JP2014512672A - 共有ポンプを備えた真空チャンバ - Google Patents
共有ポンプを備えた真空チャンバ Download PDFInfo
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- JP2014512672A JP2014512672A JP2013556825A JP2013556825A JP2014512672A JP 2014512672 A JP2014512672 A JP 2014512672A JP 2013556825 A JP2013556825 A JP 2013556825A JP 2013556825 A JP2013556825 A JP 2013556825A JP 2014512672 A JP2014512672 A JP 2014512672A
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- 238000005086 pumping Methods 0.000 claims abstract description 49
- 239000000758 substrate Substances 0.000 claims description 76
- 230000008878 coupling Effects 0.000 claims description 6
- 238000010168 coupling process Methods 0.000 claims description 6
- 238000005859 coupling reaction Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 description 4
- 238000000137 annealing Methods 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Drying Of Semiconductors (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
本発明の実施形態は、概して、単一のフォアラインを介してポンピングシステムに結合された異なるポンピング要件を有する真空チャンバに関する。
真空処理ツール(例えば、とりわけ、集積回路、フラットパネルディスプレイ、及び磁気メディアを製造するために使用されるもの)においては、真空ポンプの使用を通して、真空処理ツールのチャンバ内を真空環境に維持する。様々な真空処理チャンバ内で行われる処理は、異なる圧力及び/又はポンピング要件を有するので、各真空処理チャンバは、典型的には、専用の真空ポンプを有している。こうして、真空ポンプは、異なった環境に特有のポンピング要件を正確に満たすことができないため、従来は同一のポンピング要件を有する真空チャンバ間でのみ共有されている。各真空チャンバ専用のポンプの必要性は、ハードウェアのコストや複数のポンプのための余分な空間要件に関連するコストのみならず、システム全体のコストを増加させる。
Claims (16)
- 第1基板搬送チャンバを第2基板搬送チャンバから分離したチャンバ本体と、
真空ポンプと、
ポンプに結合された高コンダクタンスフォアラインと、
第1基板搬送チャンバにフォアラインを結合する高コンダクタンスポンピングコンジットと、
第2基板搬送チャンバにフォアラインを結合する低コンダクタンスポンピングコンジットを含む基板処理システム。 - 高コンダクタンスフォアラインに結合された第2真空ポンプを含む請求項1記載のシステム。
- 各基板搬送チャンバは2つの基板搬送ポートを有する請求項1記載のシステム。
- 第1基板搬送チャンバ内に配置されたシャワーヘッドを含む請求項1記載のシステム。
- 第1基板搬送チャンバがリモートプラズマソースに結合される請求項1記載のシステム。
- 第1基板搬送チャンバ及び第2基板搬送チャンバが内部に形成されたチャンバ本体であって、第1基板搬送チャンバが第2基板搬送チャンバから分離されたチャンバ本体と、
真空ポンプと、
ポンプに結合された高コンダクタンスフォアラインと、
第1基板搬送チャンバにフォアラインを結合する高コンダクタンスポンピングコンジットと、
第2基板搬送チャンバにフォアラインを結合する低コンダクタンスポンピングコンジットを含む基板処理システム。 - 各基板搬送チャンバは2つの基板搬送ポートを有する請求項6記載のシステム。
- 第1基板搬送チャンバ内に配置されたシャワーヘッドを含む請求項6記載のシステム。
- 高コンダクタンスフォアラインに結合された第2真空ポンプを含む請求項6記載のシステム。
- 第1基板搬送チャンバを第2基板搬送チャンバから分離した第1チャンバ本体と、
第3基板搬送チャンバを第4基板搬送チャンバから分離した第2チャンバ本体と、
真空ポンプと、
ポンプに結合された高コンダクタンスフォアラインと、
高コンダクタンスフォアラインに結合された高コンダクタンス共通排気部と、
第1基板搬送チャンバに高コンダクタンス共通排気部を結合する第1高コンダクタンスポンピングコンジットと、
第3基板搬送チャンバに高コンダクタンス共通排気部を結合する第2高コンダクタンスポンピングコンジットと、
高コンダクタンスフォアラインに結合された低コンダクタンス共通排気部と、
第2基板搬送チャンバに低コンダクタンス共通排気部を結合する第1低コンダクタンスポンピングコンジットと、
第4基板搬送チャンバに低コンダクタンス共通排気部を結合する第2低コンダクタンスポンピングコンジットを含む基板処理システム。 - 第1及び第2高コンダクタンスポンピングコンジットは等しいコンダクタンスを有する請求項10記載のシステム。
- 第1及び第2高コンダクタンスポンピングコンジットは鏡像配置されている請求項10記載のシステム。
- 第1基板搬送チャンバはプラズマ処理チャンバであり、第2基板搬送チャンバはロードロックチャンバである請求項10記載のシステム。
- 高コンダクタンスフォアラインに結合された第2ポンプを含む請求項10記載のシステム。
- 第1及び第2高コンダクタンスポンピングコンジットは、ベローズによって高コンダクタンスフォアラインに結合される請求項10記載のシステム。
- 各基板搬送チャンバは、2つの基板搬送ポートを有する請求項10記載のシステム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201161448024P | 2011-03-01 | 2011-03-01 | |
US61/448,024 | 2011-03-01 | ||
PCT/US2012/027099 WO2012118886A2 (en) | 2011-03-01 | 2012-02-29 | Vacuum chambers with shared pump |
Publications (2)
Publication Number | Publication Date |
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JP2014512672A true JP2014512672A (ja) | 2014-05-22 |
JP6034311B2 JP6034311B2 (ja) | 2016-11-30 |
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JP2013556825A Active JP6034311B2 (ja) | 2011-03-01 | 2012-02-29 | 共有ポンプを備えた真空チャンバ |
Country Status (6)
Country | Link |
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US (1) | US20120222813A1 (ja) |
JP (1) | JP6034311B2 (ja) |
KR (1) | KR101847026B1 (ja) |
CN (2) | CN107164742B (ja) |
TW (1) | TWI611498B (ja) |
WO (1) | WO2012118886A2 (ja) |
Cited By (2)
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KR101809041B1 (ko) * | 2016-01-20 | 2017-12-14 | 주식회사 더셀머트리얼즈 | 밸브 삽입형 로드락 챔버 |
JP2019125755A (ja) * | 2018-01-19 | 2019-07-25 | 株式会社ディスコ | 保持装置 |
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CN107164742A (zh) | 2017-09-15 |
TW201246437A (en) | 2012-11-16 |
CN107164742B (zh) | 2020-10-16 |
CN103370768A (zh) | 2013-10-23 |
KR101847026B1 (ko) | 2018-04-09 |
US20120222813A1 (en) | 2012-09-06 |
KR20140018256A (ko) | 2014-02-12 |
TWI611498B (zh) | 2018-01-11 |
WO2012118886A2 (en) | 2012-09-07 |
CN103370768B (zh) | 2017-05-31 |
JP6034311B2 (ja) | 2016-11-30 |
WO2012118886A3 (en) | 2012-11-22 |
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