GB1284061A - Electron beam apparatus - Google Patents

Electron beam apparatus

Info

Publication number
GB1284061A
GB1284061A GB3205/70A GB320570A GB1284061A GB 1284061 A GB1284061 A GB 1284061A GB 3205/70 A GB3205/70 A GB 3205/70A GB 320570 A GB320570 A GB 320570A GB 1284061 A GB1284061 A GB 1284061A
Authority
GB
United Kingdom
Prior art keywords
lens
scanning
coils
point
deflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3205/70A
Inventor
Christopher Geoffrey Van Essen
Erland Maxwell Schulson
Richard Hugh Donaghay
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cambridge Scientific Instruments Ltd
Original Assignee
Cambridge Scientific Instruments Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cambridge Scientific Instruments Ltd filed Critical Cambridge Scientific Instruments Ltd
Publication of GB1284061A publication Critical patent/GB1284061A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1478—Beam tilting means, i.e. for stereoscopy or for beam channelling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Abstract

1284061 Photo-electric apparatus CAMBRIDGE SCIENTIFIC INSTRUMENTS Ltd 19 April 1971 2829/70 and 32059/70 Heading G1A [Also in Division H1] In a scanning electron or ion beam micro-scope or micro-probe, the point of impact of the beam on the specimen remains substantially constant but the angle is varied periodically in order to observe a pseudo-Kikuchi effect in single crystal specimens. In Fig.4 one or more focusing coils L2 converge the beam at a point I on the axis where the beam is subjected to scanning fields from orthogonal scanning coils D1. The final focusing lens L3 converges all electrons at a point on the specimen, so the effect of the scanning is to vary the angle of incidence of the beam in two orthogonal planes. The point of impact may vary due to spherical aberration of the lens L3 and this may be corrected by moving the centre of deflection in accordance with the magnitude of the deflection by means of auxiliary deflection coils D2 and E. Alternatively the accelerating voltage may be varied, or the current through the lens L3 may be varied and this may be facilitated by using an air-cored coil for the lens L3 or for an auxiliary correcting lens. If the lens L3 is iron cored, the need for rapid changes in the current through it may be obviated by using spiral scanning Fig. 5 (not shown), the coils D1 being fed with sine and cosine waveforms. The output signal may be derived from backscattered electrons or from the specimen current, and is fed to a cathode ray display tube scanned in synchronism. Alternatively the output may be light or X-rays generated by the impingement of the beam.
GB3205/70A 1970-01-21 1970-01-21 Electron beam apparatus Expired GB1284061A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB282970 1970-01-21
GB3205970 1970-07-02

Publications (1)

Publication Number Publication Date
GB1284061A true GB1284061A (en) 1972-08-02

Family

ID=26237761

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3205/70A Expired GB1284061A (en) 1970-01-21 1970-01-21 Electron beam apparatus

Country Status (5)

Country Link
US (1) US3702398A (en)
JP (1) JPS5425391B1 (en)
DE (1) DE2102616A1 (en)
FR (1) FR2075739A5 (en)
GB (1) GB1284061A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3145606A1 (en) * 1980-11-21 1982-06-03 Nihon Denshi K.K., Akishima, Tokyo Electron beam device
GB2198284A (en) * 1986-10-27 1988-06-08 Atomika Tech Physik Gmbh Secondary ion masss spectroscopy to determin the composition of a solid body
GB2221567A (en) * 1988-07-25 1990-02-07 Hitachi Ltd Scanning electron microscope

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7204859A (en) * 1972-04-12 1973-10-16
US3801784A (en) * 1972-04-14 1974-04-02 Research Corp Scanning electron microscope operating in area scan and angle scan modes
US3801792A (en) * 1973-05-23 1974-04-02 Bell Telephone Labor Inc Electron beam apparatus
US4210806A (en) * 1979-01-18 1980-07-01 International Business Machines Corporation High brightness electron probe beam and method
US4780216A (en) * 1986-11-19 1988-10-25 Olin Corporation Calcium hypochlorite sanitizing compositions
US4990779A (en) * 1989-06-06 1991-02-05 Nippon Steel Corporation Method and apparatus for evaluating strains in crystals
JP2002217088A (en) * 2001-01-17 2002-08-02 Nikon Corp Charged particle beam exposing system, method therefor and method for fabricating semiconductor device
US7498564B2 (en) * 2001-02-06 2009-03-03 University Of Bristol Of Senate House Resonant scanning near-field optical microscope
US7473887B2 (en) * 2002-07-04 2009-01-06 University Of Bristol Of Senate House Resonant scanning probe microscope
US6930308B1 (en) * 2002-07-11 2005-08-16 Kla-Tencor Technologies Corporation SEM profile and surface reconstruction using multiple data sets
US8129693B2 (en) 2009-06-26 2012-03-06 Carl Zeiss Nts Gmbh Charged particle beam column and method of operating same
DE102009052392A1 (en) 2009-11-09 2011-12-15 Carl Zeiss Nts Gmbh SACP process and particle-optical system for carrying out such a process
EP3343210B1 (en) * 2016-12-30 2020-11-18 IMEC vzw Characterization of regions with different crystallinity in materials

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB832500A (en) * 1955-12-12 1960-04-13 Ass Elect Ind Improvements relating to electron optical apparatus
DE1514706C2 (en) * 1966-03-15 1975-11-06 Siemens Ag, 1000 Berlin Und 8000 Muenchen Deflection system for corpuscular beam devices
FR2010485A1 (en) * 1968-05-28 1970-02-20 Jeol Ltd
US3549883A (en) * 1968-10-07 1970-12-22 Gen Electric Scanning electron microscope wherein an image is formed as a function of specimen current

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3145606A1 (en) * 1980-11-21 1982-06-03 Nihon Denshi K.K., Akishima, Tokyo Electron beam device
GB2198284A (en) * 1986-10-27 1988-06-08 Atomika Tech Physik Gmbh Secondary ion masss spectroscopy to determin the composition of a solid body
GB2198284B (en) * 1986-10-27 1991-03-20 Atomika Tech Physik Gmbh Determining the composition of a solid body
GB2221567A (en) * 1988-07-25 1990-02-07 Hitachi Ltd Scanning electron microscope
US4983832A (en) * 1988-07-25 1991-01-08 Hitachi, Ltd. Scanning electron microscope
GB2221567B (en) * 1988-07-25 1992-11-11 Hitachi Ltd Scanning electron microscope

Also Published As

Publication number Publication date
JPS5425391B1 (en) 1979-08-28
US3702398A (en) 1972-11-07
DE2102616A1 (en) 1971-07-29
FR2075739A5 (en) 1971-10-08

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee