thickness direction of the ceramic coating layer 4.
- the adhesiveness of the ceramic carbon composite material 1 and the ceramic coating layer 4 can be improved, and characteristics, such as the whole intensity
- a ceramic powder for forming the ceramic coating layer 4 a mixture of a ceramic material powder forming the ceramic interface layer 3 and another powder may be used. Thereby, the adhesiveness of the ceramic coating layer 4 and the ceramic interface layer 3 can be improved, and characteristics such as strength can be improved.
- a sintered body of the ceramic carbon composite material 1 is manufactured, and a ceramic sintered plate or a ceramic single crystal plate is formed on at least a part of the surface of the sintered body. And bonding the ceramic sintered plate or single crystal plate onto the surface of the ceramic carbon composite material 1.
- Specific methods for joining include hot pressing, discharge plasma sintering, and pressure heating.
- the characteristics of the ceramic carbon composite materials and ceramic-coated ceramic carbon composite materials obtained in the following examples and comparative examples were evaluated by the following evaluation methods.
- the sintered ceramic carbon composite and the ceramic-coated ceramic carbon composite were visually evaluated for cracks and peeling and deformation of the ceramic surface.
- the sintered ceramic carbon composite and the ceramic-coated ceramic carbon composite were cut into a size of 4 mm ⁇ 2 mm ⁇ 20 mm, and the bending strength was measured by a three-point bending strength test.
- the span length was 15 mm and the crosshead speed was 0.5 mm / min.
- a ceramic carbon composite material having a diameter of 10 mm and a thickness of 2 mm and a ceramic-coated ceramic carbon composite material were produced, and the thermal conductivity was measured by a laser flash method.
- Example 1 NH 3 H 2 O was added dropwise to a slurry obtained by adding water (5% by volume) to mesographite powder (10 g, particle size: 5 to 20 ⁇ m) and mixed, and then the pH value was adjusted to about 11, and then Al (NO 3 ) Three solutions (20 wt%) were added and mixed, and NH 3 H 2 O (28 wt%) was further added dropwise. NH 3 H 2 O is 10 times more than the amount that Al (OH 3 ) is all precipitated. Thereafter, the slurry was washed with water, washed with methanol, and dried at 110 ° C. Subsequently, carbothermal reduction and nitriding were performed at 1500 ° C. for 2 hours in a nitrogen atmosphere.
- Al (OH 3 ) was almost converted to AlN, and the surface of the mesographite particles was almost uniformly coated.
- the AlN coating amount determined from the X-ray diffraction calibration curve is about 20% by volume. When the coating amount was further increased, the coating film was peeled off or many cracks were observed.
- This AlN-coated mesographite powder was filled in a graphite mold and sintered by a discharge plasma sintering method at 1600 ° C., 30 MPa for 5 minutes. The characteristics of the obtained ceramic carbon composite material were evaluated as described above. The results of the evaluation test are shown in Table 1.
- Example 2 The same meso graphite powder (5 g) and hydroxyethyl cellulose aqueous solution (5% by weight, 1.5 g) as in Example 1 were placed in a plastic container and machined for 30 seconds using a rotating / revolving mixer (model number: AR-310, manufactured by Shinky Corporation). Mixed. Next, Al 2 O 3 powder (average particle size: 100 nm, Grade TM-D, Daimei Chemical Co., Ltd., 2.3 g) was added, mixed for 2 minutes, and dried. As shown in FIG. 4, the Al 2 O 3 particles were uniformly coated on the surface of the mesographite powder. The amount of Al 2 O 3 is about 20% by volume.
- This Al 2 O 3 coating powder was filled in a graphite mold, and pressed for 20 minutes under the conditions of a temperature of 2000 ° C. and a pressure of 40 MPa, to perform discharge plasma sintering.
- the test results are shown in Table 1.
- the structure of the sintered Al 2 O 3 carbon composite material is shown in FIG.
- Example 3 Spherical natural graphite powder (25 g) is added to 6.23 g of a binder solution prepared by dissolving acrylamide (8 g) and N, N′methylenebisacrylamide (1 g) in isopropanol (45 g), and centrifuged for 1 minute, and then AlN powder ( (Average particle size: 0.6 ⁇ m, grade: H, 9.35 g, manufactured by Tokuyama Corporation) was added and mixed for 3 minutes to prepare a slurry. Thereafter, the slurry was poured into a plastic mold and dried at 90 ° C. for 12 hours. This molded body was subjected to spark plasma sintering under the same conditions as in Example 1. The test results are shown in Table 1. As the spherical natural graphite particles, those having an average particle diameter of 20 ⁇ m were used.
- Example 4 The Al 2 O 3 -coated mesographite powder prepared in Example 2 was filled in a graphite mold, and an AlN powder to which Y 2 O 3 (5% by weight) as a sintering aid was added was laminated thereon. The spark plasma sintering was performed under the same conditions. A dense AlN layer (thickness 1 mm) could be covered, and no cracking or peeling occurred. Moreover, although the sample which coat
- Example 1 The spherical natural graphite powder (10 g) used in Example 3 and the SiC fine powder (SERA-A06, average particle size: 600 nm, manufactured by Shinano Denki Co., Ltd., 12 g) were mixed well in a mill, and then filled into a graphite mold. Sintering was performed under the same conditions as in Example 1 by the discharge plasma sintering method. The results of the evaluation test are shown in Table 1.
- Example 2 The spherical natural graphite powder used in Example 3 was filled in a graphite mold without being coated with ceramic particles, and sintered under the same conditions as in Example 1 by the discharge plasma sintering method. The results of the evaluation test are shown in Table 1.
- Example 3 The spherical natural graphite powder (10 g) used in Example 3 and AlN powder (average particle size 0.6 ⁇ m: 3.74 g, manufactured by Tokuyama Corporation) were mixed for half a day in a normal rotary mill, and then filled into a graphite mold. Spark plasma sintering was performed under the same conditions as in Example 1. The test results are shown in Table 1.
- Example 4 The mesographite powder used in Example 1 was filled in a graphite mold without being coated with ceramic particles, and sintered under the same conditions as in Example 1 by the discharge plasma sintering method. The graphite powder did not sinter and did not harden.
- the ceramic carbon composite materials of Examples 1 to 3 and the ceramic-coated ceramic carbon composite material of Example 4 according to the present invention are lighter than ceramics and are resistant to oxidation and dust generation. It can be seen that it has excellent properties, thermal conductivity, electrical conductivity, strength and denseness.
- the oxidation start temperature of the ceramic-coated ceramic carbon composite material of the example is “not measured” in Table 1. However, since this is coated with a ceramic coating layer, oxidation almost proceeds in the measured temperature range. Indicates that no.
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Products (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
Description
焼結後のセラミックス炭素複合材及びセラミックス被覆セラミックス炭素複合材について、目視により、割れやセラミックス表面の剥がれ及び変形を評価した。
焼結したセラミックス炭素複合材及びセラミックス被覆セラミックス炭素複合材の小片を用い、熱重量試験により、昇温速度10℃/分で昇温し、重量減少開始温度を測定し、酸化開始温度とした。
焼結したセラミックス炭素複合材及びセラミックス被覆セラミックス炭素複合材を、4mm×2mm×20mmの大きに切り出し、3点曲げ強度試験により曲げ強度を測定した。スパン長を15mm、クロスヘッド速度を0.5mm/分とした。
直径10mm、厚さ2mmのセラミックス炭素複合材及びセラミックス被覆セラミックス炭素複合材を作製し、レーザーフラッシュ法で熱伝導率を測定した。
焼結したセラミックス炭素複合材及びセラミックス被覆セラミックス炭素複合材の表面の抵抗率を、直流四探針法で測定した。
焼結したセラミックス炭素複合材及びセラミックス被覆セラミックス炭素複合材を、白紙の上に一定の荷重でこすりつけ、白紙の変色を目視により観察し、以下の基準で評価した。
△:やや薄く灰色になる
×:容易に黒くなり炭素が付着する
メソ黒鉛粉末(10g、粒子径:5~20μm)に水(5体積%)を加え混合したスラリーに、NH3H2Oを滴下しpH値を約11に調整した後、Al(NO3)3溶液(20重量%)を添加混合し、さらにNH3H2O(28重量%)滴下した。NH3H2OはAl(OH3)が全部沈澱すると仮定した量より10倍多い。その後、スラリーを水洗し、メタノール洗浄後、110℃で乾燥した。ついで窒素雰囲気中で、炭素熱還元と窒化処理を1500℃、2時間行った。X線粉末回折とSEM観察から、Al(OH3)は殆どAlNに転換し、メソ黒鉛粒子表面をほぼ均一に被覆していた。X線回折の検量線から求めたAlN被覆量は約20体積%である。これ以上被覆量が多くなると、被膜が剥がれたり、割れが多く見られた。このAlN被覆メソ黒鉛粉末を、黒鉛モールドに充填し、放電プラズマ焼結法により1600℃、30MPa、5分間焼結した。得られたセラミックス炭素複合材について、上記のようにして特性を評価した。評価試験の結果を表1に示す。
実施例1と同じメソ黒鉛粉末(5g)とヒドロキシエチルセルロース水溶液(5重量%、1.5g)をプラスチック容器に入れ、自転・公転ミキサー(型番:AR-310、株式会社シンキー製)により30秒間機械混合した。ついで、Al2O3粉末(平均粒径:100nm、グレードTM-D、大明化学工業株式会社、2.3g)を添加し2分混合後、乾燥した。Al2O3粒子は図4に示すようにメソ黒鉛粉末表面に均一に被覆されていた。Al2O3量は約20体積%である。このAl2O3被覆粉末を黒鉛モールドに充填し、温度2000℃、圧力40MPaの条件で20分間加圧し、放電プラズマ焼結を行った。試験結果を表1に示す。また、焼結したAl2O3炭素複合材の組織を図5に示す。
アクリルアミド(8g)、及びN,N’メチレンビスアクリルアミド(1g)をイソプロパノール(45g)に溶解したバインダー溶液6.23gに、球状天然黒鉛粉末(25g)を入れ1分間遠心混合し、ついでAlN粉末(平均粒径:0.6μm、グレード:H、株式会社トクヤマ製、9.35g)を添加し、3分間混合しスラリーを作製した。その後、このスラリーをプラスチック製モールドに流し込み、90℃で12時間乾燥させた。この成形体を実施例1と同じ条件で放電プラズマ焼結した。試験結果を表1に示す。球状天然黒鉛粒子としては、平均粒子径20μmのものを用いた。
実施例2で作製したAl2O3被覆メソ黒鉛粉末を黒鉛モールドに充填し、その上に焼結助剤のY2O3(5重量%)を添加したAlN粉末を積層し、実施例2と同じ条件で放電プラズマ焼結した。緻密なAlN層(厚み1mm)が被覆でき、割れや剥がれは生じなかった。また、全表面をAlN層で被覆するサンプルも作製したが、割れ等はなかった。
実施例3で使用した球状天然黒鉛粉末(10g)とSiC微粉末(SERA-A06、平均粒径:600nm、信濃電気精錬社製、12g)、をミルでよく混合した後、黒鉛モールドに充填し、放電プラズマ焼結法により実施例1と同じ条件で焼結した。評価試験の結果を表1に示す。
実施例3で使用した球状天然黒鉛粉末を、セラミックス粒子を被覆することなく黒鉛モールドに充填し、放電プラズマ焼結法により実施例1と同じ条件で焼結した。評価試験の結果を表1に示す。
実施例3で使用した球状天然黒鉛粉末(10g)とAlN粉末(平均粒径0.6μm:3.74g、トクヤマ社製)を通常の回転ミルで半日混合した後、黒鉛モールドに充填し、実施例1と同じ条件で放電プラズマ焼結した。試験結果を表1に示す。
実施例1で使用したメソ黒鉛粉末を、セラミックス粒子を被覆することなく黒鉛モールドに充填し、放電プラズマ焼結法により実施例1と同じ条件で焼結した。該黒鉛粉末は焼結せず固まらなかった。
2…炭素粒子
3…セラミックス界面層
4…セラミックス被覆層
5…セラミックス被覆セラミックス炭素複合材
10…炭素粒子
11…セラミックス層
12…セラミックス被覆粉末
Claims (12)
- 黒鉛もしくは黒鉛を含む炭素粒子同士間にセラミックスの界面層が形成されたことを特徴とするセラミックス炭素複合材。
- 前記セラミックスの界面層が、AlN、Al2O3、SiC、Si3N4、B4C、TaC、NbC、ZrC、ZnO、SiO2及びZrO2からなる群より選ばれる少なくとも1種から形成されていることを特徴とする請求項1に記載のセラミックス炭素複合材。
- 前記セラミックスの界面層が、黒鉛もしくは黒鉛を含む炭素粒子間で、連続した3次元網目構造を有していることを特徴とする請求項1または2に記載のセラミックス炭素複合材。
- 前記セラミックスの界面層の厚さが、100nm~10μmであることを特徴とする請求項1~3のいずれか1項に記載のセラミックス炭素複合材。
- 請求項1~4のいずれか1項に記載のセラミックス炭素複合材を製造する方法であって、
黒鉛もしくは黒鉛を含む炭素粒子の表面に、前記セラミックスからなるセラミックス層を被覆したセラミックス被覆粉末を作製する工程と、
前記セラミックス被覆粉末から成形体を成形し、この成形体を焼結して、セラミックス炭素複合材を作製する工程とを備えるセラミックス炭素複合材の製造方法。 - 前記セラミックス層を、気相法、液相法、機械的混合法、またはこれらを組み合わせた方法により前記炭素粒子の表面に形成することを特徴とする請求項5に記載のセラミックス炭素複合材の製造方法。
- 前記炭素粒子を、セラミックス粒子のスラリー中に添加することにより、前記炭素粒子の表面に前記セラミックス粒子を付着させ前記セラミックス層を形成することを特徴とする請求項5に記載のセラミックス炭素複合材の製造方法。
- 請求項1~4のいずれか1項に記載のセラミックス炭素複合材の表面の少なくとも一部の上に、セラミックス被覆層を形成したことを特徴とするセラミックス被覆セラミックス炭素複合材。
- 前記セラミックス被覆層が、AlN、Al2O3、MgO、SiC、Si3N4、B4C、TaC、NbC、ZrC、ZnO、SiO2及びZrO2からなる群より選ばれる少なくとも1種から形成されていることを特徴とする請求項8に記載のセラミックス被覆セラミックス炭素複合材。
- 前記セラミックス炭素複合材におけるセラミックスの界面層を形成するセラミックス材料と、前記セラミックス被覆層を形成するセラミックス材料とが異なる場合において、前記セラミックス被覆層の組成が、内部から外部に向かうにつれて変化していることを特徴とする請求項8または9に記載のセラミックス被覆セラミックス炭素複合材。
- 請求項8~10のいずれか1項に記載のセラミックス被覆セラミックス炭素複合材を製造する方法であって、
焼結前のセラミックス炭素複合材の成形体を成形する工程と、
前記成形体の表面の少なくとも一部の上に、前記セラミックス被覆層を形成するためのセラミックス粉末の層を設ける工程と、
前記セラミックス粉末の層を形成したセラミックス炭素複合材の成形体を、一体的に焼結する工程とを備えることを特徴とするセラミックス被覆セラミックス炭素複合材の製造方法。 - 請求項8~10のいずれか1項に記載のセラミックス被覆セラミックス炭素複合材を製造する方法であって、
セラミックス炭素複合体の焼結体を製造する工程と、
前記セラミックス炭素複合体の焼結体の表面の少なくとも一部の上に、セラミックス焼結板もしくは単結晶板を配置し接合することにより、前記セラミックス被覆層を形成する工程とを備えることを特徴とするセラミックス被覆セラミックス炭素複合材の製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU2012112955/03A RU2012112955A (ru) | 2009-09-04 | 2010-09-01 | Керамический углеродный композиционный материал, способ получения керамического углеродного композиционного материала, керамический углеродный композиционный материал с керамическим покрытием и способ получения керамического углеродного композиционного материала с керамическим покрытием |
EP20100813706 EP2474515A4 (en) | 2009-09-04 | 2010-09-01 | CERAMIC CARBON COMPOSITE MATERIAL, METHOD FOR MANUFACTURING CERAMIC CARBON COMPOSITE MATERIAL, CERAMIC CARBON COMPOSITE MATERIAL WITH CERAMIC COATING, AND PROCESS FOR PRODUCING CERAMIC CARBON COMPOSITE MATERIAL WITH CERAMIC COATING |
CN201080039131.0A CN102482164B (zh) | 2009-09-04 | 2010-09-01 | 陶瓷碳复合材及其制造方法与陶瓷包覆陶瓷碳复合材及其制造方法 |
US13/392,594 US9296660B2 (en) | 2009-09-04 | 2010-09-01 | Ceramic carbon composite material, method for producing ceramic carbon composite material, ceramic-coated ceramic carbon composite material, and method for producing ceramic-coated ceramic carbon composite material |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009205042A JP5678332B2 (ja) | 2009-09-04 | 2009-09-04 | セラミックス炭素複合材及びその製造方法並びにセラミックス被覆セラミックス炭素複合材及びその製造方法 |
JP2009-205042 | 2009-09-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2011027757A1 true WO2011027757A1 (ja) | 2011-03-10 |
Family
ID=43649292
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2010/064872 WO2011027757A1 (ja) | 2009-09-04 | 2010-09-01 | セラミックス炭素複合材及びその製造方法並びにセラミックス被覆セラミックス炭素複合材及びその製造方法 |
Country Status (8)
Country | Link |
---|---|
US (1) | US9296660B2 (ja) |
EP (1) | EP2474515A4 (ja) |
JP (1) | JP5678332B2 (ja) |
KR (1) | KR20120076341A (ja) |
CN (1) | CN102482164B (ja) |
RU (1) | RU2012112955A (ja) |
TW (1) | TWI481581B (ja) |
WO (1) | WO2011027757A1 (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012165208A1 (ja) * | 2011-05-27 | 2012-12-06 | 東洋炭素株式会社 | 金属材とセラミックス-炭素複合材との接合体、その製造方法、炭素材接合体、炭素材接合体用接合材及び炭素材接合体の製造方法 |
WO2012165291A1 (ja) * | 2011-05-27 | 2012-12-06 | 東洋炭素株式会社 | 炭化ケイ素-炭素複合材の製造方法 |
JP2012246172A (ja) * | 2011-05-27 | 2012-12-13 | Toyo Tanso Kk | 金属材とセラミックス−炭素複合材との接合体及びその製造方法 |
JP2012246173A (ja) * | 2011-05-27 | 2012-12-13 | Toyo Tanso Kk | 炭素材接合体、炭素材接合体用接合材及び炭素材接合体の製造方法 |
US20130309501A1 (en) * | 2012-05-15 | 2013-11-21 | Toyo Tanso Co., Ltd. | Method for producing carbon member-inorganic member joined body, and carbon member-inorganic member joined body |
JPWO2013172286A1 (ja) * | 2012-05-15 | 2016-01-12 | 東洋炭素株式会社 | 炭素材−セラミック材接合体の製造方法、及び炭素材−セラミック材接合体 |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5520564B2 (ja) | 2009-10-13 | 2014-06-11 | 東洋炭素株式会社 | 炭素材料及びその製造方法 |
JP5418720B2 (ja) * | 2011-09-13 | 2014-02-19 | Dic株式会社 | 無機フィラー複合体、熱伝導性樹脂組成物、及び成形体 |
CN103085372B (zh) * | 2011-10-31 | 2015-10-07 | 深圳光启高等理工研究院 | 一种超材料介质基板及其加工方法 |
JP5832277B2 (ja) * | 2011-12-22 | 2015-12-16 | 大阪瓦斯株式会社 | 亜鉛化合物被覆炭素材及びその製造方法、並びに該亜鉛化合物被覆炭素材を用いた複合材 |
KR101218508B1 (ko) * | 2012-01-17 | 2013-01-03 | 인하대학교 산학협력단 | 세라믹-탄소 복합체 및 그 제조방법 |
RU2520310C2 (ru) * | 2012-09-17 | 2014-06-20 | Открытое Акционерное Общество "Уральский научно-исследовательский институт композиционных материалов" | Способ получения защитного покрытия на изделиях с карбид кремния-, нитрид кремния-, углеродсодержащей основой |
WO2014081005A1 (ja) | 2012-11-26 | 2014-05-30 | 東洋炭素株式会社 | セラミックス炭素複合材の特性制御方法並びにセラミックス炭素複合材 |
CN105073189A (zh) * | 2013-03-13 | 2015-11-18 | 株式会社爱入府 | 生物体紧张缓和部件 |
WO2015025951A1 (ja) * | 2013-08-23 | 2015-02-26 | 東洋炭素株式会社 | 多孔質セラミックス及びその製造方法 |
CN104072144A (zh) * | 2014-07-16 | 2014-10-01 | 苏州立瓷电子技术有限公司 | 一种高导热氮化铝陶瓷材料及其制备方法 |
US20170114455A1 (en) * | 2015-10-26 | 2017-04-27 | Jones Tech (USA), Inc. | Thermally conductive composition with ceramic-coated electrically conductive filler |
CN106211387A (zh) * | 2016-07-05 | 2016-12-07 | 安徽吉安特种线缆制造有限公司 | 一种复合高分子自限温伴热电缆 |
KR101901596B1 (ko) * | 2017-06-02 | 2018-09-27 | 재단법인 철원플라즈마 산업기술연구원 | 절연특성과 높은 열전도성을 갖는 탄소-세라믹 복합소재 및 그 제조방법 |
KR102338247B1 (ko) * | 2017-09-21 | 2021-12-10 | 엔테그리스, 아이엔씨. | 유리 성형용 주형을 위한 코팅 및 이를 포함하는 주형 |
CN108484136B (zh) * | 2018-02-10 | 2020-12-25 | 河南工业大学 | 一种高耐磨滑板砖及其生产方法 |
JP7152003B2 (ja) * | 2018-08-22 | 2022-10-12 | 河合石灰工業株式会社 | 高熱伝導性無機フィラー複合粒子及びその製造方法 |
CN112661515A (zh) * | 2020-12-24 | 2021-04-16 | 江苏集芯半导体硅材料研究院有限公司 | 一种单晶硅炉用加热器SiC-ZrC-B4C-ZrB2-BN复合涂层及制备方法 |
CN114455949B (zh) * | 2022-03-03 | 2023-04-14 | 西安交通大学 | 一种三维氮化铝骨架增强高取向片状石墨复合材料及其制备方法 |
WO2024056557A1 (en) * | 2022-09-14 | 2024-03-21 | Ripd Ip Development Ltd | Ceramic materials including core-shell particles and varistors including the same |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59129142A (ja) * | 1983-01-14 | 1984-07-25 | 日本ピラ−工業株式会社 | 複合成形体およびその製造方法 |
JPH03174358A (ja) * | 1989-12-01 | 1991-07-29 | Osaka Cement Co Ltd | 炭素及び炭化ケイ素の連続相からなる複合材料並びにその製造方法 |
JPH0625569A (ja) | 1992-04-20 | 1994-02-01 | Aqualon Co | 水性保護塗料 |
JP2004339048A (ja) | 2003-04-24 | 2004-12-02 | Mitsuyuki Oyanagi | C−SiC焼結体およびその製造方法 |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55140768A (en) | 1979-04-19 | 1980-11-04 | Shinagawa Refractories Co | Spray refractories |
JPS58181713A (ja) | 1982-04-19 | 1983-10-24 | Nippon Pillar Packing Co Ltd | 膨張黒鉛成形体 |
JPS6025569A (ja) | 1983-07-25 | 1985-02-08 | Toyo Seikan Kaisha Ltd | 塗装焼付乾燥炉の排気量制御方法 |
US5246897A (en) * | 1991-08-09 | 1993-09-21 | Asahi Glass Company Ltd. | Powder mixture for monolithic refractories containing graphite and a method of making thereof |
JP3217864B2 (ja) * | 1991-08-28 | 2001-10-15 | 旭硝子株式会社 | 黒鉛含有不定形耐火物用組成物とその調製方法 |
US5422322A (en) * | 1993-02-10 | 1995-06-06 | The Stackpole Corporation | Dense, self-sintered silicon carbide/carbon-graphite composite and process for producing same |
US5580834A (en) * | 1993-02-10 | 1996-12-03 | The Morgan Crucible Company Plc | Self-sintered silicon carbide/carbon graphite composite material having interconnected pores which may be impregnated and raw batch and process for producing same |
US5374342A (en) | 1993-03-22 | 1994-12-20 | Moltech Invent S.A. | Production of carbon-based composite materials as components of aluminium production cells |
US5486496A (en) * | 1994-06-10 | 1996-01-23 | Alumina Ceramics Co. (Aci) | Graphite-loaded silicon carbide |
JP3966911B2 (ja) * | 1994-10-17 | 2007-08-29 | 東洋炭素株式会社 | 炉内部材及び治具 |
JPH09157040A (ja) * | 1995-11-30 | 1997-06-17 | Kawasaki Steel Corp | 高炉樋用不定形耐火物 |
DE19710105A1 (de) * | 1997-03-12 | 1998-09-17 | Sgl Technik Gmbh | Mit Graphitkurzfasern verstärkter Siliciumcarbidkörper |
JP3608335B2 (ja) * | 1997-03-31 | 2005-01-12 | Jfeスチール株式会社 | 高炉主樋メタルライン用黒鉛含有不定形耐火材料 |
DE19727586C2 (de) * | 1997-06-28 | 2002-10-24 | Daimler Chrysler Ag | Bremseinheit aus Bremsscheibe und Bremsbelag |
JPH11310474A (ja) * | 1998-04-28 | 1999-11-09 | Okayama Ceramics Gijutsu Shinko Zaidan | 表面処理黒鉛およびそれを用いた炭素含有不定形 耐火物 |
JP4024946B2 (ja) | 1998-09-11 | 2007-12-19 | 東洋炭素株式会社 | メカニカルシール部材 |
US20050181209A1 (en) * | 1999-08-20 | 2005-08-18 | Karandikar Prashant G. | Nanotube-containing composite bodies, and methods for making same |
JP2001180919A (ja) * | 1999-12-24 | 2001-07-03 | Sumitomo Electric Ind Ltd | 炭化珪素−炭素系複合粉末とそれを用いた複合材料 |
KR100417161B1 (ko) * | 2001-02-12 | 2004-02-05 | 국방과학연구소 | 탄소직물로 이루어진 C/SiC 복합재료의 제조방법 |
US6716800B2 (en) * | 2002-04-12 | 2004-04-06 | John Crane Inc. | Composite body of silicon carbide and binderless carbon, process for producing such composite body, and article of manufacturing utilizing such composite body for tribological applications |
US6953760B2 (en) * | 2003-06-04 | 2005-10-11 | Saint-Gobain Ceramics & Plastics, Inc. | Ceramic component containing inclusions |
US20050276961A1 (en) * | 2003-08-04 | 2005-12-15 | Sherwood Walter J | Materials and methods for making ceramic matrix composites |
US20060062985A1 (en) * | 2004-04-26 | 2006-03-23 | Karandikar Prashant G | Nanotube-containing composite bodies, and methods for making same |
JP4849824B2 (ja) * | 2004-05-17 | 2012-01-11 | イビデン株式会社 | 親水性多孔質材、親水性多孔質材の製造方法、高分子電解質型燃料電池用加湿部材、及び、固体高分子型燃料電池用セパレータ |
US7842432B2 (en) * | 2004-12-09 | 2010-11-30 | Nanosys, Inc. | Nanowire structures comprising carbon |
WO2007097402A1 (ja) * | 2006-02-24 | 2007-08-30 | Hitachi Chemical Company, Ltd. | セラミック焼結体及びこれを用いた摺動部品、並びに、セラミック焼結体の製造方法 |
ES2372005T3 (es) | 2006-06-09 | 2012-01-12 | Element Six (Production) (Pty) Ltd. | Materiales compuestos ultraduros. |
JP5737547B2 (ja) * | 2009-09-04 | 2015-06-17 | 東洋炭素株式会社 | 炭化ケイ素被覆黒鉛粒子の製造方法及び炭化ケイ素被覆黒鉛粒子 |
-
2009
- 2009-09-04 JP JP2009205042A patent/JP5678332B2/ja not_active Expired - Fee Related
-
2010
- 2010-09-01 RU RU2012112955/03A patent/RU2012112955A/ru not_active Application Discontinuation
- 2010-09-01 KR KR20127003034A patent/KR20120076341A/ko not_active Application Discontinuation
- 2010-09-01 WO PCT/JP2010/064872 patent/WO2011027757A1/ja active Application Filing
- 2010-09-01 US US13/392,594 patent/US9296660B2/en not_active Expired - Fee Related
- 2010-09-01 CN CN201080039131.0A patent/CN102482164B/zh not_active Expired - Fee Related
- 2010-09-01 EP EP20100813706 patent/EP2474515A4/en not_active Withdrawn
- 2010-09-02 TW TW099129621A patent/TWI481581B/zh not_active IP Right Cessation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59129142A (ja) * | 1983-01-14 | 1984-07-25 | 日本ピラ−工業株式会社 | 複合成形体およびその製造方法 |
JPH03174358A (ja) * | 1989-12-01 | 1991-07-29 | Osaka Cement Co Ltd | 炭素及び炭化ケイ素の連続相からなる複合材料並びにその製造方法 |
JPH0625569A (ja) | 1992-04-20 | 1994-02-01 | Aqualon Co | 水性保護塗料 |
JP2004339048A (ja) | 2003-04-24 | 2004-12-02 | Mitsuyuki Oyanagi | C−SiC焼結体およびその製造方法 |
Non-Patent Citations (1)
Title |
---|
See also references of EP2474515A4 * |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012165208A1 (ja) * | 2011-05-27 | 2012-12-06 | 東洋炭素株式会社 | 金属材とセラミックス-炭素複合材との接合体、その製造方法、炭素材接合体、炭素材接合体用接合材及び炭素材接合体の製造方法 |
WO2012165291A1 (ja) * | 2011-05-27 | 2012-12-06 | 東洋炭素株式会社 | 炭化ケイ素-炭素複合材の製造方法 |
JP2012246172A (ja) * | 2011-05-27 | 2012-12-13 | Toyo Tanso Kk | 金属材とセラミックス−炭素複合材との接合体及びその製造方法 |
JP2012246173A (ja) * | 2011-05-27 | 2012-12-13 | Toyo Tanso Kk | 炭素材接合体、炭素材接合体用接合材及び炭素材接合体の製造方法 |
CN103596905A (zh) * | 2011-05-27 | 2014-02-19 | 东洋炭素株式会社 | 金属材料与陶瓷-碳复合材料的接合体、其制造方法、碳材料接合体、碳材料接合体用接合材料和碳材料接合体的制造方法 |
EP2716618A4 (en) * | 2011-05-27 | 2015-05-27 | Toyo Tanso Co | A COMPOSITE OF A METAL MATERIAL AND A CERAMIC CARBON COMPOSITE MATERIAL, METHOD OF MANUFACTURING THEREOF, CARBON MATERIAL COMPOUND, JOINT MATERIAL FOR THE CARBON MATERIAL COMPOUND, AND METHOD FOR THE PRODUCTION OF THE CARBON MATERIAL COMPOUND |
US9045375B2 (en) | 2011-05-27 | 2015-06-02 | Toyo Tanso Co., Ltd. | Method for producing silicon carbide-carbon composite |
CN104744063A (zh) * | 2011-05-27 | 2015-07-01 | 东洋炭素株式会社 | 金属材料与陶瓷-碳复合材料的接合体、其制造方法、碳材料接合体、碳材料接合体用接合材料和碳材料接合体的制造方法 |
US20130309501A1 (en) * | 2012-05-15 | 2013-11-21 | Toyo Tanso Co., Ltd. | Method for producing carbon member-inorganic member joined body, and carbon member-inorganic member joined body |
JP2014065651A (ja) * | 2012-05-15 | 2014-04-17 | Toyo Tanso Kk | 炭素材−無機材接合体の製造方法、及び炭素材−無機材接合体 |
JPWO2013172286A1 (ja) * | 2012-05-15 | 2016-01-12 | 東洋炭素株式会社 | 炭素材−セラミック材接合体の製造方法、及び炭素材−セラミック材接合体 |
Also Published As
Publication number | Publication date |
---|---|
KR20120076341A (ko) | 2012-07-09 |
CN102482164A (zh) | 2012-05-30 |
RU2012112955A (ru) | 2013-10-10 |
JP5678332B2 (ja) | 2015-03-04 |
US9296660B2 (en) | 2016-03-29 |
EP2474515A1 (en) | 2012-07-11 |
US20120164441A1 (en) | 2012-06-28 |
JP2011051867A (ja) | 2011-03-17 |
TW201113235A (en) | 2011-04-16 |
EP2474515A4 (en) | 2013-03-13 |
CN102482164B (zh) | 2014-06-18 |
TWI481581B (zh) | 2015-04-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5678332B2 (ja) | セラミックス炭素複合材及びその製造方法並びにセラミックス被覆セラミックス炭素複合材及びその製造方法 | |
JP5737547B2 (ja) | 炭化ケイ素被覆黒鉛粒子の製造方法及び炭化ケイ素被覆黒鉛粒子 | |
CN110590404B (zh) | 一种碳基材料表面HfB2-SiC抗氧化涂层的制备方法 | |
TW201302659A (zh) | 金屬材與陶瓷-碳複合材之接合體、其製造方法、碳材接合體、碳材接合體用接合材以及碳材接合體之製造方法 | |
Kawano et al. | Highly electroconductive TiN/Si 3 N 4 composite ceramics fabricated by spark plasma sintering of Si 3 N 4 particles with a nano-sized TiN coating | |
KR101413250B1 (ko) | 질화알루미늄 소결체, 그 제법 및 그것을 이용한 정전 척 | |
CN114180943A (zh) | 复合烧结体、半导体制造装置构件及复合烧结体的制造方法 | |
Shimoda et al. | Novel production route for SiC/SiC ceramic-matrix composites using sandwich prepreg sheets | |
JP5748564B2 (ja) | 炭化ケイ素−炭素複合材の製造方法 | |
JP2016204220A (ja) | 金属ナノ粒子が付着したグラファイト粉体及びその粉体の製造方法 | |
JP2004175605A (ja) | 耐酸化性c/c複合材及びその製造方法 | |
CN113260732A (zh) | 等离子体处理装置用构件和具备它的等离子体处理装置 | |
Mohammad et al. | Development and characterization of Silicon Carbide Coating on Graphite Substrate | |
WO2014081005A1 (ja) | セラミックス炭素複合材の特性制御方法並びにセラミックス炭素複合材 | |
JP5748586B2 (ja) | 炭素−炭化ケイ素複合材 | |
Khan et al. | ELECTRICAL AND DIELECTRIC PROPERTIES OF MgO-Y 2 O 3-Si 3 N 4 SINTERED CERAMICS | |
JPH0291270A (ja) | 耐酸化性炭素繊維強化炭素材料およびその製造方法 | |
WO2013190662A1 (ja) | 炭素-炭化ケイ素複合材 | |
JPH0274669A (ja) | 耐酸化性炭素繊維強化炭素材料およびその製造方法 | |
KR20220125189A (ko) | 비접착 보호 코팅법 | |
TW201400435A (zh) | 碳-碳化矽複合材料 | |
Ayodele et al. | Processing, Resistivity and Microstructure of Al-Kaolinite Clay-Based Cermet System | |
JPH09124374A (ja) | 高温耐酸化性に優れた複合セラミックス焼結体及びその製造方法 | |
JPH03252373A (ja) | 繊維強化セラミックス及び金属複合体 | |
JPH03137059A (ja) | 窒化アルミニウム焼結体の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 201080039131.0 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 10813706 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 20127003034 Country of ref document: KR Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 13392594 Country of ref document: US |
|
REEP | Request for entry into the european phase |
Ref document number: 2010813706 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2010813706 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 1931/CHENP/2012 Country of ref document: IN |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2012112955 Country of ref document: RU |