JPWO2008029813A1 - 配線基板複合体、半導体装置、及びそれらの製造方法 - Google Patents
配線基板複合体、半導体装置、及びそれらの製造方法 Download PDFInfo
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Abstract
Description
12;支持体
13;金属体
14;配線基板
15;支持基板
16;金属体付き配線基板
17;絶縁層
18;下層配線
19;ビア
20;上層配線
21;配線層
22;ソルダーレジスト
23;半田ボール
24;半導体素子
25;アンダーフィル樹脂
26;ボンディングワイヤー
27;半導体装置
28;モールド樹脂
125;接着剤
Claims (25)
- 支持体と、この支持体上に設けられた金属体と、前記支持体により支持された前記金属体上に形成された複数個の配線基板と、を有し、前記配線基板は、絶縁層と、この絶縁層により絶縁された上下の配線と、上下の配線を接続するビアとを有することを特徴とする配線基板複合体。
- 1個の前記支持体の複数個の面上に、夫々前記金属体が設けられており、前記金属体上に前記配線基板が形成されていることを特徴とする請求項1に記載の配線基板複合体。
- 1個の前記支持体上に複数個の前記金属体が設けられており、前記金属体上に前記配線基板が形成されていることを特徴とする請求項1に記載の配線基板複合体。
- 複数個の前記支持体上に、隣接する前記支持体間にまたがるように前記金属体が設けられており、前記支持体と前記金属体とが一体化され、前記金属体上に前記配線基板が形成されていることを特徴とする請求項1に記載の配線基板複合体。
- 前記金属体は、1個の前記支持体の表面から側面を介して裏面まで回り込むようにして屈曲して形成されており、前記金属体が前記支持体により支持されていることを特徴とする請求項1に記載の配線基板複合体。
- 前記金属体の断面形状はコの字型であり、前記金属体の開放端部には前記支持体が挟まれており、前記金属体が前記支持体により支持されていることを特徴とする請求項1に記載の配線基板複合体。
- 前記支持体と前記金属体との間、及び前記金属体と前記配線基板との間の一方又は双方には、接合面の分離を容易にする低密着な界面が形成されていることを特徴とする請求項1乃至6のいずれか1項に記載の配線基板複合体。
- 前記支持体と前記金属体との間に、前記支持体及び前記金属体の材料とは異なる材料からなる層を形成することにより前記低密着な界面が形成され、前記金属体と前記配線基板との間に、前記金属体及び前記配線基板の材料とは異なる材料からなる層を形成することにより前記低密着な界面が形成されていることを特徴とする請求項7に記載の配線基板複合体。
- 前記支持体及び/又は前記金属体は、夫々その構成材料からなる第1及び第2の層を有し、前記第1及び第2の層間に前記構成材料とは異なる材料からなる第3の層を形成することにより、前記第1の層と前記第2の層との間に低密着な界面が形成されていることを特徴とする請求項1乃至8のいずれか1項に記載の配線基板複合体。
- 請求項1乃至9のいずれか1項に記載の配線基板複合体に、半導体素子が接続されていることを特徴とする半導体装置。
- 前記半導体素子は、前記配線基板複合体にフリップチップ接続又はワイヤーボンディング接続されていることを特徴とする請求項10に記載の半導体装置。
- 支持体と金属体とからなる支持基板を形成する工程と、前記支持基板における前記金属体上の1又は複数個の平面上に、絶縁層、この絶縁層により絶縁された上下の配線、及び上下の配線を接続するビアを有する複数個の配線基板を形成する工程と、を有することを特徴とする配線基板複合体の製造方法。
- 前記支持体と前記金属体とからなる前記支持基板を形成する工程において、前記支持体の1又は複数個の平面上に、1又は複数個の前記金属体を設けることにより、前記支持体と前記金属体とを一体化させることを特徴とする請求項12に記載の配線基板複合体の製造方法。
- 前記支持体と前記金属体とからなる前記支持基板を形成する工程において、前記支持体の同一平面上に複数個の前記金属体を設けることを特徴とする請求項12に記載の配線基板複合体の製造方法。
- 前記支持体と前記金属体とからなる前記支持基板を形成する工程において、前記金属体を屈曲させ、前記金属体上に複数個の平面を形成することを特徴とする請求項12に記載の配線基板複合体の製造方法。
- 支持体と金属体とからなる支持基板を形成する工程と、前記支持基板における前記金属体上の1又は複数個の平面上に、絶縁層、この絶縁層により絶縁された上下の配線、及び上下の配線を接続するビアを有する複数個の配線基板を形成する工程と、前記支持基板と前記配線基板とから構成される配線基板複合体から、前記配線基板を分離する工程と、を有することを特徴とする配線基板の製造方法。
- 支持体と金属体とからなる支持基板を形成する工程と、前記支持基板における前記金属体上の1又は複数個の平面上に、絶縁層、この絶縁層により絶縁された上下の配線、及び上下の配線を接続するビアを有する複数個の配線基板を形成する工程と、前記支持基板と前記配線基板とから構成される配線基板複合体から、前記金属体が一体化された前記配線基板を分離する工程と、を有することを特徴とする配線基板の製造方法。
- 前記金属体が一体化された前記配線基板を分離する工程の後に、前記配線基板と前記金属体とを分離する工程を有することを特徴とする請求項17に記載の配線基板の製造方法。
- 前記配線基板と前記金属体とを分離する工程において、前記配線基板から前記金属体を完全に分離することを特徴とする請求項18に記載の配線基板の製造方法。
- 前記配線基板と前記金属体とを分離する工程において、前記配線基板に前記金属体の一部を残すことを特徴とする請求項18に記載の配線基板の製造方法。
- 請求項12乃至15のいずれか1項に記載の配線基板複合体の製造方法により製造された配線基板複合体に、半導体素子を搭載することを特徴とする半導体装置の製造方法。
- 前記配線基板複合体に前記半導体素子を搭載した後に、前記支持体を前記配線基板複合体から分離することを特徴とする請求項21に記載の半導体装置の製造方法。
- 前記配線基板複合体に前記半導体素子を搭載した後に、前記支持体及び前記金属体を前記配線基板複合体から分離することを特徴とする請求項21に記載の半導体装置の製造方法。
- 請求項16乃至20のいずれか1項に記載の配線基板の製造方法により製造された配線基板に、半導体素子を搭載することを特徴とする半導体装置の製造方法。
- 前記半導体素子と前記配線基板とがフリップチップ接続又はワイヤーボンディング接続されていることを特徴とする請求項21乃至24のいずれか1項に記載の半導体装置の製造方法。
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PCT/JP2007/067237 WO2008029813A1 (fr) | 2006-09-04 | 2007-09-04 | Corps composite de plaque de connexion, dispositif semi-conducteur et procédé pour fabriquer le corps composite de plaque de connexion et le dispositif semi-conducteur |
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JP (1) | JPWO2008029813A1 (ja) |
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KR101767381B1 (ko) * | 2010-12-30 | 2017-08-11 | 삼성전자 주식회사 | 인쇄회로기판 및 이를 포함하는 반도체 패키지 |
US20120243155A1 (en) * | 2011-01-20 | 2012-09-27 | Endicott Interconnect Technologies, Inc. | Conductive metal nub for enhanced electrical interconnection, and information handling system utilizing same |
JP2014204004A (ja) * | 2013-04-05 | 2014-10-27 | Hoya株式会社 | 基板組立体、基板組立体の製造方法およびチップパッケージの製造方法 |
JP6341644B2 (ja) * | 2013-09-26 | 2018-06-13 | フリージア・マクロス株式会社 | キャリヤ付き金属箔および積層基板の製造方法 |
CN204014250U (zh) * | 2014-05-16 | 2014-12-10 | 奥特斯(中国)有限公司 | 用于生产电子元件的连接系统的半成品 |
KR101650938B1 (ko) * | 2014-09-25 | 2016-08-24 | 코닝정밀소재 주식회사 | 집적회로 패키지용 기판 |
JPWO2018123974A1 (ja) * | 2016-12-28 | 2019-06-27 | 株式会社フジクラ | 配線体、配線基板、及びタッチセンサ |
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CN101512758B (zh) | 2012-01-11 |
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WO2008029813A1 (fr) | 2008-03-13 |
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