JP2014511575A5 - - Google Patents
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- JP2014511575A5 JP2014511575A5 JP2013556826A JP2013556826A JP2014511575A5 JP 2014511575 A5 JP2014511575 A5 JP 2014511575A5 JP 2013556826 A JP2013556826 A JP 2013556826A JP 2013556826 A JP2013556826 A JP 2013556826A JP 2014511575 A5 JP2014511575 A5 JP 2014511575A5
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- Prior art keywords
- substrate
- chamber
- load lock
- lock chamber
- halogen
- Prior art date
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201161448027P | 2011-03-01 | 2011-03-01 | |
| US61/448,027 | 2011-03-01 | ||
| PCT/US2012/027135 WO2012118897A2 (en) | 2011-03-01 | 2012-02-29 | Abatement and strip process chamber in a dual loadlock configuration |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014511575A JP2014511575A (ja) | 2014-05-15 |
| JP2014511575A5 true JP2014511575A5 (enExample) | 2015-04-09 |
| JP6114698B2 JP6114698B2 (ja) | 2017-04-12 |
Family
ID=46758477
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013556826A Active JP6114698B2 (ja) | 2011-03-01 | 2012-02-29 | デュアルロードロック構成内の除害及びストリップ処理チャンバ |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US10453694B2 (enExample) |
| JP (1) | JP6114698B2 (enExample) |
| KR (1) | KR101895307B1 (enExample) |
| CN (1) | CN103403852B (enExample) |
| TW (1) | TWI555058B (enExample) |
| WO (1) | WO2012118897A2 (enExample) |
Families Citing this family (161)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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- 2012-02-29 WO PCT/US2012/027135 patent/WO2012118897A2/en not_active Ceased
- 2012-02-29 TW TW101106559A patent/TWI555058B/zh not_active IP Right Cessation
- 2012-02-29 US US14/002,087 patent/US10453694B2/en active Active
- 2012-02-29 KR KR1020137025383A patent/KR101895307B1/ko not_active Expired - Fee Related
- 2012-02-29 CN CN201280010528.6A patent/CN103403852B/zh active Active
-
2019
- 2019-09-26 US US16/584,732 patent/US11177136B2/en active Active
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