JP6306233B1 - フラッシュメモリおよびその製造方法 - Google Patents
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- 238000004519 manufacturing process Methods 0.000 title claims description 24
- 239000000758 substrate Substances 0.000 claims abstract description 49
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 45
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 45
- 239000010703 silicon Substances 0.000 claims abstract description 45
- 238000003860 storage Methods 0.000 claims abstract description 42
- 239000010410 layer Substances 0.000 claims description 157
- 239000012535 impurity Substances 0.000 claims description 33
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 30
- 229920005591 polysilicon Polymers 0.000 claims description 28
- 229910052751 metal Inorganic materials 0.000 claims description 20
- 239000002184 metal Substances 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 19
- 239000011229 interlayer Substances 0.000 claims description 8
- 150000004767 nitrides Chemical class 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 229910021332 silicide Inorganic materials 0.000 claims description 4
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 4
- 238000009792 diffusion process Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- 238000005468 ion implantation Methods 0.000 description 4
- 239000007769 metal material Substances 0.000 description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910052785 arsenic Inorganic materials 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- -1 arsenic ions Chemical class 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000002784 hot electron Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/30—EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region
- H10B43/35—EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region with cell select transistors, e.g. NAND
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- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/20—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/792—Field effect transistors with field effect produced by an insulated gate with charge trapping gate insulator, e.g. MNOS-memory transistors
- H01L29/7926—Vertical transistors, i.e. transistors having source and drain not in the same horizontal plane
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/32055—Deposition of semiconductive layers, e.g. poly - or amorphous silicon layers
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- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/20—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/30—EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/40—EEPROM devices comprising charge-trapping gate insulators characterised by the peripheral circuit region
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
- H01L29/4011—Multistep manufacturing processes for data storage electrodes
- H01L29/40117—Multistep manufacturing processes for data storage electrodes the electrodes comprising a charge-trapping insulator
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/20—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels
- H10B43/23—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
- H10B43/27—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels
Abstract
Description
半導体基板110と、半導体基板110の表面から垂直方向に延在する複数の柱状部120と、複数の柱状部120の側部を取り囲むように形成された電荷蓄積部130とを含む。半導体基板110は、例えば、シリコン基板である。柱状部120は、例えば、円柱状のシリコンまたはポリシリコンからなり、メモリセルの活性領域またはチャンネル領域を形成する。メモリセルがn型のMOS構造を有する場合には、柱状部120は、例えば、p型のシリコンまたはポリシリコンから構成される。
110:シリコン基板
120:柱状部
130:電荷蓄積部
132、136:酸化膜(O)
134:窒化膜(N)
140:コントロールゲート
150:ビット線
200:シリコン基板
210:高不純物層
220:第1のバッファ層
230:第2のバッファ層
240:マスク層
250:開口
260:柱状部
272、276:酸化膜(O)
274:窒化膜(N)
400:絶縁層
410:金属層
420:ポリシリコン層
Claims (15)
- 基板と、
前記基板上に形成された高不純物層と、
前記高不純物層上に形成された絶縁層と、
前記高不純物層の表面から前記絶縁層を介して垂直方向に延在し、前記絶縁層によって底部を包囲され、かつ活性領域を含む複数の柱状部と、
前記絶縁層上に形成され、かつ各柱状部の側部を取り囲むように形成された複数の電荷蓄積部と、
各電荷蓄積部の側部を取り囲むように形成された複数のコントロールゲートとを含み、
前記柱状部の一方の端部がコンタクトホールを介してビット線に電気的に接続され、前記柱状部の他方の端部が前記高不純物層から拡散された拡散領域を含む、NOR型のフラッシュメモリ。 - 前記柱状部は、シリコンまたは多結晶シリコンから構成され、前記柱状部の一方の端部にはドレイン領域が形成され、他方の端部にはソース領域が形成されている、請求項1に記載のフラッシュメモリ。
- 前記柱状部は、概ね円筒状を有し、前記電荷蓄積部は、円筒状の側部を一周取り囲む、請求項1または2に記載のフラッシュメモリ。
- 電荷蓄積部は、酸化膜(O)、窒化膜(N)および酸化膜(O)を含む、請求項1ないし3いずれか1つに記載のフラッシュメモリ。
- 前記高不純物層は、シリコン基板上に形成されたn+シリコン層である、請求項1に記載のフラッシュメモリ。
- フラッシュメモリはさらに、前記高不純物層とシリコン基板との間に金属層と他の絶縁層とを含む、請求項1に記載のフラッシュメモリ。
- 前記絶縁層の膜厚は、高不純物層から不純物が拡散する距離にほぼ等しい、請求項1に記載のフラッシュメモリ。
- 前記高不純物層は、ソース線を構成し、複数の柱状部に共通に接続される、請求項1に記載のフラッシュメモリ。
- 前記基板は、シリコン基板であり、メモリセルの周辺回路は、シリコン基板上に形成され、メモリセルは、シリコン基板上に形成された導電領域上に形成される、請求項1ないし8いずれか1つに記載のフラッシュメモリ。
- NOR型のフラッシュメモリの製造方法であって、
基板上に導電領域を形成し、
前記導電領域上にバッファ層を形成し、
前記バッファ層内に前記導電領域に至る開口を形成し、
前記開口を含む領域にシリコン層またはポリシリコン層を形成し、
前記シリコン層またはポリシリコン層の一部を除去し、前記基板上にシリコンまたはポリシリコンからなる柱状部を形成し、
前記柱状部の側部を取り囲むように電荷蓄積部を形成し、
前記電荷蓄積部の側部を取り囲むようにコントロールゲートを形成し、
前記柱状部、前記コントロールゲートを含む基板上に層間絶縁膜を形成し、
前記層間絶縁膜にコンタクトホールを形成して前記柱状部の一方の端部に電気的に接続するビット線を形成する、工程を備えた製造方法。 - 製造方法はさらに、前記バッファ層が露出されるまで前記シリコン層またはポリシリコン層を平坦化する工程を含む、請求項10に記載の製造方法。
- 前記バッファ層を形成する工程は、第1のバッファ層を形成し、当該第1のバッファ層上に第2のバッファ層を形成することを含み、
製造工程はさらに、前記シリコン層またはポリシリコン層が平坦化された後に、第2のバッファ層を選択的に除去する工程を含む、請求項11に記載の製造方法。 - 前記導電領域の不純物を前記柱状部の端部に拡散させる工程を含む、請求項10に記載の製造方法。
- 製造方法はさらに、基板上に絶縁層を形成し、当該絶縁層上に金属層を形成する工程を含み、
前記導電領域は、前記金属層上に形成される、請求項10に記載の製造方法。 - 前記金属層は、高融点シリサイド金属である、請求項14に記載の製造方法。
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JP2017037089A JP6306233B1 (ja) | 2017-02-28 | 2017-02-28 | フラッシュメモリおよびその製造方法 |
TW106140059A TWI656627B (zh) | 2017-02-28 | 2017-11-20 | 反或型快閃記憶體及其製造方法 |
CN201810100575.9A CN108511452B (zh) | 2017-02-28 | 2018-02-01 | 或非型闪速存储器及其制造方法 |
US15/892,350 US10811425B2 (en) | 2017-02-28 | 2018-02-08 | NOR flash memory and manufacturing method thereof |
KR1020180015842A KR102031703B1 (ko) | 2017-02-28 | 2018-02-08 | Nor형 플래시 메모리 및 그 제조 방법 |
US16/893,411 US11271005B2 (en) | 2017-02-28 | 2020-06-04 | NOR flash memory and manufacturing method thereof |
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JP2017037089A JP6306233B1 (ja) | 2017-02-28 | 2017-02-28 | フラッシュメモリおよびその製造方法 |
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JP2018142659A JP2018142659A (ja) | 2018-09-13 |
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JP (1) | JP6306233B1 (ja) |
KR (1) | KR102031703B1 (ja) |
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008010868A (ja) * | 2006-06-29 | 2008-01-17 | Samsung Electronics Co Ltd | 垂直チャンネルを有する不揮発性メモリ装置およびその製造方法 |
JP2008117959A (ja) * | 2006-11-06 | 2008-05-22 | Genusion:Kk | 不揮発性半導体記憶装置 |
JP2011124240A (ja) * | 2008-03-31 | 2011-06-23 | Tokyo Electron Ltd | Mos型半導体メモリ装置、その製造方法およびコンピュータ読み取り可能な記憶媒体 |
JP2015516678A (ja) * | 2012-03-31 | 2015-06-11 | サイプレス セミコンダクター コーポレーション | 多層酸窒化物層を有する酸化物−窒化物−酸化物積層体 |
JP2015149503A (ja) * | 2010-06-28 | 2015-08-20 | マイクロン テクノロジー, インク. | 3次元メモリおよびその形成方法 |
JP2015170644A (ja) * | 2014-03-05 | 2015-09-28 | 株式会社東芝 | 不揮発性半導体記憶装置 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3608919B2 (ja) | 1997-10-07 | 2005-01-12 | シャープ株式会社 | 半導体記憶装置 |
JP4454896B2 (ja) * | 2001-09-27 | 2010-04-21 | シャープ株式会社 | 仮想接地型不揮発性半導体記憶装置 |
GB0125529D0 (en) * | 2001-10-24 | 2001-12-12 | The Technology Partnership Plc | Sensing apparatus |
JP2005064031A (ja) * | 2003-08-12 | 2005-03-10 | Fujio Masuoka | 半導体装置 |
US6933558B2 (en) * | 2003-12-04 | 2005-08-23 | Advanced Micro Devices, Inc. | Flash memory device |
US7050330B2 (en) * | 2003-12-16 | 2006-05-23 | Micron Technology, Inc. | Multi-state NROM device |
JP5421549B2 (ja) | 2008-05-23 | 2014-02-19 | スパンション エルエルシー | 半導体装置の製造方法及び半導体装置 |
US9129859B2 (en) * | 2013-03-06 | 2015-09-08 | Intel Corporation | Three dimensional memory structure |
JP5819570B1 (ja) * | 2014-03-03 | 2015-11-24 | ユニサンティス エレクトロニクス シンガポール プライベート リミテッドUnisantis Electronics Singapore Pte Ltd. | 半導体装置 |
JP2016058494A (ja) | 2014-09-08 | 2016-04-21 | 株式会社東芝 | 半導体記憶装置 |
US9224473B1 (en) | 2014-09-15 | 2015-12-29 | Macronix International Co., Ltd. | Word line repair for 3D vertical channel memory |
US9230985B1 (en) * | 2014-10-15 | 2016-01-05 | Sandisk 3D Llc | Vertical TFT with tunnel barrier |
CN105990361B (zh) | 2015-02-06 | 2019-06-18 | 旺宏电子股份有限公司 | 高速垂直通道三维与非门存储器装置 |
US9711530B1 (en) * | 2016-03-25 | 2017-07-18 | Sandisk Technologies Llc | Locally-trap-characteristic-enhanced charge trap layer for three-dimensional memory structures |
US9812463B2 (en) | 2016-03-25 | 2017-11-07 | Sandisk Technologies Llc | Three-dimensional memory device containing vertically isolated charge storage regions and method of making thereof |
US9691786B1 (en) | 2016-04-29 | 2017-06-27 | Kabushiki Kaisha Toshiba | Semiconductor memory device |
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Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008010868A (ja) * | 2006-06-29 | 2008-01-17 | Samsung Electronics Co Ltd | 垂直チャンネルを有する不揮発性メモリ装置およびその製造方法 |
JP2008117959A (ja) * | 2006-11-06 | 2008-05-22 | Genusion:Kk | 不揮発性半導体記憶装置 |
JP2011124240A (ja) * | 2008-03-31 | 2011-06-23 | Tokyo Electron Ltd | Mos型半導体メモリ装置、その製造方法およびコンピュータ読み取り可能な記憶媒体 |
JP2015149503A (ja) * | 2010-06-28 | 2015-08-20 | マイクロン テクノロジー, インク. | 3次元メモリおよびその形成方法 |
JP2015516678A (ja) * | 2012-03-31 | 2015-06-11 | サイプレス セミコンダクター コーポレーション | 多層酸窒化物層を有する酸化物−窒化物−酸化物積層体 |
JP2015170644A (ja) * | 2014-03-05 | 2015-09-28 | 株式会社東芝 | 不揮発性半導体記憶装置 |
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US20180247944A1 (en) | 2018-08-30 |
TW201834220A (zh) | 2018-09-16 |
CN108511452A (zh) | 2018-09-07 |
US11271005B2 (en) | 2022-03-08 |
CN108511452B (zh) | 2021-04-30 |
TWI656627B (zh) | 2019-04-11 |
US20200303384A1 (en) | 2020-09-24 |
JP2018142659A (ja) | 2018-09-13 |
KR20180099468A (ko) | 2018-09-05 |
US10811425B2 (en) | 2020-10-20 |
KR102031703B1 (ko) | 2019-10-14 |
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