WO2008126244A1 - 駆動装置 - Google Patents
駆動装置 Download PDFInfo
- Publication number
- WO2008126244A1 WO2008126244A1 PCT/JP2007/057070 JP2007057070W WO2008126244A1 WO 2008126244 A1 WO2008126244 A1 WO 2008126244A1 JP 2007057070 W JP2007057070 W JP 2007057070W WO 2008126244 A1 WO2008126244 A1 WO 2008126244A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- section
- stage
- moving
- stage section
- driven
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
- G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
- G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
- G11B9/1418—Disposition or mounting of heads or record carriers
- G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
- G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
- G11B9/02—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using ferroelectric record carriers; Record carriers therefor
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Micromachines (AREA)
- Details Of Measuring And Other Instruments (AREA)
Abstract
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009508794A JP4542618B2 (ja) | 2007-03-30 | 2007-03-30 | 駆動装置 |
US12/532,797 US7893642B2 (en) | 2007-03-30 | 2007-03-30 | Driving apparatus |
PCT/JP2007/057070 WO2008126244A1 (ja) | 2007-03-30 | 2007-03-30 | 駆動装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2007/057070 WO2008126244A1 (ja) | 2007-03-30 | 2007-03-30 | 駆動装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008126244A1 true WO2008126244A1 (ja) | 2008-10-23 |
Family
ID=39863425
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2007/057070 WO2008126244A1 (ja) | 2007-03-30 | 2007-03-30 | 駆動装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7893642B2 (ja) |
JP (1) | JP4542618B2 (ja) |
WO (1) | WO2008126244A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008126236A1 (ja) * | 2007-03-30 | 2008-10-23 | Pioneer Corporation | 駆動装置 |
JP4542618B2 (ja) * | 2007-03-30 | 2010-09-15 | パイオニア株式会社 | 駆動装置 |
DE102008012992A1 (de) * | 2008-03-07 | 2009-09-10 | Physik Instrumente (Pi) Gmbh & Co. Kg | Ultraschallmotor |
US9527733B2 (en) * | 2014-11-07 | 2016-12-27 | The Chinese University Of Hong Kong | Method and apparatus for dynamic-tuning |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05126517A (ja) * | 1991-11-05 | 1993-05-21 | Canon Inc | 走査機構及びこれを用いた走査型顕微鏡及び記録再生装置 |
JPH05314549A (ja) * | 1992-05-07 | 1993-11-26 | Canon Inc | 記録再生装置 |
JPH06231493A (ja) * | 1993-02-03 | 1994-08-19 | Canon Inc | 基板位置決め機構および記録再生装置 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62105440A (ja) | 1985-11-01 | 1987-05-15 | Olympus Optical Co Ltd | 振動型ステ−ジ装置 |
JP3817120B2 (ja) * | 2000-07-07 | 2006-08-30 | 住友重機械工業株式会社 | 移動テーブルの変位制御方法、部材加工方法、x−yステージ装置、該x−yステージ装置の製造方法 |
DE102006024381B3 (de) * | 2006-05-24 | 2007-12-06 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | MEMS Vakuumsensor nach dem Reibungsprinzip |
WO2008126235A1 (ja) * | 2007-03-30 | 2008-10-23 | Pioneer Corporation | 駆動装置 |
JP4542613B2 (ja) * | 2007-03-30 | 2010-09-15 | パイオニア株式会社 | 駆動装置 |
WO2008126236A1 (ja) * | 2007-03-30 | 2008-10-23 | Pioneer Corporation | 駆動装置 |
JP4542619B2 (ja) * | 2007-03-30 | 2010-09-15 | パイオニア株式会社 | 駆動装置 |
US7808152B2 (en) * | 2007-03-30 | 2010-10-05 | Pioneer Corporation | Drive device |
US7843109B2 (en) * | 2007-03-30 | 2010-11-30 | Pioneer Corporation | Driving apparatus |
JP4542618B2 (ja) * | 2007-03-30 | 2010-09-15 | パイオニア株式会社 | 駆動装置 |
US7843110B2 (en) * | 2007-03-30 | 2010-11-30 | Pioneer Corporation | Driving apparatus |
JP4542620B2 (ja) * | 2007-03-30 | 2010-09-15 | パイオニア株式会社 | 駆動装置 |
JP4542617B2 (ja) * | 2007-03-30 | 2010-09-15 | パイオニア株式会社 | 駆動装置 |
-
2007
- 2007-03-30 JP JP2009508794A patent/JP4542618B2/ja not_active Expired - Fee Related
- 2007-03-30 WO PCT/JP2007/057070 patent/WO2008126244A1/ja active Search and Examination
- 2007-03-30 US US12/532,797 patent/US7893642B2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05126517A (ja) * | 1991-11-05 | 1993-05-21 | Canon Inc | 走査機構及びこれを用いた走査型顕微鏡及び記録再生装置 |
JPH05314549A (ja) * | 1992-05-07 | 1993-11-26 | Canon Inc | 記録再生装置 |
JPH06231493A (ja) * | 1993-02-03 | 1994-08-19 | Canon Inc | 基板位置決め機構および記録再生装置 |
Also Published As
Publication number | Publication date |
---|---|
JP4542618B2 (ja) | 2010-09-15 |
US7893642B2 (en) | 2011-02-22 |
JPWO2008126244A1 (ja) | 2010-07-22 |
US20100102769A1 (en) | 2010-04-29 |
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