WO2008126246A1 - 駆動装置 - Google Patents

駆動装置 Download PDF

Info

Publication number
WO2008126246A1
WO2008126246A1 PCT/JP2007/057073 JP2007057073W WO2008126246A1 WO 2008126246 A1 WO2008126246 A1 WO 2008126246A1 JP 2007057073 W JP2007057073 W JP 2007057073W WO 2008126246 A1 WO2008126246 A1 WO 2008126246A1
Authority
WO
WIPO (PCT)
Prior art keywords
stage moving
stage
driver unit
elasticity
elastic body
Prior art date
Application number
PCT/JP2007/057073
Other languages
English (en)
French (fr)
Inventor
Jun Suzuki
Original Assignee
Pioneer Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Corporation filed Critical Pioneer Corporation
Priority to JP2009508796A priority Critical patent/JP4493058B2/ja
Priority to PCT/JP2007/057073 priority patent/WO2008126246A1/ja
Priority to US12/532,800 priority patent/US7843108B2/en
Publication of WO2008126246A1 publication Critical patent/WO2008126246A1/ja

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/02—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using ferroelectric record carriers; Record carriers therefor
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other

Landscapes

  • Micromachines (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

駆動装置（１００ｔ）は、移動可能なステージ部（１３０）と、ステージ部を一の方向に沿って移動させるような弾性を有すると共に、一の方向に沿って並ぶように配列される２つの第１弾性部（１２０－１）と、ステージ部及び第１弾性部により定まる共振周波数でステージ部が一の方向に沿って共振するようにステージ部を移動させるための加振力を加える第１印加部（１８１）と、ステージ部を他の方向に沿って移動させるための駆動力を加える第２印加部（１８２）とを備えると共に、一の方向に沿って並ぶように配列される２つの駆動源部（１８０）と、ステージ部を一の方向に沿って移動させるような弾性を有すると共に、一の方向に沿って並ぶように配列される２つの第２弾性部（１２０－２）と、ステージ部を他の方向に沿って移動させるような弾性を有する第３弾性部（１２０－３）と、第３弾性部の他方の端部が接続されるベース部（１１０）とを備え、２つの駆動源部の夫々により加えられる前記加振力の方向をずらす。
PCT/JP2007/057073 2007-03-30 2007-03-30 駆動装置 WO2008126246A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009508796A JP4493058B2 (ja) 2007-03-30 2007-03-30 駆動装置
PCT/JP2007/057073 WO2008126246A1 (ja) 2007-03-30 2007-03-30 駆動装置
US12/532,800 US7843108B2 (en) 2007-03-30 2007-03-30 Driving apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/057073 WO2008126246A1 (ja) 2007-03-30 2007-03-30 駆動装置

Publications (1)

Publication Number Publication Date
WO2008126246A1 true WO2008126246A1 (ja) 2008-10-23

Family

ID=39863427

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/057073 WO2008126246A1 (ja) 2007-03-30 2007-03-30 駆動装置

Country Status (3)

Country Link
US (1) US7843108B2 (ja)
JP (1) JP4493058B2 (ja)
WO (1) WO2008126246A1 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2136368A4 (en) * 2007-03-30 2011-05-25 Pioneer Corp WHEEL
US8089053B1 (en) * 2009-11-10 2012-01-03 Dudley Finch Dynamically tilting specimen holder for stereo and tomographic imaging in a transmission electron microscope using a combination of micro electro mechanical systems (MEMS) and piezoelectric transducers (PZTs)
JP2011166919A (ja) * 2010-02-09 2011-08-25 Olympus Corp 超音波モータ機構
US9527733B2 (en) * 2014-11-07 2016-12-27 The Chinese University Of Hong Kong Method and apparatus for dynamic-tuning

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06231493A (ja) * 1993-02-03 1994-08-19 Canon Inc 基板位置決め機構および記録再生装置
JPH07191756A (ja) * 1993-12-27 1995-07-28 Canon Inc 微動駆動装置及びそれを用いた情報記録及び／又は再生装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62105440A (ja) * 1985-11-01 1987-05-15 Olympus Optical Co Ltd 振動型ステ−ジ装置
JP3289929B2 (ja) * 1991-11-05 2002-06-10 キヤノン株式会社 走査機構及びこれを用いた走査型顕微鏡及び記録再生装置
JP3029499B2 (ja) * 1992-05-07 2000-04-04 キヤノン株式会社 記録再生装置
US6555829B1 (en) * 2000-01-10 2003-04-29 Applied Materials, Inc. High precision flexure stage
JP3817120B2 (ja) * 2000-07-07 2006-08-30 住友重機械工業株式会社 移動テーブルの変位制御方法、部材加工方法、ｘ−ｙステージ装置、該ｘ−ｙステージ装置の製造方法
JP4007767B2 (ja) * 2001-01-18 2007-11-14 日本碍子株式会社 圧電／電歪デバイスおよびその製造方法
KR100552687B1 (ko) * 2003-08-22 2006-02-20 삼성전자주식회사 대면적 스테이지를 구비한 2축 액츄에이터
US7461543B2 (en) * 2005-06-17 2008-12-09 Georgia Tech Research Corporation Overlay measurement methods with firat based probe microscope
JP2007273589A (ja) * 2006-03-30 2007-10-18 Fujitsu Ltd 薄膜圧電デバイスおよびその作製方法
JP4542614B2 (ja) * 2007-03-30 2010-09-15 パイオニア株式会社 駆動装置
WO2008126234A1 (ja) * 2007-03-30 2008-10-23 Pioneer Corporation 駆動装置
US7825565B2 (en) * 2007-03-30 2010-11-02 Pioneer Corporation Driving apparatus
WO2008126235A1 (ja) * 2007-03-30 2008-10-23 Pioneer Corporation 駆動装置
WO2008126248A1 (ja) * 2007-03-30 2008-10-23 Pioneer Corporation 駆動装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06231493A (ja) * 1993-02-03 1994-08-19 Canon Inc 基板位置決め機構および記録再生装置
JPH07191756A (ja) * 1993-12-27 1995-07-28 Canon Inc 微動駆動装置及びそれを用いた情報記録及び／又は再生装置

Also Published As

Publication number Publication date
JPWO2008126246A1 (ja) 2010-07-22
US7843108B2 (en) 2010-11-30
JP4493058B2 (ja) 2010-06-30
US20100102675A1 (en) 2010-04-29

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