WO2008126241A1 - 駆動装置 - Google Patents

駆動装置 Download PDF

Info

Publication number
WO2008126241A1
WO2008126241A1 PCT/JP2007/057063 JP2007057063W WO2008126241A1 WO 2008126241 A1 WO2008126241 A1 WO 2008126241A1 JP 2007057063 W JP2007057063 W JP 2007057063W WO 2008126241 A1 WO2008126241 A1 WO 2008126241A1
Authority
WO
WIPO (PCT)
Prior art keywords
elastic body
stage
stage moving
driver unit
elasticity
Prior art date
Application number
PCT/JP2007/057063
Other languages
English (en)
French (fr)
Inventor
Jun Suzuki
Original Assignee
Pioneer Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Corporation filed Critical Pioneer Corporation
Priority to JP2009508791A priority Critical patent/JP4493057B2/ja
Priority to US12/532,930 priority patent/US7843110B2/en
Priority to PCT/JP2007/057063 priority patent/WO2008126241A1/ja
Publication of WO2008126241A1 publication Critical patent/WO2008126241A1/ja

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/02—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using ferroelectric record carriers; Record carriers therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20012—Multiple controlled elements
    • Y10T74/20201—Control moves in two planes

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Micromachines (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

駆動装置（１００ｔ）は、移動可能なステージ部（１３０）と、一方の端部がステージ部に接続されると共に、ステージ部を一の方向に沿って移動させるような弾性を有する第１弾性部（１２０－１）と、ステージ部及び第１弾性部により定まる共振周波数でステージ部が一の方向に沿って共振するようにステージ部を移動させるための加振力を加える第１印加部（１８１）と、ステージ部を他の方向に沿って段階的に又は連続的に移動させるための駆動力を加える第２印加部（１８２）とを備えると共に、第１弾性部の他方の端部が接続される駆動源部（１８０）と、一方の端部が駆動源部に接続されると共に、ステージ部を一の方向に沿って移動させるような弾性を有する第２弾性部（１２０－２）と、一方の端部が第２弾性部の他方の端部に接続されると共に、ステージ部を他の方向に沿って移動させるような弾性を有する第３弾性部（１２０－３）と、第３弾性部の他方の端部が接続されるベース部（１１０）とを備える。
PCT/JP2007/057063 2007-03-30 2007-03-30 駆動装置 WO2008126241A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009508791A JP4493057B2 (ja) 2007-03-30 2007-03-30 駆動装置
US12/532,930 US7843110B2 (en) 2007-03-30 2007-03-30 Driving apparatus
PCT/JP2007/057063 WO2008126241A1 (ja) 2007-03-30 2007-03-30 駆動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/057063 WO2008126241A1 (ja) 2007-03-30 2007-03-30 駆動装置

Publications (1)

Publication Number Publication Date
WO2008126241A1 true WO2008126241A1 (ja) 2008-10-23

Family

ID=39863422

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/057063 WO2008126241A1 (ja) 2007-03-30 2007-03-30 駆動装置

Country Status (3)

Country Link
US (1) US7843110B2 (ja)
JP (1) JP4493057B2 (ja)
WO (1) WO2008126241A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012190497A (ja) * 2011-03-08 2012-10-04 Toshiba Corp アクチュエータ及び記憶装置
JP2012203971A (ja) * 2011-03-28 2012-10-22 Toshiba Corp 記憶装置、記録再生方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4542618B2 (ja) * 2007-03-30 2010-09-15 パイオニア株式会社 駆動装置
US9527733B2 (en) * 2014-11-07 2016-12-27 The Chinese University Of Hong Kong Method and apparatus for dynamic-tuning

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06231493A (ja) * 1993-02-03 1994-08-19 Canon Inc 基板位置決め機構および記録再生装置
JPH07191756A (ja) * 1993-12-27 1995-07-28 Canon Inc 微動駆動装置及びそれを用いた情報記録及び／又は再生装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62105440A (ja) 1985-11-01 1987-05-15 Olympus Optical Co Ltd 振動型ステ−ジ装置
JP3289929B2 (ja) 1991-11-05 2002-06-10 キヤノン株式会社 走査機構及びこれを用いた走査型顕微鏡及び記録再生装置
JP3029499B2 (ja) 1992-05-07 2000-04-04 キヤノン株式会社 記録再生装置
JP3817120B2 (ja) 2000-07-07 2006-08-30 住友重機械工業株式会社 移動テーブルの変位制御方法、部材加工方法、ｘ−ｙステージ装置、該ｘ−ｙステージ装置の製造方法
US6583524B2 (en) * 2001-03-07 2003-06-24 Hewlett-Packard Company Micro-mover with balanced dynamics
JP3987382B2 (ja) * 2002-06-11 2007-10-10 富士通株式会社 マイクロミラー素子およびその製造方法
JP2005088188A (ja) * 2003-08-12 2005-04-07 Fujitsu Ltd マイクロ揺動素子およびマイクロ揺動素子駆動方法
KR100624436B1 (ko) * 2004-10-19 2006-09-15 삼성전자주식회사 2축 액츄에이터 및 그 제조방법
JP4385938B2 (ja) * 2004-12-15 2009-12-16 セイコーエプソン株式会社 アクチュエータ
JP4385937B2 (ja) * 2004-12-15 2009-12-16 セイコーエプソン株式会社 アクチュエータ
US20080309191A1 (en) * 2007-06-14 2008-12-18 Tsung-Kuan Allen Chou Mems moving platform with lateral zipping actuators

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06231493A (ja) * 1993-02-03 1994-08-19 Canon Inc 基板位置決め機構および記録再生装置
JPH07191756A (ja) * 1993-12-27 1995-07-28 Canon Inc 微動駆動装置及びそれを用いた情報記録及び／又は再生装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012190497A (ja) * 2011-03-08 2012-10-04 Toshiba Corp アクチュエータ及び記憶装置
JP2012203971A (ja) * 2011-03-28 2012-10-22 Toshiba Corp 記憶装置、記録再生方法

Also Published As

Publication number Publication date
US7843110B2 (en) 2010-11-30
US20100109478A1 (en) 2010-05-06
JPWO2008126241A1 (ja) 2010-07-22
JP4493057B2 (ja) 2010-06-30

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