TW201302659A - 金屬材與陶瓷-碳複合材之接合體、其製造方法、碳材接合體、碳材接合體用接合材以及碳材接合體之製造方法 - Google Patents

金屬材與陶瓷-碳複合材之接合體、其製造方法、碳材接合體、碳材接合體用接合材以及碳材接合體之製造方法 Download PDF

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TW201302659A
TW201302659A TW101118677A TW101118677A TW201302659A TW 201302659 A TW201302659 A TW 201302659A TW 101118677 A TW101118677 A TW 101118677A TW 101118677 A TW101118677 A TW 101118677A TW 201302659 A TW201302659 A TW 201302659A
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Taiwan
Prior art keywords
carbon
ceramic
metal
joined body
particles
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TW101118677A
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English (en)
Inventor
Tomoyuki Ohkuni
Wei-Wu Chen
Yoshinari Miyamoto
Tetsuro Tojo
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Toyo Tanso Co
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Priority claimed from JP2011118581A external-priority patent/JP2012246172A/ja
Priority claimed from JP2011118582A external-priority patent/JP2012246173A/ja
Application filed by Toyo Tanso Co filed Critical Toyo Tanso Co
Publication of TW201302659A publication Critical patent/TW201302659A/zh

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Abstract

本發明提供一種能於高溫下使用之金屬材與陶瓷-碳複合材之接合體、其製造方法、新穎的碳材接合體、碳材接合體用接合材以及碳接合體之製造方法。詳言之,金屬材4與陶瓷-碳複合材1之接合體6,係由包含金屬之金屬材4、與陶瓷-碳複合材1所成的接合體。陶瓷-碳複合材1,具有複數個碳粒子2,及包含陶瓷之陶瓷部3。陶瓷部3,係形成於複數個碳粒子2之間。金屬材4、與陶瓷-碳複合材1,係介由接合層而接合。接合層5包含有金屬的碳化物及陶瓷。

Description

金屬材與陶瓷-碳複合材之接合體、其製造方法、碳材接合體、碳材接合體用接合材以及碳材接合體之製造方法
本發明係有關金屬材與陶瓷(ceramic)-碳複合材之接合體、其製造方法、碳材接合體、碳材接合體用接合材以及碳材接合體之製造方法。
近年來,對兼備有作為金屬之特性、及作為碳材之特性之金屬材與碳材之接合體的需求正逐漸增高。然而,一般而言,金屬材與碳材的接合較為困難。目前,作為金屬材與碳材之間的接合方法而言,僅止於例如專利文獻1中所記載般之採用蠟(wax)材之接合方法之提案。
又,石墨或陶瓷,均為高熔點材料。因此,難以藉由熔焊(fusion welding)法將包含石墨之構件,與包含石墨或陶瓷之構件加以接合。又,石墨或陶瓷,均為脆性材料(brittle material)。因此,難以藉由壓焊(pressure welding)法將包含石墨之構件,與包含石墨或陶瓷之構件加以接合。因此,包含石墨之構件,與包含石墨或陶瓷之構件的接合,通常,係藉由採用老虎鉗(vise)等之機械式方法,或採用蠟材、黏著劑(adhesive)等之方法實施。
例如,專利文獻2中,揭示有採用酚甲醛樹脂以黏著石墨材之方法。專利文獻3中,揭示有採用酚樹脂等的碳系黏著劑以黏著石墨材之作法。
[先前技術文獻] [專利文獻]
[專利文獻1]日本專利特開2000-313677號公報
[專利文獻2]日本專利特開平6-345553號公報
[專利文獻3]日本專利特開2002-321987號公報
如專利文獻1所記載,在採用蠟材以接合金屬材與碳材時,在高於蠟材的熔點之溫度下即無法得到可使用之接合材。
又,目前需要開發一種包含碳材之構件,與包含碳、陶瓷或金屬之構件之更有力的接合方法。
本發明之第1目的,在於提供一種能在高溫下使用之金屬材與陶瓷-碳複合材之接合體及其製造方法。本發明之第2目的,在於提供一種新穎的碳材接合體、碳材接合體用接合材以及碳材接合體之製造方法。
本發明之金屬材與陶瓷-碳複合材之接合體,係包含金屬之金屬材、與陶瓷-碳複合材之接合體。陶瓷-碳複合材係具有複數個碳粒子、及包含陶瓷之陶瓷部。陶瓷部,係形成於複數個碳粒子間者。金屬材、與前述陶瓷-碳複合材,係介由接合層而接合。接合層,係包含金屬的碳化物及陶瓷。
在此,於本發明中,「金屬」中係包括有合金在內。
於本發明之金屬材與陶瓷-碳複合材之接合體中,陶瓷部較佳為具有連續之構造。
於本發明之金屬材與陶瓷-碳複合材之接合體中,陶瓷較佳為包含氮化鋁及碳化矽之至少一種。
於本發明之金屬材與陶瓷-碳複合材之接合體中,金屬較佳為包含W(鎢)及Mo(鉬)之至少一種。
於本發明之金屬材與陶瓷-碳複合材之接合體中,如陶瓷含有碳化矽時,則接合層可含有金屬及矽(Si)。
本發明之金屬材與陶瓷-碳複合材之接合體之製造方法中,預備一種具有複數個碳粒子,及形成於複數個碳粒子間且包含陶瓷之陶瓷部之陶瓷-碳複合材。然後,在使陶瓷-碳複合材、與金屬材相接觸之狀態下進行煅燒。
於本發明之金屬材與陶瓷-碳複合材之接合體之製造方法中,陶瓷部較佳為具有連續之三維篩網構造(three-dimensimal mesh structure)者。
於本發明之金屬材與陶瓷-碳複合材之接合體之製造方法中,陶瓷-碳複合材較佳為含有助燒結劑(sintering aid)。
於本發明之金屬材與陶瓷-碳複合材之接合體之製造方法中,金屬材較佳為粉體。
本發明之碳材接合體,具備有第1構件、及第2構件、以及陶瓷-石墨複合材。第1構件,係包含碳材。第2構件,係包含碳、陶瓷或金屬。陶瓷-石墨複合材,係接合有第1構件與第2構件。陶瓷-石墨複合材,係具有複數個碳粒子、及陶瓷部。陶瓷部,係形成於複數個碳粒子間。
在此,本發明中,「碳材接合體」,係指具有互相接合 之複數個構件且複數個構件之至少一者為碳材之接合體。
又,於本發明中,「金屬」中係包含合金在內。
於本發明之碳材接合體中,陶瓷-石墨複合材之陶瓷部,較佳為具有連續之構造。
於本發明之碳材接合體中,陶瓷部較佳為由選自氮化鋁、氧化鋁、碳化矽、氮化矽、碳化硼、碳化鉭、碳化鈮、碳化鋯、氧化鋅、氧化矽以及氧化鋯所成群組中之至少一種所形成。
本發明之第1碳接合材之製造方法,係具備包含碳材之第1構件、及包含碳、陶瓷或金屬且接合於第1構件之第2構件之碳材接合體之製造方法。本發明之第1碳接合材之製造方法,具備:於第1構件與第2構件之間配置表面附著有陶瓷之碳粒子以製作層合體之層合體製作步驟,及煅燒層合體之煅燒步驟。
本發明之第1碳材接合體之製造方法中,於層合體製造步驟中,亦可在第1構件與第2構件之間配置表面附著有陶瓷粒子之碳粒子。
於本發明之第1碳材接合體之製造方法中,作為陶瓷粒子,較佳為使用由選自氮化鋁、氧化鋁、碳化矽、氮化矽、碳化硼、碳化鉭、碳化鈮、碳化鋯、氧化鋅、氧化矽以及氧化鋯所成群組中之至少一種所形成之陶瓷粒子。
本發明之第1碳材接合體之製造方法中,於層合體製作步驟中,亦可在第1構件與第2構件之間,配置表面附著有陶瓷之碳粒子與樹脂之混合物。在此情形下,作為樹 脂較佳為使用熱塑性樹脂。
於本發明之第1碳材接合體之製造方法中,於層合體製作步驟中,亦可在第1構件與第2構件之間,配置具有複數個碳粒子,及覆蓋有碳粒子且連結有複數個碳粒子之陶瓷部之陶瓷-碳複合體層。
本發明之碳材接合體用接合體,係碳材,與包含碳、陶瓷或金屬之構件的接合所用之接合材。本發明之碳材接合體用接合材,含有表面附著有陶瓷之複數個碳粒子。
於本發明之碳材接合體接合材中,在碳粒子的表面可附著有陶瓷粒子。
本發明之碳材接合體用接合材,較佳為含有樹脂。樹脂較佳為熱塑性樹脂。
於本發明之碳材接合體用接合材中,經附著於碳粒子表面之陶瓷,亦可覆蓋碳粒子且連結複數個碳粒子。
本發明之碳材接合體用接合材,可為片狀者。
本發明之第2碳材接合體之製造方法,係具備包含碳材之第1構件,及包含碳、陶瓷或金屬且接合於第1構件之第2構件之碳材接合體之製造方法。本發明之第2碳材接合體之製造方法,係具備:將於第1構件之上配置第2構件與樹脂的混合物所製作之層合體加以煅燒之步驟。
於本發明之第2碳材接合材之製造方法中,第2構件可為粉體。
如採用本發明,則可提供一種能於高溫下使用之金屬 材與陶瓷-碳複合材之接合體及其製造方法。如採用本發明,則可提供一種新穎的碳材接合體、碳材接合體用接合材以及碳材接合體之製造方法。
以下,將實施本發明之較佳形態之一例加以說明。但,下述之實施形態僅係一種例示。本發明,並不因下述之實施形態而有所限定。
於實施形態等中所參考之圖面,係作為模式性方式所記載者,圖面中所描繪之物體的尺寸的比例等,會有與實際的物體尺寸之比例等相異的情形。具體的物體的尺寸比例等,應在參考下述說明之下加以判斷。
(第1實施形態)
第1圖,係表示於第1實施形態中之金屬材與陶瓷-碳複合材的接合體之模式性剖面圖。
如第1圖所示,金屬材與陶瓷-碳複合材之接合體6,係包含金屬之金屬材4,與陶瓷-碳複合材1之接合體。
(金屬材4)
構成金屬材4之金屬,並不特別限定。金屬之具體例而言,可例舉:W(鎢)、Mo(鉬)、Ti(鈦)、Si(矽)、Al(鋁)、Cr(鉻)、Cu(銅)、Sn(錫)或此等的合金等。金屬材4,較佳為包含W及Mo之至少1種者。亦即,金屬材4,較佳為包含W、Wo或W與Mo之合金。
金屬材4,可具有任何形狀。金屬材4的形狀,可為例如,粒狀、板狀、柱狀、纖維狀等。金屬材4,較佳為 粉體。
(陶瓷-碳複合材1)
陶瓷-碳複合材1,具有複數個碳粒子2、及包含陶瓷之陶瓷部3。
碳粒子2,宜使用例如包含環狀石墨、鱗片狀石墨(flake graphite)、無定形石墨(amorphous graphite)等之天然石墨、焦碳(coke)、內消旋相(mesophase)小球體等作為原料之人造石墨、碳質(carbonaceous)等。碳粒子2的粒徑,較佳為50nm至500μm左右,更佳為1μm至250μm左右,又更佳為5μm至100μm左右。如碳粒子2的粒徑過小時,則碳粒子2容易凝聚。如碳粒子2過於凝聚時,則陶瓷-碳複合材1可能難於獲得碳之特性。另一方面,如碳粒子2的粒徑過大時,則所煅燒之陶瓷-碳複合材1的強度可能會降低。複數個碳粒子2,可為僅含1種碳粒子2,亦可含有複數種碳粒子2。
陶瓷部3,係形成於複數個碳粒子2間。陶瓷部3,較佳為具有連續之構造。亦即,複數個碳粒子2,較佳為藉由具有連續之構造之陶瓷部3而加以一體化者。陶瓷部3較佳為具有三維篩網構造者。於陶瓷-碳複合材1中,較佳為碳粒子2分散於陶瓷部3中。亦可為碳粒子2成為塊狀而分散於陶瓷部3中。此外,陶瓷部3可由連續之一個陶瓷部所構成,亦可由弧立之複數個陶瓷部所構成。
陶瓷-碳複合材1中之碳粒子2與陶瓷部3的體積比(碳粒子2的體積:陶瓷部3的體積),較佳為95:5至50: 50,更佳為90:10至70:30。
構成陶瓷部3之陶瓷而言,可例舉如:AlN等的氮化鋁、Al2O3等的氧化鋁、SiC等的碳化矽、Si3N4等的氮化矽、B4C等的碳化硼、TaC等的碳化鉭、NbC等的碳化鈮、ZrC等的碳化鋯、ZnO等的氧化鋅、SiO2等的氧化矽、ZrO2等的氧化鋯等。其中,AlN等的氮化鋁、及SiC等的碳化矽,很適合使用於陶瓷部3。在此,陶瓷的組成,可為均勻,亦可為不均勻者。
陶瓷部3的厚度,較佳為100nm至10μm左右。
陶瓷-碳複合材1,例如,將表面附著有陶瓷粒子之碳粒子2加以煅燒,則可製作。表面附著有陶瓷之碳粒子2,可藉由例如,氣相(gaseous phase)法、液相(liquid phase)法、採用攪拌器(mixer)等以混合陶瓷與碳粒子2之機械式混合方法、料漿(slurry)法或者經組合此等之方法而製作。氣相法的具體例而言,可例舉如:化學氣相沉積法(CVD)法、轉化法(CVR法)等。液相法之具體例而言,可例舉如:化學沉澱法等。料漿法之具體例而言,可例舉:凝膠流延(gel casting)法、注漿(slip casting)等、薄帶成形(tape casting)法等。
表面附著有陶瓷之碳粒子2的煅燒溫度或煅燒時間、煅燒環境的種類、煅燒環境的壓力等,則可按照所使用之材料種類、形狀、大小等而適當加以設定。煅燒溫度,可作成例如,1700℃至2100℃左右。煅燒時間,可作成例如,5分鐘至2小時左右。煅燒環境之種類,可作成例如,氮 氣、氬氣等的惰性氣體之環境。煅燒環境之壓力,可作成例如,0.01MPa(兆帕)至10MPa左右。
陶瓷-碳複合材1,較佳為含有助燒結劑。助燒結劑而言,可舉:Y2O3等的氧化釔、Al2O3等的氧化鋁、CaO等的氧化鈣、SiO2等的氧化矽等。
(接合層5)
在金屬材4與陶瓷-碳複合材1之間,形成有接合層5。介由該接合層5而接合有金屬材4與陶瓷-碳複合材1。接合層5中,含有金屬的碳化物與陶瓷。
接合層5中所含之金屬碳化物,如後所述,係於接合步驟中,從金屬材4所供給之金屬經碳化所成者。亦即,金屬之碳化物,係源自金屬材4者。因此,為與構成金屬材4之金屬同種之金屬的碳化物。因而,接合層5中所含金屬之碳化物種類,將由構成金屬材4之金屬所決定。例如,如金屬材4為由W及Mo之至少一種所成時,則接合層5中所含金屬之碳化物,將成為碳化鎢及碳化鉬之至少一種。
接合層5中所含之陶瓷,如後所述,係源自陶瓷部3者。因此,接合層5中所含之陶瓷,為與構成陶瓷部3之陶瓷同種之陶瓷。例如,如陶瓷部3為包含氮化鋁及碳化矽之至少一種時,則接合層5中,亦含有氮化鋁及碳化矽之至少一種。在此,於接合層5中,金屬及陶瓷可以作為單體存在,亦可以互相結合之狀態存在。
接合層5之厚度,通常為1μm至200μm左右。
如上所說明,本實施形態之接合體6中,接合層5含有金屬的碳化物及陶瓷。因此,接合層5,係對金屬材4或陶瓷-碳複合材1具有優異的親和性。因而,接合層5,與金屬材4之間的密接強度高,且接合層5,與陶瓷-碳複合材1之間的密接強度高。其結果,金屬材4與陶瓷-碳複合材1之間的密接強度亦會提高。亦即,接合體6中,金屬材4與陶瓷-碳複合材1係以高的接合強度而接合。
又,接合體6,在金屬材4與陶瓷-碳複合材1之接合並未使用蠟材。因此,接合體6可在較蠟材之熔點為高的溫度下使用。
以上可知,本實施形態之接合體6,可適用作為高性能的X射線旋轉式對陰極、散熱構件或耐熱構件、耐放射線構件、耐電漿損耗構件等。
(接合體6之製造方法)
以下,就金屬材4與陶瓷-碳複合材1之接合體6之製造方法的一例加以說明。
使陶瓷-碳複合材1,與金屬材4接觸所得層合體進行煅燒。於此煅燒步驟中,金屬材4的陶瓷-碳複合材1側表層中所含之金屬即被從陶瓷-碳複合材1側表層中所含之金屬即被從陶瓷-碳複合材1的碳粒子2所供給之碳所碳化,而形成金屬碳化物。由此而形成包含有金屬碳化物及陶瓷部3之陶瓷之接合層5。其結果,可製得經結合金屬材4與陶瓷-碳複合材1之接合體6。
再者,例如,金屬材4為粉體時,則於陶瓷-碳複合材 1上配置本身為粉體之金屬材4,並在其狀態下煅燒,即可製造接合體6。例如,如金屬材4為板狀時,則在陶瓷-碳複合材1與金屬材4層合之狀態下煅燒,即可製造接合體6。
在此,W或Mo,係容易構成碳化物之金屬。因此,如採用包含W及Mo之至少一種之金屬材4,則容易形成金屬碳化物。因而,金屬材4與陶瓷-碳複合材1之間的接合,將成為容易。
陶瓷-碳複合材1與金屬材4之煅燒溫度或煅燒時間、煅燒環境之種類、煅燒環境之壓力等,可按照所使用之材料種類、形狀、大小等而適當地加以設定。煅燒溫度,例如,可作成600℃至1800℃左右。煅燒時間,例如,可作成2分鐘至2小時左右。煅燒環境之種類,例如,可作成氮氣、氬氣等的惰性氣體之環境。煅燒環境的壓力,例如,可作成0MPa至10MPa左右。
如採用本實施形態之接合體6之製造方法,則在不使用蠟材或黏著劑等之下,可進行金屬材4與陶瓷-碳複合材1之接合。
又,對藉由螺栓(bolt)等的機械式接合時而無法接合般之形狀的金屬材4與陶瓷-碳複合材1之接合仍能進行。
以下,根據具體性實施例,將本發明內容再詳細加以說明。惟本發明並不因下述之實施例而有所限定。本發明在不改變本發明之要旨之範圍內能適當加以變更實施。
(實驗例1)
按下述方式製作具有與陶瓷-碳複合材1實質上同樣構成之陶瓷-碳複合材。
作為碳粒子2而使用石墨(內消旋相小球體,東洋碳(股)製)。作為陶瓷而使用氮化鋁粉末(德山(股)製之H型式)。
將石墨(10g)、氮化鋁(3.54g)與作為助燒結劑之Y2O3(0.19g)混合之粉末,與丙烯醯胺(8g)及N,N’-亞甲基雙丙烯醯胺(1g)溶解於異丙醇(45g)中之黏合劑用溶液(binder solution)(2.49g),依凝膠鑄製法加以混合,並將混合物流延於塑膠模具(plastic mould)中。混合物中的石墨與陶瓷之體積比為80:20。將所得混合物於常壓下,在80℃下乾燥12小時後製得乾燥物。接著,將乾燥物於真空中,在700℃下加熱1小時以去除作為黏合劑之丙烯醯胺。再者,依放電電漿燒結法(electric discharge plasma sintering),在施加30MPa之壓力之下,在1900℃下,依真空條件進行脈衝通電燒結(pulse heat sintering)5分鐘。其結果,製得作為陶瓷-碳複合材之氮化鋁-石墨複合材。
將所得氮化鋁、石墨複合材之體密度(bulk density)、抗曲強度(bending strength)以及熱導率(thermal conductivity),按下述要點加以測定。將結果表示於下列表1中。
[體密度]
藉由阿基米德(Archimedes)法而測定體密度。具體而 言,根據JIS A1509-3以測定者。
(抗曲強度(bending strength))
藉由3點抗曲強度試驗(three-point bending strength test)而測定抗曲強度。具體而言,根據JIS A1509-4以測定者。
(熱導率)
藉由雷射閃光(laser flash)法而測定熱導率。具體而言,根據JIS A1650-3以測定者。
(實驗例2)
除了不用氮化鋁而使用碳化矽(宇部興產(股)製的E型式)以外,其餘則按與實驗例1同樣方式製得碳化矽-石墨複合材。石墨與陶瓷之體積比係作成70:30。
將所得碳化矽-石墨複合材之體密度、抗曲強度以及熱導率,按實驗例1所記載之要點加以測定。將其結果,表示於下列表1中。
(實驗例3)
於實驗例1中,除了未經使用助燒結劑以外,其餘則按與上述者同樣方式製得氮化鋁-石墨複合材。
將所得氮化鋁-石墨複合材之體密度、抗曲強度,按實驗例1所記載之要點加以測定。將其結果,表示於下列表1中。在此,熱導率並未測定。
(比較實驗例1)
將石墨(內消旋相小球體,東洋碳(股)製,10g)、氮化鋁(3.54g)與助燒結劑(Y2O3 0.19g)之混合粉末,與乙醇 (15g),在球磨機(ball mill)中加以混合。將所得之混合物於常壓下,在80℃下乾燥12小時後製得乾燥粉末。接著,將所得粉末,依放電電漿燒結法,在施加30MPa之壓力之下,在1900℃下,依真空條件進行脈衝通電燒結5分鐘。其結果,製得氮化鋁與石墨之複合燒結體。
將所得複合燒結體之體密度、抗曲強度以及熱導率,按實驗例1所記載之要點加以測定。將其結果,表示於下列表1中。
(實施例1)
將實驗例1所製作之氮化鋁-石墨複合材(厚度5mm,直徑25mm的圓柱)的端面使用砂紙(sand paper)加以研磨後,將作為金屬材4之鎢粉末(粒徑約0.6μm,4.5g),按厚度能成為0.3mm之方式配置於氮化鋁-石墨複合材的端面上,而製得層合體。接著,於對層合體施加30MPa的壓力之下,在1700℃下,依真空條件下進行脈衝通電燒結5分鐘。其結果,製得鎢與氮化鋁-石墨複合材之接合體6。將所得接合體6,按如下述方式加工、研磨後,按下述要領測定所得試驗片之抗曲強度。將其結果表示於表2中。
[試驗片之製作]
試驗片,係加工為寬幅約3mm,厚度2至6mm,長度20mm的長方體,並使用80μm之研磨平台(abrasion platform)加以研磨。
[抗曲強度]
藉由3點抗曲強度試驗而測定抗曲強度。具體而言,根據JIS A1509-4加以測定。
(實施例2)
除了作為陶瓷-碳複合材而使用氮化鋁-石墨複合材(厚度5mm,直徑25mm的圓柱),及作為金屬材4而將鎢粉末(粒徑約0.6μm,5g),按厚度能成為0.5mm之方式配置以外,其餘則按與實施例1同樣方式,製得鎢與氮化鋁-石墨複合材之接合體6。所得接合體6,則按與實施例1同樣方式,在加工及研磨後測定抗曲強度。將其結果表示於下列表2中。
(實施例3)
按與實施例2同樣方式,製得鎢與氮化鋁-石墨複合材之接合體6。對所得接合體6實施熱循環處理(heat cycle treatment)。熱循環處理的方法,係在真空中重複從室溫至400℃止之加熱-冷卻10次。所得接合體6,則按與實施例1同樣方式,在加工及研磨後測定抗曲強度。將其結果表示於下列表2中。
(實施例4)
除了作為陶瓷-碳複合材,而使用實驗例2中所得之碳 化矽-石墨複合材(厚度5mm,直徑25mm)以外,其餘則按與實施例2同樣方式,製得鎢與陶瓷-碳複合材之接合體6。所得接合體6,則按與實施例1同樣方式,在加工及研磨後測定抗曲強度。將其結果表示於下列表2中。
(實施例5)
除了作為陶瓷-碳複合材1,而使用按與實驗例2同樣方法所得碳化矽-石墨複合材(厚度6mm,直徑25mm),及作為金屬材4而將鉬(Mo)粉末(粒徑約0.7mm,3.5g),按厚度能成為0.5mm之方式配置以外,其餘則按與實施例1同樣方式,製得鉬與陶瓷-石墨複合材之接合體6。所得接合體6,則按與實施例1同樣方式,在加工及研磨後測定抗曲強度。將其結果表示於下列表2中。
(實施例6)
除了作為陶瓷-碳複合材1,而使用實驗例3中所得氮化鋁-石墨複合材(厚度5mm,直徑25mm的圓柱)以外,其餘則按與實施例1同樣方式,製得鎢與氮化鋁-石墨複合材之接合體6。所得接合體6,則按與實施例1同樣方式,在加工及研磨後測定抗曲強度。將其結果表示於下列表2中。
(比較例1)
將東洋碳(股)製的IG-88石墨使用砂紙加以研磨後,於上部將鎢粉末(粒徑約0.6μm,5g),按厚度能成為0.5mm之方式配置5g。接著,於施加30MPa的壓力之下,在1700℃下,依真空條件下進行脈衝通電燒結5分鐘。其結果,未能接合石墨與鎢粉末。將其結果表示於下列表2中。
在此,於實施例1至6之陶瓷-石墨複合材的厚度,係上述加工及研磨後的試驗片厚度。
(第2實施形態)
第6圖,係有關第2實施形態之碳材接合體的略圖型剖面圖。如第6圖所示,碳材接合體6a,具有第1構件4a、及第2構件5a。碳材接合體6a,係第1構件4a與第2構件之接合體。
(第1構件4a)
第1構件4a,係包含碳材。碳材,係以碳作為主成分之材料。碳材,可含有碳以外之成分。碳材之具體例而言,可列舉:石墨化前的碳質材、各向同性(isotropy)石墨材、擠出材(extruded material)或壓紋材(embossed material)等的各向異性(anisotropy)石墨材、碳纖維複合材等。碳材的熱膨脹係數,較佳為在0.5至10-6/K~9.0至10-6/K的範圍內者。
(第2構件5a)
第2構件5a,係包含碳、陶瓷或金屬。
很適合作為第2構件5a的構成材料使用之碳而言,可列舉如:與上述第1構件4a同樣者。
適合作為第2構件5a的構成材料使用之陶瓷而言,可例舉:氮化鋁、氧化鋁、碳化矽、氮化矽、碳化硼、碳化鉭、碳化呢、碳化鋯、氧化鋅、氧化矽、氧化鋯等。第2構件5a的陶瓷的組成,可為均勻,亦可為不均勻。例如,構成第2構件5a之陶瓷與陶瓷-石墨複合材1a相接之界面附近的組成,可為與陶瓷-石墨複合材1a的陶瓷部近似的組成。
適合作為第2構件5a的構成材料使用之金屬而言,可例舉:Al、Cu、Ag(銀)、Ni(鎳)、Fe(鐵)、Cr、W、Ti、Mo、Au(金)、Pt(鉑)等。
第6圖中,按模式性地描繪第2構件5a為長方體狀。然而,第2構件5a的形狀並不特別加以限定。第2構件5a,可為如第6圖中所記載般之塊(block)狀,亦可為例如,粒狀、柱狀、纖維狀等。如第2構件5a為粒狀時,第2構件5a的粒徑,可作為例如,50nm至500μm左右。
(陶瓷-石墨複合材1a)
於第1構件4a與第2構件5a之間,配置有陶瓷-石墨複合材1a。藉由該陶瓷-石墨複合材1a,使第1構件4a與第2構件5a接合。
陶瓷-石墨複合材1a,具備複數個碳粒子2a、及陶瓷部3a。
碳粒子2a而言,可例舉:將有機化合物(合成或天然 有機化合物)加以煅燒者,內消旋碳(meso carbon)小球體煅燒品、樹脂煅燒品、石油系焦碳、煤碳系焦碳、天然石墨或人造石墨等具有石墨構造者等的石墨粒子。此中較佳者,可舉石墨粒子,例如,球晶(spherulite)石墨或球狀天然石墨等更適合使用。碳粒子的粒徑,較佳為50nm至500μm左右,更佳為1μm至250μm左右,再佳為5μm至100μm左右。如碳粒子2a的粒徑過小時,則碳粒子2a容易凝聚。如碳粒子2a過於凝聚時,則強度會降低。另一方面,如碳粒子2a的粒徑大時,則可能有空隙(void)增大之情形,而在此情形時因應力集中(stress concentration)而強度即降低。複數個碳粒子2a,可僅含有1種碳粒子,亦可含有複數種的碳粒子。
陶瓷部3a,係位於複數個碳粒子2a之間。陶瓷部3a,具有連續之構造。因此,複數個碳粒子2a,係被陶瓷部3a而一體化。陶瓷部3a,較佳為具有三維篩網構造。於陶瓷-石墨複合材1a中,較佳為陶瓷部3a中分散有碳粒子2a。再者,亦可為陶瓷部3a中,碳粒子2a成為塊狀而分散。
再者,陶瓷部3a,可由連續之一個陶瓷部所構成,亦可由獨立的複數個陶瓷部所構成。
構成陶瓷部3a之陶瓷,並不特別限定。構成陶瓷部之陶瓷之具體例而言,可例舉:氮化鋁、氧化鋁、碳化矽、氮化矽、碳化硼、碳化鉭、碳化鈮、碳化鋯、氧化鋅、氧化矽、氧化鋯等。陶瓷部3a,可僅由1種陶瓷所構成,亦可由複數種陶瓷所構成。又,如陶瓷部3a為由複數種陶瓷 所構成時,其組成可為均勻,亦可為不均勻等。
如上所述,碳材接合體6a,係在陶瓷-石墨複合材1a中含有複數個碳粒子2a,及陶瓷部3a。因此,陶瓷-石墨複合材1a,係與碳、陶瓷、金屬之間的親和性高。因而,陶瓷-石墨複合材1a,與包含碳材之第1構件4a之間的密接強度高,且陶瓷-石墨複合材1a、與包含碳、陶瓷或金屬之第2構件5a之間的密接強度高。其結果,第1構件4a與第2構件5a之間的密接強度亦會增高。亦即,在碳材接合體6a中,包含碳材之第1構件4a,與包含碳、陶瓷或金屬之第2構件5a係以高的接合強度接合。
從為能獲得第1構件4a與第2構件5a之間的更高的接合強度起見,如第2構件5a包含陶瓷時,則第2構件5a的陶瓷-石墨複合材1a側的界面附近之組成,較佳為與陶瓷-石墨複合材1a的陶瓷部3a的組成近似者。又,第2構件5a的陶瓷-石墨複合材1a側的界面附近之組成,與陶瓷-石墨複合材1a的陶瓷部3a之組成,較佳為互相能固溶(solid soluble)之組成,或互相容易引起化學反應之組成。
由於陶瓷-石墨複合材1a,具有碳粒子2a及陶瓷部3a之故,如調整碳粒子2a或陶瓷部3a的構成材料等,則可將陶瓷-石墨複合材1a的熱膨脹係數,作成與第1構件4a的熱膨脹係數或第2構件5a的熱膨脹係數近似者。因而,可有效抑制第1構件4a與陶瓷-石墨複合材1a之間的剝離、第2構件5a與陶瓷-石墨複合材1a之間的剝離。
又,由於陶瓷-石墨複合材1a,具碳粒子2a及陶瓷部3a之故,如調整碳粒子2a或陶瓷部3a的構成材料等,或調整碳粒子2a與陶瓷部3a之間的比例,則可調整陶瓷-石墨複合材1a的熱導率。
由於本實施形態之碳接合體6a,具有如上述般的優異的特性之故,很適合作為散熱基板、構造構件等使用。
以下,就碳材接合體6a之製造方法之一例加以說明。
(層合體製作步驟)
首先,實施層合體製作步驟。層合體製作步驟中,在第1構件4a與第2構件5a之間,配置包含表面附著有陶瓷之複數個碳粒子2a(第7圖中並未圖示)之碳材接合體用接合材7a,以製作第7圖中所示層合體8a。
在此,碳粒子2a表面所附著之陶瓷,係為構成陶瓷部3a之用者。因此,碳粒子2a表面所附著之陶瓷種類,可按照預形成之陶瓷部3a的種類加以適當選擇。接合材7a中所含陶瓷的組成,可為均勻,亦可為不均勻者。接合材7a中所含陶瓷與第2構件5a之陶瓷的組成,可為相同,亦可為不相同者。
陶瓷的形狀並不特別加以限定。例如,可使陶瓷粒子附著於碳粒子2a表面。在此情形,陶瓷粒子的粒徑,較佳為在碳粒子的粒徑的1/100至1/5的範圍內。在此情形,將能以陶瓷粒子實質性地覆蓋碳粒子表面。陶瓷粒子的粒徑,更佳為在碳粒子的粒徑的1/50至1/10的範圍內,再佳為在1/40至1/20的範圍內。
又,亦可於碳粒子2a表面形成厚度100nm至20μm左右之陶瓷層。在此情形,表面上形成有陶瓷層之複數個碳粒子2a,可分別為粒狀,亦可為被陶瓷層而一體化者。亦即,可將被陶瓷層所塗佈之複數個碳粒子2a配置於第1構件4a與第2構件5a之間,亦可配置實質上具有與陶瓷-石墨複合材1a同樣形態之接合材7a。換言之,接合材7a,亦可由複數個碳粒子2a、及覆蓋有碳粒子2a且連結有複數個碳粒子2a之陶瓷部3a之陶瓷-碳複合體所構成。
表面附著有陶瓷之碳粒子,可藉由例如,氣相法、液相法、採用攪拌器等以混合陶瓷與碳粒子之機械式混合方法、料漿法或者經組合此等之方法而製作。氣相法的具體例而言,可例舉:化學氣相沉積法(CVD法)、化學氣相反應法(CVR法)等。液相法之具體例而言,可例舉:共沉澱(co-precipitation)法、溶膠-凝膠(sol-gel)法等。料漿法之具體例而言,可例舉:凝膠流延(gel casting)法、薄帶成形(tape casting)法等。
具有實質上與陶瓷-石墨複合材1a同樣形態之接合材7a,可藉由依上述方法所製作之表面附著有陶瓷之碳粒子之煅燒而製作。
如表面附著有陶瓷之碳粒子為粉體時,則較佳者為接合材7a由表面附著有陶瓷之碳粒子與樹脂的混合物所構成者。在此情形,接合材7a的操作處理會成為容易。又,可自由調整接合材7a之形狀。例如,可將接合材7a作成片狀。如接合材7a含有樹脂時,則接合材7a可侵入碳粒 子的細孔內。接合材7a經由侵入碳粒子的細孔內之結果,可提高第1構件4a與第2構件5a之間的接合強度。樹脂而言,可採用熱塑性樹脂或熱硬化性樹脂。樹脂,較佳為熱塑性樹脂。具體而言,例如,聚乙烯醇、聚乙烯丁醛等之樹脂很適合使用。
(煅燒步驟)
接著,進行層合體8a之煅燒。由此,可將包含碳材之第1構件4a,與包含碳、陶瓷或金屬之第2構件5a,在不使用蠟材等之下,藉由陶瓷-石墨複合材1a而順利接合。又,對藉由螺栓等的機械式接合時而不能接合之形狀的第1及第2構件4a、5a之接合仍能進行。
又,本實施形態之接合方法中,可以高的接合強度使第1構件4a與第2構件5a進行接合。又,亦可製得第1構件4a與第2構件5a之間不易產生剝離之碳材接合體6a。又,亦可提高第1構件4a與第2構件5a之間的熱導率。
再者,層合體的煅燒溫度或煅燒時間、煅燒環境的種類、荷重壓等,則可按照所使用之材料的種類、形狀、大小等適當加以設定。層合體的煅燒溫度,可作成例如,1000℃至2000℃左右。層合體的煅燒時間,可作成例如,5分鐘至1日左右。煅燒環境的種類,可作成例如,氮、氬、氦等的惰性氣體環境或真空中。荷重壓,可作成例如,0MPa至40MPa左右。
以下,就本發明之較佳實施形態之另一例加以說明。 將實質上與第2實質形態具有共通的功能之構件則使用共通符號參考,而省略其說明。
(第3實施形態)
第8圖,係於第3實施形態中之層合體的略圖式剖面圖。以下,在參考第8圖之下,就於本實施形態中之第1構件4a與第2構件5a之間的接合方法加以說明。
本實施形態中,第2構件5a為粒子狀者。本實施形態中,在第1構件4a上,配置粒子狀的第2構件5a與樹脂9a之混合物,藉以形成樹脂9a中分散有第2構件5a之樹脂層10a。
樹脂層10a之形成,例如,可依薄帶成形法等實施。
接著,實施第1構件4a與樹脂層10a之層合體11a之煅燒。由此,如第9圖所示,可製得在第1構件4a表面接合有經煅燒之第2構件5a之碳材接合體12a。
本實施形態之碳材接合體12a之製造方法,可以高的接合強度接合第1構件4a與第2構件5a。
再者,煅燒條件而言,與上述第2實施形態同樣,可按照所使用材料的種類、形狀、大小等而適當加以設定。
以下,就本發明內容,根據具體的實施例,再詳細加以說明。本發明,並不因下述實施例而有所限定。在不變更本發明之要旨之範圍內,能適當變更以實施。
(實施例7)
準備體密度為1.8Mg(兆克)/m3,抗曲強度為40MPa,線熱膨脹係數為4.7×10-6/K的各向同性石墨材。將此各向 同性石墨材作為第1構件4a使用。
接著,將平均粒徑26μm的球晶石墨及氮化鋁粉末(德山(股)製的H等級,平均粒徑0.6μm,比表面積2.7m2/g)按體積比(球晶石墨的體積:氮化鋁粉末的體積)能成為80:20之方式加以混合。對所得混合物13.74g,添加作為分散劑之磷酸2-庚基己酯0.83g,及作為溶媒之2-丁酮.乙醇混合物(體積比例66:34)10g,及作為黏合劑(binder)之聚乙烯丁醛2.5g,以及作為塑化劑(plasticizer)之聚乙二醇.鄰苯二甲酸苄基丁醇混合物(質量比例50:50)1.15g,以調製混合物。將所得混合物使用自轉.公轉混合機(rotation.Revolution mixer)進行攪拌,製得料漿。將所得料漿藉由刮刀(doctor blade)法而成型為片狀,在室溫下乾燥後製得厚度150μm的石墨.氮化鋁帶。將該石墨.氮化鋁帶作為接合材7a使用。
接著,對氮化鋁粉末(德山(股)製的H等級,平均粒徑0.6μm,比表面積2.7m2/g)20g,作為分散劑之磷酸2-庚基己酯0.26g,及作為溶媒之2-丁酮.乙醇混合物(體積比例66:34)10.9g,及作為黏合劑之聚乙烯丁醛2.18g,以及作為塑化劑之聚乙二醇.鄰苯二甲酸苄基丁醇混合物(質量比例50:50)2.97g,以調製混合物。將所得混合物使用自轉.公轉混合機進行攪拌,製得料漿。將所得料漿藉由刮刀法而成型為片狀,在室溫下乾燥後製得厚度140μm的氮化鋁粒子分散所成之氮化鋁帶。將此氮化鋁帶作為第2構件5a使用。
接著,於包含各向同性石墨材之第1構件4a之上,依序配置包含石墨.氮化鋁帶之接合材7a,及包含氮化鋁帶之第2構件5a,以製作層合體8a。
接著,將層合體8a,藉由放電電漿燒結法,在30MPa的壓力下,於真空中,在1900℃下保持5分鐘。此結果,製得包含各向同性石墨材之第1構件4a,及包含氮化鋁之第2構件5a,為被含有複數個碳粒子2a及陶瓷部3a之陶磁-石墨複合材1a所接合之碳材接合體。
將實施例7所製作之碳材接合體之剝離狀態的觀察,3點抗曲強度試驗,分別按下述要點實施。將其結果,與3點抗曲強度及體密度一起,表示於下列表3中。
[剝離狀態的觀察]
依目視,觀察調製後的第1構件4a與第2構件5a的接合的情況。
[3點抗曲強度試驗]
除了將各向同性石墨的尺寸作成寬幅1.6mm×厚度1.6mm×長度20mm,支點間距離作成15mm,十字頭(cross head)下降速度作成0.5mm/min以外,其餘則準照JIS R7222進行測定。
(實施例8)
除了不用氮化鋁帶,而將厚度1mm的AlN板作為第2構件5a使用,並將藉由放電電漿燒結法之燒結溫度作成1700℃以外,其餘則按與實施例7同樣方式,以製作碳材接合體。
接著,將實施例8中所製作之碳材接合體的剝離狀態之觀察,3點抗曲強度試驗,按與實施例7同樣方式實施。將其結果,與3點抗曲強度及體密度一起,表示於下列表3中。
(實施例9)
除了不用鋁帶,而將厚度1mm的SiC板作為第2構件5a使用,並將藉由放電電漿燒結法之燒結溫度作成1700℃以外,其餘則按與實施例7同樣方式,製得碳材接合體。
接著,將實施例9中所製作之碳材接合體之剝離狀態的觀察,3點抗曲強度試驗,按與實施例7同樣方式實施。將其結果,與3點抗曲強度及體密度一起,表示於下列表3中。
(實施例10)
準備體密度為1.8Mg/m3,抗曲強度為40MPa,線熱膨脹係數為4.7×10-6/K的各向同性石墨材。將此各向同性石墨材作為第1構件4a使用。
於其第1構件4a之上,配置按與實施例7同樣方式所製作之包含氮化鋁帶之陶瓷層,以製作層合體11a。
接著,將層合體11a,藉由放電電漿燒結法,在30MPa的壓力下,於真空中,在1900℃下保持5分鐘。此結果,製得包含各向同性石墨材之第1構件4a,及包含氮化鋁之粒子狀的第2構件5a進行直接接合之碳材接合體。
接著,將實施例10中所製作之碳材接合體之剝離狀態的觀察,3點抗曲強度試驗,按與實施例7同樣方式實施。 將其結果,與3點抗曲強度及體密度一起,表示於下列表3中。
(比較例2)
按與實施例7同樣方式,將體密度為1.8Mg/m3,3點抗曲強度為40MPa,線熱膨脹係數為4.7×10-6/K的各向同性石墨材,作為第1構件4a使用。
於其第1構件4a之上,配置與實施例7中為氮化鋁帶的製作所用者同樣的氮化鋁粉末(1.5g),並在其狀態下,實施與實施例7同樣之藉由放電電漿燒結法之燒結,惟並未能確認石墨與氮化鋁之間的接合。
(比較例3)
按與實施例7同樣方式,將體密度為1.8Mg/m3,抗曲強度為40MPa,線熱膨脹係數為4.7×10-6/K的各向同性石墨材,作為第1構件4a使用。
於其第1構件4a之上,配置氮化鋁帶(厚度1mm),並在此狀態下,實施與實施例7同樣之藉由放電電漿燒結法之燒結,惟並未能確認石墨與氮化鋁之間的接合。
1‧‧‧陶瓷-碳複合材
1a‧‧‧陶瓷-石墨複合材
2、2a‧‧‧碳粒子
3、3a‧‧‧陶瓷部
4‧‧‧金屬材
4a‧‧‧第1構件
5‧‧‧接合層
5a‧‧‧第2構件
6‧‧‧金屬材與陶瓷-碳複合材之接合體
6a‧‧‧碳材接合體
7a‧‧‧接合材
8a‧‧‧層合體
9a‧‧‧樹脂
10a‧‧‧樹脂層
11a‧‧‧層合體
12a‧‧‧碳材接合體
第1圖,係於第1實施形態中之金屬材與陶瓷-碳複合材之接合體的略圖式剖面圖。
第2圖,係由實施例1所得接合體的接合面的掃描式電子顯微鏡照片(左側之倍率為500倍、右側之倍率為5000倍)。
第3圖,係由實施例4所得接合體的接合面的掃描式電子顯微鏡照片(左側之倍率為500倍、右側之倍率為2000倍)。
第4圖,係由實施例5所得接合體的接合面的掃描式電子顯微鏡照片(左側之倍率為100倍、右側之倍率為2000倍)。
第5圖,係由實施例6所得接合體的接合面的掃描式電子顯微鏡照片(左側之倍率為500倍、右側之倍率為2000倍)。
第6圖,係有關第2實施形態之碳材接合體的略圖式剖面圖。
第7圖,係於第3實施形態中之層合體的略圖式剖面圖。
第8圖,係於第3實施形態中之層合體的略圖式剖面圖。
第9圖,係於第3實施形態中所製作之碳材接合體的略圖式剖面圖。
1‧‧‧陶瓷-碳複合材
2‧‧‧碳粒子
3‧‧‧陶瓷部
4‧‧‧金屬材
5‧‧‧接合層
6‧‧‧金屬材與陶瓷-碳複合材之接合體

Claims (26)

  1. 一種金屬材與陶瓷-碳複合材之接合體,係將包含金屬之金屬材,與具有複數個碳粒子及形成於前述複數個碳粒子間之包含陶瓷的陶瓷部之陶瓷-碳複合材,經由接合層而接合之接合體,其特徵為:前述接合層包含有前述金屬的碳化物及前述陶瓷。
  2. 如申請專利範圍第1項所述之金屬材與陶瓷-碳複合材之接合體,其中,前述陶瓷部具有連續之構造。
  3. 如申請專利範圍第1項或第2項所述之金屬材與陶瓷-碳複合材之接合體,其中前述陶瓷部,係包含氮化鋁及碳化矽之至少一者。
  4. 如申請專利範圍第1項至第3項中任一項所述之金屬材與陶瓷-碳複合材之接合體,其中前述金屬,係包含W及Mo之至少一者。
  5. 如申請專利範圍第1項至第4項中任一項所述之金屬材與陶瓷-碳複合材之接合體,其中前述陶瓷為碳化矽,而前述接合層包含有前述金屬及Si。
  6. 一種金屬材與陶瓷-碳複合材之接合體之製造方法,其係準備具有複數個碳粒子,及形成於前述複數個碳粒子間之包含陶瓷的陶瓷部之陶瓷-碳複合材,在使前述陶瓷-碳複合材與金屬材相接觸之狀態下進行煅燒者。
  7. 如申請專利範圍第6項所述之金屬材與陶瓷-碳複合材之接合體之製造方法,其中前述陶瓷部具有連續之三維 篩網構造。
  8. 如申請專利範圍第6項或第7項所述之金屬材與陶瓷-碳複合材之接合體之製造方法,其中前述陶瓷-碳複合材包含有助燒結劑。
  9. 如申請專利範圍第6項至第8項中任一項所述之金屬材與陶瓷-碳複合材之接合體之製造方法,其中前述金屬材為粉體。
  10. 一種碳材接合體,係具備包含碳材之第1構件,及包含碳、陶瓷或金屬之第2構件,以及接合有前述第1構件與前述第2構件之陶瓷-石墨複合材,其中,前述陶瓷-石墨複合材包含有複數個碳粒子及形成於前述複數個碳粒子間之陶瓷部。
  11. 如申請專利範圍第10項所述之碳材接合體,其中前述陶瓷部具有連續之構造。
  12. 如申請專利範圍第10項或第11項所述之碳材接合體,其中前述陶瓷部,係由選自氮化鋁、氧化鋁、碳化矽、氮化矽、碳化硼、碳化鉭、碳化鈮、碳化鋯、氧化鋅、氧化矽以及氧化鋯所成群組中之至少一種所形成。
  13. 一種碳材接合體之製造方法,係具有由包含碳材之第1構件、及包含碳、陶瓷或金屬且接合於前述第1構件之第2構件之碳材接合體之製造方法,其具備下述步驟:於前述第1構件與前述第2構件之間,配置表面附 著有陶瓷之碳粒子以製作層合體之層合體製作步驟,及煅燒前述層合體之煅燒步驟。
  14. 如申請專利範圍第13項所述之碳材接合體之製造方法,其中於前述層合體製作步驟中,在前述第1構件與第2構件之間,配置表面附著有陶瓷粒子之碳粒子。
  15. 如申請專利範圍第14項所述之碳材接合體之製造方法,其中作為前述陶瓷粒子,係使用由選自氮化鋁、氧化鋁、碳化矽、氮化矽、碳化硼、碳化鉭、碳化鈮、碳化鋯、氧化鋅、氧化矽以及氧化鋯所成群組中之至少一種所形成之陶瓷粒子。
  16. 如申請專利範圍第13項至第15項中任一項所述之碳材接合體之製造方法,其中於前述層合體製作步驟中,在前述第1構件與前述第2構件之間,配置表面附著有前述陶瓷之碳粒子與樹脂之混合物。
  17. 如申請專利範圍第16項所述之碳材接合體之製造方法,其中作為前述樹脂,係使用熱塑性樹脂。
  18. 如申請專利範圍第13項所述之碳材接合體之製造方法,其中於前述層合體製作步驟中,在前述第1構件與前述第2構件之間,配置具有複數個碳粒子,及覆蓋前述碳粒子且連結前述複數個碳粒子之陶瓷部之陶瓷-碳複合體層。
  19. 一種碳材接合體用接合材,係碳材,與包含碳、陶瓷或金屬之構件的接合所用之接合材,其中包含表面附著有 陶瓷之複數個碳粒子。
  20. 如申請專利範圍第19項所述之碳材接合體用接合材,其中在前述碳粒子的表面附著有陶瓷粒子。
  21. 如申請專利範圍第19項或第20項所述之碳材接合體用接合材,其中再含有樹脂。
  22. 如申請專利範圍第21項所述之碳材接合體用接合材,其中前述樹脂為熱塑性樹脂。
  23. 如申請專利範圍第19項所述之碳材接合體用接合材,其中經附著於前述碳粒子表面之前述陶瓷,為覆蓋前述碳粒子且連結前述複數個碳粒子。
  24. 如申請專利範圍第19項至第23項中任一項所述之碳材接合體用接合材,其為片狀者。
  25. 一種碳材接合體之製造方法,係具備包含碳材之第1構件,及包含碳、陶瓷或金屬且接合於前述第1構件之第2構件之碳材接合體之製造方法,其具備:將前述第1構件之上配置前述第2構件與樹脂的混合物所製作之層合體加以煅燒之步驟。
  26. 如申請專利範圍第25項所述之碳材接合體之製造方法,其中前述第2構件為粉體。
TW101118677A 2011-05-27 2012-05-25 金屬材與陶瓷-碳複合材之接合體、其製造方法、碳材接合體、碳材接合體用接合材以及碳材接合體之製造方法 TW201302659A (zh)

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CN104884411B (zh) * 2013-02-04 2017-03-22 东洋炭素株式会社 接合体及其制造方法

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