KR101652270B1 - 개방 동작 모드와 폐쇄 동작 모드사이를 용이하게 변경하는 처리실 설계를 이용하여 마이크로일렉트로닉 워크피이스를 처리하는 장치 및 방법 - Google Patents

개방 동작 모드와 폐쇄 동작 모드사이를 용이하게 변경하는 처리실 설계를 이용하여 마이크로일렉트로닉 워크피이스를 처리하는 장치 및 방법 Download PDF

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KR101652270B1
KR101652270B1 KR1020167001702A KR20167001702A KR101652270B1 KR 101652270 B1 KR101652270 B1 KR 101652270B1 KR 1020167001702 A KR1020167001702 A KR 1020167001702A KR 20167001702 A KR20167001702 A KR 20167001702A KR 101652270 B1 KR101652270 B1 KR 101652270B1
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flow
air
fluid
process chamber
gas
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Korean (ko)
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KR20160014774A (ko
Inventor
제프리 엠 라우에르하아아스
지미 디. 코린스
트래시 에이. 가스트
알랜 디. 로즈
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티이엘 에프에스아이, 인코포레이티드
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H01L21/02307—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H01L21/02343—
    • H01L21/67017—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00—Cleaning and liquid contact with solids
    • Y10S134/902—Semiconductor wafer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y10T137/0363—For producing proportionate flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2496—Self-proportioning or correlating systems
    • Y10T137/2559—Self-controlled branched flow systems
    • Y10T137/2574—Bypass or relief controlled by main line fluid condition
    • Y10T137/2579—Flow rate responsive
    • Y10T137/2599—Venturi

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  • Cleaning Or Drying Semiconductors (AREA)
KR1020167001702A 2008-05-09 2009-05-05 개방 동작 모드와 폐쇄 동작 모드사이를 용이하게 변경하는 처리실 설계를 이용하여 마이크로일렉트로닉 워크피이스를 처리하는 장치 및 방법 Expired - Fee Related KR101652270B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12712908P 2008-05-09 2008-05-09
US61/127,129 2008-05-09
PCT/US2009/002768 WO2009137032A2 (en) 2008-05-09 2009-05-05 Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation

Related Parent Applications (1)

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KR1020137017895A Division KR20130083940A (ko) 2008-05-09 2009-05-05 개방 동작 모드와 폐쇄 동작 모드사이를 용이하게 변경하는 처리실 설계를 이용하여 마이크로일렉트로닉 워크피이스를 처리하는 공구 및 방법

Publications (2)

Publication Number Publication Date
KR20160014774A KR20160014774A (ko) 2016-02-11
KR101652270B1 true KR101652270B1 (ko) 2016-08-30

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KR1020167001702A Expired - Fee Related KR101652270B1 (ko) 2008-05-09 2009-05-05 개방 동작 모드와 폐쇄 동작 모드사이를 용이하게 변경하는 처리실 설계를 이용하여 마이크로일렉트로닉 워크피이스를 처리하는 장치 및 방법
KR1020107023349A Ceased KR20110005699A (ko) 2008-05-09 2009-05-05 개방 동작 모드와 폐쇄 동작 모드사이를 용이하게 변경하는 처리실 설계를 이용하여 마이크로일렉트로닉 워크피이스를 처리하는 공구 및 방법
KR1020137017895A Ceased KR20130083940A (ko) 2008-05-09 2009-05-05 개방 동작 모드와 폐쇄 동작 모드사이를 용이하게 변경하는 처리실 설계를 이용하여 마이크로일렉트로닉 워크피이스를 처리하는 공구 및 방법
KR1020167001698A Expired - Fee Related KR101690047B1 (ko) 2008-05-09 2009-05-05 개방 동작 모드와 폐쇄 동작 모드사이를 용이하게 변경하는 처리실 설계를 이용하여 마이크로일렉트로닉 워크피이스를 처리하는 장치 및 방법

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KR1020107023349A Ceased KR20110005699A (ko) 2008-05-09 2009-05-05 개방 동작 모드와 폐쇄 동작 모드사이를 용이하게 변경하는 처리실 설계를 이용하여 마이크로일렉트로닉 워크피이스를 처리하는 공구 및 방법
KR1020137017895A Ceased KR20130083940A (ko) 2008-05-09 2009-05-05 개방 동작 모드와 폐쇄 동작 모드사이를 용이하게 변경하는 처리실 설계를 이용하여 마이크로일렉트로닉 워크피이스를 처리하는 공구 및 방법
KR1020167001698A Expired - Fee Related KR101690047B1 (ko) 2008-05-09 2009-05-05 개방 동작 모드와 폐쇄 동작 모드사이를 용이하게 변경하는 처리실 설계를 이용하여 마이크로일렉트로닉 워크피이스를 처리하는 장치 및 방법

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Country Link
US (3) US8235062B2 (https=)
JP (2) JP5705723B2 (https=)
KR (4) KR101652270B1 (https=)
CN (2) CN102683249B (https=)
TW (2) TWI511799B (https=)
WO (1) WO2009137032A2 (https=)

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