494079 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（ 發明領域： 本發明係有關於一種晶盒（Front Open Uni Π ed Pod; FOUP)之輸送系統與裝置，特別是有關於一種用於晶圓廠 内晶盒在自動化材料處理系統（Automated Material Handling System ; AMHS)與自動化儲存/取回系統 (Automated Storage/Retrieval System; AS/RS)間的走道間 (Interbay)輸送系統與裝置。 發明背景： 在現今的晶圓廠中，晶盒的輸送路線大致可分為走道 内（Intrabay)的輸送與走道間（Interbay)的輸送。走道（Bay) 的兩旁放置有各種不同的製程機台。請參考第1圖所示之 自動化材料處理系統示意圖，走道每一邊的每一部機台i 〇 安裝有負載埠（Load P〇rt)20，以供放置晶盒3〇之用。走道 每一邊的每一部機台10之負載埠20彼此對齊晶盒中心 線，以利自動化材料處理系統的天車輸送系統（〇verhead Hoist Transport ; 〇HT)60能在最短的時間内有效率地抓起 負載埠20上的晶盒30並傳送至另一機台1〇的負載埠2〇 上。這種晶盒30在同一走道之内的輸送過程稱為走道内系 統1 1 〇，而晶盒3 0在不同的走道之間的輸送則稱為走道間 系統100。走道内系統U〇的輸送使用自動化材料處理系 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱) '----------------- -------I---裝--------訂·-------- (請先閱讀背面之注意事項再填寫本頁) 494079 A7 B7 五、發明說明（ 、洗的天車輸运系統6〇，走道間系統1 〇〇的輸送則是先將晶 I 30由天車輪送系統6〇移至倉儲系統中暫時 儲存，等到需用爿此晶盒30日寺，再以人力搬移到廢與礙之 間的輸送系統·自動化儲存/取回系統8〇中。 上述自動化儲存/取回系統8〇，其亦為一倉儲系統，負 責與每-廠内的走道間系統刚作連接。本專利的訴求在 於倉儲系統5G與自，動化儲存/取回系統8()間的傳送，因習 关层儲系統5 0與自動化儲存/取回系統8〇間的傳送具有 列缺點。 卜 化問 動程 自工 及因 統人 系生 健產 倉 將 由舉 盒此。 晶，重 將出斤 員搬公 作中8 操籃過 要盒超 需曰BS量 是的重 點统吣 缺系盒 個回晶 一取畠 第？因 存， 儲題 放 與 間 空 福 〇 緩本 的成 盒的 晶廠 移圓 搬晶 員 Ψ间 作提 操將 供舉 提此 需 ’ 是間 點空 缺的 個統 二 系 第儲 倉 置 ------------裝--------訂--------- C請先閱讀背面之沒意事項再填寫本頁} 經濟部智慧財產局員工消費合作社印製 本 成 的 廠 圓 晶 高 提 會 也 置 購 的 統 系 儲 倉 是 點 缺 個 三 第 間 時 的 多 較 用 使 需 盒 晶 it il 搬 力 人。 用本 使成 是產 點生 缺高 個提 四亦 第中 形 無 公 97 12 X 110 一 2 ✓IV 格 規 A4 S) N (C 準 標 家 國 國 中 用 適 度 |尺 張 紙 本 494079 經濟部智慧財產局員工消費合作社印製 A7 —____ _B7 五、發明說明（） 第五個缺點是使可省下瞄¥人 4 疋即使」咱卜稱置倉儲系統與僱用操作員 的成本而欲直接將晶盒由天車輪送系統輪送至自動化儲存 /取回系統的晶盒藍中，卻面臨白& ^ r | 自動化材料處理系統之天車 輸送系統與自動化儲存/取回系統間介面無法整合的問 題’因為此兩系統原本就是源自於不同產業的產物。第2 圖圖不此兩系統，gp自動化材料處理系統之天車輸送系統 60與自動化儲存/取回系統80。晶盒7〇在天車輸送系統6〇 與晶盒監90間之輸送目前是以人力來進行。 發明目的及概述： 鑒於上述之發明背景中，目前晶圓廠内進行晶盒在自 動化材料處理系統與自動化儲存/取回系統間的走道間輸 送時’面操作員搬移晶盒的安全問遽、操作空間與倉儲 系統導致的成本問題、無法準時輸送晶盒的問題、以及自 動化材料處理系統與自動化儲存/取回系統間介面無法整 合的問題。 因此本發明之一目的為提供一種用於晶圓廠内自動化 材料處理系統與自動化儲存/取回系統間的走道間輸送系 統與裝置。運用此發明，可解決上述問題並有下列優點。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ---------I I --------訂--------- (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印制衣 494079 A7 -- B7 五、發明說明（） 第一個優點是不需要以人工進行晶盒在自動化材料處 理系統與自動化儲存/取回系統間的輸送作業，此舉杜絕了 以人工搬運晶盒時產生的安全問題。 第一個優點是省去操作員搬移晶盒的緩衝空間與放置 倉儲系統的空間，此舉將降低晶圓廠的成本。 第三個優點是省去倉儲系統的購置成本。 第四個優點是可準時搬運晶盒，無形中亦降低生產成 本β 第五個優點是使用現有的天車輸送系統及相關的半導 體設備暨材料國際（Semiconductor Equipment And Material International ; SEMI)標準功能E84進行晶盒輸送，再輔以 對自動化儲存/取回系統的晶盒籃裝置作特殊的設計，便可 解決自動化材料處理系統與自動化儲存/取回系統間的介 面問題。以下針對本發明中此晶盒籃裝置的設計及自動化 材料處理系統與自動化儲存/取回系統間的介面作概略的 說明： 倉儲系統與天車輸送系統間本來即存在連接琿以做為 兩者訊息交換（Handshake)的介面，此介面為半導體設備藝 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -----------裝--------訂--------- (請先閱讀背面之注意事項再填寫本頁) 494079 A7 B7 五、發明說明（ 材料國際之標準功能E84。在本發明中，將倉儲系統移去 後，即可以E 8 4裝置作為自動化材料處理系統與自動化儲 存/取回系統間的晶盒輸送介面。但需對自動化儲存/取回系 統中負貝承載晶盒的晶盒數作一特殊設計。此特殊設計包 含：晶盒籃底座的運動聯結插銷（Kinematics-Coupling Pin) 及曰曰盒監底部的晶盒槽與運動聯結插銷孔，用來確認晶盒 月b確只置於日日盒監中，以及存在（presence)與位置 (Placement)感應器，用來偵測晶盒是否已就定位。E84裝 置能進行與這些感應器的狀態之訊息交換。至於在軟體的 部份，自動化儲存/取回系統包含一用來控制的主電腦。此 主電腦擁有與各廠中主電腦通訊的能力，也可執行各廠間 的備料工作並追蹤晶盒的進出。自動化健存/取回系統主電 腦也可根據其與自動化儲存/取回系統間的通訊對自動化 材料處理系統發出移入需求（Move In Request ; MIR)與移出 需求（MoveOutRequest;MOR)的命令。 (請先閱讀背面之注意事項再填寫本頁) ---1494079 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the Invention (Field of the Invention: The present invention relates to a conveying system and device for a Front Open Uni Π ed Pod; FOUP) Interbay conveying system and device for wafer box in wafer fab between Automated Material Handling System (AMHS) and Automated Storage / Retrieval System (AS / RS) Background of the Invention: In today's wafer fabs, the transport path of the wafer box can be roughly divided into the transport in the aisle (Intrabay) and the transport between the aisles (Interbay). There are various process machines on both sides of the aisle (Bay). Please refer to the schematic diagram of the automated material processing system shown in Figure 1. Each machine i 〇 on each side of the aisle is equipped with a load port 20 for placing the crystal box 30. Aisle The load ports 20 of each machine 10 on each side are aligned with the center line of the crystal box to facilitate the overhead conveying system of the automated material handling system (〇verhead Hoist Transport; 〇HT ) 60 can efficiently pick up the crystal box 30 on the load port 20 and transfer it to the load port 20 of another machine 10 in the shortest time. The transport process of this crystal box 30 in the same aisle It is called the system in the aisle 1 1 0, and the conveyance of the crystal box 30 between different aisles is called the aisle system 100. The conveyance of the system U 0 in the aisle uses automated material processing. The paper dimensions are applicable to Chinese national standards ( CNS) A4 specification (210 X 297 public love) '----------------- ------- I --- install -------- order · -------- (Please read the precautions on the back before filling in this page) 494079 A7 B7 V. Description of the invention (, the washing crane transportation system 60, the aisle system 1 00 transmission rules The crystal I 30 is first moved from the sky wheel delivery system 60 to the storage system for temporary storage. When the crystal box is needed for 30 days, it is manually moved to the transportation system between waste and obstruction. Automatic storage / retrieval Return to system 80. The above-mentioned automated storage / retrieval system 80 is also a storage system, which is responsible for just connecting with the aisle system in each plant. The claim of this patent lies in the storage system 5G and self, The transfer between the 8 () of the automatic storage / retrieval system is due to the shortcomings of the transmission between the Xiguan layered storage system 50 and the automated storage / retrieval system 80. Bu Huawen's self-working and factor-based health warehouse The box will be lifted by this. Jing, the key player will move in the official work. 8 The dribble is over. The box is over-required. The key point is that the amount of BS is missing. Because of the existence, the storage of the problem and the time-saving blessing of the boxed crystal plant, the circle of the crystal factory, the shift of the wafers, and the operation of the crystal will be provided to mention this need. ---------- Equipment -------- Order --------- CPlease read the unintentional matter on the back before filling out this page} Staff Consumption of Intellectual Property Bureau, Ministry of Economic Affairs The co-operative printing company's original factory wafer crystal high-rise conference will also purchase the department storehouse, which is more expensive when the box crystal is used. The use of books to make the production point is high or low. The fourth is also the middle form of innocence 97 12 X 110 a 2 ✓ IV standard A4 S) N (C quasi-standard home country intermediate use moderate | ruled paper on paper 494079 Ministry of Economic Affairs Printed by the Intellectual Property Bureau's Consumer Cooperative A7 —____ _B7 V. Description of the Invention (5) The fifth disadvantage is that it can save the sight of ¥ 4. Even if "we claim that the cost of setting up a warehousing system and hiring an operator is The crystal box is transferred to the blue box of the automatic storage / retrieval system by the wheel delivery system, but it faces white & ^ r | The interface between the overhead transport system of the automated material handling system and the automatic storage / retrieval system cannot be integrated The problem 'because these two systems are originally products from different industries. The second figure is not the two systems, the gp automated material handling system's crane transportation system 60 and the automated storage / retrieval system 80. Crystal box 7〇 The transportation between the overhead crane transportation system 60 and the crystal box monitor 90 is currently performed by manpower. Purpose and summary of the invention: In view of the above-mentioned background of the invention, wafer boxes are currently being processed in automated material processing systems and wafer processing facilities in wafer fabs. When transporting between walkways between automated storage / retrieval systems, the safety of the operator when moving the crystal box, the cost of the operating space and storage system, the problem of not being able to transport the crystal box on time, and the automated material handling system and automated storage The problem that the interface between the retrieval / retrieval system cannot be integrated. Therefore, one object of the present invention is to provide an aisle conveying system and device for use between an automated material processing system and an automated storage / retrieval system in a fab. Using this invention, It can solve the above problems and has the following advantages: This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) --------- II -------- Order --- ------ (Please read the precautions on the back before filling out this page) Printed clothing for employees' cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 494079 A7-B7 V. Description of the invention () The first advantage is that it does not require manual labor. Carrying out the transfer of the crystal box between the automated material handling system and the automated storage / retrieval system, which eliminates the safety problems that occur when the crystal box is manually moved. The first advantage is that it eliminates the operator's removal The buffer space of the box and the space for the storage system will reduce the cost of the fab. The third advantage is that it eliminates the purchase cost of the storage system. The fourth advantage is that the crystal box can be transported on time, which also reduces production virtually. Cost β The fifth advantage is the use of the existing overhead crane transportation system and related semiconductor equipment and material international (SEMI) standard function E84 for crystal box transportation, supplemented by the automatic storage / retrieval system. The crystal basket device is specially designed to solve the interface problem between the automated material handling system and the automated storage / retrieval system. The following is a brief description of the design of the crystal box basket device and the interface between the automated material processing system and the automated storage / retrieval system in the present invention: There is already a connection between the storage system and the overhead conveying system, as the two Information exchange (Handshake) interface, this interface is a semiconductor device art paper standard applicable Chinese National Standard (CNS) A4 specification (210 X 297 mm) ----------- install ----- --- Order --------- (Please read the notes on the back before filling this page) 494079 A7 B7 V. Description of the invention (Material International Standard Function E84. In the present invention, the storage system is moved After it is removed, the E 8 4 device can be used as the crystal box transport interface between the automated material processing system and the automatic storage / retrieval system. However, a special number of crystal boxes with negative shells in the automatic storage / retrieval system needs to be made. Design. This special design includes: Kinematics-Coupling Pins on the base of the crystal box basket and the crystal box grooves and kinematic coupling pin holes at the bottom of the box monitor to confirm that the crystal box month b is only placed on the day and day. Box monitoring, and presence Placement sensors are used to detect whether the crystal box has been positioned. The E84 device can exchange information with the status of these sensors. As for the software part, the automatic storage / retrieval system includes a control Host computer. This host computer has the ability to communicate with the host computer in each factory, and can also perform material preparation between factories and track the in and out of the crystal box. The main computer of the automated storage / retrieval system can also be stored according to its automation / Retrieve the communication between the systems to issue the Move In Request (MIR) and Move OutRequest (MOR) commands to the automated material processing system. (Please read the precautions on the back before filling this page) --- 1
壽— I I I I 明 說 單 簡 式 圖 經濟部智慧財產局員工消費合作社印製 列 下 以 輔 中 字 文 明 說 之 後 往 於： 將 例其 施， 實述 佳闡 較的 的細 明詳 發更 本做 形 圖 圖 意 示 之 統 系 S 處 料 材 化 自 知 習 為 圖 IX 第 本紙張尺度適用中國國豕標準（CNS)A4規格（210 X 297公爱） 494079 A7 ------------B7___ 五、發明說明（） 第2圖為習知自動化材料處理系統之天車輸送系統與 自動化儲存/取回系統的示意圖。 3 /乐 Ctul 理 處。 料圖 材意 化示 動的 自統 中系 例回 施取 / 實存 佳儲 較化 一 之自 明與 發統 本系 為送 圖輸 車 第天之 統 的 座 底 其 與 。 籃器 盒€ 二 中置 例位 施及 實器 佳應 較感 一在 之存 明含 發包 本中 為其 圖， 4 圖 第詳 解 分 的 座 底 其 與 籃 盒 晶 中 例 施 實 佳 較 1 之 明 發 本 為 C 圖圖 5 意 第示 合 組 明說 照對號 圖 10 機台 3 0 晶盒 60 天車輸送系統 20 負載埠 50 倉儲系統 7 0 晶盒 80 自動化儲存/取回系統 90 晶盒籃 (請先閱讀背面之注意事項再填寫本頁) Μ--------訂· % 經濟部智慧財產局員工消費合作社印製 100走道間系統 160天車輸送系統 180自動化儲存/取回系統 200 E84裝置 220運動聯結插銷孔 1 1 0走道内系統 tl 7 0晶盒 190晶盒籃 2 1 0晶盒槽 2 3 0運動聯結插銷 本纸張尺度適用中國國家標準（CNS)A4規格（210 X 297公餐） ''-----—— 494079 250位置感應器 2 7 0小孔 A7 B7 五、發明說明（） 240晶盒籃底座 260存在感應器 2 80播板 發明詳細說明： 本發明首次嘗試在同一個介面下完成晶盒在走道内與 走道間的輸送作業。本發明之一較佳實施例之詳細說明如 下： 在晶圓廠内進行晶盒在自動化材料處理系統與自動化 儲存/取回系統間的走道間輸送時，本發明提供一種用於晶 圓廢内自動化材料處理系統與自動化儲存/取回系統間= 走道間輸送系統與裝置。在此實施例中，使用現有的天車 輸送系統及相關的半導體設備暨材料國際標準功能e84介 面進行晶盒輸送，再辅以對自動化儲存/取回系統的晶盒籃 裝置作特殊的設計，便可解決自動化材料處理系統與自動 化儲存/取回系統間的介面問題。此晶盒籃裝置的特殊設計 說明如下： 倉儲系統與天車輸送系統間本來即存在連接埠以做為 兩者訊息交換的介面，此介面為半導體設備暨材料國際標 準功能E 8 4。請參考第3圖，在本實施例中，將倉健系統 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ---------------------訂.-------- f請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 494079 A7 五、發明說明（） 移去後，即可以此E84裝置2〇〇作 之妥* & , < 马自動化材料處理系統 天車輸送系統160與自動化儲存/取 17n你 取回糸統180間的晶盒 丄/ϋ傳送介面。但需對自動化儲存/ (請先閱讀背面之注意事項再填寫本頁) 子/取回糸統180中負責承 戟下表面有小孔（未緣示）之晶盒1 7 〇 ^ , υ之中空晶盒籃190作 一特殊設計。請參考第4圖及第5 曰^ 61，此特殊設計包含： 日日盈籃底座240的運動聯結插4肖23〇及晶盒藍底部的晶盒 槽⑴與運動聯結插銷孔22〇，用來確認晶纟17〇能確實 置入晶盒籃i90中；擋板280内側的存在感應器26〇,用 來發出紅外線；晶盒籃190側面的小孔27〇,用來讓存在 感應器260發出的紅外線穿過以偵測晶盒17〇是否已進入 晶盒藍m巾；以及晶盒藍底座24〇上表面中央的位置感 應器250，用來發出紅外線以偵測晶盒17〇的底端是否已 碰觸晶盒籃底座240而就定位。當晶盒籃19〇中無晶盒17〔 時，存在感應器260發出的紅外線可直接穿過晶盒籃19(； 側面的小孔270而到達對面擋板28〇。若天車輸送系統（未 繪示）抓住晶盒170下降進入晶盒籃19〇中，則紅外線經小 孔270進入晶盒籃190後被晶盒17〇阻擋，表示晶盒17〇 已存在於晶盒籃190中。搔著晶盒丨70繼續下降，直到位 置感應器250偵測到晶盒170已碰觸晶盒籃底座24〇，便 經濟部智慧財產局員工消費合作社印製 表示晶盒1 7 0已就定位，此時天車輸送系統可將晶盒丨7 〇 放開，完成此次輸送作業。 接著是自動化材料處理系統與自動化儲存/取回系統 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公餐) 494079 A7 B7 經 濟 部 智 慧 財 產 局 五、發明說明（ 間的”面E84裝置之說明，其能用來進行與上述存在感應 器及位置感應器的狀態之訊息交換。i於在軟體架構的； 份，自動化儲存/取回系統包含一用來控制的主電腦。此主 電腦擁有與各廠中主電腦通訊的能力，也可執行各廠間的 備料工作並追縱晶盒的進出。自動化料取回系統主電腦 也可根據其與自動化儲存/取回系統間的通訊對自動化材 料處理系統發出移入需求與移出需的命令。 在上述實施例中，已將第1圖之倉儲系統50移去，此 舉除可省去倉㈣統的購置成本外，„省去倉儲系統的 放置空間而間接降低晶圓廠的成本。&實施例之做法適用 於未購置倉儲系統前，但若在實施本發明的做法前，倉儲 系統即已購置完成，則亦可在本發明中加入倉健系統的運 作。 综合上述，本發明的第一個優點為提供一種晶盒之輸 送系統與t置，本發明之輪I系統與裝置使E84裝置舆 經特殊設計之晶盒籃裝置進行晶盒在自動化材料處理系統 與自動化儲存/取回系統間之輸送，使用此輸送系統與裝置 便不*要以人工進行晶盒在自動化材料處理系統與自動化 儲存/取回系統間的輸送作業，此舉杜絕了以人工搬運晶盒 時產生的安全問題。 --------丨！參裝--------訂---------§ (請先閱讀背面之注意事項再填寫本頁) 消 f 合 作 社 印 製 10 A7Shou — IIII Explanatory note printed by the Ministry of Economic Affairs ’Intellectual Property Bureau ’s Employees’ Cooperatives and printed with the supplementary Chinese character civilization theory, and then goes to: The system of materialization shown in Figure S is self-knowledge. Figure IX The paper size is applicable to China National Standard (CNS) A4 (210 X 297 public love) 494079 A7 ---------- --B7 ___ V. Description of the invention (2) Figure 2 is a schematic diagram of the overhead conveying system and the automatic storage / retrieval system of the conventional automated material processing system. 3 / Le Ctul. The self-control system of the material map and the materialization of the system is an example of the return / existence of the self-definition and storage system of the best storage and comparison system. Basket box. The second example of the middle and the actual device should be better. One is shown in the book containing the package. The figure 4 shows the bottom of the seat. It is better than the basket case. The Zhimingfa version is C. Figure 5. The Yidi group shows the corresponding figure. Figure 10 Machine 3 0 Crystal box 60 Crane transportation system 20 Load port 50 Storage system 7 0 Crystal box 80 Automatic storage / retrieval system 90 crystal Box basket (please read the precautions on the back before filling this page) Μ -------- Order ·% Printed by the Intellectual Property Bureau Staff Consumer Cooperative of the Ministry of Economic Affairs 100 Aisle system 160 Skycar transport system 180 Automated storage / Retrieval system 200 E84 device 220 Motion coupling pin hole 1 1 0 System in the aisle tl 7 0 Crystal box 190 Crystal box basket 2 1 0 Crystal box slot 2 3 0 Motion coupling pin This paper size applies to China National Standard (CNS) A4 Specifications (210 X 297 meals) '' --------- 494079 250 position sensor 2 7 0 small hole A7 B7 V. Description of the invention () 240 crystal box basket base 260 presence sensor 2 80 broadcast board invention details Description: This invention first attempts to complete the crystal box in the aisle under the same interface. And transport operation between the aisle. A detailed description of a preferred embodiment of the present invention is as follows: When a wafer box is transported between aisles between an automated material processing system and an automated storage / retrieval system in a wafer fab, the present invention provides a method for Between automated material handling systems and automated storage / retrieval systems = conveyor systems and devices between walkways. In this embodiment, the existing overhead crane transportation system and related semiconductor equipment and materials international standard function e84 interface are used for crystal box transportation, and supplemented by a special design for the crystal box basket device of the automatic storage / retrieval system. This solves the interface problem between the automated material handling system and the automated storage / retrieval system. The special design of the crystal box basket device is described as follows: There is a port between the storage system and the overhead crane transport system as an interface for information exchange between the two. This interface is the international standard function of semiconductor equipment and materials E 8 4. Please refer to Figure 3. In this example, the paper size of the Cangjian system is applied to the Chinese National Standard (CNS) A4 (210 X 297 mm) --------------- ------ Order .-------- f Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 494079 A7 V. Description of the invention () After removal , You can use this E84 device to make 2000 * &, < Horse Automated Material Handling System Crane Transport System 160 and Automated Storage / Retrieval 17n You can retrieve the 180 wafer box 丄 / ϋ transport interface of the system. However, the automatic storage / (Please read the precautions on the back before filling out this page) / Retrieve the crystal box 1 7 〇 ^, υ in the system 180 responsible for bearing the small hole (not shown) on the lower surface of the halberd The hollow crystal box basket 190 is specially designed. Please refer to Figure 4 and 5 ^^ 61. This special design includes: The movement coupling socket 4 of the Riyue base 240, and the groove 30 and the movement coupling pin hole 22 of the bottom of the crystal box blue. To confirm that the crystal 纟 17 can be placed in the crystal box basket i90; the presence sensor 26 inside the baffle plate 280 is used to emit infrared rays; the small hole 27 on the side of the crystal box basket 190 is used for the presence sensor 260 The emitted infrared rays pass through to detect whether the crystal box 17 has entered the crystal box blue towel; and the position sensor 250 in the center of the upper surface of the crystal box blue base 24 is used to emit infrared rays to detect the bottom of the crystal box 17 Whether the end has touched the crystal basket base 240 or not. When there is no crystal box 17 in the crystal box basket 19, the infrared rays emitted by the presence sensor 260 can directly pass through the crystal box basket 19 (; the small hole 270 on the side and reach the opposite baffle 28. If the overhead crane conveying system ( (Not shown) Grasp the crystal box 170 and descend into the crystal box basket 190. The infrared rays enter the crystal box basket 190 through the small hole 270 and are blocked by the crystal box 170. This means that the crystal box 170 already exists in the crystal box basket 190. Holding the crystal box 丨 70 continued to descend until the position sensor 250 detected that the crystal box 170 had touched the base of the crystal box basket 24, and the consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs printed that the crystal box 1 7 0 was ready. Positioning, at this time, the overhead crane conveying system can release the crystal box, and then complete the conveying operation. Next is the automatic material processing system and automatic storage / retrieval system. The paper size applies the Chinese National Standard (CNS) A4 specification ( 210 X 297 public meals) 494079 A7 B7 Intellectual Property Bureau of the Ministry of Economic Affairs V. Description of the invention (Intermediate) The description of the E84 device can be used to exchange information with the status of the presence sensors and position sensors mentioned above. In software architecture; The storage / retrieval system includes a host computer for control. This host computer has the ability to communicate with the host computer in each factory, and can also perform the material preparation work between factories and track the in and out of the crystal box. Automatic material retrieval The main computer of the system can also issue the order of moving in and moving out to the automated material processing system according to the communication between it and the automatic storage / retrieval system. In the above embodiment, the storage system 50 in FIG. 1 has been removed. Except that the purchase cost of the warehouse system can be eliminated, the storage space of the storage system is eliminated and the cost of the fab is indirectly reduced. The method of the embodiment is applicable before the storage system is purchased, but if the present invention is implemented Before the method is completed, the warehouse system has been purchased, and the operation of the warehouse health system can also be added to the present invention. Based on the above, the first advantage of the present invention is to provide a crystal box conveying system and t storage. The wheel I system and device enable the E84 device to transfer the crystal box between the automatic material processing system and the automatic storage / retrieval system through the specially designed crystal box basket device. Use this transport system With the device, it is not necessary to manually carry out the transfer of the crystal box between the automated material processing system and the automatic storage / retrieval system, which eliminates the safety problem when the crystal box is manually transported. ------- -丨! Installation -------- Order --------- § (Please read the precautions on the back before filling in this page) F printed by the cooperative 10 A7
494079 五、發明說明（） 本發明的第二個優點是省去操作員搬移晶盒的緩衝空 間與放置倉儲系統的空間，此舉將降低晶圓廠的成本。 本發明的第二個優點是省去倉儲系統的購置成本。 本發明的第四個優點是可準時搬運晶盒，無形中亦降 低生產成本。 本發明的第五個優點是使用現有的天車輸送系統及相 關的半導體設備暨材料國際標準功能E84進行晶盒輸送， 再輔以對自動化儲存/取回系統的晶盒籃裝置作特殊的設 計，便可解決自動化材料處理系統與自動化儲存/取回系統 間的介面問題。 如熟悉此技術之人員所瞭解的，以上所述僅為本發明 之較佳實施例而已，並非用以限定本發明之申請專利範 圍，凡其它未脫離本發明所揭示之精神下所完成之等效改 變或修飾，均應包含在下述之申請專利範圍内。 ------------41^------- 丨tr--------- (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）494079 5. Description of the invention () The second advantage of the present invention is that it eliminates the need for the operator to move the buffer space of the crystal box and the space for the storage system, which will reduce the cost of the fab. The second advantage of the present invention is that the purchase cost of the storage system is eliminated. The fourth advantage of the present invention is that the crystal box can be transported on time, and the production cost is reduced substantially. The fifth advantage of the present invention is the use of the existing overhead crane transportation system and related semiconductor equipment and materials international standard function E84 for crystal box transportation, supplemented by a special design of the crystal box basket device of the automatic storage / retrieval system. , You can solve the interface problem between the automated material handling system and the automated storage / retrieval system. As will be understood by those familiar with this technology, the above descriptions are merely preferred embodiments of the present invention, and are not intended to limit the scope of patent application for the present invention, and all others completed without departing from the spirit disclosed by the present invention, etc. Effective changes or modifications should be included in the scope of patent application described below. ------------ 41 ^ ------- 丨 tr --------- (Please read the notes on the back before filling this page) Intellectual Property Bureau of the Ministry of Economic Affairs The paper size printed by the employee consumer cooperative is applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm)