JP2013533628A5 - - Google Patents
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- JP2013533628A5 JP2013533628A5 JP2013518511A JP2013518511A JP2013533628A5 JP 2013533628 A5 JP2013533628 A5 JP 2013533628A5 JP 2013518511 A JP2013518511 A JP 2013518511A JP 2013518511 A JP2013518511 A JP 2013518511A JP 2013533628 A5 JP2013533628 A5 JP 2013533628A5
- Authority
- JP
- Japan
- Prior art keywords
- memory
- conductive material
- device level
- memory cells
- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000004020 conductor Substances 0.000 claims 31
- 239000000758 substrate Substances 0.000 claims 15
- 239000003989 dielectric material Substances 0.000 claims 8
- 230000008878 coupling Effects 0.000 claims 2
- 238000010168 coupling process Methods 0.000 claims 2
- 238000005859 coupling reaction Methods 0.000 claims 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 1
- 229920005591 polysilicon Polymers 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/825,211 | 2010-06-28 | ||
| US12/825,211 US8803214B2 (en) | 2010-06-28 | 2010-06-28 | Three dimensional memory and methods of forming the same |
| PCT/US2011/041888 WO2012009140A2 (en) | 2010-06-28 | 2011-06-24 | Three dimensional memory and methods of forming the same |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015083308A Division JP5923641B2 (ja) | 2010-06-28 | 2015-04-15 | 3次元メモリおよびその形成方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013533628A JP2013533628A (ja) | 2013-08-22 |
| JP2013533628A5 true JP2013533628A5 (enExample) | 2014-08-21 |
| JP5735107B2 JP5735107B2 (ja) | 2015-06-17 |
Family
ID=45351712
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013518511A Active JP5735107B2 (ja) | 2010-06-28 | 2011-06-24 | 3次元メモリおよびその形成方法 |
| JP2015083308A Active JP5923641B2 (ja) | 2010-06-28 | 2015-04-15 | 3次元メモリおよびその形成方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015083308A Active JP5923641B2 (ja) | 2010-06-28 | 2015-04-15 | 3次元メモリおよびその形成方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (9) | US8803214B2 (enExample) |
| EP (2) | EP2586060B1 (enExample) |
| JP (2) | JP5735107B2 (enExample) |
| KR (2) | KR102005475B1 (enExample) |
| CN (1) | CN103038882B (enExample) |
| SG (3) | SG10201907425TA (enExample) |
| WO (1) | WO2012009140A2 (enExample) |
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| US8803214B2 (en) | 2010-06-28 | 2014-08-12 | Micron Technology, Inc. | Three dimensional memory and methods of forming the same |
| US8193054B2 (en) | 2010-06-30 | 2012-06-05 | SanDisk Technologies, Inc. | Ultrahigh density vertical NAND memory device and method of making thereof |
| US8237213B2 (en) | 2010-07-15 | 2012-08-07 | Micron Technology, Inc. | Memory arrays having substantially vertical, adjacent semiconductor structures and the formation thereof |
| US8759895B2 (en) | 2011-02-25 | 2014-06-24 | Micron Technology, Inc. | Semiconductor charge storage apparatus and methods |
| KR20130046700A (ko) * | 2011-10-28 | 2013-05-08 | 삼성전자주식회사 | 3차원적으로 배열된 메모리 요소들을 구비하는 반도체 장치 |
| US9269766B2 (en) * | 2013-09-20 | 2016-02-23 | Globalfoundries Singapore Pte. Ltd. | Guard ring for memory array |
| US10902921B2 (en) * | 2018-12-21 | 2021-01-26 | Texas Instruments Incorporated | Flash memory bitcell erase with source bias voltage |
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2010
- 2010-06-28 US US12/825,211 patent/US8803214B2/en active Active
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2011
- 2011-06-24 KR KR1020137001962A patent/KR102005475B1/ko active Active
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- 2011-06-24 JP JP2013518511A patent/JP5735107B2/ja active Active
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- 2011-06-24 EP EP22170124.6A patent/EP4109537A3/en active Pending
- 2011-06-24 WO PCT/US2011/041888 patent/WO2012009140A2/en not_active Ceased
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