JP7223711B2 - 超伝導集積回路の製造のためのシステム及び方法 - Google Patents

超伝導集積回路の製造のためのシステム及び方法 Download PDF

Info

Publication number
JP7223711B2
JP7223711B2 JP2019562235A JP2019562235A JP7223711B2 JP 7223711 B2 JP7223711 B2 JP 7223711B2 JP 2019562235 A JP2019562235 A JP 2019562235A JP 2019562235 A JP2019562235 A JP 2019562235A JP 7223711 B2 JP7223711 B2 JP 7223711B2
Authority
JP
Japan
Prior art keywords
superconducting
layer
metal layer
depositing
stud
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019562235A
Other languages
English (en)
Japanese (ja)
Other versions
JP2020509608A (ja
JP2020509608A5 (https=
Inventor
ファン，シュイユアン
オ，ビョン，エイチ．
ステッドラー，ダグラス，ピー．
ステルプカ，エドワード，ジー．
ブニク，ポール，アイ．
ウィタカー，ジェド，ディー．
アルトマーレ，ファビオ
ハリス，リチャード，ジー．
エンデルド，コリン，シー．
スウェンソン，ローレン，ジェー．
ラディジンスキー，ニコラス，シー．
ヤオ，ジェイソン，ジェイ．
ラディジンスキー，エリック，ジー．
Original Assignee
ディー－ウェイブ システムズ インコーポレイテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ディー－ウェイブ システムズ インコーポレイテッド filed Critical ディー－ウェイブ システムズ インコーポレイテッド
Publication of JP2020509608A publication Critical patent/JP2020509608A/ja
Publication of JP2020509608A5 publication Critical patent/JP2020509608A5/ja
Application granted granted Critical
Publication of JP7223711B2 publication Critical patent/JP7223711B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0156—Manufacture or treatment of devices comprising Nb or an alloy of Nb with one or more of the elements of group IVB, e.g. titanium, zirconium or hafnium
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0241—Manufacture or treatment of devices comprising nitrides or carbonitrides
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/80—Constructional details
    • H10N60/85—Superconducting active materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N69/00—Integrated devices, or assemblies of multiple devices, comprising at least one superconducting element covered by group H10N60/00
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/031—Manufacture or treatment of conductive parts of the interconnections
    • H10W20/063—Manufacture or treatment of conductive parts of the interconnections by forming conductive members before forming protective insulating material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/031—Manufacture or treatment of conductive parts of the interconnections
    • H10W20/063—Manufacture or treatment of conductive parts of the interconnections by forming conductive members before forming protective insulating material
    • H10W20/0633—Manufacture or treatment of conductive parts of the interconnections by forming conductive members before forming protective insulating material using subtractive patterning of the conductive members
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/031—Manufacture or treatment of conductive parts of the interconnections
    • H10W20/064—Manufacture or treatment of conductive parts of the interconnections by modifying the conductivity of conductive parts, e.g. by alloying
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/031—Manufacture or treatment of conductive parts of the interconnections
    • H10W20/069—Manufacture or treatment of conductive parts of the interconnections by forming self-aligned vias or self-aligned contact plugs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/031—Manufacture or treatment of conductive parts of the interconnections
    • H10W20/069—Manufacture or treatment of conductive parts of the interconnections by forming self-aligned vias or self-aligned contact plugs
    • H10W20/0693—Manufacture or treatment of conductive parts of the interconnections by forming self-aligned vias or self-aligned contact plugs by forming self-aligned vias
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/41—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
    • H10W20/42—Vias, e.g. via plugs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/41—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
    • H10W20/43—Layouts of interconnections
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/41—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
    • H10W20/44—Conductive materials thereof
    • H10W20/4403—Conductive materials thereof based on metals, e.g. alloys, metal silicides
    • H10W20/4437—Conductive materials thereof based on metals, e.g. alloys, metal silicides the principal metal being a transition metal
    • H10W20/4441—Conductive materials thereof based on metals, e.g. alloys, metal silicides the principal metal being a transition metal the principal metal being a refractory metal
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/41—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
    • H10W20/44—Conductive materials thereof
    • H10W20/4484—Superconducting materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/495—Capacitive arrangements or effects of, or between wiring layers
    • H10W20/496—Capacitor integral with wiring layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/497—Inductive arrangements or effects of, or between, wiring layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP2019562235A 2017-02-01 2018-01-31 超伝導集積回路の製造のためのシステム及び方法 Active JP7223711B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201762453358P 2017-02-01 2017-02-01
US62/453,358 2017-02-01
PCT/US2018/016237 WO2018144601A1 (en) 2017-02-01 2018-01-31 Systems and methods for fabrication of superconducting integrated circuits

Publications (3)

Publication Number Publication Date
JP2020509608A JP2020509608A (ja) 2020-03-26
JP2020509608A5 JP2020509608A5 (https=) 2021-03-11
JP7223711B2 true JP7223711B2 (ja) 2023-02-16

Family

ID=63040039

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019562235A Active JP7223711B2 (ja) 2017-02-01 2018-01-31 超伝導集積回路の製造のためのシステム及び方法

Country Status (5)

Country Link
US (2) US11038095B2 (https=)
EP (3) EP4142457B1 (https=)
JP (1) JP7223711B2 (https=)
CN (1) CN110462857B (https=)
WO (1) WO2018144601A1 (https=)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2340572B1 (en) 2008-09-03 2017-07-26 D-Wave Systems Inc. Systems, methods and apparatus for active compensation of quantum processor elements
WO2013180780A2 (en) 2012-03-08 2013-12-05 D-Wave Systems Inc. Systems and methods for fabrication of superconducting integrated circuits
US11038095B2 (en) 2017-02-01 2021-06-15 D-Wave Systems Inc. Systems and methods for fabrication of superconducting integrated circuits
EP3516596B1 (en) 2017-09-13 2022-05-11 Google LLC Hybrid kinetic inductance devices for superconducting quantum computing
US20200152851A1 (en) 2018-11-13 2020-05-14 D-Wave Systems Inc. Systems and methods for fabricating superconducting integrated circuits
US12102017B2 (en) 2019-02-15 2024-09-24 D-Wave Systems Inc. Kinetic inductance for couplers and compact qubits
JP7197013B2 (ja) * 2019-07-19 2022-12-27 日本電気株式会社 発振装置、量子計算機、及び制御方法
US11955929B2 (en) 2019-07-19 2024-04-09 Nec Corporation Oscillation apparatus, quantum computer, and control method
US12367412B2 (en) 2019-12-05 2025-07-22 1372934 B.C. Ltd. Systems and methods for fabricating flux trap mitigating superconducting integrated circuits
US12598922B2 (en) 2020-01-17 2026-04-07 D-Wave Systems Inc. Systems and methods for fabricating superconducting integrated circuits
FR3106935B1 (fr) * 2020-02-05 2022-01-14 Thales Sa Procede de fabrication d'un dispositif electronique comportant au moins une zone supraconductrice et dispositif associe
WO2021231224A1 (en) * 2020-05-11 2021-11-18 D-Wave Systems Inc. Kinetic inductance devices, methods for fabricating kinetic inductance devices, and articles employing the same
CN113257552B (zh) * 2020-05-20 2022-03-04 阿里巴巴集团控股有限公司 电感元件的制备方法、设备、电感元件及超导电路
WO2021262741A1 (en) * 2020-06-23 2021-12-30 D-Wave Systems Inc. Methods for fabricating superconducting integrated circuits
CN111933787B (zh) * 2020-08-20 2022-09-06 中国科学院上海微系统与信息技术研究所 超导连接通道及其制备方法
US11558955B2 (en) * 2020-11-17 2023-01-17 International Business Machines Corporation Ground discontinuities for thermal isolation
WO2022178130A1 (en) * 2021-02-19 2022-08-25 D-Wave Systems Inc. Systems and methods for fabrication of superconducting integrated circuits with improved coherence
CN118339566A (zh) 2021-06-11 2024-07-12 西克公司 针对超导量子电路的通量偏置的系统和方法
US20240260486A1 (en) * 2021-07-20 2024-08-01 1372934 B.C. Ltd. Systems and methods for quantum computing using fluxonium qubits with kinetic inductors
US20230134994A1 (en) * 2021-11-02 2023-05-04 Raytheon Company Systems and methods for nitridization of niobium traces
US12392823B2 (en) 2021-11-05 2025-08-19 D-Wave Systems Inc. Systems and methods for on-chip noise measurements
FR3129249B1 (fr) * 2021-11-18 2024-01-12 Commissariat Energie Atomique Procede de réalisation d'interconnexions supraconductrices
US12156484B2 (en) * 2021-12-23 2024-11-26 Trading Technologies International, Inc. Fabrication stack for high integration density superconducting digital circuits
US11809839B2 (en) 2022-01-18 2023-11-07 Robert Lyden Computer language and code for application development and electronic and optical communication
CN114496915B (zh) * 2022-01-28 2025-03-25 中国科学院上海微系统与信息技术研究所 应用于超导集成电路的堆栈式电连接结构及其制备方法
CN114944380B (zh) * 2022-06-07 2024-08-13 本源量子计算科技（合肥）股份有限公司 测试结构、量子芯片及其制作和测试方法
US12431389B2 (en) * 2022-07-29 2025-09-30 Imec Vzw Superconductive interconnect structure
CA3263651A1 (en) * 2022-08-09 2024-05-16 1372934 B.C. Ltd. SYSTEMS AND METHODS FOR MANUFACTURING SUPERCONDUCTIVE INTEGRATED CIRCUITS HAVING INVERTED CHIP ARRANGEMENTS WITH HIGH-COHERENCE DEVICES
CN115514336B (zh) * 2022-09-30 2024-08-13 本源量子计算科技（合肥）股份有限公司 阻抗匹配电路、测试装置、及量子计算机

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005039244A (ja) 2003-06-27 2005-02-10 Hitachi Ltd 電子デバイスとその多層配線の形成方法

Family Cites Families (187)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2223867B1 (https=) 1973-03-30 1978-10-27 Air Liquide
US4028714A (en) 1974-12-31 1977-06-07 International Business Machines Corporation Ultralow-power, micro-miniaturized Josephson devices having high inductance
US4454522A (en) 1981-11-05 1984-06-12 The Board Of Trustees Of The Leland Stanford Junior University Microbridge superconducting device having support with stepped parallel surfaces
US4490733A (en) 1982-10-15 1984-12-25 Sperry Corporation Josephson device with tunneling barrier having low density of localized states and enhanced figures of merit
US4554567A (en) * 1983-03-21 1985-11-19 Sperry Corporation Superconductive integrated circuit incorporating a magnetically controlled interferometer
JPS60140885A (ja) 1983-12-28 1985-07-25 Hitachi Ltd 超電導素子集積回路
US4749888A (en) 1984-01-25 1988-06-07 Agency Of Industrial Science & Technology Josephson transmission line device
US4689559A (en) 1984-11-13 1987-08-25 Sperry Corporation Apparatus and method to reduce the thermal response of SQUID sensors
DE3604202C2 (de) 1985-02-14 1997-01-09 Nippon Denso Co Direkt beheizte Strömungsmeßvorrichtung
JPS6215869A (ja) 1985-07-13 1987-01-24 Nippon Telegr & Teleph Corp <Ntt> ジヨセフソン素子の作製方法
JPS6257263A (ja) 1985-09-06 1987-03-12 Agency Of Ind Science & Technol ジヨセフソン集積回路の製造方法
JPS62200777A (ja) 1986-02-28 1987-09-04 Fujitsu Ltd 超伝導薄膜の加工方法
JPS637675A (ja) 1986-06-28 1988-01-13 Agency Of Ind Science & Technol 超伝導装置の製造方法
JPS63226981A (ja) 1987-03-16 1988-09-21 Fujitsu Ltd 超伝導集積回路装置およびその製造方法
JPH073009Y2 (ja) 1987-07-10 1995-01-30 昭和アルミニウム株式会社 吸気マニホルド
JPS6476610A (en) 1987-09-17 1989-03-22 Fujitsu Ltd Superconductive composite material
US5162298A (en) 1988-02-16 1992-11-10 International Business Machines Corporation Grain boundary junction devices using high tc superconductors
US5084438A (en) 1988-03-23 1992-01-28 Nec Corporation Electronic device substrate using silicon semiconductor substrate
JPH027583A (ja) 1988-06-27 1990-01-11 Nippon Telegr & Teleph Corp <Ntt> 磁束量子素子
DE68926947T2 (de) 1988-12-09 1997-01-30 Canon Kk Supraleitender elektromagnetischer Wellenmischer und diesen enthaltendes Gerät
US5087605A (en) 1989-06-01 1992-02-11 Bell Communications Research, Inc. Layered lattice-matched superconducting device and method of making
DE69026339T2 (de) 1989-11-13 1996-08-14 Fujitsu Ltd Josephson-Übergang-Apparat
DE69020127T2 (de) 1989-12-29 1995-10-26 Fujitsu Ltd Josephson-integrierte Schaltung mit einem Widerstandselement.
JPH03286578A (ja) 1990-04-03 1991-12-17 Nec Corp ニオブ膜エッチング用アルミニウムマスクの加工方法
FR2662856B1 (fr) * 1990-06-01 1997-01-24 Thomson Csf Dispositifs haute frequence accordables.
JPH0472777A (ja) 1990-07-13 1992-03-06 Sumitomo Electric Ind Ltd 超電導デバイス用基板
EP0476844A1 (en) 1990-09-21 1992-03-25 Trw Inc. Method for fabricating Josephson tunnel junctions with accurate junction area control
US5627139A (en) 1990-09-24 1997-05-06 The Regents Of The University Of California High-temperature superconducting josephson devices having a barrier layer of a doped, cubic crystalline, conductive oxide material
US5055158A (en) 1990-09-25 1991-10-08 International Business Machines Corporation Planarization of Josephson integrated circuit
US5962866A (en) 1991-01-22 1999-10-05 Biomagnetic Technologies, Inc. Microbridge superconductor device utilizing stepped junctions
US5157466A (en) 1991-03-19 1992-10-20 Conductus, Inc. Grain boundary junctions in high temperature superconductor films
US5880069A (en) 1991-04-11 1999-03-09 Sanyo Electric Co., Ltd. Process of making high Tc Josephson junction device
JP2500302B2 (ja) 1991-05-09 1996-05-29 株式会社日立製作所 超電導素子及び超電導回路
JPH05102547A (ja) 1991-05-30 1993-04-23 Fujitsu Ltd ジヨセフソン集積回路装置の製造方法
JPH05251777A (ja) 1991-12-13 1993-09-28 Sumitomo Electric Ind Ltd 超電導電界効果型素子およびその作製方法
US5274249A (en) 1991-12-20 1993-12-28 University Of Maryland Superconducting field effect devices with thin channel layer
JPH05190922A (ja) 1992-01-09 1993-07-30 Hitachi Ltd 量子メモリ装置
JP2964112B2 (ja) 1992-08-11 1999-10-18 セイコーインスツルメンツ株式会社 直流駆動型超伝導量子干渉素子
US5250817A (en) 1992-08-12 1993-10-05 Microelectronics And Computer Technology Corporation Alkali barrier superconductor Josephson junction and circuit
US5358928A (en) 1992-09-22 1994-10-25 Sandia Corporation High temperature superconductor step-edge Josephson junctions using Ti-Ca-Ba-Cu-O
US5290761A (en) 1992-10-19 1994-03-01 E. I. Du Pont De Nemours And Company Process for making oxide superconducting films by pulsed excimer laser ablation
JPH0817252B2 (ja) 1993-03-05 1996-02-21 工業技術院長 電流注入型ジョゼフソン論理ゲートとその集積回路
US6051846A (en) 1993-04-01 2000-04-18 The United States Of America As Represented By The Secretary Of The Navy Monolithic integrated high-Tc superconductor-semiconductor structure
US5323520A (en) 1993-04-29 1994-06-28 Fujitsu Limited Process for fabricating a substrate with thin film capacitor
JPH0766462A (ja) 1993-08-24 1995-03-10 Seiko Instr Inc 超伝導回路
JPH07245404A (ja) 1994-03-04 1995-09-19 Matsushita Electric Ind Co Ltd 薄膜トランジスタおよびその電気的接続構造と薄膜トランジスタ型液晶表示装置
US5672212A (en) 1994-07-01 1997-09-30 Texas Instruments Incorporated Rotational megasonic cleaner/etcher for wafers
US5514974A (en) * 1994-10-12 1996-05-07 International Business Machines Corporation Test device and method for signalling metal failure of semiconductor wafer
KR0148596B1 (ko) 1994-11-28 1998-10-15 양승택 결정 입계 채널을 갖는 초전도 전계효과 소자와 그 제조방법
JPH08236823A (ja) 1994-12-28 1996-09-13 Fujitsu Ltd 超伝導放射線検出装置及びその製造方法
US5767043A (en) 1995-02-21 1998-06-16 Conductus, Inc. Multiple squid direct signal injection device formed on a single layer substrate
JP3329127B2 (ja) 1995-03-24 2002-09-30 松下電器産業株式会社 超伝導発振器
JPH0936449A (ja) 1995-07-24 1997-02-07 Kokusai Chodendo Sangyo Gijutsu Kenkyu Center ジョセフソン素子
WO1997015955A1 (en) 1995-10-24 1997-05-01 The Regents Of The University Of California High temperature superconducting josephson junctions and squids
US5804251A (en) 1995-12-29 1998-09-08 Intel Corporation Low temperature aluminum alloy plug technology
JP3690619B2 (ja) 1996-01-12 2005-08-31 忠弘 大見 洗浄方法及び洗浄装置
US6011981A (en) 1996-03-12 2000-01-04 International Superconductivity Technology Center Oxide superconductor multilayered film and oxide superconductor josephson device
JPH104223A (ja) 1996-06-18 1998-01-06 Kokusai Chodendo Sangyo Gijutsu Kenkyu Center 酸化物超電導体ジョセフソン素子
US5863868A (en) 1996-04-08 1999-01-26 Trw Inc. Superconductive quantum interference device for digital logic circuits
US5776863A (en) 1996-07-08 1998-07-07 Trw Inc. In-situ fabrication of a superconductor hetero-epitaxial Josephson junction
US5892243A (en) 1996-12-06 1999-04-06 Trw Inc. High-temperature SSNS and SNS Josephson junction and method of making junction
US6284721B1 (en) 1997-01-21 2001-09-04 Ki Won Lee Cleaning and etching compositions
US6767840B1 (en) 1997-02-21 2004-07-27 Canon Kabushiki Kaisha Wafer processing apparatus, wafer processing method, and semiconductor substrate fabrication method
US5962865A (en) 1997-04-11 1999-10-05 Trw Inc. Low inductance superconductive integrated circuit and method of fabricating the same
US5889289A (en) 1997-08-28 1999-03-30 The United States Of America As Represented By The Secretary Of The Navy High temperature superconductor/insulator composite thin films with Josephson coupled grains
KR20010024096A (ko) 1997-09-18 2001-03-26 메르다드 엠. 모슬레히 고성능 집적 회로 배선 제조 방법 및 장치
JP3278638B2 (ja) 1998-09-01 2002-04-30 日本電気株式会社 高温超伝導ジョセフソン接合およびその製造方法
US6110392A (en) 1998-09-18 2000-08-29 Trw Inc. Process for reducing surface roughness of superconductor integrated circuit having a ground plane of niobium nitride of improved smoothness
KR100283858B1 (ko) 1998-10-22 2001-04-02 정명세 초전도 소자 제조방법
US6715944B2 (en) 1998-11-12 2004-04-06 Mitsubishi Denki Kabushiki Kaisha Apparatus for removing photoresist film
US20030089987A1 (en) * 1999-02-05 2003-05-15 Suketu A. Parikh Dual damascene misalignment tolerant techniques for vias and sacrificial etch segments
US6188919B1 (en) 1999-05-19 2001-02-13 Trw Inc. Using ion implantation to create normal layers in superconducting-normal-superconducting Josephson junctions
US6362638B1 (en) 1999-09-01 2002-03-26 Agere Systems Guardian Corp. Stacked via Kelvin resistance test structure for measuring contact anomalies in multi-level metal integrated circuit technologies
JP2001111123A (ja) 1999-10-12 2001-04-20 Sumitomo Electric Ind Ltd Ｓｑｕｉｄ素子
US7015499B1 (en) 1999-12-01 2006-03-21 D-Wave Systems, Inc. Permanent readout superconducting qubit
KR100372889B1 (ko) 1999-12-21 2003-02-19 한국전자통신연구원 경사형 모서리 조셉슨 접합소자 및 그 제조방법
US6495854B1 (en) 1999-12-30 2002-12-17 International Business Machines Corporation Quantum computing with d-wave superconductors
US6459097B1 (en) 2000-01-07 2002-10-01 D-Wave Systems Inc. Qubit using a Josephson junction between s-wave and d-wave superconductors
AU2001253606A1 (en) * 2000-04-17 2001-10-30 Board Of Regents, The University Of Texas System Electromigration early failure distribution in submicron interconnects
US6624122B1 (en) 2000-06-21 2003-09-23 The Regents Of The University Of California High critical current superconducting tapes
US7539875B1 (en) 2000-06-27 2009-05-26 Microsoft Corporation Secure repository with layers of tamper resistance and system and method for providing same
US6569252B1 (en) 2000-06-30 2003-05-27 International Business Machines Corporation Semi-aqueous solvent cleaning of paste processing residue from substrates
US6440870B1 (en) 2000-07-12 2002-08-27 Applied Materials, Inc. Method of etching tungsten or tungsten nitride electrode gates in semiconductor structures
US6517944B1 (en) 2000-08-03 2003-02-11 Teracomm Research Inc. Multi-layer passivation barrier for a superconducting element
US6627915B1 (en) 2000-08-11 2003-09-30 D-Wave Systems, Inc. Shaped Josephson junction qubits
US20020117738A1 (en) 2000-12-22 2002-08-29 Amin Mohammad H.S. Quantum bit with a multi-terminal junction and loop with a phase shift
WO2002069411A2 (en) 2000-12-22 2002-09-06 D-Wave Systems, Inc. Phase shift device in superconductor logic
JP2002286959A (ja) 2000-12-28 2002-10-03 Canon Inc 半導体装置、光電融合基板、及びそれらの製造方法
US6627916B2 (en) 2001-03-31 2003-09-30 D-Wave Systems, Inc. High sensitivity, directional DC-squid magnetometer
US6420189B1 (en) 2001-04-27 2002-07-16 Advanced Micro Devices, Inc. Superconducting damascene interconnected for integrated circuit
US20020180006A1 (en) 2001-05-31 2002-12-05 Marcel Franz Ferroelectric-superconductor heterostructures in solid state quantum computing systems
US6803599B2 (en) 2001-06-01 2004-10-12 D-Wave Systems, Inc. Quantum processing system for a superconducting phase qubit
US6531731B2 (en) 2001-06-15 2003-03-11 Motorola, Inc. Integration of two memory types on the same integrated circuit
US6518673B2 (en) 2001-06-15 2003-02-11 Trw Inc. Capacitor for signal propagation across ground plane boundaries in superconductor integrated circuits
KR20040032093A (ko) 2001-08-22 2004-04-14 재단법인 국제 초전도 산업기술연구 센터 고온 초전도 조지프슨 접합, 이를 구비한 초전도 전자장치 및 고온 초전도 조지프슨 접합의 형성 방법
US20030068832A1 (en) 2001-08-29 2003-04-10 Yuri Koval Submicron closed-form josephson junctions
US6979836B2 (en) 2001-08-29 2005-12-27 D-Wave Systems, Inc. Superconducting low inductance qubit
US20030107033A1 (en) 2001-12-06 2003-06-12 Alexander Tzalenchuk Trilayer heterostructure junctions
WO2003019683A2 (en) 2001-08-29 2003-03-06 D-Wave Systems, Inc. Trilayer heterostructure josephson junctions
US20030102470A1 (en) 2001-08-30 2003-06-05 Evgeni Il'ichev Oxygen doping of josephson junctions
JP4711249B2 (ja) * 2002-08-01 2011-06-29 独立行政法人産業技術総合研究所 超伝導集積回路及びその作製方法
JP2004079882A (ja) 2002-08-21 2004-03-11 National Institute Of Advanced Industrial & Technology ジョセフソン接合の作成方法及び装置
US20040087081A1 (en) 2002-11-01 2004-05-06 Aitchison Bradley J. Capacitor fabrication methods and capacitor structures including niobium oxide
US7060508B2 (en) * 2003-02-12 2006-06-13 Northrop Grumman Corporation Self-aligned junction passivation for superconductor integrated circuit
US20040191697A1 (en) 2003-03-24 2004-09-30 Communications Research Laboratory Method for processing a niobium type thin film and method for manufacturing a superconducting integrated circuit
JP2004303820A (ja) 2003-03-28 2004-10-28 Fujitsu Ltd 超伝導回路
CN100346491C (zh) 2003-06-18 2007-10-31 南京大学 高温超导材料本征结的制备方法
US7081417B2 (en) * 2003-06-27 2006-07-25 Hitachi, Ltd. Manufacturing method for electronic device and multiple layer circuits thereof
US7091132B2 (en) 2003-07-24 2006-08-15 Applied Materials, Inc. Ultrasonic assisted etch using corrosive liquids
US20050062131A1 (en) 2003-09-24 2005-03-24 Murduck James Matthew A1/A1Ox/A1 resistor process for integrated circuits
WO2005041264A2 (en) 2003-10-23 2005-05-06 Star Cryoelectronics, Llc Charge dissipative dielectric for cryogenic devices
US20050250651A1 (en) 2004-03-29 2005-11-10 Amin Mohammad H S Adiabatic quantum computation with superconducting qubits
CN100585629C (zh) 2004-12-23 2010-01-27 D-波系统公司 包括量子装置的模拟处理器
US7533068B2 (en) 2004-12-23 2009-05-12 D-Wave Systems, Inc. Analog processor comprising quantum devices
US7619437B2 (en) 2004-12-30 2009-11-17 D-Wave Systems, Inc. Coupling methods and architectures for information processing
US7341978B2 (en) 2005-03-04 2008-03-11 Lsi Logic Corporation Superconductor wires for back end interconnects
US7639035B2 (en) 2005-04-26 2009-12-29 D-Wave Systems, Inc. Qubit state copying
US7898282B2 (en) 2005-04-26 2011-03-01 D-Wave Systems Inc. Systems, devices, and methods for controllably coupling qubits
US7624088B2 (en) 2005-08-03 2009-11-24 D-Wave Systems Inc. Analog processor comprising quantum devices
KR100753049B1 (ko) 2005-11-28 2007-08-30 주식회사 하이닉스반도체 반도체소자의 스토리지노드콘택플러그 형성 방법
WO2007085074A1 (en) 2006-01-27 2007-08-02 D-Wave Systems, Inc. Methods of adiabatic quantum computation
US7518481B2 (en) * 2006-06-30 2009-04-14 Intel Corporation Slotted magnetic material for integrated circuit inductors
DE102006040585B4 (de) 2006-08-30 2013-02-07 Infineon Technologies Ag Verfahren zum Auffüllen eines Grabens in einem Halbleiterprodukt
US7615385B2 (en) 2006-09-20 2009-11-10 Hypres, Inc Double-masking technique for increasing fabrication yield in superconducting electronics
CA2669816C (en) 2006-12-05 2017-03-07 D-Wave Systems, Inc. Systems, methods and apparatus for local programming of quantum processor elements
WO2008083498A1 (en) 2007-01-12 2008-07-17 D-Wave Systems, Inc. Systems, devices and methods for interconnected processor topology
US7843209B2 (en) 2007-04-25 2010-11-30 D-Wave Systems Inc. Architecture for local programming of quantum processor elements using latching qubits
US8098179B2 (en) 2007-05-14 2012-01-17 D-Wave Systems Inc. Systems, methods and apparatus for digital-to-analog conversion of superconducting magnetic flux signals
US20090033353A1 (en) * 2007-07-31 2009-02-05 Pdf Solutions Systems and methods for electrical characterization of inter-layer alignment
CN101868802B (zh) 2007-09-24 2013-12-25 D-波系统公司 用于量子位状态读出的系统、方法以及装置
JP2009111306A (ja) 2007-11-01 2009-05-21 Hitachi Ltd ジョセフソン接合を備えた電子デバイスとその製造方法
US8190548B2 (en) 2007-11-08 2012-05-29 D-Wave Systems Inc. Systems, devices, and methods for analog processing
US7871902B2 (en) 2008-02-13 2011-01-18 Infineon Technologies Ag Crack stop trenches
CA2719343C (en) 2008-03-24 2017-03-21 Paul Bunyk Systems, devices, and methods for analog processing
JP2011524131A (ja) 2008-06-03 2011-08-25 ディー−ウェイブ システムズ，インコーポレイテッド 超伝導デマルチプレクサ回路用のシステム、方法、および装置
US8179133B1 (en) 2008-08-18 2012-05-15 Hypres, Inc. High linearity superconducting radio frequency magnetic field detector
EP2340572B1 (en) 2008-09-03 2017-07-26 D-Wave Systems Inc. Systems, methods and apparatus for active compensation of quantum processor elements
EP3098865B1 (en) 2009-02-27 2018-10-03 D-Wave Systems Inc. Method for fabricating a superconducting integrated circuit
US8571614B1 (en) * 2009-10-12 2013-10-29 Hypres, Inc. Low-power biasing networks for superconducting integrated circuits
US8301214B1 (en) 2010-01-08 2012-10-30 Hypres, Inc. System and method for providing multi-conductive layer metallic interconnects for superconducting integrated circuits
CA2814865C (en) 2010-11-11 2019-02-19 D-Wave Systems Inc. Systems and methods for superconducting flux qubit readout
US9761666B2 (en) 2011-06-16 2017-09-12 Taiwan Semiconductor Manufacturing Company, Ltd. Strained channel field effect transistor
US8987181B2 (en) 2011-11-08 2015-03-24 Dynaloy, Llc Photoresist and post etch residue cleaning solution
US9355362B2 (en) 2011-11-11 2016-05-31 Northrop Grumman Systems Corporation Quantum bits and method of forming the same
JP5771137B2 (ja) 2011-12-21 2015-08-26 公益財団法人国際超電導産業技術研究センター 高温超電導磁気センサ
WO2013180780A2 (en) 2012-03-08 2013-12-05 D-Wave Systems Inc. Systems and methods for fabrication of superconducting integrated circuits
US8644898B1 (en) 2012-05-01 2014-02-04 The United States Of America As Represented By The Secretary Of The Navy Superconductor device having a pattern of engineered defects for controlling magnetic flux
US8742594B2 (en) 2012-09-14 2014-06-03 International Business Machines Corporation Structure and method of making an offset-trench crackstop that forms an air gap adjacent to a passivated metal crackstop
US9329227B2 (en) * 2012-10-24 2016-05-03 Nvidia Corporation Method and apparatus for testing interconnection reliability of a ball grid array on a testing printed circuit board
HUE053159T2 (hu) 2013-03-15 2021-06-28 Intra Cellular Therapies Inc Szerves vegyületek
US9495644B2 (en) 2013-07-24 2016-11-15 D-Wave Systems Inc. Systems and methods for improving the performance of a quantum processor by reducing errors
US20160170675A1 (en) 2013-07-30 2016-06-16 SMART Storage Systems, Inc. Superconducting Fiber and Efficient Cryogenic Cooling
US9183508B2 (en) 2013-08-07 2015-11-10 D-Wave Systems Inc. Systems and devices for quantum processor architectures
US9741918B2 (en) * 2013-10-07 2017-08-22 Hypres, Inc. Method for increasing the integration level of superconducting electronics circuits, and a resulting circuit
US9634224B2 (en) 2014-02-14 2017-04-25 D-Wave Systems Inc. Systems and methods for fabrication of superconducting circuits
US9520180B1 (en) * 2014-03-11 2016-12-13 Hypres, Inc. System and method for cryogenic hybrid technology computing and memory
JP6059754B2 (ja) 2014-03-20 2017-01-11 富士フイルム株式会社 組成物、硬化性組成物、透明膜、固体撮像素子および表示装置
EP3195377B1 (en) 2014-08-13 2021-12-15 D-Wave Systems Inc. Method of forming superconducting wiring layers with low magnetic noise
US9685935B2 (en) 2014-09-12 2017-06-20 Northrop Grumman Systems Corporation Tunable transmon circuit assembly
US9971970B1 (en) * 2015-04-27 2018-05-15 Rigetti & Co, Inc. Microwave integrated quantum circuits with VIAS and methods for making the same
US10381542B2 (en) 2015-04-30 2019-08-13 International Business Machines Corporation Trilayer Josephson junction structure with small air bridge and no interlevel dielectric for superconducting qubits
EP3266063B1 (en) * 2015-05-14 2020-03-18 D-Wave Systems Inc. Frequency multiplexed resonator input and/or output for a superconducting device
JP6945553B2 (ja) 2016-05-03 2021-10-06 ディー−ウェイブ システムズ インコーポレイテッド 超伝導回路及びスケーラブルな計算において使用される超伝導デバイスのためのシステム及び方法
WO2017217959A1 (en) * 2016-06-13 2017-12-21 Intel Corporation Suspended josephson junctions
EP3497726A4 (en) * 2016-08-15 2020-04-08 INTEL Corporation Stripline and microstrip transmission lines for qubits
US10312141B2 (en) 2016-08-16 2019-06-04 Northrop Grumman Systems Corporation Preclean methodology for superconductor interconnect fabrication
US20190164959A1 (en) 2016-09-29 2019-05-30 Intel Corporation On-chip control logic for qubits
US10528886B2 (en) 2016-10-06 2020-01-07 D-Wave Systems Inc. Quantum flux parametron based structures (e.g., muxes, demuxes, shift registers), addressing lines and related methods
EP3563309B1 (en) 2016-12-29 2024-03-13 Google LLC Selective capping to reduce quantum bit dephasing
US11038095B2 (en) 2017-02-01 2021-06-15 D-Wave Systems Inc. Systems and methods for fabrication of superconducting integrated circuits
AU2017404536B2 (en) 2017-03-13 2020-05-14 Google Llc Integrating circuit elements in a stacked quantum computing device
US10141493B2 (en) 2017-04-11 2018-11-27 Microsoft Technology Licensing, Llc Thermal management for superconducting interconnects
US10276504B2 (en) 2017-05-17 2019-04-30 Northrop Grumman Systems Corporation Preclean and deposition methodology for superconductor interconnects
US11295225B2 (en) 2017-07-07 2022-04-05 D-Wave Systems Inc. Superconducting quantum processor and method of operating same
EP3516596B1 (en) 2017-09-13 2022-05-11 Google LLC Hybrid kinetic inductance devices for superconducting quantum computing
US10847705B2 (en) 2018-02-15 2020-11-24 Intel Corporation Reducing crosstalk from flux bias lines in qubit devices
US10243132B1 (en) 2018-03-23 2019-03-26 International Business Machines Corporation Vertical josephson junction superconducting device
US20200266234A1 (en) 2018-04-20 2020-08-20 D-Wave Systems Inc. Systems and methods for fabrication of superconducting devices
US11105866B2 (en) 2018-06-05 2021-08-31 D-Wave Systems Inc. Dynamical isolation of a cryogenic processor
US20200152851A1 (en) 2018-11-13 2020-05-14 D-Wave Systems Inc. Systems and methods for fabricating superconducting integrated circuits
US12102017B2 (en) 2019-02-15 2024-09-24 D-Wave Systems Inc. Kinetic inductance for couplers and compact qubits
IL286613B2 (en) 2019-04-19 2024-06-01 Ibm Structures and fabrication methods for qubit frequency tuning for chip devices of quantum computing
US12367412B2 (en) 2019-12-05 2025-07-22 1372934 B.C. Ltd. Systems and methods for fabricating flux trap mitigating superconducting integrated circuits
WO2021231224A1 (en) 2020-05-11 2021-11-18 D-Wave Systems Inc. Kinetic inductance devices, methods for fabricating kinetic inductance devices, and articles employing the same
US20210375516A1 (en) 2020-05-29 2021-12-02 D-Wave Systems Inc. Superconducting tunable inductance
WO2021262741A1 (en) 2020-06-23 2021-12-30 D-Wave Systems Inc. Methods for fabricating superconducting integrated circuits
WO2022178130A1 (en) 2021-02-19 2022-08-25 D-Wave Systems Inc. Systems and methods for fabrication of superconducting integrated circuits with improved coherence

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005039244A (ja) 2003-06-27 2005-02-10 Hitachi Ltd 電子デバイスとその多層配線の形成方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
TOLPYGO, Sergey K. et al.，Advanced Fabrication Processes for Superconducting Very Large-Scale Integrated Circuits，IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY，2016年01月19日，VOL. 26, NO. 3，1100110，DOI: 10.1109/TASC.2016.2519388

Also Published As

Publication number Publication date
EP4443484A2 (en) 2024-10-09
JP2020509608A (ja) 2020-03-26
EP3577700B1 (en) 2022-03-30
WO2018144601A1 (en) 2018-08-09
EP4142457A1 (en) 2023-03-01
US11957065B2 (en) 2024-04-09
US20200144476A1 (en) 2020-05-07
US20210384406A1 (en) 2021-12-09
EP4443484A3 (en) 2025-01-08
US11038095B2 (en) 2021-06-15
EP3577700A4 (en) 2020-10-07
EP4142457B1 (en) 2024-07-10
CN110462857A (zh) 2019-11-15
CN110462857B (zh) 2024-02-27
EP3577700A1 (en) 2019-12-11

Similar Documents

Publication Publication Date Title
JP7223711B2 (ja) 超伝導集積回路の製造のためのシステム及び方法
US12369501B2 (en) Systems and methods for fabrication of superconducting integrated circuits
TWI401745B (zh) Semiconductor device and manufacturing method thereof
US11855128B2 (en) Metal insulator metal (MIM) structure and manufacturing method thereof
CN110495001A (zh) 磁性隧穿接合元件制程/前图案化的晶种层的整合方法
WO2018065833A1 (en) Superconducting electronic integrated circuit
CN114093813A (zh) 一种用于半导体器件的接触孔的制作方法
US11882771B2 (en) Smooth metal layers in Josephson junction devices
US12148617B2 (en) Structure and method to pattern pitch lines
US20230134994A1 (en) Systems and methods for nitridization of niobium traces
CN110047799A (zh) 半导体器件的制造方法及半导体器件
US20230187355A1 (en) Method to Produce Buried Nb Lines Surrounded by Ti
WO2025186511A1 (en) Electrical junction structure
US20230055603A1 (en) Enhanced patterning process for qubit fabrication
JP2010165762A (ja) 半導体装置及びその製造方法
CN120239565A (zh) 半导体结构及形成方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20210125

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20210125

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20220311

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20220405

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220906

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20221214

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20221220

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20230206

R150 Certificate of patent or registration of utility model

Ref document number: 7223711

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250