JP2007305751A - 絶縁ゲート型半導体装置 - Google Patents
絶縁ゲート型半導体装置 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims description 61
- 239000000758 substrate Substances 0.000 claims description 46
- 239000012535 impurity Substances 0.000 abstract description 48
- 108091006146 Channels Proteins 0.000 description 62
- 230000015556 catabolic process Effects 0.000 description 25
- 239000010410 layer Substances 0.000 description 21
- 210000000746 body region Anatomy 0.000 description 20
- 239000011229 interlayer Substances 0.000 description 18
- 239000002184 metal Substances 0.000 description 8
- 238000000605 extraction Methods 0.000 description 6
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 5
- 229920005591 polysilicon Polymers 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 238000000151 deposition Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 108010075750 P-Type Calcium Channels Proteins 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
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- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
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- H01L29/1095—Body region, i.e. base region, of DMOS transistors or IGBTs
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- H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
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- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
- H01L29/7395—Vertical transistors, e.g. vertical IGBT
- H01L29/7396—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions
- H01L29/7397—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions and a gate structure lying on a slanted or vertical surface or formed in a groove, e.g. trench gate IGBT
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- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
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- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
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- Insulated Gate Type Field-Effect Transistor (AREA)
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Abstract
【解決手段】 ゲートパッド電極の下方にもトランジスタセルと連続するチャネル領域およびゲート電極を配置する。トランジスタセルをストライプ状としソース電極とコンタクトさせることで、ゲートパッド電極の下方に位置するチャネル領域およびゲート電極を所定の電位で固定する。これにより、ゲートパッド電極下方全面にp+型不純物領域を設けなくても、所定のドレイン−ソース間逆方向耐圧を確保することができる。
【選択図】 図1
Description
1a n+型シリコン半導体基板
1b n−型エピタキシャル層
4 チャネル領域
7 トレンチ
11 ゲート絶縁膜
13 ゲート電極
13a ゲート引き出し電極
14 ボディ領域
15 ソース領域
16 層間絶縁膜
17 ソース電極
18 ゲートパッド電極
18a ゲート配線
21 動作領域
22 ガードリング
29 p+型不純物領域
31 半導体基板
31a n+型シリコン半導体基板
31b n−型エピタキシャル層
34 チャネル領域
41 ゲート絶縁膜
43 ゲート電極
45 ソース領域
47 ソース電極
48 ゲートパッド電極
49 p+型不純物領域
51 動作領域
Claims (7)
- 一導電型半導体基板と、
該一導電型半導体基板の一主面においてストライプ状に設けられたゲート電極と、
前記ゲート電極に沿って前記一主面にストライプ状に設けられた逆導電型のチャネル領域と、
前記ゲート電極と前記チャネル領域間に設けられた第1絶縁膜と、
前記ゲート電極に沿って前記一主面の前記チャネル領域にストライプ状に設けられた一導電型のソース領域と、
前記ゲート電極上に設けられた第2絶縁膜と、
一部の前記チャネル領域上に前記第2絶縁膜を介して設けられたゲートパッド電極と、を具備することを特徴とする絶縁ゲート型半導体装置。 - 前記第2絶縁膜に設けたコンタクトホールと、
前記第2絶縁膜上に設けられ、前記コンタクトホールを介して前記ソース領域および前記チャネル領域とコンタクトするソース電極と、を具備することを特徴とする請求項1に記載の絶縁ゲート型半導体装置。 - 前記一導電型半導体基板の周囲に設けられ前記ゲート電極および前記ゲートパッド電極に接続するゲート引き出し電極と、前記ゲート引き出し電極下方の前記基板表面に設けられ前記チャネル領域と接続する高濃度逆導電型領域とを有することを特徴とする請求項1に記載の絶縁ゲート型半導体装置。
- 前記ゲートパッド電極の下方に配置される前記チャネル領域は、前記ゲートパッド電極に隣接して設けられた前記ソース電極と電気的に接続することを特徴とする請求項2に記載の絶縁ゲート型半導体装置。
- 前記一導電型半導体基板の表面においてストライプ状に設けられたトレンチを有し、前記ゲート電極は前記トレンチに埋設されることを特徴とする請求項1に記載の絶縁ゲート型半導体装置。
- 前記ゲートパッド電極の下方に前記ゲート引き出し電極および前記ゲート電極の一部が配置されることを特徴とする請求項3に記載の絶縁ゲート型半導体装置。
- 一導電型半導体基板と、
該一導電型半導体基板の一主面においてストライプ状に設けられたゲート電極と、
前記ゲート電極に沿って前記一主面にストライプ状に設けられた逆導電型のチャネル領域と、
前記ゲート電極と前記チャネル領域間に設けられた第1絶縁膜と、
前記ゲート電極に沿って前記一主面の前記チャネル領域にストライプ状に設けられた一導電型のソース領域と、
前記ゲート電極上に設けられた第2絶縁膜と、
前記一導電型半導体基板の周囲に設けられ前記ゲート電極およびゲートパッド電極に接続するゲート引き出し電極と、
前記ゲート引き出し電極下方の前記基板表面に設けられ前記チャネル領域と接続する高濃度一導電型領域と、を具備し、
前記ゲートパッド電極下方に前記第2絶縁膜を介して一部の前記チャネル領域、前記ゲート電極および前記ゲート引き出し電極が配置されることを特徴とする絶縁ゲート型半導体装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006131820A JP5048273B2 (ja) | 2006-05-10 | 2006-05-10 | 絶縁ゲート型半導体装置 |
TW096115819A TW200746432A (en) | 2006-05-10 | 2007-05-04 | Insulation gate type semiconductor device |
US11/797,900 US7692240B2 (en) | 2006-05-10 | 2007-05-08 | Insulated gate semiconductor device |
CN200710102817XA CN101071825B (zh) | 2006-05-10 | 2007-05-09 | 绝缘栅极型半导体装置 |
KR1020070045384A KR100856299B1 (ko) | 2006-05-10 | 2007-05-10 | 절연 게이트형 반도체 장치 |
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JP2006131820A JP5048273B2 (ja) | 2006-05-10 | 2006-05-10 | 絶縁ゲート型半導体装置 |
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JP2007305751A true JP2007305751A (ja) | 2007-11-22 |
JP5048273B2 JP5048273B2 (ja) | 2012-10-17 |
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JP2006131820A Active JP5048273B2 (ja) | 2006-05-10 | 2006-05-10 | 絶縁ゲート型半導体装置 |
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US (1) | US7692240B2 (ja) |
JP (1) | JP5048273B2 (ja) |
KR (1) | KR100856299B1 (ja) |
CN (1) | CN101071825B (ja) |
TW (1) | TW200746432A (ja) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014112739A (ja) * | 2014-03-19 | 2014-06-19 | Toshiba Corp | 半導体装置 |
WO2014163060A1 (ja) * | 2013-03-31 | 2014-10-09 | 新電元工業株式会社 | 半導体装置 |
JP5719976B2 (ja) * | 2013-03-31 | 2015-05-20 | 新電元工業株式会社 | 半導体装置 |
WO2015107742A1 (ja) * | 2014-01-16 | 2015-07-23 | 富士電機株式会社 | 半導体装置 |
JP2016027675A (ja) * | 2013-03-31 | 2016-02-18 | 新電元工業株式会社 | 半導体装置 |
JP2018101662A (ja) * | 2016-12-19 | 2018-06-28 | パナソニックIpマネジメント株式会社 | 半導体素子 |
JP2020150137A (ja) * | 2019-03-13 | 2020-09-17 | 富士電機株式会社 | 半導体装置 |
WO2024101131A1 (ja) * | 2022-11-08 | 2024-05-16 | ローム株式会社 | SiC半導体装置 |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
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US7692240B2 (en) | 2010-04-06 |
JP5048273B2 (ja) | 2012-10-17 |
TWI341031B (ja) | 2011-04-21 |
CN101071825A (zh) | 2007-11-14 |
CN101071825B (zh) | 2011-07-27 |
KR100856299B1 (ko) | 2008-09-03 |
KR20070109907A (ko) | 2007-11-15 |
TW200746432A (en) | 2007-12-16 |
US20070262390A1 (en) | 2007-11-15 |
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