TW201606864A - 用於至少部分地分離載體基板與產品基板之間的連結的方法 - Google Patents

用於至少部分地分離載體基板與產品基板之間的連結的方法 Download PDF

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TW201606864A
TW201606864A TW104136540A TW104136540A TW201606864A TW 201606864 A TW201606864 A TW 201606864A TW 104136540 A TW104136540 A TW 104136540A TW 104136540 A TW104136540 A TW 104136540A TW 201606864 A TW201606864 A TW 201606864A
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substrate
product substrate
carrier substrate
film
solvent
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TWI603389B (zh
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費德瑞克 保羅 林德納
喬根 伯格拉夫
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Ｅｖ集團有限公司
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    • B32B38/00—Ancillary operations in connection with laminating processes
    • B32B38/10—Removing layers, or parts of layers, mechanically or chemically
    • B—PERFORMING OPERATIONS; TRANSPORTING
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    • B32B43/00—Operations specially adapted for layered products and not otherwise provided for, e.g. repairing; Apparatus therefor
    • B32B43/003—Cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
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    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
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Abstract

本發明係關於一種用於經由一撓性薄膜將一產品基板自藉一互連層連接至該產品基板之一載體基板拆卸之裝置，該撓性薄膜安裝於一薄膜框架上且其包括一黏著層，該黏著層用於將該產品基板固持在該薄膜之一接合表面區段中，該薄膜安裝於位於該薄膜之一附接區段中之該薄膜框架上，該附接區段圍繞該接合表面區段，且該薄膜包括位於該接合表面區段與該附接區段之間的一拆卸區段，該裝置具有拆卸構件，其用於實現自一產品基板之一周邊將該產品基板自該載體基板拆卸。 更進一步，本發明係關於一種用於經由一撓性薄膜將一產品基板自藉一互連層連接至該產品基板之一載體基板上拆卸之方法，該撓性薄膜安裝於一薄膜框架上且其包括一黏著層，該黏著層用於將該產品基板固持在該薄膜之一接合表面區段中，該薄膜安裝於位於該薄膜之一附接區段中之該薄膜框架上，該附接區段圍繞該接合表面區段，且該薄膜包括位於該接合表面區段與該附接區段之間的一拆卸區段，及由於該拆卸構件造成自一產品基板之一周邊將該產品基板自該載體 基板拆卸。

Description

用於至少部分地分離載體基板與產品基板之間的連結的方法
本發明係關於一種如技術方案1之用於將一產品基板自一載體基板拆卸之裝置及一種如技術方案14之用於將一產品基板自一載體基板拆卸之方法。
在半導體產業中常常需要產品基板之背面薄化，且在機械及/或化學產業中亦是如此。為背面薄化之目的，產品基板大體上需要暫時固定在一載體上，存在各種固定方法。例如，載體材料可為薄膜，玻璃基板或矽晶圓。
取決於所使用的載體材料及載體與產品基板之間所使用的互連層，(吾人)已知用於溶解及破壞互連層的不同方法，舉例而言(例如)，UV光、雷射束之使用，溫度或溶液之作用。
由於幾微米厚之薄基板在拆卸/剝離時容易破裂或因拆卸過程中所需之作用力而破壞，故拆卸正不斷成為最關鍵的處理步驟之一。
此外，薄基板幾乎沒有任何穩固的形狀或完全沒有且其通常因沒有支撐材料而捲曲。因此，在處理背面薄化晶圓期間，本質上絕對需要固定及支撐晶圓。
因此，本發明之目的為設計一種以儘量不破壞的方式將此類產 品基板自一載體上拆卸之裝置及方法。
此目的用如技術方案1及14之特徵來實現。在隨附申請專利範圍中給出本發明之其他有利發展。本發明之框架亦包含在實施方式，申請專利範圍及/或圖式中給出之至少兩個特徵之所有結合。在特定值範圍內，位於指示界限內之值亦被揭示為臨界值，且其等會以任何組合方式得以主張。
本發明係基於進一步發展一種藉安裝在一薄膜框架上之一薄膜之彈性及撓性用以自產品基板之邊緣(尤其係在薄膜之拆卸區段)開始(即，使薄膜變形)仔細拆卸該產品基板之理念。用這種方法，產品基板可立刻在分離之後直接用於其他的處理步驟且受薄膜與薄膜框架保護。許多處理步驟可直接執行於安裝於薄膜框架之產品基板上。
換言之：經由毗接薄膜框架及在薄膜之接合表面區段中接合產品基板之黏著層的力，撓性薄膜傳遞一張力至產品基板，該產品基板藉此自載體基板拆卸，尤其是剝離下來。
一產品基板常被定義為習知薄化至介於0.5μm至250μm之間的厚度的一產品基板，例如一半導體晶圓，產品基板正趨向於越來越薄。利用本身就具有類似於安裝在薄膜框架上之薄膜之撓性之產品基板，本發明工作時尤其有效。在根據本發明之裝置及根據本發明之方法中，產品基板自載體基板上被剝離，尤其是自產品基板之周邊共中心地開始。
例如，載體為具有介於50μm與5,000μm之間，尤其為介於500μm與1,000μm之間之厚度的一載體基板。
互連層可以為一黏著劑，例如一可溶性黏著劑，尤其為一熱塑性材料，其可(例如)選擇性地施加於載體基板產品基板組合體之一邊緣區域中，尤其是在0.1毫米至20毫米之一邊緣區域中。或者，該黏 著層可施加於整個表面，且可利用一黏著降低層(例如含氟聚合物，較佳為聚四氟乙烯)降低黏著力。
一夾盤是尤其正好適合作為固持構件，尤其是用於固持載體基板之一旋轉夾盤，尤其是經由負壓，例如吸徑、吸孔或吸盤。或者，可使用(例如)藉橫向夾箍之機械固持。在另一替代組態中發生靜電固持。
拆卸構件包含安裝在薄膜框架上之薄膜及一薄膜框架固持件，該薄膜框架固持件施加一力且其固持該薄膜框架。
有利地，除了拆卸構件之外，亦存在一連接釋放構件，其用於至少部分釋放由互連層造成的載體基板與產品基板之間之連接。
就此而言，該裝置具有加熱構件，其用於加熱(尤其)整合至載體基板固持件中的載體基板產品基板組合體，一熱塑料性溶解黏著劑可用作為一互連層。最高加熱溫度為250℃，較佳為最高175℃。
在本發明之一有利實施例中，提供為連接釋放構件經製成為本質上無需加熱即可工作。用此方法，可以省去任何加熱構件。
在本發明之另一有利實施例中，提供為連接釋放構件包括用於分離互連層之流體構件，尤其為可選擇性地溶解該互連層之一溶劑。該互連層之化學溶解對產品基板起特別防護作用，且因相對應材料選擇，溶解亦能很快地發生，尤其是當只有產品基板之邊緣區域具有一互連層時，使得該溶劑能自側邊快速作用。用這種方法，可省去在該載體基板及/或產品基板中穿孔。
在本發明之另一替代實施例中，提供為連接釋放構件包括用於分離互連層的機械分離構件，尤其為用於切斷互連層之一刀片。用這種方法，自載體上特別迅速地分離產品基板成為可能。亦可使用機械分離構件及流體構件之組合。
在本發明之另一替代實施例中，提供為連接釋放構件包括一UV 光源，其用於分離互連層。此實施例亦能與機械分離構件之實施例及/或流體構件之實施例相結合。
就此而言，該連接釋放構件係製成為尤其專門自產品基板之一側邊緣作用，可省去自頂部及/或底部(尤其是位於側邊緣內的產品基板之內部區域)作用於產品基板及/或載體。
存在可用於旋轉載體基板、產品基板及/或含有薄膜之薄膜框架之一旋轉構件使得可省去在該產品基板之整個周邊上配置該連接釋放構件且該產品基板之周邊上之部分作用為充分。
就此而言，拆卸區段位於該產品基板之外輪廓之外部及/或毗鄰接合區段，藉薄膜之變形可使拆卸力能最佳地傳遞給產品基板。
有利地，將互連層暴露至流體構件，為固持該流體構件，存在固定(尤其是密封)至載體基板或載體基板固持件之一溶劑儲液器，該儲液器之頂邊緣延伸為至少遠到該產品基板所形成之平面。至少部份地包圍該產品基板之側邊緣或周邊的該溶劑儲液器容許對該互連層的尤其有效的作用。此外，包圍措施防止流體構件自該溶劑儲液器中脫離或防止UV光強度損失。當使用機械分離構件時，可防止可能之污染物自該溶劑儲液器中脫離出來及防止污染該產品基板。在一有利組態中，該溶劑儲液器之橫截面可製成為L型或U型。
在本發明之另一有利組態中，提供為溶劑儲液器僅延伸於產品基板之側邊緣之一周邊部或周邊上方。有利地，該溶劑儲液器僅在產品基板中心方向上稍微延伸於載體基板之側邊緣或周邊上，使得一力Fs被施加於該載體基板上。該力Fs亦可經由該溶劑儲液器傳遞給該載體基板。
根據本發明之一有利實施例，其提供為因作用於載體基板上之一力Fs及作用於薄膜框架上且針對該力Fs之一力Ff而引起拆卸。該裝置可製成為將該力Ff作為一局部力來傳遞，在該薄膜框架上的至少一 點處尤其是呈點式。有利地，該力Ff被傳遞為分佈於該薄膜框架之周邊之若干個點之間，藉此可傳遞不同之力且可由於該裝置而造成該薄膜框架相對於該載體基板或該載體基板固持件傾斜。
根據拆卸所需之形式，產品基板之周邊上之一均勻力分佈由於薄膜因拆卸區段中之力Fs與力Fs而產生之變形(尤其是拉伸)能力來實現。
根據本發明之另一有利實施例，提供為力Fs與力Ff可造成薄膜框架相對於載體基板之移位，藉以用這種方法在該薄膜框架中形成一槽，其具有尤其是由一流體(其可被固持於該槽中)形成的音波產生構件，及浸入於該流體中用於將音波傳輸至產品基板及/或溶劑的一聲音傳輸器。該產品基板之拆卸因超音波或巨音波而產生的空穴現象而大大加速，使得拆卸更周密且同時更快速地發生。
有利地，此外還提供為產品基板之拆卸自該產品基板之周邊至該產品基板之中心共中心地發生。
在拆卸過程期間如果產品基板被製成為黏附至薄膜，則尤其有利，這是因為用這種方法可確保覆蓋層固持及受到保護。
1‧‧‧薄膜框架
1i‧‧‧內周邊
2‧‧‧載體基板
3‧‧‧薄膜
3a‧‧‧拆卸區段
3b‧‧‧附接區段
3k‧‧‧接合表面區段
3s‧‧‧黏著層
4‧‧‧產品基板
4u‧‧‧周邊
4z‧‧‧中心
6‧‧‧互連層
7‧‧‧載體基板固持件
8‧‧‧真空路徑
9‧‧‧槽
10‧‧‧聲音傳輸器
11‧‧‧流體
20‧‧‧溶劑儲液器
21‧‧‧外周邊壁
22‧‧‧溶劑
A‧‧‧距離
D‧‧‧厚度
E‧‧‧平面
圖1a顯示由產品基板、載體基板及一薄膜框架上的互連層所組成的一基板組合之示意性俯視圖；圖1b以詳圖顯示關於圖1之示意性側視圖；圖2以詳圖顯示在將產品基板自載體基板上拆卸期間的根據本發明之裝置之示意性圖形表示；圖3以詳圖顯示顯示在將產品基板自載體基板上拆卸期間的根據本發明之裝置之示意性圖形表示；及圖4顯示本發明之一實施例之一示意性圖形表示。
將從下文較佳實施例之描述並基於圖式對本發明之其他優點、特徵及細節獲更深一層之瞭解。
在圖式中，相同組件及具有相同功能之組件以相同元件符號標明。
如圖1a顯示一薄膜框架1，其在此實施例中至少在一內周邊1i是圓形的，且在其底部安裝(尤其是膠黏)有一薄膜3。在該薄膜框架1內部，一產品基板載體基板組合體相對於該薄膜框架1共中心地膠黏在該薄膜3之一黏著層3s上，且相對於該薄膜框架1之該內周邊1i有一徑向距離(如圖1b所示)。
該產品基板載體基板組合體由黏著至該薄膜3之一產品基板4、一載體基板2及一互連層6組成，該互連層6與該產品基板4及該載體基板2連接。該產品基板4及該載體基板2之直徑本質上是相同的，而該產品基板4之厚度小於該載體基板2之厚度。
該薄膜3由一附接區段3b組成，在此情況中該附接區段3b呈一個圓環狀且其中該薄膜3被固定至該薄膜框架1。此外，該薄膜3由一接合表面區段3k組成，其中該產品基板4可被固定在該薄膜3之該黏著層3s上。在該附接區段3b與該接合表面區段3k之間存在一拆卸區段3a，其相對於該附接區段3b及該接合表面區段3k尤其呈共中心定位，且根據本發明，該拆卸區段3a有一至關重要的功能。因此該拆卸區段3a自該產品基板4之一周邊4u延伸至該薄膜框架之該內周邊1i，此處標記為距離A。該薄膜框架1之厚度D與該距離A之比率有利的是從至少1：2至1：50，尤其是1：5至1：25，且較佳為1：19至1：10。
在圖1b中顯示的初始位置，與該薄膜3接觸之該產品基板4之側邊及與該薄膜3接觸之該薄膜框架1之側邊經配置齊平在同一個平面E上。圖1a及圖1b中所示的部分經組裝於一已知薄膜框架安裝架上。
圖2及圖3示意性顯示兩次變動中的拆卸過程，即該產品基板2自 該載體基板4之拆卸開始後不久。
藉傳遞相反力Ff或Ff1及Ff2及Fs，該產品基板-載體基板組合體與黏著至該組合體之該薄膜3之該接合表面區段3k以一載體基板固持件7之方向自該薄膜框架1移出。從一運動學翻轉角度，該薄膜框架1亦可經由圖中未顯示的一薄膜框架固持件(例如一機械臂)藉該力Ff移出。
經由已被機械加工在該載體基板固持件7之表面中的一真空路徑8及經由連接至該載體基板固持件7與該載體基板2之一真空構件(圖中未顯示)，該力自該載體基板固持件7轉移至該載體基板2。該載體基板固持件7可安全地錨定至該裝置。
或者，可將該載體基板2機械地固持，例如藉由夾箍或靜電。
如圖2中所示，作用在該薄膜框架1上之該力Ff可均勻作用而作為一表面力分佈於該薄膜框架1上使得將該產品基板4自該載體基板2上拆卸之過程經由該拆卸區段3a之變形而自邊緣開始，如圖2詳細圖形表示中放大部份所顯示。此處該力Ff1與該力Ff2相同。該力可被傳遞呈點式分佈於該薄膜框架1之該周邊上或可由一薄膜框架固持件引入分佈。
在圖3所示之實施例中，該薄膜框架1之周邊上之力分佈是不同的，特別是該力Ff1大於在相對側上的該力Ff2使得該產品基板4首先在傳遞較大力Ff1之側被拆卸。因此，用於將該力傳遞給該薄膜框架1之固持構件必須製成為容許該薄膜框架1之傾斜。
由於該產品基板4以與該薄膜3相似之一彈性方式表現，故該產品基板4促進拆卸，且因此該產品基板4自該產品基板載體基板組合體逐步地自其邊緣分離。
根據圖4，溶劑儲液器20被配置於該載體基板2上使得該產品基板載體基板組合體之浸入在該產品基板載體基板組合體受到一力之位 置處。在此情況下該溶劑儲液器20呈環形地附接至該載體基板2之該周邊，特別是形成為一密封件，使得該力與之前一樣在該溶劑儲液器20內被傳遞至該載體基板2。該力亦可被交替傳遞至該溶劑儲液器20，例如當該溶劑儲液器20非正地附接至該載體基板2時。該溶劑儲液器20之一外周邊壁21延伸至少遠到由該產品基板4所形成之一平面，使得在該溶劑儲液器20中之溶劑22達到至少遠到該互連層6，且該互連層6可被該溶劑22溶解。有利地，該外周邊壁21延伸超過由該產品基板4所形成之該平面，幾乎遠到該薄膜框架1處，使得即使在旋轉期間，會儘可能避免該溶劑22自該溶劑儲液器20中脫離出來。
藉由自該產品基板4之該周邊4u開始溶解該互連層6及該產品基板4因施加至該周邊4u使該薄膜3變形之張力而被小心地提升，故此措施支持將該產品基板4自該載體基板2拆卸，尤其是剝離。
該薄膜3之變形造成一槽9。一流體11進入該槽9中之傳遞被製成為用於使音波(超音波、巨音波)經由該薄膜3傳輸進入位於該薄膜3相對處之溶劑22中及經由一音波產生構件(此處為一聲音傳輸器10)進入該產品基板載體基板組合體。該溶劑22經由音波之傳遞以一加速方式自該邊緣作用於該互連層6上使得在該薄膜框架1方向上的該薄膜3之回復力可被減小及/或支持拆卸，尤其是根據圖2之徑向對稱拆卸。
音波之傳遞造成該溶劑22之分子振動，從而導致空穴現象；這亦導致該互連層6之溶解的明顯速度。
有利地，該溶劑22可與該互連層6選擇性地配合，且該黏著層3s不會受到溶劑22侵襲。
1‧‧‧薄膜框架
1i‧‧‧周邊內部
2‧‧‧載體基板
3‧‧‧薄膜
3a‧‧‧拆卸區段
3b‧‧‧附接區段
3k‧‧‧接合表面區段
3s‧‧‧黏著層
4‧‧‧產品基板
4u‧‧‧周邊
4z‧‧‧中心
6‧‧‧互連層
A‧‧‧距離
D‧‧‧厚度
E‧‧‧平面

Claims (9)

  1. 一種用於至少部分地分離由一互連層(6)造成的一載體基板(2)與一產品基板(4)之間的一連接之方法，其特徵在於連接釋放構件包括用於分離該互連層(6)之流體構件，即為可選擇性地溶解該互連層之一溶劑(22)，其中該分離係因由音波產生構件所產生之音波而加速。
  2. 如請求項1之方法，其特徵在於該音波係被傳輸至該溶劑(22)。
  3. 如請求項1或2之方法，其特徵在於該溶劑係專門作用於周邊(4a)之區域。
  4. 如請求項1或2之方法，其特徵在於有一用於該載體基板與該產品基板之旋轉的旋轉構件，其中該載體基板與該產品基板之周邊在同一時間僅部分地被該溶劑所作用且經由轉動則該整體周邊係被作用。
  5. 如請求項1或2之方法，其特徵在於該互連層係為一黏著劑，且可選擇性地施加於該載體基板與該產品基板之一邊緣區域。
  6. 一種用於至少部分地分離由一互連層(6)造成的一載體基板(2)與一產品基板(4)之間的一連接之裝置，其特徵在於該裝置包括：a)流體構件，即離體釋放構件，包括一用於至少部分的分離之溶劑，其可選擇性地溶解該互連層，及b)用於藉由音波加速分離之音波產生構件。
  7. 如請求項6之裝置，其特徵在於該溶劑係專門作用於周邊(4a)之區域。
  8. 如請求項6或7之裝置，其特徵在於該音波係被傳輸至該溶劑。
  9. 如請求項6或7之裝置，其特徵在於有一用於該載體基板與該產品基板之旋轉的旋轉構件，其中該載體基板與該產品基板之周 邊在同一時間僅部分地被該溶劑所作用且經由轉動則該整體周邊係被作用。
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