KR100944731B1 - 전계 방출 디스플레이용 캐소드 구조 - Google Patents
전계 방출 디스플레이용 캐소드 구조 Download PDFInfo
- Publication number
- KR100944731B1 KR100944731B1 KR1020047002418A KR20047002418A KR100944731B1 KR 100944731 B1 KR100944731 B1 KR 100944731B1 KR 1020047002418 A KR1020047002418 A KR 1020047002418A KR 20047002418 A KR20047002418 A KR 20047002418A KR 100944731 B1 KR100944731 B1 KR 100944731B1
- Authority
- KR
- South Korea
- Prior art keywords
- cathode
- layer
- electron emitting
- slit
- cathode structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/304—Field-emissive cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
- H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30446—Field emission cathodes characterised by the emitter material
- H01J2201/30453—Carbon types
- H01J2201/30469—Carbon nanotubes (CNTs)
Landscapes
- Cold Cathode And The Manufacture (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
- Electrodes For Cathode-Ray Tubes (AREA)
- Overhead Projectors And Projection Screens (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR0202075A FR2836279B1 (fr) | 2002-02-19 | 2002-02-19 | Structure de cathode pour ecran emissif |
| FR02/02075 | 2002-02-19 | ||
| PCT/FR2003/000530 WO2003071571A1 (fr) | 2002-02-19 | 2003-02-18 | Structure de cathode pour ecran emissif |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20040079404A KR20040079404A (ko) | 2004-09-14 |
| KR100944731B1 true KR100944731B1 (ko) | 2010-03-03 |
Family
ID=27636301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020047002418A Expired - Fee Related KR100944731B1 (ko) | 2002-02-19 | 2003-02-18 | 전계 방출 디스플레이용 캐소드 구조 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US7759851B2 (enExample) |
| EP (1) | EP1476888B1 (enExample) |
| JP (2) | JP2005518636A (enExample) |
| KR (1) | KR100944731B1 (enExample) |
| CN (1) | CN1316533C (enExample) |
| AT (1) | ATE472820T1 (enExample) |
| DE (1) | DE60333168D1 (enExample) |
| FR (1) | FR2836279B1 (enExample) |
| WO (1) | WO2003071571A1 (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2562388Y2 (ja) | 1991-08-05 | 1998-02-10 | 株式会社石井製作所 | 集塵機 |
| FR2873852B1 (fr) | 2004-07-28 | 2011-06-24 | Commissariat Energie Atomique | Structure de cathode a haute resolution |
| FR2886284B1 (fr) | 2005-05-30 | 2007-06-29 | Commissariat Energie Atomique | Procede de realisation de nanostructures |
| KR20070041983A (ko) * | 2005-10-17 | 2007-04-20 | 삼성에스디아이 주식회사 | 전자 방출 표시 디바이스 |
| JP2007149594A (ja) * | 2005-11-30 | 2007-06-14 | Kokusai Kiban Zairyo Kenkyusho:Kk | 冷陰極電界電子放出素子及び冷陰極電界電子放出素子の製造方法 |
| KR20070083113A (ko) | 2006-02-20 | 2007-08-23 | 삼성에스디아이 주식회사 | 전자 방출 디바이스 및 이를 이용한 전자 방출 표시디바이스 |
| KR20070083112A (ko) | 2006-02-20 | 2007-08-23 | 삼성에스디아이 주식회사 | 전자 방출 디바이스와 이를 이용한 전자 방출 표시디바이스 |
| FR2897718B1 (fr) | 2006-02-22 | 2008-10-17 | Commissariat Energie Atomique | Structure de cathode a nanotubes pour ecran emissif |
| FR2912254B1 (fr) | 2007-02-06 | 2009-10-16 | Commissariat Energie Atomique | Structure emettrice d'electrons par effet de champ, a focalisation de l'emission |
| JP2009245672A (ja) * | 2008-03-31 | 2009-10-22 | Univ Of Tokyo | フィールドエミッション装置、ならびに、その製造方法 |
| CN104299988B (zh) * | 2014-09-26 | 2017-08-25 | 中国科学院半导体研究所 | 一种具有平面型发射阴极的纳米真空三极管及其制作方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010068441A (ko) * | 2000-01-05 | 2001-07-23 | 김순택 | 전계방출소자 및 그 제조방법 |
Family Cites Families (42)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5150648A (enExample) * | 1974-10-30 | 1976-05-04 | Hitachi Ltd | |
| JP3526462B2 (ja) * | 1991-03-20 | 2004-05-17 | ソニー株式会社 | 電界放出型陰極装置 |
| DE69211581T2 (de) * | 1991-03-13 | 1997-02-06 | Sony Corp | Anordnung von Feldemissionskathoden |
| US5679043A (en) * | 1992-03-16 | 1997-10-21 | Microelectronics And Computer Technology Corporation | Method of making a field emitter |
| US5763997A (en) * | 1992-03-16 | 1998-06-09 | Si Diamond Technology, Inc. | Field emission display device |
| JP2669749B2 (ja) * | 1992-03-27 | 1997-10-29 | 工業技術院長 | 電界放出素子 |
| WO1994015352A1 (en) * | 1992-12-23 | 1994-07-07 | Microelectronics And Computer Technology Corporation | Triode structure flat panel display employing flat field emission cathodes |
| FR2702869B1 (fr) * | 1993-03-17 | 1995-04-21 | Commissariat Energie Atomique | Dispositif d'affichage à micropointes et procédé de fabrication de ce dispositif. |
| US5717285A (en) * | 1993-03-17 | 1998-02-10 | Commissariat A L 'energie Atomique | Microtip display device having a current limiting layer and a charge avoiding layer |
| JP2892587B2 (ja) * | 1994-03-09 | 1999-05-17 | 双葉電子工業株式会社 | 電界放出素子及びその製造方法 |
| JP2809129B2 (ja) * | 1995-04-20 | 1998-10-08 | 日本電気株式会社 | 電界放射冷陰極とこれを用いた表示装置 |
| JP2900837B2 (ja) * | 1995-05-31 | 1999-06-02 | 日本電気株式会社 | 電界放射型冷陰極装置及びその製造方法 |
| JPH11510307A (ja) * | 1995-08-04 | 1999-09-07 | プリンタブル フィールド エミッターズ リミテッド | 電界電子放出材料および装置 |
| EP0789382A1 (en) * | 1996-02-09 | 1997-08-13 | International Business Machines Corporation | Structure and method for fabricating of a field emission device |
| US5837331A (en) * | 1996-03-13 | 1998-11-17 | Motorola, Inc. | Amorphous multi-layered structure and method of making the same |
| US5757138A (en) * | 1996-05-01 | 1998-05-26 | Industrial Technology Research Institute | Linear response field emission device |
| JP3836539B2 (ja) * | 1996-07-12 | 2006-10-25 | 双葉電子工業株式会社 | 電界放出素子およびその製造方法 |
| JPH1092294A (ja) * | 1996-09-13 | 1998-04-10 | Sony Corp | 電子放出源およびその製造方法ならびにこの電子放出源を用いたディスプレイ装置 |
| TW353758B (en) * | 1996-09-30 | 1999-03-01 | Motorola Inc | Electron emissive film and method |
| JPH10289650A (ja) * | 1997-04-11 | 1998-10-27 | Sony Corp | 電界電子放出素子及びその製造方法並びに電界電子放出型ディスプレイ装置 |
| FR2779271B1 (fr) * | 1998-05-26 | 2000-07-07 | Commissariat Energie Atomique | Procede de fabrication d'une source d'electrons a micropointes, a grille de focalisation auto-alignee |
| FR2780808B1 (fr) * | 1998-07-03 | 2001-08-10 | Thomson Csf | Dispositif a emission de champ et procedes de fabrication |
| US6323587B1 (en) * | 1998-08-06 | 2001-11-27 | Micron Technology, Inc. | Titanium silicide nitride emitters and method |
| JP2000243218A (ja) * | 1999-02-17 | 2000-09-08 | Nec Corp | 電子放出装置及びその駆動方法 |
| JP2000251614A (ja) * | 1999-02-24 | 2000-09-14 | Futaba Corp | 電界放出素子及びその製造方法 |
| US6486609B1 (en) * | 1999-03-17 | 2002-11-26 | Matsushita Electric Industries, Inc. | Electron-emitting element and image display device using the same |
| JP2000268706A (ja) * | 1999-03-18 | 2000-09-29 | Matsushita Electric Ind Co Ltd | 電子放出素子及びそれを用いた画像描画装置 |
| JP2000268705A (ja) | 1999-03-18 | 2000-09-29 | Futaba Corp | 電子放出素子 |
| JP2000285795A (ja) * | 1999-03-31 | 2000-10-13 | Sony Corp | 電子放出源およびその製造方法ならびにディスプレイ装置 |
| JP3792436B2 (ja) * | 1999-05-26 | 2006-07-05 | 日本電気株式会社 | 電界放出型冷陰極とその製造方法および平面ディスプレイの製造方法 |
| JP2001023506A (ja) * | 1999-07-07 | 2001-01-26 | Sony Corp | 電子放出源およびその製造方法ならびにディスプレイ装置 |
| KR20010011136A (ko) * | 1999-07-26 | 2001-02-15 | 정선종 | 나노구조를 에미터로 사용한 삼극형 전계 방출 에미터의 구조및 그 제조방법 |
| JP3600126B2 (ja) * | 1999-07-29 | 2004-12-08 | シャープ株式会社 | 電子源アレイ及び電子源アレイの駆動方法 |
| JP4043153B2 (ja) | 1999-07-30 | 2008-02-06 | 双葉電子工業株式会社 | 電子放出源の製造方法、エミッタ基板の製造方法、電子放出源及び蛍光発光型表示器 |
| US6062931A (en) * | 1999-09-01 | 2000-05-16 | Industrial Technology Research Institute | Carbon nanotube emitter with triode structure |
| JP2001101977A (ja) * | 1999-09-30 | 2001-04-13 | Toshiba Corp | 真空マイクロ素子 |
| JP2001126609A (ja) * | 1999-10-26 | 2001-05-11 | Futaba Corp | 電子放出素子及び蛍光発光型表示器 |
| KR100477739B1 (ko) * | 1999-12-30 | 2005-03-18 | 삼성에스디아이 주식회사 | 전계 방출 소자 및 그 구동 방법 |
| JP2002083555A (ja) * | 2000-07-17 | 2002-03-22 | Hewlett Packard Co <Hp> | セルフアライメント型電子源デバイス |
| WO2002061789A1 (fr) * | 2001-02-01 | 2002-08-08 | Sharp Kabushiki Kaisha | Dispositif d'emission electronique et affichage d'emission de champ |
| JP2002334673A (ja) * | 2001-05-09 | 2002-11-22 | Hitachi Ltd | 表示装置 |
| TW511108B (en) * | 2001-08-13 | 2002-11-21 | Delta Optoelectronics Inc | Carbon nanotube field emission display technology |
-
2002
- 2002-02-19 FR FR0202075A patent/FR2836279B1/fr not_active Expired - Fee Related
-
2003
- 2003-02-18 AT AT03717409T patent/ATE472820T1/de not_active IP Right Cessation
- 2003-02-18 KR KR1020047002418A patent/KR100944731B1/ko not_active Expired - Fee Related
- 2003-02-18 JP JP2003570380A patent/JP2005518636A/ja active Pending
- 2003-02-18 CN CNB038009846A patent/CN1316533C/zh not_active Expired - Fee Related
- 2003-02-18 WO PCT/FR2003/000530 patent/WO2003071571A1/fr not_active Ceased
- 2003-02-18 DE DE60333168T patent/DE60333168D1/de not_active Expired - Lifetime
- 2003-02-18 EP EP03717409A patent/EP1476888B1/fr not_active Expired - Lifetime
- 2003-02-18 US US10/485,669 patent/US7759851B2/en not_active Expired - Fee Related
-
2010
- 2010-12-17 JP JP2010282102A patent/JP5425753B2/ja not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010068441A (ko) * | 2000-01-05 | 2001-07-23 | 김순택 | 전계방출소자 및 그 제조방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| ATE472820T1 (de) | 2010-07-15 |
| CN1552084A (zh) | 2004-12-01 |
| EP1476888B1 (fr) | 2010-06-30 |
| JP2005518636A (ja) | 2005-06-23 |
| US7759851B2 (en) | 2010-07-20 |
| FR2836279A1 (fr) | 2003-08-22 |
| DE60333168D1 (de) | 2010-08-12 |
| CN1316533C (zh) | 2007-05-16 |
| WO2003071571A1 (fr) | 2003-08-28 |
| JP5425753B2 (ja) | 2014-02-26 |
| EP1476888A1 (fr) | 2004-11-17 |
| US20040256969A1 (en) | 2004-12-23 |
| KR20040079404A (ko) | 2004-09-14 |
| FR2836279B1 (fr) | 2004-09-24 |
| JP2011103303A (ja) | 2011-05-26 |
| WO2003071571A8 (fr) | 2004-04-29 |
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