CN101553924A - 非易失性半导体存储器件 - Google Patents
非易失性半导体存储器件 Download PDFInfo
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- CN101553924A CN101553924A CNA200780045357XA CN200780045357A CN101553924A CN 101553924 A CN101553924 A CN 101553924A CN A200780045357X A CNA200780045357X A CN A200780045357XA CN 200780045357 A CN200780045357 A CN 200780045357A CN 101553924 A CN101553924 A CN 101553924A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 112
- 238000003860 storage Methods 0.000 title abstract description 13
- 238000012546 transfer Methods 0.000 claims description 144
- 230000004888 barrier function Effects 0.000 claims description 36
- 230000009471 action Effects 0.000 claims description 22
- 239000012535 impurity Substances 0.000 claims description 8
- 210000004027 cell Anatomy 0.000 description 128
- 238000000034 method Methods 0.000 description 115
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 59
- 238000004519 manufacturing process Methods 0.000 description 55
- 230000008569 process Effects 0.000 description 49
- 238000006243 chemical reaction Methods 0.000 description 48
- 239000010410 layer Substances 0.000 description 43
- 229910052751 metal Inorganic materials 0.000 description 39
- 239000002184 metal Substances 0.000 description 39
- 230000015572 biosynthetic process Effects 0.000 description 37
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 37
- 229920005591 polysilicon Polymers 0.000 description 37
- 229910052721 tungsten Inorganic materials 0.000 description 32
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 23
- 239000010937 tungsten Substances 0.000 description 23
- 239000012790 adhesive layer Substances 0.000 description 22
- 239000000203 mixture Substances 0.000 description 21
- 230000008859 change Effects 0.000 description 20
- 230000002596 correlated effect Effects 0.000 description 20
- 239000010949 copper Substances 0.000 description 19
- 239000010936 titanium Substances 0.000 description 19
- 229910004298 SiO 2 Inorganic materials 0.000 description 17
- 229910052719 titanium Inorganic materials 0.000 description 15
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 14
- 229910052802 copper Inorganic materials 0.000 description 14
- 230000006870 function Effects 0.000 description 14
- 230000003647 oxidation Effects 0.000 description 14
- 238000007254 oxidation reaction Methods 0.000 description 14
- 239000001301 oxygen Substances 0.000 description 14
- 229910052760 oxygen Inorganic materials 0.000 description 14
- 239000000758 substrate Substances 0.000 description 12
- 229910052715 tantalum Inorganic materials 0.000 description 12
- 230000000694 effects Effects 0.000 description 11
- 229910052759 nickel Inorganic materials 0.000 description 11
- 239000000463 material Substances 0.000 description 10
- 239000000178 monomer Substances 0.000 description 10
- 230000003534 oscillatory effect Effects 0.000 description 10
- 150000002739 metals Chemical class 0.000 description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 8
- 229910010282 TiON Inorganic materials 0.000 description 8
- 238000010276 construction Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
- 238000001312 dry etching Methods 0.000 description 8
- 229910044991 metal oxide Inorganic materials 0.000 description 7
- 150000004706 metal oxides Chemical class 0.000 description 7
- 150000004767 nitrides Chemical class 0.000 description 7
- 238000001259 photo etching Methods 0.000 description 7
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 230000000875 corresponding effect Effects 0.000 description 6
- 230000007423 decrease Effects 0.000 description 6
- 239000002019 doping agent Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 229910045601 alloy Inorganic materials 0.000 description 5
- 239000000956 alloy Substances 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 230000033228 biological regulation Effects 0.000 description 3
- 239000003153 chemical reaction reagent Substances 0.000 description 3
- 230000006837 decompression Effects 0.000 description 3
- 239000007772 electrode material Substances 0.000 description 3
- 239000011229 interlayer Substances 0.000 description 3
- 238000011835 investigation Methods 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 241001212149 Cathetus Species 0.000 description 2
- 241000220317 Rosa Species 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000007790 solid phase Substances 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 235000008733 Citrus aurantifolia Nutrition 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- 229910010303 TiOxNy Inorganic materials 0.000 description 1
- 235000011941 Tilia x europaea Nutrition 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 150000001879 copper Chemical class 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 229940090044 injection Drugs 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000004571 lime Substances 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000011572 manganese Substances 0.000 description 1
- 229940074869 marquis Drugs 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000003446 memory effect Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- VBUNOIXRZNJNAD-UHFFFAOYSA-N ponazuril Chemical compound CC1=CC(N2C(N(C)C(=O)NC2=O)=O)=CC=C1OC1=CC=C(S(=O)(=O)C(F)(F)F)C=C1 VBUNOIXRZNJNAD-UHFFFAOYSA-N 0.000 description 1
- 238000000275 quality assurance Methods 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 210000000352 storage cell Anatomy 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/101—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including resistors or capacitors only
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0007—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements comprising metal oxide memory material, e.g. perovskites
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0021—Auxiliary circuits
- G11C13/003—Cell access
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/20—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having two electrodes, e.g. diodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/80—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/80—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
- H10B63/84—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays arranged in a direction perpendicular to the substrate, e.g. 3D cell arrays
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/021—Formation of switching materials, e.g. deposition of layers
- H10N70/028—Formation of switching materials, e.g. deposition of layers by conversion of electrode material, e.g. oxidation
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/883—Oxides or nitrides
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/883—Oxides or nitrides
- H10N70/8833—Binary metal oxides, e.g. TaOx
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
- G11C2213/10—Resistive cells; Technology aspects
- G11C2213/15—Current-voltage curve
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
- G11C2213/30—Resistive cell, memory material aspects
- G11C2213/32—Material having simple binary metal oxide structure
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
- G11C2213/30—Resistive cell, memory material aspects
- G11C2213/34—Material includes an oxide or a nitride
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
- G11C2213/70—Resistive array aspects
- G11C2213/71—Three dimensional array
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
- G11C2213/70—Resistive array aspects
- G11C2213/72—Array wherein the access device being a diode
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
- G11C2213/70—Resistive array aspects
- G11C2213/76—Array using an access device for each cell which being not a transistor and not a diode
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
- G11C2213/70—Resistive array aspects
- G11C2213/77—Array wherein the memory element being directly connected to the bit lines and word lines without any access device being used
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
- G11C2213/70—Resistive array aspects
- G11C2213/79—Array wherein the access device being a transistor
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Memories (AREA)
Abstract
Description
Claims (6)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP331689/2006 | 2006-12-08 | ||
JP2006331689A JP4088324B1 (ja) | 2006-12-08 | 2006-12-08 | 不揮発性半導体記憶装置 |
PCT/JP2007/071502 WO2008068992A1 (ja) | 2006-12-08 | 2007-11-05 | 不揮発性半導体記憶装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101553924A true CN101553924A (zh) | 2009-10-07 |
CN101553924B CN101553924B (zh) | 2012-06-20 |
Family
ID=39491898
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200780045357XA Active CN101553924B (zh) | 2006-12-08 | 2007-11-05 | 非易失性半导体存储器件 |
Country Status (5)
Country | Link |
---|---|
US (2) | USRE45345E1 (zh) |
JP (1) | JP4088324B1 (zh) |
CN (1) | CN101553924B (zh) |
TW (1) | TW200839766A (zh) |
WO (1) | WO2008068992A1 (zh) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102420014A (zh) * | 2010-09-24 | 2012-04-18 | 夏普株式会社 | 半导体存储设备 |
CN102742162A (zh) * | 2010-05-11 | 2012-10-17 | 松下电器产业株式会社 | 驱动非易失性逻辑电路的方法 |
CN102834872A (zh) * | 2010-09-07 | 2012-12-19 | 松下电器产业株式会社 | 电阻变化型非易失性存储装置的检查方法及电阻变化型非易失性存储装置 |
CN103227282A (zh) * | 2012-01-30 | 2013-07-31 | 夏普株式会社 | 可变阻抗元件以及非易失性半导体存储装置 |
CN104636548A (zh) * | 2015-01-30 | 2015-05-20 | 西安华芯半导体有限公司 | 一种rram存储单元中可变电阻仿真建模方法及电路 |
CN104794261A (zh) * | 2015-03-27 | 2015-07-22 | 山东华芯半导体有限公司 | 一种具有复位功能的阻变型随机存储器模型及存储方法 |
CN110556373A (zh) * | 2018-06-01 | 2019-12-10 | 英飞凌科技股份有限公司 | 整流器器件 |
Families Citing this family (74)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8139409B2 (en) | 2010-01-29 | 2012-03-20 | Unity Semiconductor Corporation | Access signal adjustment circuits and methods for memory cells in a cross-point array |
JP4221031B2 (ja) * | 2007-02-09 | 2009-02-12 | シャープ株式会社 | 不揮発性半導体記憶装置及びその書き換え方法 |
WO2008140979A1 (en) * | 2007-05-09 | 2008-11-20 | Intermolecular, Inc. | Resistive-switching nonvolatile memory elements |
WO2009057275A1 (ja) * | 2007-10-29 | 2009-05-07 | Panasonic Corporation | 不揮発性記憶装置および不揮発性データ記録メディア |
JP2009164580A (ja) * | 2007-11-07 | 2009-07-23 | Interuniv Micro Electronica Centrum Vzw | 抵抗スイッチングNiO層を含むメモリ素子の製造方法、およびそのデバイス |
JP5423941B2 (ja) * | 2007-11-28 | 2014-02-19 | ソニー株式会社 | 記憶素子およびその製造方法、並びに記憶装置 |
JP5050813B2 (ja) * | 2007-11-29 | 2012-10-17 | ソニー株式会社 | メモリセル |
JPWO2009145308A1 (ja) * | 2008-05-30 | 2011-10-20 | 日本電気株式会社 | 半導体装置、素子再生回路および素子再生方法 |
US9385314B2 (en) | 2008-08-12 | 2016-07-05 | Industrial Technology Research Institute | Memory cell of resistive random access memory and manufacturing method thereof |
WO2010026624A1 (ja) * | 2008-09-02 | 2010-03-11 | 株式会社 東芝 | 不揮発性半導体記憶装置の製造方法 |
JP5127661B2 (ja) * | 2008-10-10 | 2013-01-23 | 株式会社東芝 | 半導体記憶装置 |
CN101393769B (zh) * | 2008-10-23 | 2013-10-16 | 复旦大学 | 电阻存储器的激活操作方法 |
JP5134522B2 (ja) * | 2008-12-16 | 2013-01-30 | シャープ株式会社 | 不揮発性半導体装置及びその負荷抵抗の温度補償回路 |
WO2010070895A1 (ja) | 2008-12-18 | 2010-06-24 | パナソニック株式会社 | 不揮発性記憶装置及びその書き込み方法 |
KR101127236B1 (ko) * | 2008-12-29 | 2012-03-29 | 주식회사 하이닉스반도체 | 저항성 메모리 소자의 제조 방법 |
US8114765B2 (en) | 2008-12-31 | 2012-02-14 | Sandisk 3D Llc | Methods for increased array feature density |
US8084347B2 (en) | 2008-12-31 | 2011-12-27 | Sandisk 3D Llc | Resist feature and removable spacer pitch doubling patterning method for pillar structures |
WO2010136056A1 (en) * | 2009-05-29 | 2010-12-02 | Rheinisch-Wetfälische Technische Hochschule Aachen | Resistive storage cell, crossbar array circuit, resistive random access memory device and read-out-method |
US8587988B2 (en) | 2009-05-29 | 2013-11-19 | Forschungszentrum Juelich Gmbh | Memory element, stacking, memory matrix and method for operation |
JP2011040633A (ja) * | 2009-08-13 | 2011-02-24 | Toshiba Corp | 半導体記憶装置 |
JP2011066337A (ja) * | 2009-09-18 | 2011-03-31 | Toshiba Corp | 不揮発性半導体記憶装置の製造方法および不揮発性半導体記憶装置 |
WO2011043448A1 (ja) * | 2009-10-09 | 2011-04-14 | 日本電気株式会社 | 半導体装置及びその製造方法 |
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- 2007-11-05 CN CN200780045357XA patent/CN101553924B/zh active Active
- 2007-11-05 WO PCT/JP2007/071502 patent/WO2008068992A1/ja active Application Filing
- 2007-11-05 US US12/515,286 patent/US8023312B2/en not_active Ceased
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Also Published As
Publication number | Publication date |
---|---|
TWI354287B (zh) | 2011-12-11 |
TW200839766A (en) | 2008-10-01 |
WO2008068992A1 (ja) | 2008-06-12 |
USRE45345E1 (en) | 2015-01-20 |
JP4088324B1 (ja) | 2008-05-21 |
US8023312B2 (en) | 2011-09-20 |
JP2008147343A (ja) | 2008-06-26 |
US20090273964A1 (en) | 2009-11-05 |
CN101553924B (zh) | 2012-06-20 |
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