TWI370804B - Ga2o3 type light meitting device and manufacturing method thereof - Google Patents

Ga2o3 type light meitting device and manufacturing method thereof

Info

Publication number
TWI370804B
TWI370804B TW093103898A TW93103898A TWI370804B TW I370804 B TWI370804 B TW I370804B TW 093103898 A TW093103898 A TW 093103898A TW 93103898 A TW93103898 A TW 93103898A TW I370804 B TWI370804 B TW I370804B
Authority
TW
Taiwan
Prior art keywords
meitting
ga2o3
manufacturing
type light
light
Prior art date
Application number
TW093103898A
Other languages
English (en)
Other versions
TW200424128A (en
Inventor
Noboru Ichinose
Kiyoshi Shimamura
Kazuo Aoki
Villora Encarnacion Antonia Garcia
Original Assignee
Univ Waseda
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2003046552A external-priority patent/JP4630986B2/ja
Priority claimed from JP2003066020A external-priority patent/JP4565062B2/ja
Priority claimed from JP2003137916A external-priority patent/JP4020314B2/ja
Application filed by Univ Waseda filed Critical Univ Waseda
Publication of TW200424128A publication Critical patent/TW200424128A/zh
Application granted granted Critical
Publication of TWI370804B publication Critical patent/TWI370804B/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/16—Oxides
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/34—Single-crystal growth by zone-melting; Refining by zone-melting characterised by the seed, e.g. by its crystallographic orientation
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02—Epitaxial-layer growth
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02414—Oxide semiconducting materials not being Group 12/16 materials, e.g. ternary compounds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/02433—Crystal orientation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02565—Oxide semiconducting materials not being Group 12/16 materials, e.g. ternary compounds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/005—Processes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/16—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular crystal structure or orientation, e.g. polycrystalline, amorphous or porous
    • H01L33/18—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular crystal structure or orientation, e.g. polycrystalline, amorphous or porous within the light emitting region
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/26—Materials of the light emitting region

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Led Devices (AREA)
  • Semiconductor Lasers (AREA)
TW093103898A 2003-02-24 2004-02-18 Ga2o3 type light meitting device and manufacturing method thereof TWI370804B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2003046552A JP4630986B2 (ja) 2003-02-24 2003-02-24 β−Ｇａ２Ｏ３系単結晶成長方法
JP2003066020A JP4565062B2 (ja) 2003-03-12 2003-03-12 薄膜単結晶の成長方法
JP2003137916A JP4020314B2 (ja) 2003-05-15 2003-05-15 Ｇａ２Ｏ３系発光素子およびその製造方法

Publications (2)

Publication Number Publication Date
TW200424128A TW200424128A (en) 2004-11-16
TWI370804B true TWI370804B (en) 2012-08-21

Family

ID=32912842

Family Applications (3)

Application Number Title Priority Date Filing Date
TW101114968A TW201242901A (en) 2003-02-24 2004-02-18 Thin film type single crystal growth method
TW093103898A TWI370804B (en) 2003-02-24 2004-02-18 Ga2o3 type light meitting device and manufacturing method thereof
TW100131316A TWI450865B (zh) 2003-02-24 2004-02-18 β氧化鎵系單結晶生長方法

Family Applications Before (1)

Application Number Title Priority Date Filing Date
TW101114968A TW201242901A (en) 2003-02-24 2004-02-18 Thin film type single crystal growth method

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW100131316A TWI450865B (zh) 2003-02-24 2004-02-18 β氧化鎵系單結晶生長方法

Country Status (8)

Country Link
US (4) US7393411B2 (zh)
EP (3) EP1598450B1 (zh)
KR (1) KR100787272B1 (zh)
AT (1) ATE525498T1 (zh)
CA (1) CA2517024C (zh)
RU (1) RU2313623C2 (zh)
TW (3) TW201242901A (zh)
WO (1) WO2004074556A2 (zh)

Families Citing this family (66)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3679097B2 (ja) 2002-05-31 2005-08-03 株式会社光波 発光素子
EP1598450B1 (en) * 2003-02-24 2011-09-21 Waseda University Beta-Ga2O3 SINGLE CRYSTAL GROWING METHOD
JP2005235961A (ja) * 2004-02-18 2005-09-02 Univ Waseda Ｇａ２Ｏ３系単結晶の導電率制御方法
JP4803634B2 (ja) * 2004-10-01 2011-10-26 学校法人早稲田大学 ｐ型Ｇａ２Ｏ３膜の製造方法およびｐｎ接合型Ｇａ２Ｏ３膜の製造方法
US7829444B2 (en) * 2004-11-10 2010-11-09 Canon Kabushiki Kaisha Field effect transistor manufacturing method
JP5003013B2 (ja) * 2006-04-25 2012-08-15 株式会社日立製作所 シリコン発光ダイオード、シリコン光トランジスタ、シリコンレーザー及びそれらの製造方法。
JP5529420B2 (ja) * 2009-02-09 2014-06-25 住友電気工業株式会社 エピタキシャルウエハ、窒化ガリウム系半導体デバイスを作製する方法、窒化ガリウム系半導体デバイス、及び酸化ガリウムウエハ
US8529802B2 (en) * 2009-02-13 2013-09-10 Samsung Electronics Co., Ltd. Solution composition and method of forming thin film and method of manufacturing thin film transistor using the solution composition
KR101664958B1 (ko) * 2009-04-09 2016-10-12 삼성전자주식회사 산화물 박막 형성용 용액 조성물 및 상기 산화물 박막을 포함하는 전자 소자
US8319300B2 (en) * 2009-04-09 2012-11-27 Samsung Electronics Co., Ltd. Solution composition for forming oxide thin film and electronic device including the oxide thin film
WO2011074407A1 (en) 2009-12-18 2011-06-23 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
KR100969127B1 (ko) 2010-02-18 2010-07-09 엘지이노텍 주식회사 발광 소자, 발광 소자 제조방법 및 발광 소자 패키지
US9187815B2 (en) * 2010-03-12 2015-11-17 United Technologies Corporation Thermal stabilization of coating material vapor stream
JP2011061225A (ja) * 2010-11-01 2011-03-24 Waseda Univ ｐｎ型Ｇａ２Ｏ３膜の製造方法
KR101935755B1 (ko) * 2010-12-20 2019-01-04 토소가부시키가이샤 금속 갈륨 침투 질화갈륨 성형물 및 이의 제조방법
USD647870S1 (en) 2010-12-28 2011-11-01 Samsung Electronics Co., Ltd. Portable telephone
USD649134S1 (en) 2010-12-28 2011-11-22 Samsung Electronics Co., Ltd. Portable telephone
USD672327S1 (en) 2010-12-28 2012-12-11 Samsung Electronics Co., Ltd. Portable telephone
EP2754736A4 (en) * 2011-09-08 2015-06-24 Tamura Seisakusho Kk CRYSTALLINE LAMINATE STRUCTURE AND MANUFACTURING METHOD THEREOF
US9461124B2 (en) * 2011-09-08 2016-10-04 Tamura Corporation Ga2O3 semiconductor element
CN110071170B (zh) * 2011-09-08 2022-10-11 株式会社田村制作所 晶体层叠结构体
WO2013035465A1 (ja) 2011-09-08 2013-03-14 株式会社タムラ製作所 Ｇａ２Ｏ３系単結晶体のドナー濃度制御方法
JP5807282B2 (ja) * 2011-09-08 2015-11-10 株式会社タムラ製作所 Ｇａ２Ｏ３系半導体素子
JP2013102081A (ja) 2011-11-09 2013-05-23 Tamura Seisakusho Co Ltd ショットキーバリアダイオード
JP5491483B2 (ja) * 2011-11-15 2014-05-14 株式会社タムラ製作所 β−Ｇａ２Ｏ３系単結晶の成長方法
WO2013080972A1 (ja) 2011-11-29 2013-06-06 株式会社タムラ製作所 Ｇａ2Ｏ3系結晶膜の製造方法
JP5756075B2 (ja) * 2012-11-07 2015-07-29 株式会社タムラ製作所 β−Ｇａ２Ｏ３系単結晶の育成方法
JP5536920B1 (ja) 2013-03-04 2014-07-02 株式会社タムラ製作所 Ｇａ２Ｏ３系単結晶基板、及びその製造方法
JP5788925B2 (ja) * 2013-04-04 2015-10-07 株式会社タムラ製作所 β−Ｇａ２Ｏ３系単結晶の成長方法
JP5984069B2 (ja) * 2013-09-30 2016-09-06 株式会社タムラ製作所 β−Ｇａ２Ｏ３系単結晶膜の成長方法、及び結晶積層構造体
JP5892495B2 (ja) * 2013-12-24 2016-03-23 株式会社タムラ製作所 Ｇａ２Ｏ３系結晶膜の成膜方法、及び結晶積層構造体
JP6013383B2 (ja) * 2014-02-28 2016-10-25 株式会社タムラ製作所 β−Ｇａ２Ｏ３系単結晶基板の製造方法
TWI550909B (zh) 2014-03-21 2016-09-21 A flip chip type light emitting diode and a method for manufacturing the same, and a flip chip type structure thereof
JP6013410B2 (ja) 2014-08-07 2016-10-25 株式会社タムラ製作所 Ｇａ２Ｏ３系単結晶基板
JP5907465B2 (ja) * 2014-08-29 2016-04-26 株式会社タムラ製作所 半導体素子及び結晶積層構造体
EP3042986A1 (en) 2015-01-09 2016-07-13 Forschungsverbund Berlin e.V. Method for growing beta phase of gallium oxide (ß-Ga2O3) single crystals from the melt contained within a metal crucible by controlling the partial pressure of oxygen.
JP6726910B2 (ja) * 2016-04-21 2020-07-22 国立大学法人信州大学 酸化ガリウム結晶の製造装置および酸化ガリウム結晶の製造方法
US10593544B2 (en) * 2016-10-14 2020-03-17 Case Westen Reverse University Method for forming a thin film comprising an ultrawide bandgap oxide semiconductor
SG11202000619WA (en) * 2017-01-25 2020-02-27 Shanghai Inst Optics & Fine Mech Cas Gallium oxide-doped crystalline material, preparation method and application thereof
CN108342775B (zh) * 2017-01-25 2024-04-12 中国科学院上海光学精密机械研究所 一种钽掺杂β氧化镓晶态材料及其制备方法和应用
JP2018135228A (ja) * 2017-02-21 2018-08-30 住友金属鉱山株式会社 ＬｉＴａＯ３単結晶の育成方法とＬｉＴａＯ３単結晶の処理方法
KR101897494B1 (ko) 2017-06-27 2018-09-12 충남대학교산학협력단 산화질화갈륨 박막의 제조방법
CN107827369B (zh) * 2017-12-06 2020-08-07 浙江海洋大学 一种ZnMgO纳米柱及其制备方法
KR102598375B1 (ko) * 2018-08-01 2023-11-06 이데미쓰 고산 가부시키가이샤 결정 구조 화합물, 산화물 소결체, 스퍼터링 타깃, 결정질 산화물 박막, 아모르퍼스 산화물 박막, 박막 트랜지스터, 및 전자 기기
CN109136859A (zh) * 2018-10-22 2019-01-04 哈尔滨工业大学 一种制备高透光率氧化镓薄膜的方法
CN109671612B (zh) * 2018-11-15 2020-07-03 中国科学院上海微系统与信息技术研究所 一种氧化镓半导体结构及其制备方法
FR3085535B1 (fr) 2019-04-17 2021-02-12 Hosseini Teherani Ferechteh Procédé de fabrication d’oxyde de gallium de type p par dopage intrinsèque, le film mince obtenu d’oxyde de gallium et son utilisation
WO2021064795A1 (ja) * 2019-09-30 2021-04-08 日本碍子株式会社 α－Ｇａ２Ｏ３系半導体膜
CN110911270B (zh) * 2019-12-11 2022-03-25 吉林大学 一种高质量氧化镓薄膜及其同质外延生长方法
US11674239B2 (en) * 2020-02-27 2023-06-13 Fujikoshi Machinery Corp. Gallium oxide crystal manufacturing device
US11680337B2 (en) 2020-04-03 2023-06-20 Psiquantum, Corp. Fabrication of films having controlled stoichiometry using molecular beam epitaxy
US11342484B2 (en) * 2020-05-11 2022-05-24 Silanna UV Technologies Pte Ltd Metal oxide semiconductor-based light emitting device
WO2021246697A1 (ko) * 2020-06-05 2021-12-09 고려대학교 산학협력단 베타 산화갈륨 박막 제조방법
CN111628019B (zh) * 2020-06-28 2022-05-27 中国科学院长春光学精密机械与物理研究所 一种三氧化二镓日盲紫外探测器及其制备方法
US20230420617A1 (en) * 2020-10-30 2023-12-28 The Regents Of The University Of California Nitride based ultraviolet light emitting diode with an ultraviolet transparent contact
CN112281211A (zh) * 2020-11-06 2021-01-29 鲁东大学 一种多晶氧化镓纳米片薄膜的制备方法
CN112993085A (zh) * 2021-02-09 2021-06-18 中国科学院上海光学精密机械研究所 一种氧化镓x射线探测器及其制备方法
CN113223929A (zh) * 2021-04-16 2021-08-06 西安电子科技大学 基于非平衡激光等离子体的氧化镓高效掺杂方法
CN113584587B (zh) * 2021-07-30 2022-04-08 中国科学院宁波材料技术与工程研究所 Sn掺杂的介稳态氧化镓晶相薄膜及其制备方法与应用
WO2023073404A1 (en) 2021-10-27 2023-05-04 Silanna UV Technologies Pte Ltd Methods and systems for heating a wide bandgap substrate
WO2023084274A1 (en) * 2021-11-10 2023-05-19 Silanna UV Technologies Pte Ltd Epitaxial oxide materials, structures, and devices
CN118369767A (zh) 2021-11-10 2024-07-19 斯兰纳Uv科技有限公司 外延氧化物材料、结构和装置
WO2023084275A1 (en) 2021-11-10 2023-05-19 Silanna UV Technologies Pte Ltd Ultrawide bandgap semiconductor devices including magnesium germanium oxides
WO2023084283A1 (en) * 2021-11-10 2023-05-19 Silanna UV Technologies Pte Ltd Epitaxial oxide materials, structures, and devices
EP4219803A1 (en) 2022-01-31 2023-08-02 Siltronic AG Method and apparatus for producing electrically conducting bulk beta-ga2o3 single crystals and electrically conducting bulk beta-ga2o3 single crystal
CN115128423B (zh) * 2022-06-30 2024-08-20 哈尔滨工业大学 一种重离子辐照影响β-Ga2O3 MOSFET器件电学性能的模拟方法

Family Cites Families (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0226899A (ja) * 1988-07-16 1990-01-29 Mitsumi Electric Co Ltd Ｆｅ−Ｓｉ−Ａｌ系合金単結晶の育成法
JP2854623B2 (ja) 1989-09-05 1999-02-03 株式会社東芝 酸化物超電導体薄膜の製造方法
US5418216A (en) * 1990-11-30 1995-05-23 Fork; David K. Superconducting thin films on epitaxial magnesium oxide grown on silicon
US5330855A (en) * 1991-09-23 1994-07-19 The United States Of America, As Represented By The Secretary Of Commerce Planar epitaxial films of SnO2
JP2735422B2 (ja) * 1991-12-03 1998-04-02 日鉄鉱業株式会社 ルチル単結晶の処理方法
JPH05179430A (ja) 1991-12-28 1993-07-20 Nec Corp パルスレーザ蒸着法によるセラミックス複合系材料薄膜の製造方法
JP2778405B2 (ja) 1993-03-12 1998-07-23 日亜化学工業株式会社 窒化ガリウム系化合物半導体発光素子
US5670966A (en) 1994-12-27 1997-09-23 Ppg Industries, Inc. Glass antenna for vehicle window
US5625202A (en) * 1995-06-08 1997-04-29 University Of Central Florida Modified wurtzite structure oxide compounds as substrates for III-V nitride compound semiconductor epitaxial thin film growth
EP0856600B1 (en) 1997-01-30 2001-04-25 Nippon Telegraph And Telephone Corporation LiGa02 single crystal, single-crystal substrate, and method of manufacturing the same
US6030453A (en) * 1997-03-04 2000-02-29 Motorola, Inc. III-V epitaxial wafer production
US6057561A (en) * 1997-03-07 2000-05-02 Japan Science And Technology Corporation Optical semiconductor element
JPH11145717A (ja) 1997-11-11 1999-05-28 Asahi Glass Co Ltd 車両用ガラスアンテナ
US6065543A (en) 1998-01-27 2000-05-23 Halliburton Energy Services, Inc. Sealed lateral wellbore junction assembled downhole
US6094295A (en) * 1998-02-12 2000-07-25 Motorola, Inc. Ultraviolet transmitting oxide with metallic oxide phase and method of fabrication
US6159834A (en) * 1998-02-12 2000-12-12 Motorola, Inc. Method of forming a gate quality oxide-compound semiconductor structure
EP0975027A2 (en) * 1998-07-23 2000-01-26 Sony Corporation Light emitting device and process for producing the same
JP2000174529A (ja) 1998-12-07 2000-06-23 Asahi Glass Co Ltd 自動車用高周波ガラスアンテナ
JP2001286814A (ja) 2000-04-05 2001-10-16 Horiba Ltd 粒子膜形成方法
US7445671B2 (en) * 2000-06-29 2008-11-04 University Of Louisville Formation of metal oxide nanowire networks (nanowebs) of low-melting metals
US7182812B2 (en) * 2002-09-16 2007-02-27 University Of Louisville Direct synthesis of oxide nanostructures of low-melting metals
JP4083396B2 (ja) * 2000-07-10 2008-04-30 独立行政法人科学技術振興機構 紫外透明導電膜とその製造方法
JP3579712B2 (ja) 2000-08-28 2004-10-20 独立行政法人産業技術総合研究所 酸化物立方晶系（１１１）基板を用いる酸化亜鉛等の六方晶系物質の（０００１）エピタキシャル薄膜の作製方法及び同法で作製した薄膜
AU2002235146A1 (en) * 2000-11-30 2002-06-11 North Carolina State University Non-thermionic sputter material transport device, methods of use, and materials produced thereby
JP5110744B2 (ja) * 2000-12-21 2012-12-26 フィリップス ルミレッズ ライティング カンパニー リミテッド ライアビリティ カンパニー 発光装置及びその製造方法
JP3969959B2 (ja) * 2001-02-28 2007-09-05 独立行政法人科学技術振興機構 透明酸化物積層膜及び透明酸化物ｐ−ｎ接合ダイオードの作製方法
TW541723B (en) 2001-04-27 2003-07-11 Shinetsu Handotai Kk Method for manufacturing light-emitting element
JP3907981B2 (ja) 2001-07-30 2007-04-18 富士通株式会社 データ処理プログラム及びデータ処理装置
US7169227B2 (en) * 2001-08-01 2007-01-30 Crystal Photonics, Incorporated Method for making free-standing AIGaN wafer, wafer produced thereby, and associated methods and devices using the wafer
JP2003066020A (ja) 2001-08-22 2003-03-05 Sumitomo Chem Co Ltd 分析システム
JP2003137916A (ja) 2001-11-07 2003-05-14 Mitsubishi Rayon Co Ltd 両親媒性重合体の製造方法
AU2003217189A1 (en) * 2002-01-22 2003-09-02 Massachusetts Institute Of Technology A method of fabrication for iii-v semiconductor surface passivation
JP3679097B2 (ja) * 2002-05-31 2005-08-03 株式会社光波 発光素子
ATE488614T1 (de) * 2002-08-28 2010-12-15 Moxtronics Inc Hybridstrahl-beschichtungssystem und verfahren zur herstellung von zno-schichten
JP3795007B2 (ja) * 2002-11-27 2006-07-12 松下電器産業株式会社 半導体発光素子及びその製造方法
EP1598450B1 (en) * 2003-02-24 2011-09-21 Waseda University Beta-Ga2O3 SINGLE CRYSTAL GROWING METHOD
TWI312582B (en) * 2003-07-24 2009-07-21 Epistar Corporatio Led device, flip-chip led package and light reflecting structure
JP2005235961A (ja) * 2004-02-18 2005-09-02 Univ Waseda Ｇａ２Ｏ３系単結晶の導電率制御方法
KR100665298B1 (ko) * 2004-06-10 2007-01-04 서울반도체 주식회사 발광장치
US7087351B2 (en) * 2004-09-29 2006-08-08 Eastman Kodak Company Antistatic layer for electrically modulated display
JP2007165626A (ja) * 2005-12-14 2007-06-28 Toyoda Gosei Co Ltd 発光素子及びその製造方法
US7488384B2 (en) * 2006-05-03 2009-02-10 Ohio University Direct pyrolysis route to GaN quantum dots
US20080008964A1 (en) * 2006-07-05 2008-01-10 Chia-Hua Chan Light emitting diode and method of fabricating a nano/micro structure

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KR100787272B1 (ko) 2007-12-20
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EP2267194A3 (en) 2011-10-19
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EP2267194A2 (en) 2010-12-29
US20060150891A1 (en) 2006-07-13
US20100229789A1 (en) 2010-09-16
TW201242901A (en) 2012-11-01
EP2273569A3 (en) 2011-03-02
CA2517024A1 (en) 2004-09-02
EP1598450A4 (en) 2008-04-23
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US20080265264A1 (en) 2008-10-30
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US7713353B2 (en) 2010-05-11
US8262796B2 (en) 2012-09-11
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EP1598450B1 (en) 2011-09-21
ATE525498T1 (de) 2011-10-15
EP2267194B1 (en) 2013-04-17
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TW200424128A (en) 2004-11-16
CA2517024C (en) 2009-12-01
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RU2313623C2 (ru) 2007-12-27
US7393411B2 (en) 2008-07-01

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