WO2008126231A1 - 駆動装置 - Google Patents
駆動装置 Download PDFInfo
- Publication number
- WO2008126231A1 WO2008126231A1 PCT/JP2007/057040 JP2007057040W WO2008126231A1 WO 2008126231 A1 WO2008126231 A1 WO 2008126231A1 JP 2007057040 W JP2007057040 W JP 2007057040W WO 2008126231 A1 WO2008126231 A1 WO 2008126231A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- section
- stage
- stage section
- driver
- moving
- Prior art date
Links
Classifications
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
- G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
- G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
- G11B9/1418—Disposition or mounting of heads or record carriers
- G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
- G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0062—Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
- G11B9/02—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using ferroelectric record carriers; Record carriers therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/03—Microengines and actuators
- B81B2201/032—Bimorph and unimorph actuators, e.g. piezo and thermo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/03—Microengines and actuators
- B81B2201/033—Comb drives
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/11—Read heads, write heads or micropositioners for hard- or optical disks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/05—Type of movement
- B81B2203/055—Translation in a plane parallel to the substrate, i.e. enabling movement along any direction in the plane
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Details Of Measuring And Other Instruments (AREA)
Abstract
駆動装置(100)は、ベース部(110)と、被駆動物(12)が搭載されると共に、移動可能なステージ部(130)と、ベース部とステージ部とを接続すると共に、ステージ部を一の方向(X軸)に沿って移動させるような弾性を有する弾性部(12)と、ステージ部がステージ部及び弾性部により定まる共振周波数で一の方向に沿って共振するようにステージ部を移動させるための加振力を加える印加部(141、142、22)とを備える。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2007/057040 WO2008126231A1 (ja) | 2007-03-30 | 2007-03-30 | 駆動装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2007/057040 WO2008126231A1 (ja) | 2007-03-30 | 2007-03-30 | 駆動装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008126231A1 true WO2008126231A1 (ja) | 2008-10-23 |
Family
ID=39863412
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2007/057040 WO2008126231A1 (ja) | 2007-03-30 | 2007-03-30 | 駆動装置 |
Country Status (1)
Country | Link |
---|---|
WO (1) | WO2008126231A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011061831A1 (ja) * | 2009-11-19 | 2011-05-26 | パイオニア株式会社 | 駆動装置 |
JP4852185B2 (ja) * | 2009-11-19 | 2012-01-11 | パイオニア株式会社 | 駆動装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05126517A (ja) * | 1991-11-05 | 1993-05-21 | Canon Inc | 走査機構及びこれを用いた走査型顕微鏡及び記録再生装置 |
JPH06231493A (ja) * | 1993-02-03 | 1994-08-19 | Canon Inc | 基板位置決め機構および記録再生装置 |
-
2007
- 2007-03-30 WO PCT/JP2007/057040 patent/WO2008126231A1/ja active Application Filing
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05126517A (ja) * | 1991-11-05 | 1993-05-21 | Canon Inc | 走査機構及びこれを用いた走査型顕微鏡及び記録再生装置 |
JPH06231493A (ja) * | 1993-02-03 | 1994-08-19 | Canon Inc | 基板位置決め機構および記録再生装置 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011061831A1 (ja) * | 2009-11-19 | 2011-05-26 | パイオニア株式会社 | 駆動装置 |
WO2011061955A1 (ja) * | 2009-11-19 | 2011-05-26 | パイオニア株式会社 | 駆動装置 |
JP4852185B2 (ja) * | 2009-11-19 | 2012-01-11 | パイオニア株式会社 | 駆動装置 |
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