JP5694285B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP5694285B2 JP5694285B2 JP2012287323A JP2012287323A JP5694285B2 JP 5694285 B2 JP5694285 B2 JP 5694285B2 JP 2012287323 A JP2012287323 A JP 2012287323A JP 2012287323 A JP2012287323 A JP 2012287323A JP 5694285 B2 JP5694285 B2 JP 5694285B2
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- 239000004065 semiconductor Substances 0.000 title claims description 104
- 239000000758 substrate Substances 0.000 claims description 47
- 210000000746 body region Anatomy 0.000 claims description 43
- 230000002093 peripheral effect Effects 0.000 claims description 22
- 239000012212 insulator Substances 0.000 claims description 11
- 239000000463 material Substances 0.000 claims 1
- 230000015556 catabolic process Effects 0.000 description 25
- 238000009792 diffusion process Methods 0.000 description 24
- 230000002441 reversible effect Effects 0.000 description 15
- 230000005684 electric field Effects 0.000 description 8
- 230000004048 modification Effects 0.000 description 7
- 238000012986 modification Methods 0.000 description 7
- 230000002829 reductive effect Effects 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 5
- 239000012535 impurity Substances 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
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Description
次に、図5を参照して実施例1の変形例1について説明する。以下では、実施例1と相違する点についてのみ説明し、実施例1と同一の構成についてはその詳細な説明を省略する。
11:半導体基板
12:素子領域
14:周辺領域
16:ゲート電極
18:第2終端トレンチ
20:第1終端トレンチ
22:ゲートパッド
24:ゲートトレンチ
26:絶縁体
28:ドレイン電極
30:ドレイン領域
32:ドリフト領域
34、35、37:拡散領域
36:ボディ領域
38:ボディコンタクト領域
40:ソース領域
42:絶縁層
44:絶縁膜
46:ソース電極
48:絶縁層
Claims (3)
- 素子領域と、素子領域を取り囲む周辺領域を有する半導体基板を備えており、
素子領域には、半導体基板の上面に臨む範囲に配置されている第1導電型のボディ領域と、
ボディ領域の下面に接している第2導電型のドリフト領域と、
ボディ領域を貫通してドリフト領域にまで延びるゲートトレンチ内に配置され、ボディ領域と対向しているゲート電極と、
ゲート電極とゲートトレンチの内壁との間に配置されている絶縁体と、
ゲートトレンチの底部を囲んでおり、その周囲がドリフト領域によって囲まれている第1導電型の第1のフローティング領域と、が形成されており、
周辺領域には、素子領域を取り囲み、半導体基板の表面から半導体基板の厚み方向に延びる少なくとも1つの第1の終端トレンチと、
素子領域を取り囲み、第1の終端トレンチより素子領域側に位置しており、半導体基板の表面から半導体基板の厚み方向に延びる少なくとも1つの第2の終端トレンチと、が形成されており、
半導体基板の表面側であって、第1の終端トレンチより素子領域側であり、かつ、第2の終端トレンチの素子領域側の境界より第1の終端トレンチ側の位置に、ゲート電極と電気的に接続されているゲートパッドが配置されていることを特徴とする半導体装置。 - 周辺領域には、
半導体基板の上面に臨む範囲に配置されている第1導電型のボディ領域と、
ボディ領域の下面に接している第2導電型のドリフト領域と、が形成されており、
第1の終端トレンチ及び第2の終端トレンチは、ボディ領域を貫通してドリフト領域にまで延びており、
周辺領域にはさらに、第1の終端トレンチと第2の終端トレンチのうち少なくとも1つの終端トレンチの底部を囲んでおり、その周囲がドリフト領域によって囲まれている第1導電型の第2のフローティング領域が形成されていることを特徴とする、請求項1に記載の半導体装置。 - 半導体基板はSiCを材料とすることを特徴とする請求項1または2に記載の半導体装置。
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JP2012287323A JP5694285B2 (ja) | 2012-12-28 | 2012-12-28 | 半導体装置 |
US14/138,270 US9257501B2 (en) | 2012-12-28 | 2013-12-23 | Semiconductor device |
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JP2012287323A JP5694285B2 (ja) | 2012-12-28 | 2012-12-28 | 半導体装置 |
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JP2014130896A JP2014130896A (ja) | 2014-07-10 |
JP5694285B2 true JP5694285B2 (ja) | 2015-04-01 |
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JP (1) | JP5694285B2 (ja) |
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JP6160477B2 (ja) * | 2013-12-25 | 2017-07-12 | トヨタ自動車株式会社 | 半導体装置 |
JP6844228B2 (ja) * | 2016-12-02 | 2021-03-17 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
WO2018154963A1 (ja) * | 2017-02-24 | 2018-08-30 | 富士電機株式会社 | 半導体装置 |
JP7172216B2 (ja) | 2018-07-13 | 2022-11-16 | 富士電機株式会社 | 半導体装置および半導体回路装置 |
CN113054012B (zh) * | 2021-02-23 | 2021-12-03 | 杭州士兰微电子股份有限公司 | 绝缘栅双极晶体管及其制造方法 |
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JP4721653B2 (ja) * | 2004-05-12 | 2011-07-13 | トヨタ自動車株式会社 | 絶縁ゲート型半導体装置 |
JP4404709B2 (ja) * | 2004-07-12 | 2010-01-27 | トヨタ自動車株式会社 | 絶縁ゲート型半導体装置およびその製造方法 |
JP4414863B2 (ja) * | 2004-10-29 | 2010-02-10 | トヨタ自動車株式会社 | 絶縁ゲート型半導体装置およびその製造方法 |
JP2006303451A (ja) * | 2005-03-23 | 2006-11-02 | Renesas Technology Corp | 半導体装置及び半導体装置の製造方法 |
JP5048273B2 (ja) * | 2006-05-10 | 2012-10-17 | オンセミコンダクター・トレーディング・リミテッド | 絶縁ゲート型半導体装置 |
JP4915297B2 (ja) * | 2007-06-22 | 2012-04-11 | トヨタ自動車株式会社 | 半導体装置 |
JP2009004707A (ja) | 2007-06-25 | 2009-01-08 | Sanyo Electric Co Ltd | 絶縁ゲート型半導体装置 |
JP4746061B2 (ja) * | 2008-02-12 | 2011-08-10 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
JP5633135B2 (ja) | 2009-10-15 | 2014-12-03 | トヨタ自動車株式会社 | 半導体装置 |
JP2012054378A (ja) | 2010-09-01 | 2012-03-15 | Renesas Electronics Corp | 半導体装置 |
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US9257501B2 (en) | 2016-02-09 |
US20140183620A1 (en) | 2014-07-03 |
JP2014130896A (ja) | 2014-07-10 |
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