JP2008147343A - 不揮発性半導体記憶装置 - Google Patents
不揮発性半導体記憶装置 Download PDFInfo
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- JP2008147343A JP2008147343A JP2006331689A JP2006331689A JP2008147343A JP 2008147343 A JP2008147343 A JP 2008147343A JP 2006331689 A JP2006331689 A JP 2006331689A JP 2006331689 A JP2006331689 A JP 2006331689A JP 2008147343 A JP2008147343 A JP 2008147343A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 114
- 230000007704 transition Effects 0.000 claims abstract description 145
- 230000004888 barrier function Effects 0.000 claims description 36
- 239000012535 impurity Substances 0.000 claims description 8
- 238000000034 method Methods 0.000 description 107
- 239000010410 layer Substances 0.000 description 98
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 64
- 238000004519 manufacturing process Methods 0.000 description 50
- 230000008569 process Effects 0.000 description 46
- 239000010408 film Substances 0.000 description 44
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 41
- 229920005591 polysilicon Polymers 0.000 description 41
- 229910052721 tungsten Inorganic materials 0.000 description 41
- 230000008859 change Effects 0.000 description 38
- 229910052751 metal Inorganic materials 0.000 description 38
- 239000002184 metal Substances 0.000 description 38
- 229910004298 SiO 2 Inorganic materials 0.000 description 37
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 33
- 239000010937 tungsten Substances 0.000 description 33
- 239000010936 titanium Substances 0.000 description 21
- 230000002829 reductive effect Effects 0.000 description 20
- 238000010586 diagram Methods 0.000 description 19
- 230000006870 function Effects 0.000 description 18
- 239000000758 substrate Substances 0.000 description 17
- 229910052719 titanium Inorganic materials 0.000 description 17
- 239000010949 copper Substances 0.000 description 16
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 13
- 239000001301 oxygen Substances 0.000 description 13
- 229910052760 oxygen Inorganic materials 0.000 description 13
- 239000000463 material Substances 0.000 description 12
- 229910052715 tantalum Inorganic materials 0.000 description 12
- 230000010355 oscillation Effects 0.000 description 11
- 230000015572 biosynthetic process Effects 0.000 description 10
- 229910052802 copper Inorganic materials 0.000 description 10
- 230000001590 oxidative effect Effects 0.000 description 9
- 229910010282 TiON Inorganic materials 0.000 description 8
- 230000002441 reversible effect Effects 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 230000007423 decrease Effects 0.000 description 7
- 238000001312 dry etching Methods 0.000 description 7
- 229910044991 metal oxide Inorganic materials 0.000 description 7
- 150000004706 metal oxides Chemical class 0.000 description 7
- 229910052759 nickel Inorganic materials 0.000 description 7
- 238000000206 photolithography Methods 0.000 description 7
- 238000005498 polishing Methods 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 6
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 239000002019 doping agent Substances 0.000 description 6
- 230000001747 exhibiting effect Effects 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 5
- 239000000956 alloy Substances 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 238000005468 ion implantation Methods 0.000 description 5
- 150000002739 metals Chemical class 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 150000004767 nitrides Chemical class 0.000 description 5
- 229910052723 transition metal Inorganic materials 0.000 description 5
- 150000003624 transition metals Chemical class 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
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- 230000008901 benefit Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
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- 238000002955 isolation Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
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- 229910052697 platinum Inorganic materials 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- -1 tungsten Chemical class 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000005751 Copper oxide Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 229910000431 copper oxide Inorganic materials 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000036961 partial effect Effects 0.000 description 2
- 239000007790 solid phase Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 206010021143 Hypoxia Diseases 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- 229910010303 TiOxNy Inorganic materials 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- INJRKJPEYSAMPD-UHFFFAOYSA-N aluminum;silicic acid;hydrate Chemical compound O.[Al].[Al].O[Si](O)(O)O INJRKJPEYSAMPD-UHFFFAOYSA-N 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000002860 competitive effect Effects 0.000 description 1
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- 230000006866 deterioration Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000011572 manganese Substances 0.000 description 1
- AMWRITDGCCNYAT-UHFFFAOYSA-L manganese oxide Inorganic materials [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
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- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/101—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including resistors or capacitors only
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Abstract
【解決手段】 両端に所定条件を充足する電圧が印加されることで、当該両端の電流電圧特性で規定される抵抗特性が低抵抗状態と高抵抗状態の安定的に取り得る2つの抵抗特性間を遷移可能である2端子構造の可変抵抗素子であって、絶対値が第1閾値電圧以上の第1極性の電圧が印加されると低抵抗状態から高抵抗状態に遷移し、絶対値が第2閾値電圧以上の第2極性の電圧が印加されると高抵抗状態から低抵抗状態に遷移する特性を有する可変抵抗素子と、可変抵抗素子に直列に接続される負荷抵抗の調整可能な負荷回路と、直列回路の両端に電圧印加可能な電圧発生回路を備え、負荷回路の抵抗を調整することにより可変抵抗素子の状態間遷移を可能に構成される。
【選択図】 図1
Description
本発明装置の構成について、図1〜図19を参照して説明する。図1は、本発明に係る不揮発性半導体記憶装置の概略構成を示すブロック図の一例である。図1に示すように、本発明装置10は、メモリセルアレイ11、ワード線デコーダ(ワード線選択回路に相当)12、ビット線デコーダ(ビット線選択回路に相当)13、負荷抵抗特性可変回路14、読み出し回路15、制御回路16、及び、電圧スイッチ回路17を備えて構成される。
V=−R1×(I−Ia)+Va
(Va−Vb)/(Ib−Ia)<R1
R1=(Va−Vt1)/(It1−Ia)
Vda>Va+R1×Ia
V=−R2×(I−Ib)+Vb
(Va−Vb)/(Ib−Ia)>R2
R2=(Vt2−Vb)/(Ib−It2)
Vdb>Vb+R2×Ib
R3=(Va−Vt3)/(It3−Ia)
(数10)
V=−R3×(I−Ia)+Va
(Va−Vb)/(Ib−Ia)<R3
R4=(Vt4−Vb)/(Ib−It4)
(数13)
V=−R4×(I−Ib)+Vb
(Va−Vb)/(Ib−Ia)>R4
次に、本発明装置の製造方法について、図面を参照して説明する。
本発明装置の製造方法に係る第1実施形態(以下、適宜「本実施形態」と称する)につき、図20〜図36の各図を参照して説明する。図20は、本実施形態で形成されるメモリセルの概略構成図であり、図21はメモリセルの平面図である。本実施形態で製造される本発明装置は、タングステン(W)および密着層TiNからなる第1の配線、バリアメタルTiN、抵抗低下層TiN型多結晶(ポリ)シリコン、下部電極TiN、可変抵抗体であるTiOxNyからなるメモリセル部、上部電極およびタングステンからなる第2の配線から構成される。又、図22〜図32は本実施形態の製造方法を工程順に示したものである。図22〜図32において各図(a)は、図20のX−X’に沿った垂直断面図を、各図(b) は、図20のY−Y’に沿った垂直断面図を夫々示したものである。尚、図20で示している図は簡略化のため単一のメモリセルを示しているが、実際はX方向およびY方向に周期的に若しくは非周期的にメモリセルが配置されているものである。
本発明装置の製造方法に係る第2実施形態(以下、適宜「本実施形態」と称する)につき、図37〜図49の各図を参照して説明する。図37は、本実施形態で形成されるメモリセルの概略構成図であり、図38はメモリセルの平面図である。本実施形態で製造される本発明装置は、P型シリコン基板内に形成されたN+層およびN−層からなる第1の配線層、下部電極TiNおよび可変抵抗体であるTiONからなるメモリセル部、上部電極と密着層であるTiNとWからなる第2の配線から構成される。又、図39〜図46は本実施形態の製造方法を工程順に示したものである。図39〜図46において各図(a)は、図38のX−X’に沿った垂直断面図を、各図(b)は、図38のY−Y’に沿った垂直断面図をそれぞれ示したものである。尚、本実施形態でも、第1実施形態と同様、下部電極に対する上部電極の極性が正電圧となるような電圧を印加することでモノポーラスイッチング動作を実現させる場合を例に挙げて説明する。
本発明装置の製造方法に係る第3実施形態(以下、適宜「本実施形態」と称する)につき、図50〜図60の各図を参照して説明する。図50は、本実施形態で形成されるメモリセルの概略構成図であり、図51はメモリセルの平面図である。本実施形態で製造される本発明装置は、W及び密着層TiNからなる第1の配線、バリアメタルTiN、抵抗低下層TiN型ポリシリコン、下部電極TiN、可変抵抗体であるTiONからなるメモリセル部、上部電極と密着層、Wからなる第2の配線から構成される。また図52〜図58は本実施形態の製造方法を工程順に示したものである。図52〜図58において各図(a)は、図51のX−X’に沿った垂直断面図を、各図(b)は、図51のY−Y’に沿った垂直断面図をそれぞれ示したものである。尚、図50で示している図は簡略化のため単一のメモリセルを示しているが、実際はX方向およびY方向に周期的に若しくは非周期的にメモリセルが配置されているものである。
11: メモリセルアレイ
12: ワード線デコーダ
13: ビット線デコーダ
14: 負荷抵抗特性可変回路
15: 読み出し回路
16: 制御回路
17: 電圧スイッチ回路
18: アドレス線
19: データ線
20: 制御信号線
21: 可変抵抗素子
22: 下部電極
23: 可変抵抗体
24: 上部電極
31〜36: P型MOSFET
37: 抵抗制御素子
51: 絶縁膜
52: TiN(密着層)
53: タングステン(第1の配線層)
54: 絶縁膜
55: バリアメタル層
56: 抵抗低下層
57: N型ポリシリコン
58: 下部電極
59: 絶縁膜
60: 可変抵抗体
61: TiN(密着層)
62: タングステン(第2の配線層)
63: P型ポリシリコン
64: P型ポリシリコン
65: 下部電極
66: 可変抵抗体
67: 上部電極
68: 金属電極
71: P型シリコン基板
72: N+層
73: N−層
74: 素子分離領域
75: 下部電極
76: 絶縁膜
77: 可変抵抗体
78: TiN(密着層)
79: タングステン(第2の配線層)
80: P層
81: 金属電極
82: 下部電極
83: 可変抵抗体
84: 上部電極
91: 絶縁膜
92: TiN(密着層)
93: タングステン(第1の配線層)
94: バリアメタル層
95: 抵抗低下層
96: N型ポリシリコン
97: 下部電極
98: 絶縁膜
99: 可変抵抗体
100: TiN(密着層)
101: タングステン(第2の配線層)
BL0〜BL3: ビット線
CA90: メモリセルアレイ
D: ダイオード
M、MC11: メモリセル
R、r: 内部抵抗
Rc: 内部抵抗
Rv: 可変抵抗
Rz: 負荷抵抗
R11: 可変抵抗素子
Sc1〜Sc7: 制御信号
SL: ソース線
Tr11: 選択トランジスタ
Vcc: 供給電圧(電源電圧)
Vee: 消去用電圧
Vee/2: 消去抑止電圧
Vpp: 書き込み用電圧
Vpp/2: 書き込み抑止電圧
Vr: 読み出し電圧
Vss: 接地電圧
WL0〜WL3: ワード線
Claims (6)
- 両端に所定条件を充足する電圧が印加されることで、当該両端の電流電圧特性で規定される抵抗特性が低抵抗状態と高抵抗状態の安定的に取り得る2つの抵抗特性間を遷移可能である2端子構造の可変抵抗素子を有するメモリセルと、
前記可変抵抗素子の一方の端子に直列に接続され、電流電圧特性で規定される負荷抵抗特性を第1負荷抵抗特性と当該第1負荷抵抗特性より高抵抗な第2負荷抵抗特性との間で切換可能に構成される負荷回路と、
前記可変抵抗素子と前記負荷回路との直列回路の両端に電圧を印加するための電圧発生回路と、を備えてなる不揮発性半導体記憶装置であって、
前記可変抵抗素子の記憶状態が、前記抵抗特性が低抵抗状態と高抵抗状態の何れであるかによって定まり、前記可変抵抗素子の両端への電圧印加によって、前記抵抗特性が低抵抗状態と高抵抗状態間で遷移することで書き換え可能な構成であり、
前記可変抵抗素子が、
一端子を基準とした場合の他端子に対する印加電圧の正負の極性が第1極性である場合には、低抵抗状態から高抵抗状態に遷移するのに必要な印加電圧の絶対値の下限値である第1閾値電圧が、前記抵抗特性が高抵抗状態から低抵抗状態に遷移するのに必要な印加電圧の絶対値の下限値である第2閾値電圧より小さく、前記印加電圧の正負の極性が前記第1極性とは異なる第2極性である場合には、前記第1閾値電圧が前記第2閾値電圧より大きい非対称な抵抗特性を示し、
前記負荷回路が、
前記可変抵抗素子の前記抵抗特性を低抵抗状態から高抵抗状態に遷移させる第1書き換え動作時には前記負荷抵抗特性が前記第1負荷抵抗特性を示し、前記可変抵抗素子の前記抵抗特性を高抵抗状態から低抵抗状態に遷移させる第2書き換え動作時には前記負荷抵抗特性が前記第2負荷抵抗特性を示すように切り換えられ、
前記電圧発生回路が、
前記第1書き換え動作時には、書き換え対象となる前記メモリセルが有する前記可変抵抗素子の両端に絶対値が前記第1閾値電圧以上の前記第1極性の電圧が印加されるように、前記可変抵抗素子及び前記負荷回路の直列回路の両端に第1書き換え電圧を印加し、
前記第2書き換え動作時には、書き換え対象となる前記メモリセルが有する前記可変抵抗素子の両端に絶対値が前記第2閾値電圧以上の前記第1極性の電圧が印加されるように、前記可変抵抗素子及び前記負荷回路の直列回路の両端に第2書き換え電圧を印加することを特徴とする不揮発性半導体記憶装置。 - 前記可変抵抗素子が、第1電極と第2電極の間に可変抵抗体を挟持してなる3層構造体を形成することを特徴とする請求項1に記載の不揮発性半導体記憶装置。
- 前記メモリセルが、前記可変抵抗素子と直列に接続する整流素子を有し、
前記整流素子が、前記可変抵抗素子の両端に前記第1極性の電圧が印加された場合に順方向バイアスを構成することを特徴とする請求項2に記載の不揮発性半導体記憶装置。 - 前記第1極性が正極性である場合には、前記下部電極の下層に接触して形成されるN型多結晶半導体と前記下部電極との界面でショットキーバリアダイオードが構成され、
前記第1極性が負極性である場合には、前記下部電極の下層に接触して形成されるP型多結晶半導体と前記下部電極との界面でショットキーバリアダイオードが構成されることを特徴とする請求項3に記載の不揮発性半導体記憶装置。 - 前記第1極性が正極性である場合には、前記N型多結晶半導体に対して前記下部電極との接触領域の一部にP型の不純物が注入されており、
前記第1極性が負極性である場合には、前記P型多結晶半導体に対して前記下部電極との接触領域の一部にN型の不純物が注入されていることを特徴とする請求項4に記載の不揮発性半導体記憶装置。 - 前記第1極性が正極性である場合には、前記下部電極の下層に接触して形成されるP型の上部多結晶半導体と、当該上部多結晶半導体の下層に接触して形成されるN型の下部多結晶半導体とでPN接合ダイオードが構成され、
前記第1極性が負極性である場合には、前記下部電極の下層に接触して形成されるN型の上部多結晶半導体と、当該上部多結晶半導体の下層に接触して形成されるP型の下部多結晶半導体とでPN接合ダイオードが構成されることを特徴とする請求項3に記載の不揮発性半導体記憶装置。
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- 2007-11-05 CN CN200780045357XA patent/CN101553924B/zh active Active
- 2007-11-05 US US14/032,056 patent/USRE45345E1/en active Active
- 2007-11-05 US US12/515,286 patent/US8023312B2/en not_active Ceased
- 2007-11-20 TW TW096143985A patent/TW200839766A/zh unknown
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Also Published As
Publication number | Publication date |
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TWI354287B (ja) | 2011-12-11 |
JP4088324B1 (ja) | 2008-05-21 |
US8023312B2 (en) | 2011-09-20 |
WO2008068992A1 (ja) | 2008-06-12 |
CN101553924A (zh) | 2009-10-07 |
CN101553924B (zh) | 2012-06-20 |
US20090273964A1 (en) | 2009-11-05 |
TW200839766A (en) | 2008-10-01 |
USRE45345E1 (en) | 2015-01-20 |
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