WO2008126248A1 - 駆動装置 - Google Patents

駆動装置 Download PDF

Info

Publication number
WO2008126248A1
WO2008126248A1 PCT/JP2007/057077 JP2007057077W WO2008126248A1 WO 2008126248 A1 WO2008126248 A1 WO 2008126248A1 JP 2007057077 W JP2007057077 W JP 2007057077W WO 2008126248 A1 WO2008126248 A1 WO 2008126248A1
Authority
WO
WIPO (PCT)
Prior art keywords
stage
driver unit
elastic body
base
moving
Prior art date
Application number
PCT/JP2007/057077
Other languages
English (en)
French (fr)
Inventor
Jun Suzuki
Original Assignee
Pioneer Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Corporation filed Critical Pioneer Corporation
Priority to EP07740513A priority Critical patent/EP2133878A4/en
Priority to US12/593,196 priority patent/US7952983B2/en
Priority to PCT/JP2007/057077 priority patent/WO2008126248A1/ja
Priority to JP2009508798A priority patent/JP4542620B2/ja
Publication of WO2008126248A1 publication Critical patent/WO2008126248A1/ja

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/02—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using ferroelectric record carriers; Record carriers therefor

Abstract

駆動装置（１００ｆ）は、ベース部（１１０）と、被駆動物（１２）が搭載されると共に、移動可能なステージ部（１３０）と、ベース部とステージ部とを接続すると共に、ステージ部を一の方向（Ｙ軸）に沿って移動させるような弾性を有する弾性部（１２）と、ステージ部及び弾性部により定まる共振周波数でステージ部が一の方向に沿って共振するようにステージ部を移動させるための加振力を、弾性部に加える印加部（１６１、１６２、２２）とを備える。
PCT/JP2007/057077 2007-03-30 2007-03-30 駆動装置 WO2008126248A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP07740513A EP2133878A4 (en) 2007-03-30 2007-03-30 TRAINING UNIT
US12/593,196 US7952983B2 (en) 2007-03-30 2007-03-30 Driver unit
PCT/JP2007/057077 WO2008126248A1 (ja) 2007-03-30 2007-03-30 駆動装置
JP2009508798A JP4542620B2 (ja) 2007-03-30 2007-03-30 駆動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/057077 WO2008126248A1 (ja) 2007-03-30 2007-03-30 駆動装置

Publications (1)

Publication Number Publication Date
WO2008126248A1 true WO2008126248A1 (ja) 2008-10-23

Family

ID=39863429

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/057077 WO2008126248A1 (ja) 2007-03-30 2007-03-30 駆動装置

Country Status (4)

Country Link
US (1) US7952983B2 (ja)
EP (1) EP2133878A4 (ja)
JP (1) JP4542620B2 (ja)
WO (1) WO2008126248A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012153739A1 (ja) * 2011-05-10 2012-11-15 インサイト株式会社 プローブおよびそれを備えた測定装置

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4542617B2 (ja) * 2007-03-30 2010-09-15 パイオニア株式会社 駆動装置
WO2008126235A1 (ja) * 2007-03-30 2008-10-23 Pioneer Corporation 駆動装置
WO2008126246A1 (ja) * 2007-03-30 2008-10-23 Pioneer Corporation 駆動装置
US7893642B2 (en) * 2007-03-30 2011-02-22 Pioneer Corporation Driving apparatus

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62105440A (ja) 1985-11-01 1987-05-15 Olympus Optical Co Ltd 振動型ステ−ジ装置
JPH05126517A (ja) * 1991-11-05 1993-05-21 Canon Inc 走査機構及びこれを用いた走査型顕微鏡及び記録再生装置
JPH06231493A (ja) * 1993-02-03 1994-08-19 Canon Inc 基板位置決め機構および記録再生装置
EP0729006A2 (en) 1995-02-23 1996-08-28 Canon Kabushiki Kaisha Information processing apparatus with probe undergoing circular motion
US20030000701A1 (en) 2001-06-28 2003-01-02 Dusterhoft Ronald G. Apparatus and method for progressively gravel packing an interval of a wellbore
US6587408B1 (en) 1998-10-01 2003-07-01 Massachusetts Institute Of Technology High-density mechanical memory and turing machine

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3029499B2 (ja) * 1992-05-07 2000-04-04 キヤノン株式会社 記録再生装置
JP2924630B2 (ja) * 1993-09-20 1999-07-26 富士通株式会社 磁気記憶装置
US5557596A (en) * 1995-03-20 1996-09-17 Gibson; Gary Ultra-high density storage device
JP3817120B2 (ja) * 2000-07-07 2006-08-30 住友重機械工業株式会社 移動テーブルの変位制御方法、部材加工方法、ｘ−ｙステージ装置、該ｘ−ｙステージ装置の製造方法
US7473887B2 (en) * 2002-07-04 2009-01-06 University Of Bristol Of Senate House Resonant scanning probe microscope

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62105440A (ja) 1985-11-01 1987-05-15 Olympus Optical Co Ltd 振動型ステ−ジ装置
JPH05126517A (ja) * 1991-11-05 1993-05-21 Canon Inc 走査機構及びこれを用いた走査型顕微鏡及び記録再生装置
JPH06231493A (ja) * 1993-02-03 1994-08-19 Canon Inc 基板位置決め機構および記録再生装置
EP0729006A2 (en) 1995-02-23 1996-08-28 Canon Kabushiki Kaisha Information processing apparatus with probe undergoing circular motion
US6587408B1 (en) 1998-10-01 2003-07-01 Massachusetts Institute Of Technology High-density mechanical memory and turing machine
US20030000701A1 (en) 2001-06-28 2003-01-02 Dusterhoft Ronald G. Apparatus and method for progressively gravel packing an interval of a wellbore

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
See also references of EP2133878A4
TATEHIKO HASEBE; SEIKO YAMANAKA; TAKESHI HARADA; YASUSHI MUTOU: "Development of wide lateral stroke electro-magnetic actuator driven by low voltage", IEEJ SENSORS AND MICROMACHINES SOCIETY SOGO-KENKYUKAI / MICROMACHINES AND SENSOR SYSTEMS KENKYU-KAI

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012153739A1 (ja) * 2011-05-10 2012-11-15 インサイト株式会社 プローブおよびそれを備えた測定装置
JPWO2012153739A1 (ja) * 2011-05-10 2014-07-31 インサイト株式会社 プローブおよびそれを備えた測定装置

Also Published As

Publication number Publication date
US7952983B2 (en) 2011-05-31
JP4542620B2 (ja) 2010-09-15
US20100085791A1 (en) 2010-04-08
EP2133878A4 (en) 2011-05-25
JPWO2008126248A1 (ja) 2010-07-22
EP2133878A1 (en) 2009-12-16

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