KR100961571B1 - 주사 탐침 현미경 - Google Patents

주사 탐침 현미경 Download PDF

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Publication number
KR100961571B1
KR100961571B1 KR1020057000162A KR20057000162A KR100961571B1 KR 100961571 B1 KR100961571 B1 KR 100961571B1 KR 1020057000162 A KR1020057000162 A KR 1020057000162A KR 20057000162 A KR20057000162 A KR 20057000162A KR 100961571 B1 KR100961571 B1 KR 100961571B1
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South Korea
Prior art keywords
probe
sample
scanning
interaction
microscope
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Expired - Fee Related
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English (en)
Korean (ko)
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KR20050043885A (ko
Inventor
머빈 죤 마일즈
앤드류 데이비드 레이버 험프리스
제이미 케인 홉스
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더 유니버시티 오브 브리스톨
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Priority claimed from GB0215581A external-priority patent/GB0215581D0/en
Priority claimed from GB0310344A external-priority patent/GB0310344D0/en
Application filed by 더 유니버시티 오브 브리스톨 filed Critical 더 유니버시티 오브 브리스톨
Publication of KR20050043885A publication Critical patent/KR20050043885A/ko
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G01Q60/34—Tapping mode
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures

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  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Radiology & Medical Imaging (AREA)
  • Power Engineering (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
KR1020057000162A 2002-07-04 2003-07-04 주사 탐침 현미경 Expired - Fee Related KR100961571B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
GB0215581A GB0215581D0 (en) 2002-07-04 2002-07-04 Scanning probe microscope
GB0215581.0 2002-07-04
GB0310344.7 2003-05-06
GB0310344A GB0310344D0 (en) 2003-05-06 2003-05-06 Scanning probe microscope

Publications (2)

Publication Number Publication Date
KR20050043885A KR20050043885A (ko) 2005-05-11
KR100961571B1 true KR100961571B1 (ko) 2010-06-04

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KR1020057000162A Expired - Fee Related KR100961571B1 (ko) 2002-07-04 2003-07-04 주사 탐침 현미경

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US (1) US7473887B2 (enExample)
EP (1) EP1540270A2 (enExample)
JP (2) JP2005531781A (enExample)
KR (1) KR100961571B1 (enExample)
CN (1) CN1304867C (enExample)
AU (1) AU2003242859A1 (enExample)
CA (1) CA2491404C (enExample)
RU (1) RU2334214C2 (enExample)
WO (1) WO2004005844A2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101263367B1 (ko) 2011-05-16 2013-05-21 명지대학교 산학협력단 전기천공 및 근접장 초음파 기법을 이용한 주사탐침 현미경 장치
KR20230071417A (ko) 2021-11-16 2023-05-23 안동대학교 산학협력단 원자 현미경

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JP4873460B2 (ja) * 2006-05-25 2012-02-08 株式会社島津製作所 探針位置制御装置
US7568381B2 (en) * 2006-08-02 2009-08-04 University Of North Carolina At Charlotte Apparatus and method for surface property measurement with in-process compensation for instrument frame distortion
KR100761059B1 (ko) * 2006-09-29 2007-09-21 파크시스템스 주식회사 오버행 샘플 측정이 가능한 주사 탐침 현미경
GB0621560D0 (en) * 2006-10-31 2006-12-06 Infinitesima Ltd Probe assembly for a scanning probe microscope
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CN101281219B (zh) * 2007-04-06 2010-09-29 国家纳米科学中心 一种测量扫描探针显微镜导电针尖的特征电容的方法
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CN101515003B (zh) * 2008-02-22 2011-02-09 国家纳米科学中心 测量材料表面电荷密度的方法
CN101515006B (zh) * 2008-02-22 2011-07-27 国家纳米科学中心 测量材料非线性电极化率的方法
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KR100956165B1 (ko) 2008-11-27 2010-05-19 한국과학기술원 유체의 유동저항을 기반으로 하는 표면 분석 측정 방법을 이용한 원자현미경
KR101569960B1 (ko) 2008-12-11 2015-11-27 인피니트시마 리미티드 다이나믹 탐침 검출 시스템
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JP5295047B2 (ja) * 2009-09-03 2013-09-18 株式会社日立ハイテクサイエンス 走査型プローブ顕微鏡による誘電率の測定方法
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RU2461839C1 (ru) * 2011-03-16 2012-09-20 Государственное образовательное учреждение высшего профессионального образования "Саратовский государственный университет им. Н.Г. Чернышевского" Сканирующий зондовый микроскоп
CN102279556B (zh) * 2011-06-02 2013-07-17 中山大学 相位全息与近场光学显微镜联用制备功能性光子晶体装置及其应用方法
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CN103185812A (zh) * 2011-12-29 2013-07-03 中国科学院沈阳自动化研究所 基于探针力曲线的材料物理特性测量系统及方法
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KR101991556B1 (ko) * 2012-06-22 2019-06-20 브루커 나노, 인코퍼레이션. 첨두힘 탭핑 모드에서 동작하는 원자력 현미경을 이용한 전기적 특성 측정 방법 및 장치
EP2932277B1 (en) * 2012-12-12 2024-04-03 Universität Basel Method and device for controlling a scanning probe microscope
CN103197103A (zh) * 2013-03-20 2013-07-10 河南科技大学 纳米尺度静电场的构筑方法和装置
GB201313064D0 (en) 2013-07-22 2013-09-04 Infinitesima Ltd Probe Microscope
CN103808967B (zh) * 2014-02-23 2015-11-25 北京航空航天大学 一种基于石英音叉探针的原子力显微镜的成像系统
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CN104020317B (zh) * 2014-06-12 2017-05-17 合肥工业大学 双端音叉扫描探针测头系统及其测量方法
KR101607606B1 (ko) * 2015-08-17 2016-03-31 한국표준과학연구원 원자간력 현미경의 측정 방법
CN105467160B (zh) * 2016-01-18 2018-11-30 江南大学 一种射频探针原子力显微镜系统
CN105527463A (zh) * 2016-03-01 2016-04-27 江南大学 一种射频原子力显微镜扫描探针及其制备方法
JP6696570B2 (ja) * 2016-06-02 2020-05-20 株式会社島津製作所 走査型プローブ顕微鏡
JP6885585B2 (ja) * 2017-03-28 2021-06-16 株式会社日立ハイテクサイエンス 走査型プローブ顕微鏡、及びその走査方法
CN107192854B (zh) * 2017-04-18 2020-12-04 天津大学 原子力显微镜的z扫描器和探针装置及探针装置安装器
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JP2019128302A (ja) * 2018-01-26 2019-08-01 株式会社日立ハイテクサイエンス 走査プローブ顕微鏡
KR102840619B1 (ko) * 2018-05-25 2025-07-31 몰레큘라 비스타 인크. 샘플에 대한 광 유도력을 개선하기 위해 센서 분자를 사용하는 스캐닝 프로브 현미경
CN109115258B (zh) * 2018-06-21 2020-10-23 迈克医疗电子有限公司 一种检测装置的校准方法、装置和终端设备
CN108844450B (zh) * 2018-08-30 2020-07-28 江苏静远建设工程有限公司 一种木塑板材表面平整度检测装置
CN109238116B (zh) * 2018-08-30 2020-04-21 南丰县致诚科技有限公司 一种复合板材表面平整度检测装置
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CN109238115B (zh) * 2018-08-30 2020-02-14 宁夏宏源建科检测有限公司 一种建筑板材表面平整度检测装置
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CN111983260B (zh) * 2020-08-19 2023-04-07 国家纳米科学中心 一种原子力显微镜探针振幅的校准方法
CN113848349B (zh) * 2021-09-09 2025-01-14 国仪量子技术(合肥)股份有限公司 探针自动进针装置及探针自动进针方法
CN114184547B (zh) * 2021-11-29 2024-05-14 重庆川仪自动化股份有限公司 一种基于双闭环的扫描光栅微镜机械摆角的控制方法
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Publication number Priority date Publication date Assignee Title
KR101263367B1 (ko) 2011-05-16 2013-05-21 명지대학교 산학협력단 전기천공 및 근접장 초음파 기법을 이용한 주사탐침 현미경 장치
KR20230071417A (ko) 2021-11-16 2023-05-23 안동대학교 산학협력단 원자 현미경

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JP2005531781A (ja) 2005-10-20
CA2491404C (en) 2014-09-09
WO2004005844A2 (en) 2004-01-15
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CA2491404A1 (en) 2004-01-15
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US20040051542A1 (en) 2004-03-18

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