JP7394554B2 - 基板処理システム - Google Patents
基板処理システム Download PDFInfo
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- JP7394554B2 JP7394554B2 JP2019145718A JP2019145718A JP7394554B2 JP 7394554 B2 JP7394554 B2 JP 7394554B2 JP 2019145718 A JP2019145718 A JP 2019145718A JP 2019145718 A JP2019145718 A JP 2019145718A JP 7394554 B2 JP7394554 B2 JP 7394554B2
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- 239000000758 substrate Substances 0.000 title claims description 151
- 238000012545 processing Methods 0.000 title claims description 94
- 238000001816 cooling Methods 0.000 claims description 46
- 230000007246 mechanism Effects 0.000 claims description 26
- 239000002826 coolant Substances 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000003507 refrigerant Substances 0.000 claims description 6
- 238000004380 ashing Methods 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 4
- 230000032258 transport Effects 0.000 description 29
- 238000000034 method Methods 0.000 description 28
- 230000007723 transport mechanism Effects 0.000 description 24
- 238000005192 partition Methods 0.000 description 6
- 230000003028 elevating effect Effects 0.000 description 4
- 230000009977 dual effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000012805 post-processing Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67201—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the load-lock chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67178—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers vertical arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67751—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a single workpiece
Description
図1は、実施形態に係る基板処理システムの構成の一例を示す図である。基板処理システム1は、ロードポート10と、大気搬送室20と、ロードロックモジュール30と、真空搬送室40と、プロセスモジュール50と、制御装置60と、を備える。
次に図3を参照し、実施形態に係る基板処理システム1による基板処理の流れの一例を説明する。図3は、一実施形態に係る基板処理システムによる基板処理の流れの一例を示すフローチャートである。
上記のように、一実施形態に係る基板処理システムは、第1チャンバと、第2チャンバと、冷却通路と、を備える。第1チャンバは、真空雰囲気に維持される第1搬送室から搬送される基板を処理する空間を提供する。第2チャンバは、第1搬送室および大気雰囲気に維持される第2搬送室と内部が連通可能に構成される。第2チャンバは、第1チャンバと略同一のフットプリントを有する。第2チャンバは、第1チャンバの下に第1チャンバと上下方向に並べて配置される。たとえば、上面視で、すなわち図1のZ軸正方向から負方向に向けてみたとき、第2チャンバの上面と第1チャンバの底面とが実質的に重なりあうように第2チャンバが配置される。冷却通路は、第1チャンバと第2チャンバの間に配置され、内部を冷却媒体が流れるよう構成される。このように、実施形態の基板処理システムにおいては、第1チャンバと第2チャンバのフットプリントを略同一として上下方向に重ねて配置する。このため、実施形態によれば、基板処理システムのフットプリントを抑制することができる。また、ロードロックモジュールの位置に基板処理を実行する空間を提供する第1チャンバを配置することで、プロセスモジュールの数を抑制することができる。また、基板処理システム内の空間を有効に活用することができる。
10 ロードポート
20 大気搬送室
21 第1搬送機構
30 ロードロックモジュール
40 真空搬送室
41 第2搬送機構
50 プロセスモジュール
60 制御装置
110 第1チャンバ
111 載置台
112 上部電極
113 隔壁部材
114 高周波電源
115 ガス供給機構
117 ゲート
118 ゲートバルブ
120 第2チャンバ
121 載置台
122 冷却機構
123 排気機構
125 ゲート
126 ゲートバルブ
127 ゲート
128 ゲートバルブ
130 冷却通路
131 供給装置
H ヒータ
Claims (5)
- 真空雰囲気に維持される第1搬送室から搬送される基板を処理する空間を提供する第1チャンバと、
前記第1搬送室および大気雰囲気に維持される第2搬送室と内部が連通可能に構成され、前記第1チャンバと略同一のフットプリントを有し、前記第1チャンバの下に前記第1チャンバと上下方向に並べて配置される第2チャンバと、
前記第1チャンバの底面と、前記第1チャンバの底面とは別体の前記第2チャンバの上面との間に形成され、内部を冷却媒体が流れるよう構成される冷却通路と、
を備え、
前記第1チャンバは、基板を加熱する加熱機構と、基板処理により温度が上昇した処理空間および周囲の部材を冷却する、前記冷却通路とは別個独立の冷却機構と、を備える基板処理システム。 - 前記冷却通路に冷媒を供給する供給装置をさらに備え、
前記冷却通路および前記供給装置は前記第1搬送室、前記第2搬送室、前記第1チャンバおよび前記第2チャンバの外側に配置される、請求項1に記載の基板処理システム。 - 前記第1チャンバは、アッシング、エッチングまたは成膜のいずれかを実行する基板処理装置を収容する、請求項1または2に記載の基板処理システム。
- 前記第2チャンバは、基板を冷却する冷却機構を備える、請求項1から3のいずれか1項に記載の基板処理システム。
- 前記第1チャンバおよび前記第2チャンバのそれぞれに載置台が設けられる、請求項1から4のいずれか1項に記載の基板処理システム。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019145718A JP7394554B2 (ja) | 2019-08-07 | 2019-08-07 | 基板処理システム |
TW109125016A TW202111844A (zh) | 2019-08-07 | 2020-07-24 | 基板處理系統 |
CN202010735536.3A CN112349620A (zh) | 2019-08-07 | 2020-07-28 | 基片处理系统 |
KR1020200093786A KR20210018070A (ko) | 2019-08-07 | 2020-07-28 | 기판 처리 시스템 |
US16/984,520 US11515183B2 (en) | 2019-08-07 | 2020-08-04 | Substrate processing system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019145718A JP7394554B2 (ja) | 2019-08-07 | 2019-08-07 | 基板処理システム |
Publications (2)
Publication Number | Publication Date |
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JP2021027259A JP2021027259A (ja) | 2021-02-22 |
JP7394554B2 true JP7394554B2 (ja) | 2023-12-08 |
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JP2019145718A Active JP7394554B2 (ja) | 2019-08-07 | 2019-08-07 | 基板処理システム |
Country Status (5)
Country | Link |
---|---|
US (1) | US11515183B2 (ja) |
JP (1) | JP7394554B2 (ja) |
KR (1) | KR20210018070A (ja) |
CN (1) | CN112349620A (ja) |
TW (1) | TW202111844A (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP7394554B2 (ja) * | 2019-08-07 | 2023-12-08 | 東京エレクトロン株式会社 | 基板処理システム |
Citations (8)
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JP2003013215A (ja) | 2001-06-26 | 2003-01-15 | Anelva Corp | スパッタリング装置 |
JP2004221197A (ja) | 2003-01-10 | 2004-08-05 | Tokyo Electron Ltd | 処理装置 |
JP2006303013A (ja) | 2005-04-18 | 2006-11-02 | Tokyo Electron Ltd | ロードロック装置及び処理方法 |
WO2008120294A1 (ja) | 2007-03-02 | 2008-10-09 | Daihen Corporation | 搬送装置 |
JP2008294146A (ja) | 2007-05-23 | 2008-12-04 | Hitachi High-Technologies Corp | プラズマ処理装置 |
JP2018514089A (ja) | 2015-04-22 | 2018-05-31 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | ロードロック装置、冷却プレートアセンブリ、並びに電子デバイス処理システム及び方法 |
WO2019078988A1 (en) | 2017-10-16 | 2019-04-25 | Applied Materials, Inc. | HEATED SUPPORT BASE AT HIGH TEMPERATURE IN A DUAL LOAD LOCK CONFIGURATION |
JP2019110325A (ja) | 2012-02-29 | 2019-07-04 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | ロードロック構成内の除害・剥離処理チャンバ |
Family Cites Families (14)
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JP2937846B2 (ja) * | 1996-03-01 | 1999-08-23 | アプライド マテリアルズ インコーポレイテッド | マルチチャンバウェハ処理システム |
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JP4048387B2 (ja) * | 1997-09-10 | 2008-02-20 | 東京エレクトロン株式会社 | ロードロック機構及び処理装置 |
US7316966B2 (en) * | 2001-09-21 | 2008-01-08 | Applied Materials, Inc. | Method for transferring substrates in a load lock chamber |
US8403613B2 (en) * | 2003-11-10 | 2013-03-26 | Brooks Automation, Inc. | Bypass thermal adjuster for vacuum semiconductor processing |
US8070408B2 (en) | 2008-08-27 | 2011-12-06 | Applied Materials, Inc. | Load lock chamber for large area substrate processing system |
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WO2012118897A2 (en) | 2011-03-01 | 2012-09-07 | Applied Materials, Inc. | Abatement and strip process chamber in a dual loadlock configuration |
JP2013254904A (ja) * | 2012-06-08 | 2013-12-19 | Tokyo Electron Ltd | 基板処理装置及び基板処理方法 |
US20130333616A1 (en) * | 2012-06-18 | 2013-12-19 | Tel Solar Ag | Plasma processing system with movable chamber housing parts |
US9530666B2 (en) | 2012-09-18 | 2016-12-27 | Tokyo Electron Limited | Plasma etching method and plasma etching apparatus |
US10720348B2 (en) * | 2018-05-18 | 2020-07-21 | Applied Materials, Inc. | Dual load lock chamber |
JP2021012944A (ja) * | 2019-07-05 | 2021-02-04 | 東京エレクトロン株式会社 | 基板処理装置及び基板の受け渡し方法 |
JP7394554B2 (ja) * | 2019-08-07 | 2023-12-08 | 東京エレクトロン株式会社 | 基板処理システム |
-
2019
- 2019-08-07 JP JP2019145718A patent/JP7394554B2/ja active Active
-
2020
- 2020-07-24 TW TW109125016A patent/TW202111844A/zh unknown
- 2020-07-28 CN CN202010735536.3A patent/CN112349620A/zh active Pending
- 2020-07-28 KR KR1020200093786A patent/KR20210018070A/ko unknown
- 2020-08-04 US US16/984,520 patent/US11515183B2/en active Active
Patent Citations (8)
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JP2003013215A (ja) | 2001-06-26 | 2003-01-15 | Anelva Corp | スパッタリング装置 |
JP2004221197A (ja) | 2003-01-10 | 2004-08-05 | Tokyo Electron Ltd | 処理装置 |
JP2006303013A (ja) | 2005-04-18 | 2006-11-02 | Tokyo Electron Ltd | ロードロック装置及び処理方法 |
WO2008120294A1 (ja) | 2007-03-02 | 2008-10-09 | Daihen Corporation | 搬送装置 |
JP2008294146A (ja) | 2007-05-23 | 2008-12-04 | Hitachi High-Technologies Corp | プラズマ処理装置 |
JP2019110325A (ja) | 2012-02-29 | 2019-07-04 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | ロードロック構成内の除害・剥離処理チャンバ |
JP2018514089A (ja) | 2015-04-22 | 2018-05-31 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | ロードロック装置、冷却プレートアセンブリ、並びに電子デバイス処理システム及び方法 |
WO2019078988A1 (en) | 2017-10-16 | 2019-04-25 | Applied Materials, Inc. | HEATED SUPPORT BASE AT HIGH TEMPERATURE IN A DUAL LOAD LOCK CONFIGURATION |
Also Published As
Publication number | Publication date |
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TW202111844A (zh) | 2021-03-16 |
KR20210018070A (ko) | 2021-02-17 |
JP2021027259A (ja) | 2021-02-22 |
US20210043480A1 (en) | 2021-02-11 |
US11515183B2 (en) | 2022-11-29 |
CN112349620A (zh) | 2021-02-09 |
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