TWI427057B - 用於純化含有以氟為基溶劑之溶液的方法及裝置以及清洗裝置 - Google Patents
用於純化含有以氟為基溶劑之溶液的方法及裝置以及清洗裝置 Download PDFInfo
- Publication number
- TWI427057B TWI427057B TW097106127A TW97106127A TWI427057B TW I427057 B TWI427057 B TW I427057B TW 097106127 A TW097106127 A TW 097106127A TW 97106127 A TW97106127 A TW 97106127A TW I427057 B TWI427057 B TW I427057B
- Authority
- TW
- Taiwan
- Prior art keywords
- water
- fluorine
- solution
- based solvent
- cleaning
- Prior art date
Links
- 239000002904 solvent Substances 0.000 title claims description 82
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 title claims description 79
- 229910052731 fluorine Inorganic materials 0.000 title claims description 79
- 239000011737 fluorine Substances 0.000 title claims description 79
- 238000004140 cleaning Methods 0.000 title claims description 63
- 238000000034 method Methods 0.000 title claims description 46
- 238000000746 purification Methods 0.000 title claims description 43
- 239000000243 solution Substances 0.000 claims description 119
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 89
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 86
- 239000000356 contaminant Substances 0.000 claims description 66
- 239000002245 particle Substances 0.000 claims description 53
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 51
- 239000003960 organic solvent Substances 0.000 claims description 47
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 33
- 239000011259 mixed solution Substances 0.000 claims description 25
- 238000005406 washing Methods 0.000 claims description 25
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 24
- 229910052739 hydrogen Inorganic materials 0.000 claims description 21
- 239000002957 persistent organic pollutant Substances 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 9
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims description 8
- OHMHBGPWCHTMQE-UHFFFAOYSA-N 2,2-dichloro-1,1,1-trifluoroethane Chemical compound FC(F)(F)C(Cl)Cl OHMHBGPWCHTMQE-UHFFFAOYSA-N 0.000 claims description 3
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims description 2
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims 1
- 239000001257 hydrogen Substances 0.000 claims 1
- 239000012044 organic layer Substances 0.000 claims 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 27
- 238000012360 testing method Methods 0.000 description 22
- 150000002500 ions Chemical class 0.000 description 17
- 239000007788 liquid Substances 0.000 description 16
- 238000011109 contamination Methods 0.000 description 10
- 239000000126 substance Substances 0.000 description 10
- 238000000691 measurement method Methods 0.000 description 9
- 229910052799 carbon Inorganic materials 0.000 description 8
- -1 fluoride ions Chemical class 0.000 description 7
- 229910021642 ultra pure water Inorganic materials 0.000 description 7
- 239000012498 ultrapure water Substances 0.000 description 7
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 6
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- 238000004821 distillation Methods 0.000 description 6
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 6
- 239000004810 polytetrafluoroethylene Substances 0.000 description 6
- 239000002351 wastewater Substances 0.000 description 6
- 150000002148 esters Chemical class 0.000 description 5
- 229930195733 hydrocarbon Natural products 0.000 description 5
- 150000002430 hydrocarbons Chemical class 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 238000011069 regeneration method Methods 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 5
- 239000007789 gas Substances 0.000 description 4
- 239000004033 plastic Substances 0.000 description 4
- 229920003023 plastic Polymers 0.000 description 4
- 230000008929 regeneration Effects 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 229920001577 copolymer Polymers 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- PRAKJMSDJKAYCZ-UHFFFAOYSA-N squalane Chemical compound CC(C)CCCC(C)CCCC(C)CCCCC(C)CCCC(C)CCCC(C)C PRAKJMSDJKAYCZ-UHFFFAOYSA-N 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 229920002943 EPDM rubber Polymers 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 150000001450 anions Chemical class 0.000 description 2
- 238000011088 calibration curve Methods 0.000 description 2
- 150000001768 cations Chemical class 0.000 description 2
- 239000003245 coal Substances 0.000 description 2
- 239000004035 construction material Substances 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000013505 freshwater Substances 0.000 description 2
- 238000004817 gas chromatography Methods 0.000 description 2
- 229920001903 high density polyethylene Polymers 0.000 description 2
- 239000004700 high-density polyethylene Substances 0.000 description 2
- 238000004255 ion exchange chromatography Methods 0.000 description 2
- 239000003456 ion exchange resin Substances 0.000 description 2
- 229920003303 ion-exchange polymer Polymers 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000002808 molecular sieve Substances 0.000 description 2
- JXTPJDDICSTXJX-UHFFFAOYSA-N n-Triacontane Natural products CCCCCCCCCCCCCCCCCCCCCCCCCCCCCC JXTPJDDICSTXJX-UHFFFAOYSA-N 0.000 description 2
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 2
- 239000004014 plasticizer Substances 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 2
- GCLGEJMYGQKIIW-UHFFFAOYSA-H sodium hexametaphosphate Chemical compound [Na]OP1(=O)OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])O1 GCLGEJMYGQKIIW-UHFFFAOYSA-H 0.000 description 2
- 229940032094 squalane Drugs 0.000 description 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 2
- CRJUWMHHXMZFHE-UHFFFAOYSA-N 1,1,1,2,3,4,4,4-octafluoro-2-methoxy-3-(trifluoromethyl)butane Chemical compound COC(F)(C(F)(F)F)C(F)(C(F)(F)F)C(F)(F)F CRJUWMHHXMZFHE-UHFFFAOYSA-N 0.000 description 1
- HNSDLXPSAYFUHK-UHFFFAOYSA-N 1,4-bis(2-ethylhexyl) sulfosuccinate Chemical compound CCCCC(CC)COC(=O)CC(S(O)(=O)=O)C(=O)OCC(CC)CCCC HNSDLXPSAYFUHK-UHFFFAOYSA-N 0.000 description 1
- SQEGLLMNIBLLNQ-UHFFFAOYSA-N 1-ethoxy-1,1,2,3,3,3-hexafluoro-2-(trifluoromethyl)propane Chemical compound CCOC(F)(F)C(F)(C(F)(F)F)C(F)(F)F SQEGLLMNIBLLNQ-UHFFFAOYSA-N 0.000 description 1
- DJXNLVJQMJNEMN-UHFFFAOYSA-N 2-[difluoro(methoxy)methyl]-1,1,1,2,3,3,3-heptafluoropropane Chemical compound COC(F)(F)C(F)(C(F)(F)F)C(F)(F)F DJXNLVJQMJNEMN-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 241000237502 Ostreidae Species 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 229930182764 Polyoxin Natural products 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 125000002947 alkylene group Chemical group 0.000 description 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical class [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- 239000008346 aqueous phase Substances 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 150000007942 carboxylates Chemical class 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- KYKAJFCTULSVSH-UHFFFAOYSA-N chloro(fluoro)methane Chemical compound F[C]Cl KYKAJFCTULSVSH-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 150000002221 fluorine Chemical class 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 235000020636 oyster Nutrition 0.000 description 1
- 238000001139 pH measurement Methods 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 235000015067 sauces Nutrition 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical compound FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/58—Treatment of water, waste water, or sewage by removing specified dissolved compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D11/00—Solvent extraction
- B01D11/04—Solvent extraction of solutions which are liquid
- B01D11/0492—Applications, solvents used
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F9/00—Multistage treatment of water, waste water or sewage
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/001—Processes for the treatment of water whereby the filtration technique is of importance
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/26—Treatment of water, waste water, or sewage by extraction
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/28—Treatment of water, waste water, or sewage by sorption
- C02F1/281—Treatment of water, waste water, or sewage by sorption using inorganic sorbents
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/28—Treatment of water, waste water, or sewage by sorption
- C02F1/283—Treatment of water, waste water, or sewage by sorption using coal, charred products, or inorganic mixtures containing them
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/40—Devices for separating or removing fatty or oily substances or similar floating material
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2101/00—Nature of the contaminant
- C02F2101/10—Inorganic compounds
- C02F2101/12—Halogens or halogen-containing compounds
- C02F2101/14—Fluorine or fluorine-containing compounds
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
- C02F2103/34—Nature of the water, waste water, sewage or sludge to be treated from industrial activities not provided for in groups C02F2103/12 - C02F2103/32
- C02F2103/346—Nature of the water, waste water, sewage or sludge to be treated from industrial activities not provided for in groups C02F2103/12 - C02F2103/32 from semiconductor processing, e.g. waste water from polishing of wafers
Landscapes
- Chemical & Material Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Water Supply & Treatment (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Water Treatment By Sorption (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Treatment Of Liquids With Adsorbents In General (AREA)
- Extraction Or Liquid Replacement (AREA)
- Detergent Compositions (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007044315A JP5085954B2 (ja) | 2007-02-23 | 2007-02-23 | フッ素系溶剤含有溶液の精製方法及び精製装置ならびに洗浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200900379A TW200900379A (en) | 2009-01-01 |
| TWI427057B true TWI427057B (zh) | 2014-02-21 |
Family
ID=39710425
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW097106127A TWI427057B (zh) | 2007-02-23 | 2008-02-21 | 用於純化含有以氟為基溶劑之溶液的方法及裝置以及清洗裝置 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20100126934A1 (https=) |
| EP (1) | EP2114831A4 (https=) |
| JP (1) | JP5085954B2 (https=) |
| KR (1) | KR101381494B1 (https=) |
| CN (1) | CN101622201B (https=) |
| TW (1) | TWI427057B (https=) |
| WO (1) | WO2008103536A1 (https=) |
Families Citing this family (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5620056B2 (ja) * | 2008-10-10 | 2014-11-05 | スリーエム イノベイティブプロパティズカンパニー | フッ素系溶剤の精製方法 |
| JP5368131B2 (ja) * | 2009-02-20 | 2013-12-18 | 大日本スクリーン製造株式会社 | 溶剤再生装置及びその方法 |
| WO2011155407A1 (ja) * | 2010-06-07 | 2011-12-15 | セントラル硝子株式会社 | 保護膜形成用薬液 |
| US9607864B2 (en) * | 2012-05-23 | 2017-03-28 | Stmicroelectronics, Inc. | Dual medium filter for ion and particle filtering during semiconductor processing |
| CN103730409B (zh) * | 2012-10-16 | 2016-12-28 | 中芯国际集成电路制造(上海)有限公司 | 半导体器件的制作方法、清洗方法和清洗系统 |
| JP6149421B2 (ja) * | 2013-02-20 | 2017-06-21 | 栗田工業株式会社 | 溶液の供給方法及び供給装置 |
| CN103083998B (zh) * | 2013-03-01 | 2014-12-03 | 成都广亚科技有限公司 | 一种溶剂净化装置及其处理方法 |
| US20140322656A1 (en) * | 2013-04-24 | 2014-10-30 | Orthogonal, Inc. | Method of patterning a device |
| KR102341140B1 (ko) * | 2013-07-25 | 2021-12-21 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 질소 함유 하이드로플루오로에테르 및 이의 제조 방법 |
| CN106459291B (zh) | 2014-05-30 | 2019-07-12 | Ａｇｃ株式会社 | 含氟聚合物的制造方法 |
| JP2016168530A (ja) * | 2015-03-12 | 2016-09-23 | 三井・デュポンフロロケミカル株式会社 | フッ素含有溶剤分離方法、フッ素含有溶剤汚染物除去方法、及び装置 |
| JP6542393B2 (ja) * | 2016-01-05 | 2019-07-10 | 富士フイルム株式会社 | 処理液、基板の洗浄方法および半導体デバイスの製造方法 |
| JP6480017B2 (ja) * | 2016-01-05 | 2019-03-06 | 富士フイルム株式会社 | 処理液、基板の洗浄方法、及び、半導体デバイスの製造方法 |
| WO2017119244A1 (ja) * | 2016-01-05 | 2017-07-13 | 富士フイルム株式会社 | 処理液、基板の洗浄方法、および、半導体デバイスの製造方法 |
| WO2018043697A1 (ja) * | 2016-09-02 | 2018-03-08 | 富士フイルム株式会社 | 有機溶剤の精製方法および有機溶剤の精製装置 |
| TWI737823B (zh) * | 2016-09-30 | 2021-09-01 | 日商富士軟片股份有限公司 | 半導體晶片的製造方法、套組 |
| JP2018118183A (ja) * | 2017-01-23 | 2018-08-02 | 光治郎 大川 | 被洗浄物洗浄装置 |
| KR102478194B1 (ko) * | 2017-06-26 | 2022-12-15 | 에이지씨 가부시키가이샤 | 진공 증착용의 마스크의 세정 방법 및 린스 조성물 |
| JPWO2019093251A1 (ja) * | 2017-11-10 | 2020-12-10 | 日本ゼオン株式会社 | 洗浄溶剤組成物の再生方法および再生装置、並びに、被洗浄物の洗浄方法および洗浄システム |
| JP7126830B2 (ja) * | 2018-01-19 | 2022-08-29 | スリーエム イノベイティブ プロパティズ カンパニー | フッ素化液体の再生方法、及び該方法を用いる再生装置 |
| JPWO2020031732A1 (ja) * | 2018-08-10 | 2021-09-24 | 日本ゼオン株式会社 | フッ素系溶剤含有物の精製方法およびフッ素系溶剤含有精製物 |
| CN111100750A (zh) * | 2018-10-29 | 2020-05-05 | 台境企业股份有限公司 | 废氟素油的处理方法及系统 |
| CN109365386A (zh) * | 2018-12-06 | 2019-02-22 | 深圳市盈石科技有限公司 | 一种净洗装置及其净洗方法 |
| JP2021000603A (ja) * | 2019-06-21 | 2021-01-07 | スリーエム イノベイティブ プロパティズ カンパニー | フッ素化液体の精製方法、及び該方法を用いる精製装置 |
| IL290395B1 (en) | 2019-09-03 | 2026-04-01 | Fujifilm Electronic Mat Usa Inc | Solvent purification systems and methods |
| JP2021041337A (ja) * | 2019-09-10 | 2021-03-18 | スリーエム イノベイティブ プロパティズ カンパニー | アルコール含有フッ素化液体の再生方法、及び該方法を用いる再生システム |
| CN111863298B (zh) * | 2020-06-10 | 2022-08-05 | 中国原子能科学研究院 | 一种purex流程污溶剂的深度净化方法 |
| CN114284130B (zh) * | 2020-09-27 | 2025-03-21 | 东莞新科技术研究开发有限公司 | 去除晶圆表面杂质的方法 |
| KR20230156917A (ko) * | 2021-03-12 | 2023-11-15 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 플루오르화 유체 컨디셔닝 시스템 |
| CN114560758B (zh) * | 2022-02-22 | 2023-08-18 | 中船(邯郸)派瑞特种气体股份有限公司 | 一种电子级九氟丁基甲醚的纯化方法 |
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- 2008-02-04 KR KR1020097018237A patent/KR101381494B1/ko not_active Expired - Fee Related
- 2008-02-04 WO PCT/US2008/052896 patent/WO2008103536A1/en not_active Ceased
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| JP2001129302A (ja) * | 1999-11-09 | 2001-05-15 | Hitachi Ltd | 溶剤再生装置及び再生方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20090122220A (ko) | 2009-11-26 |
| EP2114831A4 (en) | 2012-12-12 |
| KR101381494B1 (ko) | 2014-04-04 |
| EP2114831A1 (en) | 2009-11-11 |
| WO2008103536A1 (en) | 2008-08-28 |
| JP2008208048A (ja) | 2008-09-11 |
| CN101622201B (zh) | 2012-07-11 |
| JP5085954B2 (ja) | 2012-11-28 |
| TW200900379A (en) | 2009-01-01 |
| US20100126934A1 (en) | 2010-05-27 |
| CN101622201A (zh) | 2010-01-06 |
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