WO2008126236A1 - 駆動装置 - Google Patents

駆動装置 Download PDF

Info

Publication number
WO2008126236A1
WO2008126236A1 PCT/JP2007/057047 JP2007057047W WO2008126236A1 WO 2008126236 A1 WO2008126236 A1 WO 2008126236A1 JP 2007057047 W JP2007057047 W JP 2007057047W WO 2008126236 A1 WO2008126236 A1 WO 2008126236A1
Authority
WO
WIPO (PCT)
Prior art keywords
section
stage
resilient
driver
stage section
Prior art date
Application number
PCT/JP2007/057047
Other languages
English (en)
French (fr)
Inventor
Jun Suzuki
Original Assignee
Pioneer Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Corporation filed Critical Pioneer Corporation
Priority to JP2009508786A priority Critical patent/JP4854785B2/ja
Priority to PCT/JP2007/057047 priority patent/WO2008126236A1/ja
Priority to US12/532,836 priority patent/US8330329B2/en
Priority to EP07740483A priority patent/EP2136368A4/en
Publication of WO2008126236A1 publication Critical patent/WO2008126236A1/ja

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/02—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using ferroelectric record carriers; Record carriers therefor
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic

Landscapes

  • Micromachines (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Moving Of The Head For Recording And Reproducing By Optical Means (AREA)

Abstract

駆動装置（１００ｆ）は、ベース部（１１０）と、被駆動物（１２）が搭載されると共に、移動可能なステージ部（１３０）と、ベース部とステージ部とを接続すると共に、ステージ部を一の方向（Ｙ軸）に沿って移動させるような弾性を有する弾性部（１２）と、ステージ部及び弾性部により定まる共振周波数でステージ部が一の方向に沿って共振するようにステージ部を移動させるための加振力を、弾性部に加える印加部（１６１、１６２、２２）とを備える。
PCT/JP2007/057047 2007-03-30 2007-03-30 駆動装置 WO2008126236A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009508786A JP4854785B2 (ja) 2007-03-30 2007-03-30 駆動装置
PCT/JP2007/057047 WO2008126236A1 (ja) 2007-03-30 2007-03-30 駆動装置
US12/532,836 US8330329B2 (en) 2007-03-30 2007-03-30 Scanning probe driver
EP07740483A EP2136368A4 (en) 2007-03-30 2007-03-30 WHEEL

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/057047 WO2008126236A1 (ja) 2007-03-30 2007-03-30 駆動装置

Publications (1)

Publication Number Publication Date
WO2008126236A1 true WO2008126236A1 (ja) 2008-10-23

Family

ID=39863417

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/057047 WO2008126236A1 (ja) 2007-03-30 2007-03-30 駆動装置

Country Status (4)

Country Link
US (1) US8330329B2 (ja)
EP (1) EP2136368A4 (ja)
JP (1) JP4854785B2 (ja)
WO (1) WO2008126236A1 (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4542618B2 (ja) * 2007-03-30 2010-09-15 パイオニア株式会社 駆動装置
WO2011061831A1 (ja) * 2009-11-19 2011-05-26 パイオニア株式会社 駆動装置
GB2524759A (en) * 2014-04-01 2015-10-07 Stratec Biomedical Ag Shaker
WO2015191543A1 (en) 2014-06-10 2015-12-17 Applied Materials Israel, Ltd. Scanning an object using multiple mechanical stages
US9527733B2 (en) * 2014-11-07 2016-12-27 The Chinese University Of Hong Kong Method and apparatus for dynamic-tuning

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62105440A (ja) 1985-11-01 1987-05-15 Olympus Optical Co Ltd 振動型ステ−ジ装置
JPH05126517A (ja) * 1991-11-05 1993-05-21 Canon Inc 走査機構及びこれを用いた走査型顕微鏡及び記録再生装置
JPH06231493A (ja) * 1993-02-03 1994-08-19 Canon Inc 基板位置決め機構および記録再生装置
EP0729006A2 (en) 1995-02-23 1996-08-28 Canon Kabushiki Kaisha Information processing apparatus with probe undergoing circular motion
US20030000701A1 (en) 2001-06-28 2003-01-02 Dusterhoft Ronald G. Apparatus and method for progressively gravel packing an interval of a wellbore
US6587408B1 (en) 1998-10-01 2003-07-01 Massachusetts Institute Of Technology High-density mechanical memory and turing machine

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62293978A (ja) * 1986-06-11 1987-12-21 Canon Inc 回転アクチエ−タ
US5079471A (en) * 1990-06-04 1992-01-07 Martin Marietta Corporation High torque harmonic traction motor
US5216631A (en) * 1990-11-02 1993-06-01 Sliwa Jr John W Microvibratory memory device
US5557596A (en) * 1995-03-20 1996-09-17 Gibson; Gary Ultra-high density storage device
US5705878A (en) * 1995-11-29 1998-01-06 Lewis; Aaron Flat scanning stage for scanned probe microscopy
JPH09219980A (ja) * 1995-12-04 1997-08-19 Nikon Corp 多自由度形駆動装置
US6555829B1 (en) * 2000-01-10 2003-04-29 Applied Materials, Inc. High precision flexure stage
US7473887B2 (en) 2002-07-04 2009-01-06 University Of Bristol Of Senate House Resonant scanning probe microscope
US7133115B2 (en) * 2003-10-14 2006-11-07 Canon Kabushiki Kaisha Positioning device, exposure apparatus using the positioning device, and device production method
JP4583190B2 (ja) * 2005-01-28 2010-11-17 富士通株式会社 共振器、超音波接合ヘッド及び超音波接合装置
JP2006230048A (ja) * 2005-02-15 2006-08-31 Seiko Epson Corp アクチュエータの共振周波数の調整方法およびアクチュエータ
KR100790879B1 (ko) * 2006-06-13 2008-01-03 삼성전자주식회사 맴스 디바이스의 콤전극 형성 방법
US7843108B2 (en) * 2007-03-30 2010-11-30 Pioneer Corporation Driving apparatus
JP4542617B2 (ja) * 2007-03-30 2010-09-15 パイオニア株式会社 駆動装置
WO2008126233A1 (ja) * 2007-03-30 2008-10-23 Pioneer Corporation 駆動装置
WO2008126234A1 (ja) * 2007-03-30 2008-10-23 Pioneer Corporation 駆動装置
JP4542618B2 (ja) * 2007-03-30 2010-09-15 パイオニア株式会社 駆動装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62105440A (ja) 1985-11-01 1987-05-15 Olympus Optical Co Ltd 振動型ステ−ジ装置
JPH05126517A (ja) * 1991-11-05 1993-05-21 Canon Inc 走査機構及びこれを用いた走査型顕微鏡及び記録再生装置
JPH06231493A (ja) * 1993-02-03 1994-08-19 Canon Inc 基板位置決め機構および記録再生装置
EP0729006A2 (en) 1995-02-23 1996-08-28 Canon Kabushiki Kaisha Information processing apparatus with probe undergoing circular motion
US6587408B1 (en) 1998-10-01 2003-07-01 Massachusetts Institute Of Technology High-density mechanical memory and turing machine
US20030000701A1 (en) 2001-06-28 2003-01-02 Dusterhoft Ronald G. Apparatus and method for progressively gravel packing an interval of a wellbore

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
See also references of EP2136368A4 *
TATEHIKO HASEBE; SEIKO YAMANAKA; TAKESHI HARADA; YASUSHI MUTOU: "Development of wide lateral stroke electro-magnetic actuator driven by low voltage", IEEJ SENSORS AND MICROMACHINES SOCIETY SOGO-KENKYUKAI / MICROMACHINES AND SENSOR SYSTEMS KENKYU-KAI

Also Published As

Publication number Publication date
US20100148631A1 (en) 2010-06-17
EP2136368A1 (en) 2009-12-23
US8330329B2 (en) 2012-12-11
JP4854785B2 (ja) 2012-01-18
EP2136368A4 (en) 2011-05-25
JPWO2008126236A1 (ja) 2010-07-22

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