JPS5855377A - 窒化アルミニウム焼結体の製造方法 - Google Patents

窒化アルミニウム焼結体の製造方法

Info

Publication number
JPS5855377A
JPS5855377A JP56152141A JP15214181A JPS5855377A JP S5855377 A JPS5855377 A JP S5855377A JP 56152141 A JP56152141 A JP 56152141A JP 15214181 A JP15214181 A JP 15214181A JP S5855377 A JPS5855377 A JP S5855377A
Authority
JP
Japan
Prior art keywords
powder
sintered body
weight
oxide
parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56152141A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0244787B2 (en, 2012
Inventor
勝利 米屋
柘植 章彦
寛 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP56152141A priority Critical patent/JPS5855377A/ja
Priority to US06/420,842 priority patent/US4435513A/en
Priority to DE8282108777T priority patent/DE3274347D1/de
Priority to EP82108777A priority patent/EP0075857B1/en
Priority to CA000412089A priority patent/CA1186346A/en
Publication of JPS5855377A publication Critical patent/JPS5855377A/ja
Publication of JPH0244787B2 publication Critical patent/JPH0244787B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
JP56152141A 1981-09-28 1981-09-28 窒化アルミニウム焼結体の製造方法 Granted JPS5855377A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP56152141A JPS5855377A (ja) 1981-09-28 1981-09-28 窒化アルミニウム焼結体の製造方法
US06/420,842 US4435513A (en) 1981-09-28 1982-09-21 Sintered bodies of aluminum nitride
DE8282108777T DE3274347D1 (en) 1981-09-28 1982-09-22 Sintered bodies of aluminum nitride
EP82108777A EP0075857B1 (en) 1981-09-28 1982-09-22 Sintered bodies of aluminum nitride
CA000412089A CA1186346A (en) 1981-09-28 1982-09-23 Sintered bodies of aluminum nitride

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56152141A JPS5855377A (ja) 1981-09-28 1981-09-28 窒化アルミニウム焼結体の製造方法

Publications (2)

Publication Number Publication Date
JPS5855377A true JPS5855377A (ja) 1983-04-01
JPH0244787B2 JPH0244787B2 (en, 2012) 1990-10-05

Family

ID=15533928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56152141A Granted JPS5855377A (ja) 1981-09-28 1981-09-28 窒化アルミニウム焼結体の製造方法

Country Status (5)

Country Link
US (1) US4435513A (en, 2012)
EP (1) EP0075857B1 (en, 2012)
JP (1) JPS5855377A (en, 2012)
CA (1) CA1186346A (en, 2012)
DE (1) DE3274347D1 (en, 2012)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6065768A (ja) * 1983-09-19 1985-04-15 株式会社トクヤマ 窒化アルミニウム組成物およびその製造方法
JPS6071576A (ja) * 1983-08-01 1985-04-23 ゼネラル・エレクトリツク・カンパニイ 熱伝導率の大きい窒化アルミニウムセラミツク製品
JPS6071575A (ja) * 1983-09-26 1985-04-23 株式会社トクヤマ 窒化アルミニウム焼結体及びその製造方法
JPS60151280A (ja) * 1984-01-19 1985-08-09 日本電気株式会社 窒化アルミニウム焼結体の製造方法
JPS60151281A (ja) * 1984-01-19 1985-08-09 日本電気株式会社 窒化アルミニウム焼結体
JPS60178688A (ja) * 1984-02-27 1985-09-12 株式会社東芝 高熱伝導性回路基板
JPS61122168A (ja) * 1984-11-17 1986-06-10 株式会社トクヤマ 窒化アルミニウム焼結体の製造方法
JPS63236765A (ja) * 1987-03-26 1988-10-03 品川白煉瓦株式会社 窒化アルミニウム焼結体
JPH04254475A (ja) * 1991-06-20 1992-09-09 Toshiba Corp 半導体装置用放熱板
JPH05860A (ja) * 1991-08-26 1993-01-08 Kyocera Corp メタライズ構造
US5242872A (en) * 1986-07-18 1993-09-07 Tokuyama Soda Kabushiki Kaisha Process for producing aluminum nitride sintered body
JPH0794645A (ja) * 1994-09-07 1995-04-07 Toshiba Corp 半導体装置
US6271163B1 (en) 1998-07-22 2001-08-07 Sumitomo Electric Industries, Ltd. Aluminum nitride sintered body and method of preparing the same
KR20180126142A (ko) * 2017-05-17 2018-11-27 한국세라믹기술원 고온에서 높은 비저항을 갖는 질화알루미늄 소결체 및 그 제조방법

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3348407C2 (de) * 1982-09-17 1999-08-12 Tokuyama Corp Lichtdurchlässiger, gesinterter Körper aus Aluminiumnitrid und Verfahren zu seiner Herstellung
JPS59207814A (ja) * 1983-05-13 1984-11-26 Tokuyama Soda Co Ltd 窒化アルミニウム粉末
DE3333406A1 (de) * 1982-09-17 1984-03-22 Tokuyama Soda K.K., Tokuyama, Yamaguchi Feines aluminiumnitridpulver, verfahren zu seiner herstellung und es enthaltendes mittel
DE3247985C2 (de) * 1982-12-24 1992-04-16 W.C. Heraeus Gmbh, 6450 Hanau Keramischer Träger
DE3313836C2 (de) * 1983-04-16 1985-08-29 W.C. Heraeus Gmbh, 6450 Hanau Verwendung von Aluminiumnitrid für Laserröhrenbauteile
FR2637887A1 (en) * 1983-05-13 1990-04-20 Tokuyama Soda Kk Fine aluminium nitride powder
US4533645A (en) * 1983-08-01 1985-08-06 General Electric Company High thermal conductivity aluminum nitride ceramic body
US4537863A (en) * 1983-08-10 1985-08-27 Nippon Electric Glass Company, Ltd. Low temperature sealing composition
DE3337630A1 (de) * 1983-10-15 1985-04-25 W.C. Heraeus Gmbh, 6450 Hanau Temperaturausgleichskoerper
JPS60127267A (ja) * 1983-12-12 1985-07-06 株式会社東芝 高熱伝導性窒化アルミニウム焼結体の製造方法
EP0153737B1 (en) * 1984-02-27 1993-07-28 Kabushiki Kaisha Toshiba Circuit substrate having high thermal conductivity
JPS60195059A (ja) * 1984-03-15 1985-10-03 株式会社トクヤマ 複合焼結体
DE3572155D1 (en) * 1984-09-28 1989-09-14 Toshiba Kk Process for production of readily sinterable aluminum nitride powder
DE3534886A1 (de) * 1984-09-30 1986-04-03 Kabushiki Kaisha Toshiba, Kawasaki, Kanagawa Verfahren zum herstellen von aluminiumnitrid-keramik-platten
US4578234A (en) * 1984-10-01 1986-03-25 General Electric Company Process of pressureless sintering to produce dense high thermal conductivity ceramic body of deoxidized aluminum nitride
US4672046A (en) * 1984-10-15 1987-06-09 Tdk Corporation Sintered aluminum nitride body
US4578233A (en) * 1984-11-01 1986-03-25 General Electric Company Pressureless sintering process to produce high thermal conductivity ceramic body of aluminum nitride
US4746637A (en) * 1984-11-08 1988-05-24 Kabushiki Kaisha Toshiba Aluminum nitride sintered body and process for producing the same
US4578365A (en) * 1984-11-26 1986-03-25 General Electric Company High thermal conductivity ceramic body of aluminum nitride
US4578364A (en) * 1984-12-07 1986-03-25 General Electric Company High thermal conductivity ceramic body of aluminum nitride
US4578232A (en) * 1984-12-17 1986-03-25 General Electric Company Pressureless sintering process to produce high thermal conductivity ceramic body of aluminum nitride
US4877760A (en) * 1985-05-22 1989-10-31 Ngk Spark Plug Co., Ltd. Aluminum nitride sintered body with high thermal conductivity and process for producing same
US4695517A (en) * 1985-05-31 1987-09-22 Ngk Spark Plug Co., Ltd. Composite layer aluminum nitride base sintered body
US5001089A (en) * 1985-06-28 1991-03-19 Kabushiki Kaisha Toshiba Aluminum nitride sintered body
JPH0717454B2 (ja) * 1985-06-28 1995-03-01 株式会社東芝 窒化アルミニウム焼結体およびその製造方法
DE3650264T2 (de) * 1985-06-28 1995-08-24 Toshiba Kawasaki Kk Aluminiumnitridsinterkörper und Verfahren zu seiner Herstellung.
GB2213500B (en) * 1985-08-13 1990-05-30 Tokuyama Soda Kk Sinterable aluminum nitride composition
DE3627317A1 (de) * 1985-08-13 1987-02-19 Tokuyama Soda Kk Sinterbare aluminiumnitridzusammensetzung, sinterkoerper aus dieser zusammensetzung und verfahren zu seiner herstellung
US4719187A (en) * 1985-10-10 1988-01-12 Corning Glass Works Dense sintered bodies of nitride materials
US4897372A (en) * 1985-12-18 1990-01-30 General Electric Company High thermal conductivity ceramic body
DE3608326A1 (de) * 1986-03-13 1987-09-17 Kempten Elektroschmelz Gmbh Praktisch porenfreie formkoerper aus polykristallinem aluminiumnitrid und verfahren zu ihrer herstellung ohne mitverwendung von sinterhilfsmitteln
US4764321A (en) * 1986-03-28 1988-08-16 General Electric Company High thermal conductivity ceramic body
US4783430A (en) * 1986-04-25 1988-11-08 Gte Laboratories Incorporated Process of making high purity aluminum nitride
US4740574A (en) * 1986-05-09 1988-04-26 E. I. Du Pont De Nemours And Company Aluminum nitride structures
US4818455A (en) * 1986-05-30 1989-04-04 General Electric Company High thermal conductivity ceramic body
US4843042A (en) * 1986-06-30 1989-06-27 General Electric Company Alkaline earth fluoride additive for sintering aluminum nitride
JPH0717455B2 (ja) * 1986-07-18 1995-03-01 株式会社トクヤマ 窒化アルミニウム焼結体の製造方法
US4843038A (en) * 1986-11-13 1989-06-27 Narumi China Corporation Black sintered body of aluminum nitride and process for producing the same
US4788167A (en) * 1986-11-20 1988-11-29 Minnesota Mining And Manufacturing Company Aluminum nitride/aluminum oxynitride/group IVB metal nitride abrasive particles derived from a sol-gel process
US4833108A (en) * 1987-03-28 1989-05-23 Narumi China Corporation Sintered body of aluminum nitride
DE3871013D1 (de) * 1987-07-29 1992-06-17 Mitsui Toatsu Chemicals Verfahren zur gewinnung von aluminiumnitrid und daraus hergestelltes sinterprodukt.
US5102749A (en) * 1988-01-27 1992-04-07 W. R. Grace & Co.-Conn. Electronic package comprising aluminum nitride and aluminum nitride-borosilicate glass composite
IL89599A0 (en) * 1988-03-15 1989-09-10 Dow Chemical Co Armor
JPH01252581A (ja) * 1988-03-31 1989-10-09 Taiyo Yuden Co Ltd 窒化物セラミツクスの製造方法
JP2567491B2 (ja) * 1990-04-17 1996-12-25 住友電気工業株式会社 高熱伝導性着色窒化アルミニウム焼結体およびその製造方法
JP2943275B2 (ja) * 1990-08-07 1999-08-30 住友電気工業株式会社 高熱伝導性着色窒化アルミニウム焼結体およびその製造方法
US5336454A (en) * 1993-03-26 1994-08-09 Advanced Ceramics Corporation Ceramic composite and method
JPH07109573A (ja) * 1993-10-12 1995-04-25 Semiconductor Energy Lab Co Ltd ガラス基板および加熱処理方法
JP3100871B2 (ja) * 1995-07-11 2000-10-23 株式会社東芝 窒化アルミニウム焼結体
US7799269B2 (en) * 2007-09-25 2010-09-21 Osram Sylvania Inc. Method of sintering AIN under a methane-containing nitrogen atmosphere

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3572992A (en) * 1967-07-05 1971-03-30 Tokyo Shibaura Electric Co Preparation of moulded and sintered aluminum nitride
GB1285211A (en) 1969-01-09 1972-08-16 United States Borax Chem 31ycompositions for making refractory articles
GB1377487A (en) 1970-12-23 1974-12-18 Tokyo Shibaura Electric Co Heat resistant composite materials
CA1139791A (en) * 1978-06-15 1983-01-18 Yorihiro Murata Sintered silicon carbide-aluminum nitride articles and method of making such articles

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6071576A (ja) * 1983-08-01 1985-04-23 ゼネラル・エレクトリツク・カンパニイ 熱伝導率の大きい窒化アルミニウムセラミツク製品
JPS6065768A (ja) * 1983-09-19 1985-04-15 株式会社トクヤマ 窒化アルミニウム組成物およびその製造方法
JPS6071575A (ja) * 1983-09-26 1985-04-23 株式会社トクヤマ 窒化アルミニウム焼結体及びその製造方法
JPS60151280A (ja) * 1984-01-19 1985-08-09 日本電気株式会社 窒化アルミニウム焼結体の製造方法
JPS60151281A (ja) * 1984-01-19 1985-08-09 日本電気株式会社 窒化アルミニウム焼結体
JPS60178688A (ja) * 1984-02-27 1985-09-12 株式会社東芝 高熱伝導性回路基板
JPS61122168A (ja) * 1984-11-17 1986-06-10 株式会社トクヤマ 窒化アルミニウム焼結体の製造方法
US5242872A (en) * 1986-07-18 1993-09-07 Tokuyama Soda Kabushiki Kaisha Process for producing aluminum nitride sintered body
JPS63236765A (ja) * 1987-03-26 1988-10-03 品川白煉瓦株式会社 窒化アルミニウム焼結体
JPH04254475A (ja) * 1991-06-20 1992-09-09 Toshiba Corp 半導体装置用放熱板
JPH05860A (ja) * 1991-08-26 1993-01-08 Kyocera Corp メタライズ構造
JPH0794645A (ja) * 1994-09-07 1995-04-07 Toshiba Corp 半導体装置
US6271163B1 (en) 1998-07-22 2001-08-07 Sumitomo Electric Industries, Ltd. Aluminum nitride sintered body and method of preparing the same
US6428741B2 (en) 1998-07-22 2002-08-06 Sumitomo Electric Industries, Ltd. Aluminum nitride sintered body and method of preparing the same
KR100353387B1 (ko) * 1998-07-22 2002-09-18 스미토모덴키고교가부시키가이샤 질화알루미늄 소결체 및 그 제조방법
KR20180126142A (ko) * 2017-05-17 2018-11-27 한국세라믹기술원 고온에서 높은 비저항을 갖는 질화알루미늄 소결체 및 그 제조방법

Also Published As

Publication number Publication date
JPH0244787B2 (en, 2012) 1990-10-05
EP0075857A3 (en) 1984-06-20
DE3274347D1 (en) 1987-01-08
EP0075857B1 (en) 1986-11-20
EP0075857A2 (en) 1983-04-06
CA1186346A (en) 1985-04-30
US4435513A (en) 1984-03-06

Similar Documents

Publication Publication Date Title
JPS5855377A (ja) 窒化アルミニウム焼結体の製造方法
KR940011452B1 (ko) 개질된 실리콘 질화물 결합을 갖는 실리콘 탄화물 내화성 제품
JPS5849510B2 (ja) チツカアルミニウムシヨウケツタイノ セイゾウホウホウ
JP3366938B2 (ja) ジルコン酸カルシウム/マグネシア系複合多孔体およびその製造方法
JPS589090A (ja) 逃散性結合剤を含む核燃料物質およびその製造方法
JPS5891065A (ja) 炭化珪素質セラミツクス焼結体の製造法
JPS5950077A (ja) 良熱伝導性窒化アルミニウム焼結体
JPS63277568A (ja) 高熱伝導性窒化アルミニウム焼結体の製造方法
JPS61122168A (ja) 窒化アルミニウム焼結体の製造方法
JP3882070B2 (ja) ジルコン酸カルシウム/スピネル系複合多孔体及びその製造方法
JPS61155210A (ja) 易焼結性窒化アルミニウム粉末の製造方法
JPS6121978A (ja) 窒化アルミニウム焼結体の製造方法
JP2858965B2 (ja) 酸化アルミニウム質焼結体
JP2560237B2 (ja) SiC焼結体とその製造方法
JPS5895654A (ja) サイアロン焼結体
JPS605073A (ja) 炭化ケイ素焼結体及びその製造方法
JPS6059190B2 (ja) アルミナセラミツクスの製造方法
JPS63303864A (ja) サイアロン焼結体の製造方法
JPS6110069A (ja) 高強度緻密窒化珪素焼結体及びその製法
JPH01219062A (ja) 炭化珪素焼結体の製造方法
JPS61227908A (ja) 窒化珪素質焼結体用原料粉末の製法
JPH0517210A (ja) アルミナ基複合焼結体の製造方法及びアルミナ基複合焼結体
JPS5891066A (ja) 炭化珪素質焼結体及びその製造法
JPH04114958A (ja) アルミナ容器及びその製造方法
JPS63151678A (ja) 窒化珪素の焼結助剤及びそれを用いた窒化珪素焼結体の製法