JP2010219497A - 半導体装置用基板の製造方法、半導体装置の製造方法、半導体装置用基板及び半導体装置 - Google Patents
半導体装置用基板の製造方法、半導体装置の製造方法、半導体装置用基板及び半導体装置 Download PDFInfo
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- JP2010219497A JP2010219497A JP2010000305A JP2010000305A JP2010219497A JP 2010219497 A JP2010219497 A JP 2010219497A JP 2010000305 A JP2010000305 A JP 2010000305A JP 2010000305 A JP2010000305 A JP 2010000305A JP 2010219497 A JP2010219497 A JP 2010219497A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 262
- 239000000758 substrate Substances 0.000 title claims abstract description 224
- 238000000034 method Methods 0.000 title claims abstract description 92
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 63
- 239000002184 metal Substances 0.000 claims abstract description 168
- 229910052751 metal Inorganic materials 0.000 claims abstract description 168
- 239000011347 resin Substances 0.000 claims abstract description 63
- 229920005989 resin Polymers 0.000 claims abstract description 63
- 239000011521 glass Substances 0.000 claims abstract description 58
- 238000007789 sealing Methods 0.000 claims abstract description 51
- 238000007747 plating Methods 0.000 claims abstract description 41
- 238000011161 development Methods 0.000 claims abstract description 28
- 238000013459 approach Methods 0.000 claims abstract description 22
- 230000005540 biological transmission Effects 0.000 claims description 120
- 238000002834 transmittance Methods 0.000 claims description 54
- 230000007423 decrease Effects 0.000 claims description 12
- 230000006641 stabilisation Effects 0.000 claims description 9
- 238000011105 stabilization Methods 0.000 claims description 9
- 230000003247 decreasing effect Effects 0.000 abstract 2
- 230000010485 coping Effects 0.000 abstract 1
- 230000008569 process Effects 0.000 description 50
- 238000010586 diagram Methods 0.000 description 44
- 230000018109 developmental process Effects 0.000 description 24
- 230000004048 modification Effects 0.000 description 12
- 238000012986 modification Methods 0.000 description 12
- 230000002093 peripheral effect Effects 0.000 description 12
- 239000000463 material Substances 0.000 description 8
- 229920002120 photoresistant polymer Polymers 0.000 description 8
- 239000010949 copper Substances 0.000 description 7
- 239000007769 metal material Substances 0.000 description 7
- 229910001220 stainless steel Inorganic materials 0.000 description 6
- 239000010935 stainless steel Substances 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000004070 electrodeposition Methods 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000669 biting effect Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 230000007261 regionalization Effects 0.000 description 2
- 239000000779 smoke Substances 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 235000011121 sodium hydroxide Nutrition 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
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- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
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- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/568—Temporary substrate used as encapsulation process aid
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- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
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- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
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- H01L24/93—Batch processes
- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
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- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0555—Shape
- H01L2224/05552—Shape in top view
- H01L2224/05554—Shape in top view being square
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- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
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- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
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- H01L2224/48105—Connecting bonding areas at different heights
- H01L2224/48106—Connecting bonding areas at different heights the connector being orthogonal to a side surface of the semiconductor or solid-state body, e.g. parallel layout
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- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
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- H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L2224/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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Abstract
【解決手段】導電性を有する基板10の表面にレジスト層21を形成するレジスト形成工程と、マスクパターン31を含むガラスマスク30を用いて、レジスト層を露光する露光工程と、レジスト層を現像し、基板に接近するにつれて開口部外周が小さくなる傾斜部25を含む側面形状のレジストパターン22を基板上に形成する現像工程と、レジストパターンを用いて基板の露出部分にめっきを行い、基板に接近するにつれて外周が小さくなる傾斜部44を含む側面形状の金属層40を形成するめっき工程と、レジストパターンを除去するレジスト除去工程と、を含むことを特徴とする。
【選択図】図3
Description
透過領域と遮光領域とを有し、該透過領域と該遮光領域との間に、該透過領域より透過率が低く、該遮光領域より透過率が高い中間透過領域を有するマスクパターンを含むガラスマスクを用いて、前記レジスト層を露光する露光工程と、
前記レジスト層を現像し、前記基板に接近するにつれて開口部外周が小さくなる傾斜部を含む側面形状のレジストパターンを前記基板上に形成する現像工程と、
該レジストパターンを用いて前記基板の露出部分にめっきを行い、前記基板に接近するにつれて外周が小さくなる傾斜部を含む側面形状の金属層を形成するめっき工程と、
前記レジストパターンを除去するレジスト除去工程と、を含むことを特徴とする。
前記マスクパターンの前記中間透過領域は、前記透過領域と同じ透過率を有する透過部と、前記遮光領域と同じ透過率を有する遮光部とが混合されて構成されていることを特徴とする。
前記中間透過領域は、前記遮光部の領域中に、部分的に前記透過部を含むことを特徴とする。
前記中間透過領域は、前記透過部の領域と前記遮光部の領域とを区切るぎざぎざ形状の境界線を含むことを特徴とする。
前記レジストパターンは、上面の前記開口部外周が前記境界線と略同一のぎざぎざ形状を有し、下面の前記基板に接近するにつれてぎざぎざの大きさが小さくなる側面形状であることを特徴とする。
前記めっき工程は、前記レジストパターンの厚さ以下で前記金属層を形成することを特徴とする。
前記金属層は、ワイヤボンディングがなされる電極又は半導体素子が搭載される領域であることを特徴とする。
前記現像工程と、前記めっき工程との間に、前記レジストパターンを露光するレジストパターン安定化工程を更に含むことを特徴とする。
前記半導体装置用基板の金属層を電極として、前記半導体素子の端子と前記電極をワイヤボンディングにより接続する工程と、
前記半導体装置用基板に搭載された前記半導体素子を樹脂で封止する工程と、
前記半導体装置用基板を除去する工程と、を含むことを特徴とする。
前記電極及び/又は前記半導体素子搭載領域は、上面がぎざぎざ形状を有し、側面が、前記基板側に接近するにつれて外周が小さくなり内側に削れる傾斜部を含むとともに、ぎざぎざの大きさが小さくなる形状を有することを特徴とする。
前記電極及び/又は前記半導体素子搭載領域の上面は、平坦面であることを特徴とする。
前記電極用金属層及び/又は前記半導体素子搭載用金属層は、上面がぎざぎざ形状を有し、側面が、下面側に接近するにつれて外周が小さくなり内側に削れる傾斜部を含むとともに、ぎざぎざの大きさが小さくなる形状を有することを特徴とする。
前記電極用金属層及び/又は前記半導体素子用金属層の上面は、平坦面であることを特徴とする。
21 レジスト層
22、22a レジストパターン
23、41 上面
24、43 側面
25、44 傾斜部
30 ガラスマスク
31、31a、31b、31c、31d マスクパターン
32、32d 遮光領域
33、33a、33b、33c、33d 中間透過領域
34、34a、34b、34c、35b、35c 部分透過部
36、48 ぎざぎざ形状
37 ガラス基板
37a 透過領域
38 遮光部
39 透過部
40、40a 金属層
45 半導体素子搭載領域
46 電極
47 外部端子
50、50a 半導体装置用基板
60 半導体素子
61 端子
70 ボンディングワイヤ
80 封止樹脂
100 半導体装置
Claims (13)
- 導電性を有する基板の表面にレジスト層を形成するレジスト形成工程と、
透過領域と遮光領域とを有し、該透過領域と該遮光領域との間に、該透過領域より透過率が低く、該遮光領域より透過率が高い中間透過領域を有するマスクパターンを含むガラスマスクを用いて、前記レジスト層を露光する露光工程と、
前記レジスト層を現像し、前記基板に接近するにつれて開口部外周が小さくなる傾斜部を含む側面形状のレジストパターンを前記基板上に形成する現像工程と、
該レジストパターンを用いて前記基板の露出部分にめっきを行い、前記基板に接近するにつれて外周が小さくなる傾斜部を含む側面形状の金属層を形成するめっき工程と、
前記レジストパターンを除去するレジスト除去工程と、を含むことを特徴とする半導体装置用基板の製造方法。 - 前記マスクパターンの前記中間透過領域は、前記透過領域と同じ透過率を有する透過部と、前記遮光領域と同じ透過率を有する遮光部とが混合されて構成されていることを特徴とする請求項1に記載の半導体装置用基板の製造方法。
- 前記中間透過領域は、前記遮光部の領域中に、部分的に前記透過部を含むことを特徴とする請求項2に記載の半導体装置用基板の製造方法。
- 前記中間透過領域は、前記透過部の領域と前記遮光部の領域とを区切るぎざぎざ形状の境界線を含むことを特徴とする請求項2に記載の半導体装置用基板の製造方法。
- 前記レジストパターンは、上面の前記開口部外周が前記境界線と略同一のぎざぎざ形状を有し、下面の前記基板に接近するにつれてぎざぎざの大きさが小さくなる側面形状であることを特徴とする請求項4に記載の半導体装置用基板の製造方法。
- 前記めっき工程では、前記レジストパターンの厚さ以下で前記金属層を形成することを特徴とする請求項1乃至5のいずれか一項に記載の半導体装置用基板の製造方法。
- 前記金属層は、ワイヤボンディングがなされる電極又は半導体素子が搭載される領域であることを特徴とする請求項1乃至6のいずれか一項に記載の半導体装置用基板の製造方法。
- 前記現像工程と、前記めっき工程との間に、前記レジストパターンを露光するレジストパターン安定化工程を更に含むことを特徴とする請求項1乃至7のいずれか一項に記載の半導体装置の製造方法。
- 請求項1乃至8のいずれか一項に記載の半導体装置用基板の製造方法により製造された半導体装置用基板に半導体素子を搭載する工程と、
前記半導体装置用基板の金属層を電極として、前記半導体素子の端子と前記電極をワイヤボンディングにより接続する工程と、
前記半導体装置用基板に搭載された前記半導体素子を樹脂で封止する工程と、
前記半導体装置用基板を除去する工程と、を含むことを特徴とする半導体装置の製造方法。 - 基板上に、金属層の電極及び半導体素子搭載領域を有する半導体装置用基板であって、
前記電極及び/又は前記半導体素子搭載領域は、上面がぎざぎざ形状を有し、側面が、前記基板側に接近するにつれて外周が小さくなり内側に削れる傾斜部を含むとともに、ぎざぎざの大きさが小さくなる形状を有することを特徴とする半導体装置用基板。 - 前記電極及び/又は前記半導体素子搭載領域の前記上面は、平坦面であることを特徴とする請求項10に記載の半導体装置用基板。
- 上面がワイヤボンディング用の電極として用いられ、下面が外部端子として用いられる電極用金属層と、半導体素子が搭載される半導体素子搭載用金属層と、該半導体素子搭載用金属層に搭載され、端子が前記電極にワイヤボンディングで接続された半導体素子とを樹脂で封止した半導体装置であって、
前記電極用金属層及び/又は前記半導体素子搭載用金属層は、上面がぎざぎざ形状を有し、側面が、下面側に接近するにつれて外周が小さくなり内側に削れる傾斜部を含むとともに、ぎざぎざの大きさが小さくなる形状を有することを特徴とする半導体装置。 - 前記電極用金属層及び/又は前記半導体素子用金属層の上面は、平坦面であることを特徴とする請求項12に記載の半導体装置。
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JP2016171204A (ja) * | 2015-03-12 | 2016-09-23 | Shマテリアル株式会社 | 半導体素子搭載用基板及びその製造方法 |
JP2017152588A (ja) * | 2016-02-25 | 2017-08-31 | Shマテリアル株式会社 | 半導体素子搭載用基板、半導体装置及び光半導体装置、並びにそれらの製造方法 |
WO2017145923A1 (ja) * | 2016-02-25 | 2017-08-31 | Shマテリアル株式会社 | 半導体素子搭載用基板、半導体装置及び光半導体装置、並びにそれらの製造方法 |
TWI636541B (zh) * | 2016-02-25 | 2018-09-21 | 友立材料股份有限公司 | 半導體元件搭載用基板、半導體裝置及光半導體裝置、以及該等之製造方法 |
JP2019012788A (ja) * | 2017-06-30 | 2019-01-24 | 大口マテリアル株式会社 | 半導体素子搭載用基板及びその製造方法 |
WO2019049453A1 (ja) * | 2017-09-07 | 2019-03-14 | 株式会社ジャパンディスプレイ | 蒸着マスク、蒸着マスクの作製方法、および表示装置の製造方法 |
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CN101859701B (zh) | 2012-11-28 |
US9054116B2 (en) | 2015-06-09 |
CN101859701A (zh) | 2010-10-13 |
US20100213620A1 (en) | 2010-08-26 |
TWI420636B (zh) | 2013-12-21 |
TW201032309A (en) | 2010-09-01 |
KR101109795B1 (ko) | 2012-02-24 |
US8188588B2 (en) | 2012-05-29 |
US20120064666A1 (en) | 2012-03-15 |
CN102324417A (zh) | 2012-01-18 |
KR20100095372A (ko) | 2010-08-30 |
CN102324417B (zh) | 2014-05-14 |
KR20110089840A (ko) | 2011-08-09 |
JP4811520B2 (ja) | 2011-11-09 |
US20130309818A1 (en) | 2013-11-21 |
KR101079922B1 (ko) | 2011-11-04 |
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