JP6823533B2 - チタンシリサイド領域を形成する方法 - Google Patents
チタンシリサイド領域を形成する方法 Download PDFInfo
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- JP6823533B2 JP6823533B2 JP2017085390A JP2017085390A JP6823533B2 JP 6823533 B2 JP6823533 B2 JP 6823533B2 JP 2017085390 A JP2017085390 A JP 2017085390A JP 2017085390 A JP2017085390 A JP 2017085390A JP 6823533 B2 JP6823533 B2 JP 6823533B2
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- titanium
- gas
- film
- etching
- workpiece
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- 238000000034 method Methods 0.000 title claims description 63
- 229910021341 titanium silicide Inorganic materials 0.000 title claims description 51
- 239000010936 titanium Substances 0.000 claims description 93
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 79
- 229910052719 titanium Inorganic materials 0.000 claims description 79
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 24
- 229910052710 silicon Inorganic materials 0.000 claims description 24
- 239000010703 silicon Substances 0.000 claims description 24
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 21
- 239000011737 fluorine Substances 0.000 claims description 21
- 229910052731 fluorine Inorganic materials 0.000 claims description 21
- JOHWNGGYGAVMGU-UHFFFAOYSA-N trifluorochlorine Chemical compound FCl(F)F JOHWNGGYGAVMGU-UHFFFAOYSA-N 0.000 claims description 16
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 10
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 10
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 6
- 239000007789 gas Substances 0.000 description 132
- 238000005530 etching Methods 0.000 description 77
- 238000012545 processing Methods 0.000 description 36
- 238000002474 experimental method Methods 0.000 description 23
- 229910008486 TiSix Inorganic materials 0.000 description 20
- 238000009792 diffusion process Methods 0.000 description 11
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 238000012546 transfer Methods 0.000 description 7
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 6
- 239000011261 inert gas Substances 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 229910010413 TiO 2 Inorganic materials 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 4
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000003028 elevating effect Effects 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 230000006837 decompression Effects 0.000 description 2
- 238000011835 investigation Methods 0.000 description 2
- XROWMBWRMNHXMF-UHFFFAOYSA-J titanium tetrafluoride Chemical compound [F-].[F-].[F-].[F-].[Ti+4] XROWMBWRMNHXMF-UHFFFAOYSA-J 0.000 description 2
- 229910020323 ClF3 Inorganic materials 0.000 description 1
- 101100441092 Danio rerio crlf3 gene Proteins 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
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Description
<第1の実験における諸条件>
・ClF3ガスを用いた場合
処理空間12pの圧力:1Torr(133Pa)
チタン膜を有する被加工物の温度:200℃
ClF3ガスの流量:10sccm
添加ガス(Arガス)の流量:3990sccm
・TiCl4ガスを用いた場合
処理空間12pの圧力:3Torr(400Pa)
チタン膜を有する被加工物の温度:480℃
TiCl4ガスの流量:180sccm
添加ガス(Arガス)の流量:1000sccm
<第2の実験における諸条件>
処理空間12pの圧力:3Torr(400Pa)
被加工物の温度:160℃
添加ガス(Arガス)の流量:12600sccm
エッチング時間:60秒
<第3の実験における諸条件>
処理空間12pの圧力:3Torr(400Pa)
ClF3ガスの流量:1,5sccm
被加工物の温度:160℃
添加ガス(Arガス)の流量:12600sccm
<第4の実験の温度依存性の調査における諸条件>
処理空間12pの圧力:3Torr(400Pa)
ClF3ガスの流量:1,5sccm
添加ガス(Arガス)の流量:12600sccm
エッチング時間:75秒
<第4の実験の圧力依存性の調査における諸条件>
ClF3ガスの流量:1,5sccm
被加工物の温度:160℃
添加ガス(Arガス)の流量:12600sccm
エッチング時間:75秒
Claims (3)
- チタンシリサイド領域を形成する方法であって、
被加工物のシリコン層の清浄な面を露出させるための前処理を行う工程と、
前処理を行う前記工程の実行後に、前記シリコン層上にチタン含有領域及びチタンシリサイド領域を形成する工程と、
前記チタンシリサイド領域に対して前記チタン含有領域を選択的にエッチングするために、前記チタン含有領域及び前記チタンシリサイド領域を含む前記被加工物に、三フッ化塩素ガスであるフッ素含有ガスを供給する工程と、
を含む方法。 - 前記三フッ化塩素ガスの流量は、5sccm以下である、請求項1に記載の方法。
- 前記チタン含有領域は、チタン、酸化チタン、及び、窒化チタンのうち少なくとも一つから形成されている、請求項1又は2に記載の方法。
Priority Applications (4)
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JP2017085390A JP6823533B2 (ja) | 2017-04-24 | 2017-04-24 | チタンシリサイド領域を形成する方法 |
KR1020180043042A KR102093551B1 (ko) | 2017-04-24 | 2018-04-13 | 티타늄 실리사이드 영역을 형성하는 방법 |
US15/955,188 US10903086B2 (en) | 2017-04-24 | 2018-04-17 | Titanium silicide region forming method |
TW107113481A TWI750364B (zh) | 2017-04-24 | 2018-04-20 | 形成鈦矽化物區域之方法 |
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JP2017085390A JP6823533B2 (ja) | 2017-04-24 | 2017-04-24 | チタンシリサイド領域を形成する方法 |
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JP2018186123A JP2018186123A (ja) | 2018-11-22 |
JP6823533B2 true JP6823533B2 (ja) | 2021-02-03 |
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JP (1) | JP6823533B2 (ja) |
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TW (1) | TWI750364B (ja) |
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US11236424B2 (en) * | 2019-11-01 | 2022-02-01 | Applied Materials, Inc. | Process kit for improving edge film thickness uniformity on a substrate |
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