KR20160086335A - 나노-갭 전극 쌍 및 이를 제조하는 방법 - Google Patents

나노-갭 전극 쌍 및 이를 제조하는 방법 Download PDF

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KR20160086335A
KR20160086335A KR1020167012889A KR20167012889A KR20160086335A KR 20160086335 A KR20160086335 A KR 20160086335A KR 1020167012889 A KR1020167012889 A KR 1020167012889A KR 20167012889 A KR20167012889 A KR 20167012889A KR 20160086335 A KR20160086335 A KR 20160086335A
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gap
electrode
nano
forming
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슈지 이케다
마크 올드햄
에릭 에스. 노르만
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퀀텀 바이오시스템즈 가부시키가이샤
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    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
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    • B01L3/502715—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces
    • C—CHEMISTRY; METALLURGY
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    • C12Q1/00—Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions
    • C12Q1/68—Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions involving nucleic acids
    • C12Q1/6869—Methods for sequencing
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523—Pulsed gas flow or change of composition over time
    • C23C16/45525—Atomic layer deposition [ALD]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28—Electrolytic cell components
    • G01N27/30—Electrodes, e.g. test electrodes; Half-cells
    • G01N27/327—Biochemical electrodes, e.g. electrical or mechanical details for in vitro measurements
    • G01N27/3275—Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction
    • G01N27/3278—Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction involving nanosized elements, e.g. nanogaps or nanoparticles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416—Systems
    • G01N27/447—Systems using electrophoresis
    • G01N27/44756—Apparatus specially adapted therefor
    • G01N27/44791—Microapparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/06—Fluid handling related problems
    • B01L2200/0647—Handling flowable solids, e.g. microscopic beads, cells, particles
    • C—CHEMISTRY; METALLURGY
    • C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12Q—MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS; COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
    • C12Q2565/00—Nucleic acid analysis characterised by mode or means of detection
    • C12Q2565/60—Detection means characterised by use of a special device
    • C12Q2565/607—Detection means characterised by use of a special device being a sensor, e.g. electrode

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  • Molecular Biology (AREA)
  • Biomedical Technology (AREA)
  • General Health & Medical Sciences (AREA)
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  • Organic Chemistry (AREA)
  • Biophysics (AREA)
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  • Electrochemistry (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Urology & Nephrology (AREA)
  • Proteomics, Peptides & Aminoacids (AREA)
  • Dispersion Chemistry (AREA)
  • Zoology (AREA)
  • Wood Science & Technology (AREA)
  • Mechanical Engineering (AREA)
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  • General Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
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  • Microbiology (AREA)
  • Clinical Laboratory Science (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • General Engineering & Computer Science (AREA)
  • Genetics & Genomics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Measuring Or Testing Involving Enzymes Or Micro-Organisms (AREA)
KR1020167012889A 2013-10-16 2014-10-15 나노-갭 전극 쌍 및 이를 제조하는 방법 Withdrawn KR20160086335A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2013-215828 2013-10-16
JP2013215828A JP2015077652A (ja) 2013-10-16 2013-10-16 ナノギャップ電極およびその製造方法
PCT/US2014/060742 WO2015057870A1 (en) 2013-10-16 2014-10-15 Nano-gap electrode pair and method of manufacturing same

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KR20160086335A true KR20160086335A (ko) 2016-07-19

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US (2) US10261066B2 (enExample)
EP (1) EP3058357A4 (enExample)
JP (3) JP2015077652A (enExample)
KR (1) KR20160086335A (enExample)
CN (1) CN106133511A (enExample)
TW (1) TWI674405B (enExample)
WO (1) WO2015057870A1 (enExample)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9194838B2 (en) 2010-03-03 2015-11-24 Osaka University Method and device for identifying nucleotide, and method and device for determining nucleotide sequence of polynucleotide
US9535033B2 (en) 2012-08-17 2017-01-03 Quantum Biosystems Inc. Sample analysis method
EP3578987A1 (en) 2013-09-18 2019-12-11 Quantum Biosystems Inc. Biomolecule sequencing devices, systems and methods
JP2015077652A (ja) 2013-10-16 2015-04-23 クオンタムバイオシステムズ株式会社 ナノギャップ電極およびその製造方法
US10438811B1 (en) 2014-04-15 2019-10-08 Quantum Biosystems Inc. Methods for forming nano-gap electrodes for use in nanosensors
CN106471359A (zh) * 2014-04-28 2017-03-01 量子生物有限公司 纳米间隙电极装置和系统及其形成方法
US20160177383A1 (en) * 2014-12-16 2016-06-23 Arizona Board Of Regents On Behalf Of Arizona State University Nanochannel with integrated tunnel gap
JP6778218B2 (ja) * 2015-06-30 2020-10-28 エフ．ホフマン−ラ ロシュ アーゲーＦ． Ｈｏｆｆｍａｎｎ−Ｌａ Ｒｏｃｈｅ Ａｋｔｉｅｎｇｅｓｅｌｌｓｃｈａｆｔ ナノ製造デバイスを使用して分析物を測定するための設計および方法
KR20180072717A (ko) * 2015-10-08 2018-06-29 퀀텀 바이오시스템즈 가부시키가이샤 핵산 시퀀싱을 위한 장치, 시스템 및 방법
CN105742496A (zh) * 2016-03-31 2016-07-06 南开大学 利用双材料微悬臂实现连续变化纳米间隙的芯片及制备方法
ES2877193T3 (es) 2016-04-27 2021-11-16 Quantum Biosystems Inc Sistemas y métodos para la medición y secuenciación de biomoléculas
US10641726B2 (en) 2017-02-01 2020-05-05 Seagate Technology Llc Fabrication of a nanochannel for DNA sequencing using electrical plating to achieve tunneling electrode gap
US10889857B2 (en) 2017-02-01 2021-01-12 Seagate Technology Llc Method to fabricate a nanochannel for DNA sequencing based on narrow trench patterning process
US10731210B2 (en) 2017-02-01 2020-08-04 Seagate Technology Llc Fabrication of nanochannel with integrated electrodes for DNA sequencing using tunneling current
US10640827B2 (en) 2017-02-01 2020-05-05 Seagate Technology Llc Fabrication of wedge shaped electrode for enhanced DNA sequencing using tunneling current
US10761058B2 (en) 2017-02-01 2020-09-01 Seagate Technology Llc Nanostructures to control DNA strand orientation and position location for transverse DNA sequencing
US10752947B2 (en) 2017-03-09 2020-08-25 Seagate Technology Llc Method to amplify transverse tunneling current discrimination of DNA nucleotides via nucleotide site specific attachment of dye-peptide
US20180259475A1 (en) 2017-03-09 2018-09-13 Seagate Technology Llc Vertical nanopore coupled with a pair of transverse electrodes having a uniform ultrasmall nanogap for dna sequencing
US11784227B2 (en) * 2017-10-13 2023-10-10 Wayne State University Method for fabricating wafer scale/nano sub micron gap electrodes and arrays via photolithography
US11740226B2 (en) 2017-10-13 2023-08-29 Analog Devices International Unlimited Company Designs and fabrication of nanogap sensors
US11143618B2 (en) * 2018-04-09 2021-10-12 Roche Sequencing Solutions, Inc. Fabrication of tunneling junctions with nanopores for molecular recognition
JP7372683B2 (ja) * 2018-11-06 2023-11-01 国立大学法人大阪大学 電極基板および電極基板の製造方法
CN110420673B (zh) * 2019-08-14 2022-06-03 京东方科技集团股份有限公司 一种微流控器件及其驱动方法、微流控系统
WO2021081424A1 (en) * 2019-10-25 2021-04-29 University Of Utah Research Foundation Micro-balance biosensors to detect whole viruses
CN110993487A (zh) * 2019-11-22 2020-04-10 国家纳米科学中心 一种亚10纳米间隙结构的制备方法及其应用
KR102629165B1 (ko) * 2021-09-29 2024-01-29 한국기술교육대학교 산학협력단 이온전도도 측정기 및 이를 이용한 이온전도도 측정방법

Family Cites Families (192)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62194673A (ja) 1986-02-20 1987-08-27 Fujitsu Ltd 半導体装置の製造方法
JPS6437640A (en) 1987-08-03 1989-02-08 Mitsubishi Electric Corp Control system for cache memory
US5151164A (en) 1990-02-09 1992-09-29 The University Of Maryland Enhanced capillary zone electrophoresis and apparatus for performance thereof
US5122248A (en) 1990-05-18 1992-06-16 Northeastern University Pulsed field capillary electrophoresis
US5092972A (en) 1990-07-12 1992-03-03 Board Of Supervisors Of Louisiana State University And Agricultural And Mechanical College Field-effect electroosmosis
JPH04302151A (ja) 1991-03-29 1992-10-26 Toshiba Corp 電荷結合装置の製造方法
US5262031A (en) 1991-06-21 1993-11-16 Hewlett-Packard Company Electroosmotic flow control apparatus for capillary electrophoresis
JPH05281276A (ja) 1991-07-31 1993-10-29 Toshiba Corp 液中静電力検出装置
JP3560990B2 (ja) 1993-06-30 2004-09-02 株式会社東芝 固体撮像装置
US5585069A (en) 1994-11-10 1996-12-17 David Sarnoff Research Center, Inc. Partitioned microelectronic and fluidic device array for clinical diagnostics and chemical synthesis
US5885470A (en) 1997-04-14 1999-03-23 Caliper Technologies Corporation Controlled fluid transport in microfabricated polymeric substrates
US5906723A (en) 1996-08-26 1999-05-25 The Regents Of The University Of California Electrochemical detector integrated on microfabricated capillary electrophoresis chips
AU746549B2 (en) 1996-11-20 2002-05-02 Becton Dickinson & Company Microfabricated isothermal nucleic acid amplification devices and methods
JPH10283230A (ja) 1997-03-31 1998-10-23 Nec Corp ファイルデータ格納装置およびプログラムを記録した機械読み取り可能な記録媒体
WO1998049549A1 (en) 1997-04-30 1998-11-05 Orion Research, Inc. Capillary electrophoretic separation system
US6613513B1 (en) 1999-02-23 2003-09-02 Caliper Technologies Corp. Sequencing by incorporation
US6521428B1 (en) 1999-04-21 2003-02-18 Genome Technologies, Llc Shot-gun sequencing and amplification without cloning
US6635163B1 (en) 1999-06-01 2003-10-21 Cornell Research Foundation, Inc. Entropic trapping and sieving of molecules
US6762059B2 (en) 1999-08-13 2004-07-13 U.S. Genomics, Inc. Methods and apparatuses for characterization of single polymers
IL148088A0 (en) 1999-08-13 2002-09-12 Us Genomics Inc Methods and apparatuses for stretching polymers
WO2001063273A2 (en) 2000-02-22 2001-08-30 California Institute Of Technology Development of a gel-free molecular sieve based on self-assembled nano-arrays
US6491805B1 (en) 2000-05-23 2002-12-10 Agilent Technologies, Inc. Sample-analysis system with antisynchronously driven contactless conductivity detector
US8232582B2 (en) 2000-04-24 2012-07-31 Life Technologies Corporation Ultra-fast nucleic acid sequencing device and a method for making and using the same
AU2001259128A1 (en) 2000-04-24 2001-11-07 Eagle Research And Development, Llc An ultra-fast nucleic acid sequencing device and a method for making and using the same
US6413792B1 (en) 2000-04-24 2002-07-02 Eagle Research Development, Llc Ultra-fast nucleic acid sequencing device and a method for making and using the same
US6447663B1 (en) 2000-08-01 2002-09-10 Ut-Battelle, Llc Programmable nanometer-scale electrolytic metal deposition and depletion
US6755956B2 (en) 2000-10-24 2004-06-29 Ut-Battelle, Llc Catalyst-induced growth of carbon nanotubes on tips of cantilevers and nanowires
WO2002080262A1 (en) * 2001-03-30 2002-10-10 The Penn State Research Foundation Lateral nanostructures by vertical processing
AU2002363627A1 (en) 2001-06-11 2003-05-26 Genorx, Inc. Electronic detection of biological molecules using thin layers
US20030104428A1 (en) 2001-06-21 2003-06-05 President And Fellows Of Harvard College Method for characterization of nucleic acid molecules
US6890409B2 (en) 2001-08-24 2005-05-10 Applera Corporation Bubble-free and pressure-generating electrodes for electrophoretic and electroosmotic devices
JP2003090815A (ja) 2001-09-18 2003-03-28 Japan Science & Technology Corp 遺伝子の電気化学的検出方法と核酸チップ
KR100438828B1 (ko) 2001-11-08 2004-07-05 삼성전자주식회사 칩 상의 전기적 미세 검출기
US6905586B2 (en) * 2002-01-28 2005-06-14 Ut-Battelle, Llc DNA and RNA sequencing by nanoscale reading through programmable electrophoresis and nanoelectrode-gated tunneling and dielectric detection
JP4799861B2 (ja) 2002-04-16 2011-10-26 プリンストン ユニバーシティ マイクロ流体とナノ流体間のインターフェース用勾配構造と、その製造方法および使用方法
US7744816B2 (en) 2002-05-01 2010-06-29 Intel Corporation Methods and device for biomolecule characterization
JP2003332555A (ja) 2002-05-09 2003-11-21 Fuji Film Microdevices Co Ltd 固体撮像素子およびその製造方法
JP4075765B2 (ja) 2002-10-30 2008-04-16 日本電気株式会社 分離装置およびその製造方法、ならびに分析システム
US7033476B2 (en) * 2002-12-31 2006-04-25 Ut-Battelle, Llc Separation and counting of single molecules through nanofluidics, programmable electrophoresis, and nanoelectrode-gated tunneling and dielectric detection
US7410564B2 (en) 2003-01-27 2008-08-12 Agilent Technologies, Inc. Apparatus and method for biopolymer identification during translocation through a nanopore
JP3787630B2 (ja) 2003-02-14 2006-06-21 独立行政法人情報通信研究機構 ナノギャップ電極の製造方法
US20070042366A1 (en) 2003-02-28 2007-02-22 Brown University Nanopores, methods for using same, methods for making same and methods for characterizing biomolecules using same
WO2005008450A2 (en) 2003-03-28 2005-01-27 The Regents Of The University Of California Method and apparatus for nanogap device and array
JP4259902B2 (ja) 2003-04-01 2009-04-30 日立オムロンターミナルソリューションズ株式会社 情報読み取り装置、情報読み取り装置用プログラム
DE10331126B4 (de) * 2003-07-09 2005-09-01 Krohne Ag Coriolis-Massendurchflußmeßgerät und Verfahren zum Betreiben eines Coriolis-Massendurchflußmeßgeräts
US20120254715A1 (en) 2003-07-10 2012-10-04 David Charles Schwartz Visualizer and editor for single molecule analysis
JP4289938B2 (ja) 2003-07-11 2009-07-01 富士通テン株式会社 盗難防止装置、及び盗難防止方法
US20050048513A1 (en) 2003-08-28 2005-03-03 Alex Harwit Rapid hybridization based on cyclical electric fields
KR100549227B1 (ko) * 2003-09-06 2006-02-03 한국전자통신연구원 유기분자 소자의 제작 방법
US7390622B2 (en) 2003-10-16 2008-06-24 Hai Kang Life Corporation Limited Apparatus and methods for detecting nucleic acid in biological samples
KR100565174B1 (ko) * 2003-11-20 2006-03-30 한국전자통신연구원 나노갭 전극소자의 제작 방법
US7279337B2 (en) 2004-03-10 2007-10-09 Agilent Technologies, Inc. Method and apparatus for sequencing polymers through tunneling conductance variation detection
US20050202446A1 (en) 2004-03-11 2005-09-15 Yang Dan-Hui D. Methods for biopolymer sequencing using metal inclusions
CN100470585C (zh) 2004-03-31 2009-03-18 松下电器产业株式会社 存储卡和存储卡系统
US20050227239A1 (en) 2004-04-08 2005-10-13 Joyce Timothy H Microarray based affinity purification and analysis device coupled with solid state nanopore electrodes
US8105471B1 (en) 2004-07-19 2012-01-31 Han Sang M Nanofluidics for bioseparation and analysis
US20060057585A1 (en) 2004-09-10 2006-03-16 Mcallister William H Nanostepper/sensor systems and methods of use thereof
US8563237B2 (en) 2004-09-30 2013-10-22 Agilent Technologies, Inc. Biopolymer resonant tunneling with a gate voltage source
WO2006052242A1 (en) 2004-11-08 2006-05-18 Seirad, Inc. Methods and systems for compressing and comparing genomic data
US7892414B1 (en) 2004-11-19 2011-02-22 The United States Of America As Represented By The Secretary Of Army Electrochemical biosensors, applications and methods of making biosensors
TWI273237B (en) 2004-12-13 2007-02-11 Nat Applied Res Laboratories Coulomb blockade device operated under room temperature
US8124417B2 (en) 2004-12-28 2012-02-28 Japan Science And Technology Agency Method for analyzing nucleobases on a single molecular basis
KR100679704B1 (ko) 2005-01-10 2007-02-06 한국과학기술원 분자소자와 바이오 센서를 위한 나노갭 또는 나노 전계효과 트랜지스터 제작방법
US20060210995A1 (en) 2005-03-15 2006-09-21 Joyce Timothy H Nanopore analysis systems and methods of using nanopore devices
AU2006336262B2 (en) 2005-04-06 2011-10-13 President And Fellows Of Harvard College Molecular characterization with carbon nanotube control
JP4804028B2 (ja) 2005-04-25 2011-10-26 東京応化工業株式会社 ナノ構造体の製造方法
TWI287041B (en) 2005-04-27 2007-09-21 Jung-Tang Huang An ultra-rapid DNA sequencing method with nano-transistors array based devices
US20060275911A1 (en) 2005-06-03 2006-12-07 Shih-Yuan Wang Method and apparatus for moleclular analysis using nanostructure-enhanced Raman spectroscopy
US7326328B2 (en) 2005-07-19 2008-02-05 General Electric Company Gated nanorod field emitter structures and associated methods of fabrication
WO2007013370A1 (ja) 2005-07-25 2007-02-01 Shimadzu Corporation 核酸の塩基配列を決定する方法及び装置
KR100849384B1 (ko) 2005-10-21 2008-07-31 한국생명공학연구원 나노갭 및 나노갭 센서의 제조방법
JP5249040B2 (ja) 2005-11-18 2013-07-31 レプリソールス グループ エスアーエス 電極およびその形成方法
US8055979B2 (en) 2006-01-20 2011-11-08 Marvell World Trade Ltd. Flash memory with coding and signal processing
JP5808515B2 (ja) 2006-02-16 2015-11-10 ４５４ ライフ サイエンシーズ コーポレイション 核酸配列データのプライマー伸長誤差を補正するためのシステムおよび方法
JP4869985B2 (ja) 2006-03-06 2012-02-08 株式会社Ｊｖｃケンウッド 液晶表示装置及びその製造方法
CN100535649C (zh) * 2006-03-30 2009-09-02 中国科学院电子学研究所 三维纳隙网格阵列微电极生物传感芯片
US20080202931A1 (en) 2006-06-15 2008-08-28 Dimiter Nikolov Petsev Ion Specific Control of the Transport of Fluid and Current in Fluidic Nanochannels
CN103203256B (zh) 2006-07-19 2015-09-23 博纳基因技术有限公司 纳米口装置阵列:它们的制备以及在大分子分析中的应用
JP4765813B2 (ja) 2006-07-28 2011-09-07 三菱瓦斯化学株式会社 二重鎖ｄｎａ量の電気化学的測定方法
JP2010500559A (ja) 2006-08-11 2010-01-07 エージェンシー フォー サイエンス，テクノロジー アンド リサーチ ナノワイヤセンサ、ナノワイヤセンサアレイ、及び当該センサ及びセンサアレイを形成する方法
US7638034B2 (en) 2006-09-21 2009-12-29 Los Alamos National Security, Llc Electrochemical detection of single molecules using abiotic nanopores having electrically tunable dimensions
JP2008146538A (ja) 2006-12-13 2008-06-26 Intec Web & Genome Informatics Corp マイクロｒｎａ検出装置、方法およびプログラム
GB0625070D0 (en) 2006-12-15 2007-01-24 Imp Innovations Ltd Characterization of molecules
JP2008186975A (ja) 2007-01-30 2008-08-14 Renesas Technology Corp 半導体装置の製造方法
US8003319B2 (en) 2007-02-02 2011-08-23 International Business Machines Corporation Systems and methods for controlling position of charged polymer inside nanopore
WO2008124706A2 (en) 2007-04-06 2008-10-16 Arizona Board Of Regents Acting For And On Behalf Of Arizona State University Devices and methods for target molecule characterization
US9034637B2 (en) * 2007-04-25 2015-05-19 Nxp, B.V. Apparatus and method for molecule detection using nanopores
EP2014761B1 (en) 2007-06-22 2016-09-28 Sony Deutschland GmbH A device for processing an analyte and a method of processing and/or detecting an analyte using said device
AT505495A1 (de) 2007-07-04 2009-01-15 Arc Austrian Res Centers Gmbh Verfahren zur identifizierung und quantifizierung von organischen und biochemischen substanzen
CA2700859A1 (en) 2007-10-02 2009-04-09 President And Fellows Of Harvard College Capture, recapture, and trapping of molecules with a nanopore
AU2008310993A1 (en) 2007-10-09 2009-04-16 University Of Notre Dame Du Lac Microfluidic platforms for multi-target detection
WO2009097174A2 (en) * 2008-01-07 2009-08-06 Stc.Unm Electrochemical biosensor
GB0801142D0 (en) 2008-01-22 2008-02-27 Imp Innovations Ltd Label-free molecule detection and measurement
US8304273B2 (en) * 2008-01-24 2012-11-06 Massachusetts Institute Of Technology Insulated nanogap devices and methods of use thereof
JP5142763B2 (ja) 2008-02-29 2013-02-13 日本電信電話株式会社 分子分析方法および分子分析素子
WO2009120642A1 (en) 2008-03-26 2009-10-01 Massachusetts Institute Of Technology Methods for fabricating electrokinetic concentration devices
US20090246788A1 (en) 2008-04-01 2009-10-01 Roche Nimblegen, Inc. Methods and Assays for Capture of Nucleic Acids
JP2011517854A (ja) * 2008-04-02 2011-06-16 イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー フッ素化カーボンナノチューブを利用した電子デバイス
JP5360528B2 (ja) 2008-05-07 2013-12-04 国立大学法人北陸先端科学技術大学院大学 ギャップで分断された薄膜の製造方法、およびこれを用いたデバイスの製造方法
US8604670B2 (en) 2008-05-30 2013-12-10 The Trustees Of The University Of Pennsylvania Piezoelectric ALN RF MEM switches monolithically integrated with ALN contour-mode resonators
CA3060930C (en) 2008-06-06 2022-03-22 Bionanomatrix, Inc. Integrated analysis devices and related fabrication methods and analysis techniques
EP2318547B1 (en) 2008-06-30 2018-05-30 BioNano Genomics, Inc. Methods for single-molecule whole genome analysis
TWI383144B (zh) 2008-09-23 2013-01-21 Univ Nat Chiao Tung 感測元件、製造方法及其生物檢測系統
WO2010075570A2 (en) 2008-12-24 2010-07-01 New York University Methods, computer-accessible medium, and systems for score-driven whole-genome shotgun sequence assemble
JP2010227735A (ja) 2009-03-25 2010-10-14 Tohoku Univ マイクロ流路デバイス
EP2411536B1 (en) 2009-03-27 2014-09-17 Nabsys, Inc. Methods for analyzing biomolecules and probes bound thereto
JP5372570B2 (ja) 2009-03-30 2013-12-18 株式会社日立ハイテクノロジーズ ナノポアを用いたバイオポリマー決定方法、システム、及びキット
US8986928B2 (en) 2009-04-10 2015-03-24 Pacific Biosciences Of California, Inc. Nanopore sequencing devices and methods
US9810680B2 (en) 2009-04-16 2017-11-07 Nanonex Corporation Nanogap electronic detector for measuring properties of a biomolecule stretched in a nanochannel, and method thereof
US8926904B2 (en) 2009-05-12 2015-01-06 Daniel Wai-Cheong So Method and apparatus for the analysis and identification of molecules
CN101920932A (zh) 2009-06-10 2010-12-22 中国科学院半导体研究所 制作纳米尺寸间距的电极的方法
TWI424160B (zh) 2009-06-17 2014-01-21 國立交通大學 結合矽奈米線閘極二極體之感測元件、製造方法及其檢測系統
US8110410B2 (en) 2009-06-29 2012-02-07 International Business Machines Corporation Nanofludic field effect transistor based on surface charge modulated nanochannel
US8313633B2 (en) * 2009-07-28 2012-11-20 Polestar Technologies, Inc. Molecular imprinted nanosensors and process for producing same
JP5413892B2 (ja) 2009-08-31 2014-02-12 オリヱント化学工業株式会社 有機・ナノ炭素複合系薄膜太陽電池
US20120184047A1 (en) * 2009-09-30 2012-07-19 Ge Healthcare Bio-Sciences Ab Nanoplasmonic device
JP4932066B2 (ja) 2009-12-02 2012-05-16 独立行政法人科学技術振興機構 流路デバイス及びそれを含むサンプル処理装置
US8969090B2 (en) * 2010-01-04 2015-03-03 Life Technologies Corporation DNA sequencing methods and detectors and systems for carrying out the same
US8438903B2 (en) * 2010-01-27 2013-05-14 International Business Machines Corporation Molecule detection device formed in a semiconductor structure
CA2773101C (en) 2010-02-02 2018-08-21 Arizona Board Of Regents Controlled tunnel gap device for sequencing polymers
JP5336402B2 (ja) 2010-02-10 2013-11-06 有限会社バイオデバイステクノロジー サンプル採取量の補正方法とそれを用いた測定方法
US9194838B2 (en) 2010-03-03 2015-11-24 Osaka University Method and device for identifying nucleotide, and method and device for determining nucleotide sequence of polynucleotide
JP5764296B2 (ja) 2010-03-31 2015-08-19 株式会社日立ハイテクノロジーズ 生体ポリマーの特性解析法
US8940663B2 (en) 2010-04-07 2015-01-27 Board Of Regents, The University Of Texas System Nano-scale biosensors
US8568878B2 (en) 2010-04-08 2013-10-29 The Board Of Trustees Of The Leland Stanford Junior University Directly fabricated nanoparticles for raman scattering
US8652779B2 (en) 2010-04-09 2014-02-18 Pacific Biosciences Of California, Inc. Nanopore sequencing using charge blockade labels
CA2805247C (en) 2010-07-14 2021-08-10 The Curators Of The University Of Missouri Nanopore-facilitated single molecule detection of nucleic acids
JP5594728B2 (ja) * 2010-07-23 2014-09-24 松尾博文 直流スイッチ
US8518227B2 (en) 2010-09-16 2013-08-27 Old Dominion University Research Foundation Nanopore-based nanoparticle translocation devices
JP2012110258A (ja) 2010-11-22 2012-06-14 Nippon Steel Chem Co Ltd 塩基配列の決定方法及び塩基配列の決定方法に用いる測定用デバイス
JP2012118709A (ja) 2010-11-30 2012-06-21 Brother Ind Ltd 配信システム、ストレージ容量決定プログラム、及びストレージ容量決定方法
WO2012083249A2 (en) 2010-12-17 2012-06-21 The Trustees Of Columbia University In The City Of New York Dna sequencing by synthesis using modified nucleotides and nanopore detection
US8986524B2 (en) 2011-01-28 2015-03-24 International Business Machines Corporation DNA sequence using multiple metal layer structure with different organic coatings forming different transient bondings to DNA
US20120193231A1 (en) 2011-01-28 2012-08-02 International Business Machines Corporation Dna sequencing using multiple metal layer structure with organic coatings forming transient bonding to dna bases
PT2684027T (pt) 2011-03-09 2020-01-27 Abionic Sa Rápida quantificação de biomoléculas num biossensor nanofluídico seletivamente funcionalizado e seu método
CN102180440A (zh) * 2011-04-06 2011-09-14 北京大学 一种微纳机电器件中纳米间隙电极的制备方法
EP2710859B1 (en) 2011-05-17 2019-09-04 Canon U.S. Life Sciences, Inc. Systems and methods using external heater systems in microfluidic devices
ITRM20110252A1 (it) 2011-05-23 2012-11-24 Istituto Naz Per La Ricerca S Ul Cancro Metodo di analisi di singola molecola mediante rilevazione delle collisioni di una molecola target su nanopori funzionalizzati.
WO2012164679A1 (ja) 2011-05-31 2012-12-06 株式会社日立製作所 生体分子情報解析装置
US9926552B2 (en) 2011-06-06 2018-03-27 Cornell University Microfluidic device for extracting, isolating, and analyzing DNA from cells
US8546080B2 (en) 2011-06-17 2013-10-01 International Business Machines Corporation Molecular dispensers
EP3385992B1 (en) 2011-07-27 2024-09-04 The Board of Trustees of the University of Illinois Nanopore sensors for biomolecular characterization
US20140220704A1 (en) 2011-08-03 2014-08-07 The Johns Hopkins University Articles comprising templated crosslinked polymer films for electronic detection of nitroaromatic explosives
JP5670278B2 (ja) 2011-08-09 2015-02-18 株式会社日立ハイテクノロジーズ ナノポア式分析装置
EP2573554A1 (en) 2011-09-21 2013-03-27 Nxp B.V. Apparatus and method for bead detection
JP2013090576A (ja) 2011-10-24 2013-05-16 Hitachi Ltd 核酸分析デバイス及びそれを用いた核酸分析装置
WO2013074546A1 (en) 2011-11-14 2013-05-23 The Regents Of The University Of California Two- chamber dual-pore device
JP6082996B2 (ja) 2011-11-22 2017-02-22 パナソニックＩｐマネジメント株式会社 生体分子の１分子検出方法および１分子検出装置、疾病マーカ検査装置
US20130186758A1 (en) 2011-12-09 2013-07-25 University Of Delaware Current-carrying nanowire having a nanopore for high-sensitivity detection and analysis of biomolecules
CN103998931B (zh) * 2011-12-28 2016-06-01 英特尔公司 具有选择性表面固定化部位的纳米间隙换能器
JP2013156167A (ja) 2012-01-30 2013-08-15 Osaka Univ 物質の移動速度の制御方法および制御装置、並びに、これらの利用
WO2013116509A1 (en) 2012-02-01 2013-08-08 Arizona Board Of Regents Acting For And On Behalf Of Arizona State University Systems, apparatuses and methods for reading an amino acid sequence
CN103492865B (zh) 2012-03-29 2018-12-28 量子生物有限公司 确定多核苷酸的碱基序列的方法和确定多核苷酸的碱基序列的装置
EP2836604B1 (en) 2012-04-09 2021-09-15 The Trustees of Columbia University in the City of New York Method of preparation of nanopore and uses thereof
US9310326B2 (en) 2012-06-14 2016-04-12 Samsung Electronics Co., Ltd. Device for determining a monomer molecule sequence of a polymer comprising different electrodes and use thereof
TWI498520B (zh) 2012-06-29 2015-09-01 Ibm 從一安裝表面分離一元件的裝置及方法
US9551682B2 (en) 2012-06-29 2017-01-24 Intel Corporation High throughput biochemical detection using single molecule fingerprinting arrays
KR101882865B1 (ko) 2012-07-03 2018-07-27 삼성전자주식회사 핵산의 염기 서열을 결정하는 방법
US9535033B2 (en) 2012-08-17 2017-01-03 Quantum Biosystems Inc. Sample analysis method
KR20140031559A (ko) 2012-09-04 2014-03-13 전홍석 그래핀을 이용한 핵산 염기서열결정 장치
JP6063693B2 (ja) 2012-10-03 2017-01-18 株式会社日立ハイテクノロジーズ 分析装置及び分析方法
US20140103945A1 (en) 2012-10-05 2014-04-17 Miami University Apparatus and method for demonstrating quantized conductance
CN102914395B (zh) * 2012-11-06 2015-04-08 苏州新锐博纳米科技有限公司 基于金属纳米间隙的纳米应力传感器及其制备方法
US8906215B2 (en) 2012-11-30 2014-12-09 International Business Machines Corporation Field effect based nanosensor for biopolymer manipulation and detection
JP6282036B2 (ja) 2012-12-27 2018-02-21 クオンタムバイオシステムズ株式会社 物質の移動速度の制御方法および制御装置
JP5951527B2 (ja) 2013-03-07 2016-07-13 株式会社東芝 検体検出装置及び検出方法
US9222130B2 (en) 2013-03-15 2015-12-29 Keith Oxenrider Method and apparatus for sequencing molecules
JP6054790B2 (ja) 2013-03-28 2016-12-27 三菱スペース・ソフトウエア株式会社 遺伝子情報記憶装置、遺伝子情報検索装置、遺伝子情報記憶プログラム、遺伝子情報検索プログラム、遺伝子情報記憶方法、遺伝子情報検索方法及び遺伝子情報検索システム
US9012329B2 (en) 2013-04-04 2015-04-21 International Business Machines Corporation Nanogap in-between noble metals
US9188578B2 (en) 2013-06-19 2015-11-17 Globalfoundries Inc. Nanogap device with capped nanowire structures
JP2018027018A (ja) 2013-08-27 2018-02-22 クオンタムバイオシステムズ株式会社 生体分子熱変性装置及びその製造方法
CA2922600A1 (en) 2013-08-27 2015-03-05 Quantum Biosystems Inc. Nano-gap electrode and methods for manufacturing same
JP6334115B2 (ja) 2013-09-18 2018-05-30 クオンタムバイオシステムズ株式会社 生体分子シーケンシング装置、方法、及びプログラム
EP3578987A1 (en) 2013-09-18 2019-12-11 Quantum Biosystems Inc. Biomolecule sequencing devices, systems and methods
JP2015077652A (ja) 2013-10-16 2015-04-23 クオンタムバイオシステムズ株式会社 ナノギャップ電極およびその製造方法
US9551697B2 (en) 2013-10-17 2017-01-24 Genia Technologies, Inc. Non-faradaic, capacitively coupled measurement in a nanopore cell array
US9546398B2 (en) 2013-11-14 2017-01-17 Agilent Technologies, Inc. Polymerase idling method for single molecule DNA sequencing
JP6636455B2 (ja) 2014-01-24 2020-01-29 国立大学法人大阪大学 生体分子配列決定装置、システムおよび方法
JP2015154750A (ja) 2014-02-20 2015-08-27 国立大学法人大阪大学 生体分子シーケンシング装置用電極、生体分子シーケンシング装置、方法、及びプログラム
EP3111353A4 (en) 2014-02-26 2017-11-01 Nantomics, LLC Secured mobile genome browsing devices and methods therefor
CN106471359A (zh) 2014-04-28 2017-03-01 量子生物有限公司 纳米间隙电极装置和系统及其形成方法
US9658184B2 (en) 2014-05-07 2017-05-23 International Business Machines Corporation Increasing the capture zone by nanostructure patterns
WO2015170782A1 (en) 2014-05-08 2015-11-12 Osaka University Devices, systems and methods for linearization of polymers
WO2015170784A1 (en) 2014-05-08 2015-11-12 Osaka University Nanogap electrodes with dissimilar materials
TW201544449A (zh) 2014-05-08 2015-12-01 Univ Osaka 用於可調式奈米間隙電極之裝置及方法
US9362162B2 (en) 2014-08-14 2016-06-07 Globalfoundries Inc. Methods of fabricating BEOL interlayer structures
ES2882583T3 (es) 2015-06-23 2021-12-02 Bgi Shenzhen Electrodo microporoso y método para el análisis de una sustancia química
KR20180072717A (ko) 2015-10-08 2018-06-29 퀀텀 바이오시스템즈 가부시키가이샤 핵산 시퀀싱을 위한 장치, 시스템 및 방법
WO2017179581A1 (en) 2016-04-11 2017-10-19 Quantum Biosystems Inc. Systems and methods for biological data management
ES2877193T3 (es) 2016-04-27 2021-11-16 Quantum Biosystems Inc Sistemas y métodos para la medición y secuenciación de biomoléculas
WO2018025887A1 (en) 2016-08-02 2018-02-08 Quantum Biosystems Inc. Devices and methods for creation and calibration of a nanoelectrode pair
WO2019065904A1 (en) 2017-09-27 2019-04-04 Quantum Biosystems Inc. NANOELECTRODES DEVICES AND METHODS OF MANUFACTURING THE SAME

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