JP6160477B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP6160477B2 JP6160477B2 JP2013267786A JP2013267786A JP6160477B2 JP 6160477 B2 JP6160477 B2 JP 6160477B2 JP 2013267786 A JP2013267786 A JP 2013267786A JP 2013267786 A JP2013267786 A JP 2013267786A JP 6160477 B2 JP6160477 B2 JP 6160477B2
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- 239000004065 semiconductor Substances 0.000 title claims description 168
- 239000000758 substrate Substances 0.000 claims description 74
- 238000004519 manufacturing process Methods 0.000 claims description 44
- 238000005192 partition Methods 0.000 claims description 29
- 238000000034 method Methods 0.000 claims description 13
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 12
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 12
- 229910052796 boron Inorganic materials 0.000 claims description 12
- 229910052698 phosphorus Inorganic materials 0.000 claims description 12
- 239000011574 phosphorus Substances 0.000 claims description 12
- 238000005530 etching Methods 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 373
- 239000011229 interlayer Substances 0.000 description 43
- 239000011810 insulating material Substances 0.000 description 19
- 238000005229 chemical vapour deposition Methods 0.000 description 18
- 230000006866 deterioration Effects 0.000 description 9
- 238000000151 deposition Methods 0.000 description 8
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 7
- 230000004048 modification Effects 0.000 description 7
- 238000012986 modification Methods 0.000 description 7
- 230000003647 oxidation Effects 0.000 description 6
- 238000007254 oxidation reaction Methods 0.000 description 6
- 238000001312 dry etching Methods 0.000 description 5
- 239000002994 raw material Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 210000000746 body region Anatomy 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000005224 laser annealing Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- MXSJNBRAMXILSE-UHFFFAOYSA-N [Si].[P].[B] Chemical compound [Si].[P].[B] MXSJNBRAMXILSE-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
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Description
(半導体装置100の構造)
図1に示すように、本実施例の半導体装置100は、半導体基板10中に、電流が流れる素子領域110と、その素子領域110を取り囲む終端領域120とを有している。本実施例の半導体装置100は、パワーMOSFETである。
次いで、本実施例の半導体装置100の製造方法を説明する。まず、図4に示すように、複数のゲートトレンチ20と、複数の終端トレンチ30a〜30jとが形成された半導体基板10を準備する。本実施例では、半導体基板10はSiCによって形成されている。なお、図4では、ゲートトレンチ20は1本のみを図示している。図4の時点で、各ゲートトレンチ20の下端部には、フローティング領域26が形成されている。また、各終端トレンチ30a〜30jの下端部には、フローティング領域36が形成されている。また、この時点で、半導体基板10には、ドリフト領域12、ボディ領域13、及び、ソース領域11が形成されている。
(半導体装置200の構造)
続いて、図1、図9〜図17を参照して、第2実施例の半導体装置200について説明する。図1に示すように、本実施例の半導体装置200も、半導体装置100と同様に、半導体基板10中に素子領域110と、その素子領域110を取り囲む終端領域120とを有している。本実施例の半導体装置200も、パワーMOSFETである。
次いで、本実施例の半導体装置100の製造方法を説明する。まず、複数のゲートトレンチ20と、複数の終端トレンチ30とが形成された半導体基板10を準備する(図4参照)。
12:ドリフト領域
14:ドレイン領域
18:ドレイン電極
20:ゲートトレンチ
22:ゲート絶縁膜
24:ゲート電極
26:フローティング領域
30a〜30j:終端トレンチ
32a〜32e:埋込絶縁層
36 フローティング領域
40:層間絶縁膜
42:コンタクトホール
44:ゲート配線
100:半導体装置
110:素子領域
120:終端領域
200:半導体装置
222:ゲート絶縁膜
224:ゲート電極
232a、232b:第1の絶縁層
234a〜234d:第2の絶縁層
236b〜236d:第3の絶縁層
240:層間絶縁膜
242:コンタクトホール
244:ゲート配線
250a、250b:凹部
Claims (7)
- 素子領域と、前記素子領域を取り囲む終端領域が形成されている半導体基板を有する半導体装置であって、
前記素子領域は、
ゲートトレンチと、
前記ゲートトレンチの内面を覆うゲート絶縁膜と、
前記ゲート絶縁膜の内側に配置されているゲート電極と、を有しており、
前記終端領域は、
前記素子領域の周囲に形成されている複数の終端トレンチと、
前記複数の終端トレンチのそれぞれの内側に配置されているトレンチ内絶縁層と、
前記終端領域内の前記半導体基板の上面に配置されている上面絶縁層と、
を有しており、
前記上面絶縁層は、第1部分と、前記第1部分よりも厚みが薄く、前記第1部分よりも前記素子領域から離れた位置に配置されている第2部分を有しており、
ゲート配線が、前記第1部分の上面に配置されており、前記第2部分の上面に配置されていない、
半導体装置。 - 前記上面絶縁層は、
第1層と、
リンとボロンの単位体積当たりの含有量が前記第1層よりも多く、前記第1層の上面に配置されている第2層、
を有しており、
第1領域内の前記上面絶縁層が、前記第1層と前記第2層を有しており、
前記第1領域よりも前記素子領域から離れた位置の第2領域内の前記上面絶縁層が、前記第2層と前記第1領域内の前記第1層よりも薄い前記第1層を有している、または、前記第2層を有しており前記第1層を有しておらず、
前記ゲート配線が、前記第1領域内の前記上面絶縁層の上面に配置されており、前記第2領域内の前記上面絶縁層の上面に配置されていない、
請求項1の半導体装置。 - ゲートトレンチと、前記ゲートトレンチを取り囲む複数の第1終端トレンチと、前記第1終端トレンチを取り囲む複数の第2終端トレンチを含む複数のトレンチを有する半導体基板の各トレンチ内と、前記半導体基板の上面に絶縁層を形成する工程と、
前記複数の第1終端トレンチが形成されている第1領域内の前記半導体基板の上面に形成されている前記絶縁層をエッチバックしないで、前記ゲートトレンチ内に形成されている前記絶縁層、及び、前記複数の第2終端トレンチが形成されている第2領域内の前記半導体基板の上面に形成されている前記絶縁層をエッチバックする工程と、
前記第2領域内に前記ゲート配線を形成しないで、前記第1領域内の前記半導体基板の上面に形成されている前記絶縁層の上方にゲート配線を形成する工程、
を有する半導体装置の製造方法。 - 素子領域と、前記素子領域を取り囲む終端領域が形成されている半導体基板を有する半導体装置であって、
前記素子領域は、
ゲートトレンチと、
前記ゲートトレンチの内面を覆うゲート絶縁膜と、
前記ゲート絶縁膜の内側に配置されているゲート電極と、を有しており、
前記終端領域は、
前記素子領域の周囲に形成されている複数の終端トレンチと、
前記複数の終端トレンチのそれぞれの内側、及び、前記半導体基板の上面に形成されている絶縁層、
を有しており、
前記絶縁層は、
第1層と、
リンとボロンの単位体積当たりの含有量が前記第1層よりも多く、前記第1層の上面に配置されている第2層、
を有しており、
前記第1層の上面に、複数の凹部が形成されており、
各凹部は、隣り合う終端トレンチの間の隔壁に沿って延設されており、
隣り合う凹部の間隔が、前記隣り合う終端トレンチの間隔よりも長く、
前記各凹部内に、前記第2層が充填されており、
前記絶縁層の上面に、ゲート配線が配置されている、
半導体装置。 - 前記第1層が、
前記複数の終端トレンチのそれぞれの内面を覆う第1の絶縁層と、
前記第1の絶縁層で覆われた前記複数の終端トレンチの内側に充填されている第2の絶縁層、
を有し、
前記第1の絶縁層の屈折率は、前記第2の絶縁層の屈折率よりも大きい、
請求項4の半導体装置。 - 前記凹部に対応する前記隔壁上に、前記第1の絶縁層と前記第2層が積層されており、前記第2の絶縁層が積層されておらず、
前記凹部に対応しない前記隔壁上に、前記第1の絶縁層と、前記第2の絶縁層と、前記第2層が積層されている、
請求項5の半導体装置。 - 前記第1層は、前記第2の絶縁層の上面に形成されている第3の絶縁層を有しており、
前記第3の絶縁層の屈折率は、前記第2の絶縁層の屈折率よりも大きい、
請求項6の半導体装置。
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