JP4650831B2 - 基板キャリアを支持する場所を変更するための方法および装置 - Google Patents
基板キャリアを支持する場所を変更するための方法および装置 Download PDFInfo
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- JP4650831B2 JP4650831B2 JP2005205939A JP2005205939A JP4650831B2 JP 4650831 B2 JP4650831 B2 JP 4650831B2 JP 2005205939 A JP2005205939 A JP 2005205939A JP 2005205939 A JP2005205939 A JP 2005205939A JP 4650831 B2 JP4650831 B2 JP 4650831B2
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- substrate carrier
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67775—Docking arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
2003年8月28日に出願された発明の名称が「System For Transporting Substrate Carriers」である米国特許出願第10/650,310号(代理人整理番号第6900号);および
2003年8月28日に出願された発明の名称が「Substrate Carrier Handler That Unloads Substrate Carriers Directly From a Moving Conveyor」である米国特許出願第10/650,480号(代理人整理番号第7676号)。
Claims (30)
- エンドエフェクターによって支持される場所を変更するための方法であって、
エンドエフェクターを使用して基板キャリアの底部によって基板キャリアを支持するステップと、
基板キャリアをエンドエフェクターから中間支持ロケーションに移送するステップであって、中間支持ロケーションは、基板キャリアの底部によって基板キャリアを支持するステップと、
エンドエフェクターを基板キャリアのオーバーヘッド移送フランジの近くに再配置するステップと、
エンドエフェクターを使用して基板キャリアのオーバーヘッド移送フランジによって基板キャリアを支持するステップと、
基板キャリアを中間支持ロケーションから移送するステップと、
を含む方法。 - エンドエフェクターを使用して基板キャリアの底部によって基板キャリアを支持するステップが、エンドエフェクターの上側部を使用して基板キャリアの底部によって基板キャリアを支持する工程を含む、請求項1に記載の方法。
- エンドエフェクターを使用して基板キャリアのオーバーヘッド移送フランジによって基板キャリアを支持するステップが、エンドエフェクターの底側部を使用して基板キャリアのオーバーヘッド移送フランジによって基板キャリアを支持する工程を含む、請求項1に記載の方法。
- エンドエフェクターを基板キャリアのオーバーヘッド移送フランジの近くに再配置するステップが、基板キャリアから横方向にずれた領域においてエンドエフェクターを垂直方向に動かす工程を含む、請求項1に記載の方法。
- 基板キャリアをエンドエフェクターから中間支持ロケーションに移送するステップが、中間支持ロケーションの上側部上に存在するピンが基板キャリアの底部に存在する対応するスロットに結合するように、かつ、エンドエフェクターの上側部上に存在するピンが基板キャリアの底部に存在する対応するスロットにもはや結合しないようにエンドエフェクターを動かす工程を含む、請求項1に記載の方法。
- 基板キャリアを中間支持ロケーションから移送するステップが、エンドエフェクターの底側部に結合されたピンが基板キャリアのオーバーヘッド移送フランジの対応するスロットに結合するように、かつ、中間支持ロケーションの上側部上に存在するピンが基板キャリアの底部に存在する対応するスロットにもはや結合しないようにエンドエフェクターを動かす工程を含む、請求項1に記載の方法。
- エンドエフェクターによって支持される場所を変更するための方法であって、
エンドエフェクターを使用して基板キャリアのオーバーヘッド移送フランジによって基板キャリアを支持するステップと、
基板キャリアをエンドエフェクターから中間支持ロケーションに移送するステップであって、中間支持ロケーションは、基板キャリアの底部によって基板キャリアを支持するステップと、
エンドエフェクターを基板キャリアの底部の近くに再配置するステップと、
エンドエフェクターを使用して基板キャリアの底部によって基板キャリアを支持するステップと、
基板キャリアを中間支持ロケーションから移送するステップと、
を含む方法。 - エンドエフェクターを使用して基板キャリアのオーバーヘッド移送フランジによって基板キャリアを支持するステップが、エンドエフェクターの底側部を使用して基板キャリアのオーバーヘッド移送フランジによって基板キャリアを支持する工程を含む、請求項7に記載の方法。
- エンドエフェクターを使用して基板キャリアの底部によって基板キャリアを支持するステップが、エンドエフェクターの上側部を使用して基板キャリアの底部によって基板キャリアを支持する工程を含む、請求項7に記載の方法。
- エンドエフェクターを基板キャリアの底部の近くに再配置するステップが、基板キャリアから横方向にずれた領域においてエンドエフェクターを垂直方向に動かす工程を含む、請求項7に記載の方法。
- 基板キャリアをエンドエフェクターから中間支持ロケーションに移送するステップが、中間支持ロケーションの上側部上に存在するピンが基板キャリアの底部に存在する対応するスロットに結合するように、かつ、エンドエフェクターの底側部に結合されたピンが基板キャリアのオーバーヘッド移送フランジの対応するスロットにもはや結合しないようにエンドエフェクターを動かす工程を含む、請求項7に記載の方法。
- 基板キャリアを中間支持ロケーションから移送するステップが、エンドエフェクターの上側部上に存在するピンが基板キャリアの底部に存在する対応するスロットに結合するように、かつ、中間支持ロケーションの上側部上に存在するピンが基板キャリアの底部に存在する対応するスロットにもはや結合しないようにエンドエフェクターを動かす工程を含む、請求項7に記載の方法。
- 基板キャリア移送システムであって、
基板キャリアの底部によって基板キャリアを支持し、かつ、基板キャリアのオーバーヘッド移送フランジによって基板キャリアを支持するように適合されたエンドエフェクターと、
中間支持ロケーションと、
エンドエフェクターに結合されたコントローラとを備え、前記コントローラが、
エンドエフェクターを使用して基板キャリアの底部によって基板キャリアを支持し、
基板キャリアをエンドエフェクターから中間支持ロケーションに移送し、前記中間支持ロケーションは、基板キャリアの底部によって基板キャリアを支持し、
エンドエフェクターを基板キャリアのオーバーヘッド移送フランジの近くに再配置し、
エンドエフェクターを使用して基板キャリアのオーバーヘッド移送フランジによって基板キャリアを支持し、
基板キャリアを中間支持ロケーションから移送する、
ように適合された基板キャリア移送システム。 - コントローラが、さらに、エンドエフェクターの上側部を使用して基板キャリアの底部によって基板キャリアを支持するように適合された、請求項13に記載の基板キャリア移送システム。
- コントローラが、さらに、エンドエフェクターの底側部を使用して基板キャリアのオーバーヘッド移送フランジによって基板キャリアを支持するように適合された、請求項13に記載の基板キャリア移送システム。
- コントローラが、さらに、基板キャリアから横方向にずれた領域においてエンドエフェクターを垂直方向に動かすことによって、エンドエフェクターを基板キャリアのオーバーヘッド移送フランジの近くに再配置するように適合された、請求項13に記載の基板キャリア移送システム。
- コントローラが、さらに、中間支持ロケーションの上側部上に存在するピンが基板キャリアの底部に存在する対応するスロットに結合するように、かつ、エンドエフェクターの上側部上に存在するピンが基板キャリアの底部に存在する対応するスロットにもはや結合しないようにエンドエフェクターを動かすように適合された、請求項13に記載の基板キャリア移送システム。
- コントローラが、さらに、エンドエフェクターの底側部に結合されたピンが基板キャリアのオーバーヘッド移送フランジの対応するスロットに結合するように、かつ、中間支持ロケーションの上側部上に存在するピンが基板キャリアの底部に存在する対応するスロットにもはや結合しないようにエンドエフェクターを動かすように適合された、請求項13に記載の基板キャリア移送システム。
- 基板キャリア移送システムであって、
基板キャリアの底部によって基板キャリアを支持し、かつ、基板キャリアのオーバーヘッド移送フランジによって基板キャリアを支持するように適合されたエンドエフェクターと、
中間支持ロケーションと、
エンドエフェクターに結合されたコントローラとを備え、前記コントローラが、
エンドエフェクターを使用して基板キャリアのオーバーヘッド移送フランジによって基板キャリアを支持し、
基板キャリアをエンドエフェクターから中間支持ロケーションに移送し、前記中間支持ロケーションは、基板キャリアの底部によって基板キャリアを支持し、
エンドエフェクターを基板キャリアの底部の近くに再配置し、
エンドエフェクターを使用して基板キャリアの底部によって基板キャリアを支持し、
基板キャリアを中間支持ロケーションから移送する、
ように適合された基板キャリア移送システム。 - コントローラが、さらに、エンドエフェクターの底側部を使用して基板キャリアのオーバーヘッド移送フランジによって基板キャリアを支持するように適合された、請求項19に記載の基板キャリア移送システム。
- コントローラが、さらに、エンドエフェクターの上側部を使用して基板キャリアの底部によって基板キャリアを支持するように適合された、請求項19に記載の基板キャリア移送システム。
- コントローラが、さらに、基板キャリアから横方向にずれた領域においてエンドエフェクターを垂直方向に動かすことによって、エンドエフェクターを基板キャリアの底部の近くに再配置するように適合された、請求項19に記載の基板キャリア移送システム。
- コントローラが、さらに、中間支持ロケーションの上側部上に存在するピンが基板キャリアの底部に存在する対応するスロットに結合するように、かつ、エンドエフェクターの底側部に結合されたピンが基板キャリアのオーバーヘッド移送フランジの対応するスロットにもはや結合しないようにエンドエフェクターを動かすように適合された、請求項19に記載の基板キャリア移送システム。
- コントローラが、さらに、エンドエフェクターの上側部上に存在するピンが基板キャリアの底部に存在する対応するスロットに結合するように、かつ、中間支持ロケーションの上側部上に存在するピンが基板キャリアの底部に存在する対応するスロットにもはや結合しないようにエンドエフェクターを動かすように適合された、請求項19に記載の基板キャリア移送システム。
- オーバーヘッドコンベアシステムを使用して基板キャリアを搬送するステップと、
プロセスツールのエンドエフェクターを使用して、基板キャリアの底部によって基板キャリアを支持することによって、オーバーヘッドコンベアシステムから基板キャリアを取り出すステップと、
エンドエフェクターを使用して、基板キャリアをプロセスツールの中間支持ロケーションに移送するステップと、
エンドエフェクターを基板キャリアのオーバーヘッド移送フランジの近くに再配置するステップと、
エンドエフェクターを使用して、基板キャリアのオーバーヘッド移送フランジによって基板キャリアを支持することによって、基板キャリアを中間支持ロケーションから取り出すステップと、
エンドエフェクターを使用して基板キャリアをプロセスツールのロードポートに移送するステップと、
を含む方法。 - 基板キャリアをロードポートにドッキングし、かつ開けるステップをさらに含む、請求項25に記載の方法。
- プロセスツールを用いて基板キャリア内のいずれかの基板を処理するステップをさらに含む、請求項26に記載の方法。
- ロードポートにおいて基板キャリアを閉めかつロードポートから基板キャリアを切り離すステップをさらに含む、請求項26に記載の方法。
- エンドエフェクターを使用して、基板キャリアのオーバーヘッド移送フランジによって基板キャリアをロードポートから取り外すステップと、
エンドエフェクターを使用して、基板キャリアをプロセスツールの中間支持ロケーションに移送するステップと、
エンドエフェクターを基板キャリアの底部の近くに再配置するステップと、
エンドエフェクターを使用して、基板キャリアの底部によって基板キャリアを支持することによって、基板キャリアを中間支持ロケーションから取り外すステップと、
エンドエフェクターを使用して、基板キャリアの底部によって基板キャリアを支持することによって、基板キャリアをオーバーヘッドコンベアシステム上に装填するステップと、
をさらに含む、請求項25に記載の方法。 - エンドエフェクターを使用して基板キャリアをオーバーヘッドコンベアシステムから取り外すステップおよびエンドエフェクターを使用して基板キャリアをオーバーヘッドコンベアシステム上に装填するステップが、オーバーヘッドコンベアシステムが移動しているときに発生する、請求項29に記載の方法。
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US58775204P | 2004-07-14 | 2004-07-14 |
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JP2006066893A JP2006066893A (ja) | 2006-03-09 |
JP4650831B2 true JP4650831B2 (ja) | 2011-03-16 |
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US (2) | US7409263B2 (ja) |
JP (1) | JP4650831B2 (ja) |
KR (1) | KR101157673B1 (ja) |
CN (1) | CN100568479C (ja) |
TW (1) | TWI306827B (ja) |
Families Citing this family (342)
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US7930061B2 (en) | 2002-08-31 | 2011-04-19 | Applied Materials, Inc. | Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedback |
US7243003B2 (en) * | 2002-08-31 | 2007-07-10 | Applied Materials, Inc. | Substrate carrier handler that unloads substrate carriers directly from a moving conveyor |
US7684895B2 (en) * | 2002-08-31 | 2010-03-23 | Applied Materials, Inc. | Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event |
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JP2001520803A (ja) * | 1997-04-14 | 2001-10-30 | アシスト テクノロジーズ インコーポレイテッド | 一貫生産型のベイ内バッファ・デリベリ・ストッカシステム |
JP2001526470A (ja) * | 1997-12-19 | 2001-12-18 | セミトゥール・インコーポレイテッド | 半導体ウエハ搬入/搬出取り扱いシステム |
JP2002531934A (ja) * | 1998-12-01 | 2002-09-24 | アシスト テクノロジーズ インコーポレイテッド | キャリヤパージ用受動式弁 |
JP2002265011A (ja) * | 2001-03-12 | 2002-09-18 | Shinko Electric Co Ltd | ストッカ用ロボット |
WO2003105216A1 (ja) * | 2002-06-07 | 2003-12-18 | 平田機工株式会社 | 容器搬送システム |
JP2005136294A (ja) * | 2003-10-31 | 2005-05-26 | Murata Mach Ltd | 移載装置 |
Also Published As
Publication number | Publication date |
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US7409263B2 (en) | 2008-08-05 |
KR20060050174A (ko) | 2006-05-19 |
US7914248B2 (en) | 2011-03-29 |
US20060013674A1 (en) | 2006-01-19 |
TW200607732A (en) | 2006-03-01 |
JP2006066893A (ja) | 2006-03-09 |
TWI306827B (en) | 2009-03-01 |
US20080286076A1 (en) | 2008-11-20 |
CN1779937A (zh) | 2006-05-31 |
KR101157673B1 (ko) | 2012-06-20 |
CN100568479C (zh) | 2009-12-09 |
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