JP2005505690A5 - - Google Patents

Download PDF

Info

Publication number
JP2005505690A5
JP2005505690A5 JP2003534647A JP2003534647A JP2005505690A5 JP 2005505690 A5 JP2005505690 A5 JP 2005505690A5 JP 2003534647 A JP2003534647 A JP 2003534647A JP 2003534647 A JP2003534647 A JP 2003534647A JP 2005505690 A5 JP2005505690 A5 JP 2005505690A5
Authority
JP
Japan
Prior art keywords
tungsten
substrate surface
nucleation layer
angstroms
exposing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003534647A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005505690A (ja
JP4174424B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2002/032348 external-priority patent/WO2003031679A2/en
Publication of JP2005505690A publication Critical patent/JP2005505690A/ja
Publication of JP2005505690A5 publication Critical patent/JP2005505690A5/ja
Application granted granted Critical
Publication of JP4174424B2 publication Critical patent/JP4174424B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2003534647A 2001-10-10 2002-10-10 一連の堆積技術を用いる耐火性金属層を堆積する方法 Expired - Lifetime JP4174424B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US32845101P 2001-10-10 2001-10-10
PCT/US2002/032348 WO2003031679A2 (en) 2001-10-10 2002-10-10 Method for depositing metal layers employing sequential deposition techniques

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2008181763A Division JP5048602B2 (ja) 2001-10-10 2008-07-11 一連の堆積技術を用いる耐火性金属層を堆積する方法

Publications (3)

Publication Number Publication Date
JP2005505690A JP2005505690A (ja) 2005-02-24
JP2005505690A5 true JP2005505690A5 (https=) 2008-08-28
JP4174424B2 JP4174424B2 (ja) 2008-10-29

Family

ID=23281040

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2003534647A Expired - Lifetime JP4174424B2 (ja) 2001-10-10 2002-10-10 一連の堆積技術を用いる耐火性金属層を堆積する方法
JP2008181763A Expired - Lifetime JP5048602B2 (ja) 2001-10-10 2008-07-11 一連の堆積技術を用いる耐火性金属層を堆積する方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2008181763A Expired - Lifetime JP5048602B2 (ja) 2001-10-10 2008-07-11 一連の堆積技術を用いる耐火性金属層を堆積する方法

Country Status (5)

Country Link
US (3) US6797340B2 (https=)
JP (2) JP4174424B2 (https=)
KR (1) KR100978993B1 (https=)
TW (1) TW589684B (https=)
WO (1) WO2003031679A2 (https=)

Families Citing this family (175)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI119941B (fi) * 1999-10-15 2009-05-15 Asm Int Menetelmä nanolaminaattien valmistamiseksi
US6974766B1 (en) 1998-10-01 2005-12-13 Applied Materials, Inc. In situ deposition of a low κ dielectric layer, barrier layer, etch stop, and anti-reflective coating for damascene application
JP2002536549A (ja) * 1999-02-12 2002-10-29 ゲレスト インコーポレイテッド 窒化タングステンの化学蒸着
AU1208201A (en) 1999-10-15 2001-04-30 Asm America, Inc. Method for depositing nanolaminate thin films on sensitive surfaces
US6475276B1 (en) * 1999-10-15 2002-11-05 Asm Microchemistry Oy Production of elemental thin films using a boron-containing reducing agent
FI20000099A0 (fi) 2000-01-18 2000-01-18 Asm Microchemistry Ltd Menetelmä metalliohutkalvojen kasvattamiseksi
US6620723B1 (en) 2000-06-27 2003-09-16 Applied Materials, Inc. Formation of boride barrier layers using chemisorption techniques
US6551929B1 (en) 2000-06-28 2003-04-22 Applied Materials, Inc. Bifurcated deposition process for depositing refractory metal layers employing atomic layer deposition and chemical vapor deposition techniques
US7964505B2 (en) 2005-01-19 2011-06-21 Applied Materials, Inc. Atomic layer deposition of tungsten materials
US7101795B1 (en) 2000-06-28 2006-09-05 Applied Materials, Inc. Method and apparatus for depositing refractory metal layers employing sequential deposition techniques to form a nucleation layer
US7732327B2 (en) 2000-06-28 2010-06-08 Applied Materials, Inc. Vapor deposition of tungsten materials
US6936538B2 (en) 2001-07-16 2005-08-30 Applied Materials, Inc. Method and apparatus for depositing tungsten after surface treatment to improve film characteristics
US7405158B2 (en) 2000-06-28 2008-07-29 Applied Materials, Inc. Methods for depositing tungsten layers employing atomic layer deposition techniques
US7141494B2 (en) * 2001-05-22 2006-11-28 Novellus Systems, Inc. Method for reducing tungsten film roughness and improving step coverage
US7955972B2 (en) * 2001-05-22 2011-06-07 Novellus Systems, Inc. Methods for growing low-resistivity tungsten for high aspect ratio and small features
US9076843B2 (en) 2001-05-22 2015-07-07 Novellus Systems, Inc. Method for producing ultra-thin tungsten layers with improved step coverage
US7005372B2 (en) * 2003-01-21 2006-02-28 Novellus Systems, Inc. Deposition of tungsten nitride
US7589017B2 (en) * 2001-05-22 2009-09-15 Novellus Systems, Inc. Methods for growing low-resistivity tungsten film
US7262125B2 (en) * 2001-05-22 2007-08-28 Novellus Systems, Inc. Method of forming low-resistivity tungsten interconnects
US6849545B2 (en) 2001-06-20 2005-02-01 Applied Materials, Inc. System and method to form a composite film stack utilizing sequential deposition techniques
US7211144B2 (en) 2001-07-13 2007-05-01 Applied Materials, Inc. Pulsed nucleation deposition of tungsten layers
TW581822B (en) 2001-07-16 2004-04-01 Applied Materials Inc Formation of composite tungsten films
US20030029715A1 (en) 2001-07-25 2003-02-13 Applied Materials, Inc. An Apparatus For Annealing Substrates In Physical Vapor Deposition Systems
US9051641B2 (en) 2001-07-25 2015-06-09 Applied Materials, Inc. Cobalt deposition on barrier surfaces
US8110489B2 (en) 2001-07-25 2012-02-07 Applied Materials, Inc. Process for forming cobalt-containing materials
JP2005504885A (ja) 2001-07-25 2005-02-17 アプライド　マテリアルズ　インコーポレイテッド 新規なスパッタ堆積方法を使用したバリア形成
US20090004850A1 (en) 2001-07-25 2009-01-01 Seshadri Ganguli Process for forming cobalt and cobalt silicide materials in tungsten contact applications
AU2002333601A1 (en) * 2001-09-14 2003-04-01 Asm America, Inc. Metal nitride deposition by ald using gettering reactant
US6936906B2 (en) 2001-09-26 2005-08-30 Applied Materials, Inc. Integration of barrier layer and seed layer
US7049226B2 (en) 2001-09-26 2006-05-23 Applied Materials, Inc. Integration of ALD tantalum nitride for copper metallization
TW589684B (en) * 2001-10-10 2004-06-01 Applied Materials Inc Method for depositing refractory metal layers employing sequential deposition techniques
US7780785B2 (en) 2001-10-26 2010-08-24 Applied Materials, Inc. Gas delivery apparatus for atomic layer deposition
US6916398B2 (en) 2001-10-26 2005-07-12 Applied Materials, Inc. Gas delivery apparatus and method for atomic layer deposition
US6911391B2 (en) 2002-01-26 2005-06-28 Applied Materials, Inc. Integration of titanium and titanium nitride layers
US6833161B2 (en) 2002-02-26 2004-12-21 Applied Materials, Inc. Cyclical deposition of tungsten nitride for metal oxide gate electrode
US7439191B2 (en) * 2002-04-05 2008-10-21 Applied Materials, Inc. Deposition of silicon layers for active matrix liquid crystal display (AMLCD) applications
US7279432B2 (en) 2002-04-16 2007-10-09 Applied Materials, Inc. System and method for forming an integrated barrier layer
US6838125B2 (en) * 2002-07-10 2005-01-04 Applied Materials, Inc. Method of film deposition using activated precursor gases
US7153542B2 (en) * 2002-08-06 2006-12-26 Tegal Corporation Assembly line processing method
US7398090B2 (en) * 2002-09-13 2008-07-08 Hewlett-Packard Development Company, L.P. Defining a smart area
US6888755B2 (en) 2002-10-28 2005-05-03 Sandisk Corporation Flash memory cell arrays having dual control gates per memory cell charge storage element
JP4031704B2 (ja) 2002-12-18 2008-01-09 東京エレクトロン株式会社 成膜方法
US7262133B2 (en) * 2003-01-07 2007-08-28 Applied Materials, Inc. Enhancement of copper line reliability using thin ALD tan film to cap the copper line
US6703296B1 (en) * 2003-04-17 2004-03-09 Macronix International Co. Ltd. Method for forming metal salicide
US6844258B1 (en) 2003-05-09 2005-01-18 Novellus Systems, Inc. Selective refractory metal and nitride capping
US7211508B2 (en) 2003-06-18 2007-05-01 Applied Materials, Inc. Atomic layer deposition of tantalum based barrier materials
TW200508413A (en) * 2003-08-06 2005-03-01 Ulvac Inc Device and method for manufacturing thin films
US7754604B2 (en) * 2003-08-26 2010-07-13 Novellus Systems, Inc. Reducing silicon attack and improving resistivity of tungsten nitride film
US20050069641A1 (en) * 2003-09-30 2005-03-31 Tokyo Electron Limited Method for depositing metal layers using sequential flow deposition
US6924223B2 (en) * 2003-09-30 2005-08-02 Tokyo Electron Limited Method of forming a metal layer using an intermittent precursor gas flow process
US7405143B2 (en) 2004-03-25 2008-07-29 Asm International N.V. Method for fabricating a seed layer
US7410864B2 (en) * 2004-04-23 2008-08-12 Infineon Technologies Ag Trench and a trench capacitor and method for forming the same
KR100578221B1 (ko) * 2004-05-06 2006-05-12 주식회사 하이닉스반도체 확산방지막을 구비하는 반도체소자의 제조 방법
US8202575B2 (en) * 2004-06-28 2012-06-19 Cambridge Nanotech, Inc. Vapor deposition systems and methods
KR100550346B1 (ko) * 2004-08-24 2006-02-08 삼성전자주식회사 반도체 장치와 그의 제조 방법 및 이를 이용한 트랜치소자 분리막의 제조 방법
KR100615093B1 (ko) * 2004-08-24 2006-08-22 삼성전자주식회사 나노크리스탈을 갖는 비휘발성 메모리 소자의 제조방법
KR100648252B1 (ko) * 2004-11-22 2006-11-24 삼성전자주식회사 텅스텐막 형성 방법 및 이를 이용하는 반도체 소자의 형성방법
US7429402B2 (en) 2004-12-10 2008-09-30 Applied Materials, Inc. Ruthenium as an underlayer for tungsten film deposition
KR100745066B1 (ko) 2005-03-24 2007-08-01 주식회사 하이닉스반도체 반도체 소자의 금속배선 형성 방법
JP4945937B2 (ja) * 2005-07-01 2012-06-06 東京エレクトロン株式会社 タングステン膜の形成方法、成膜装置及び記憶媒体
JP2007048926A (ja) * 2005-08-10 2007-02-22 Tokyo Electron Ltd Ｗ系膜の成膜方法、ゲート電極の形成方法、半導体装置の製造方法およびコンピュータ読取可能な記憶媒体
JP2007046134A (ja) * 2005-08-11 2007-02-22 Tokyo Electron Ltd 金属系膜形成方法及びプログラムを記録した記録媒体
US7235485B2 (en) * 2005-10-14 2007-06-26 Samsung Electronics Co., Ltd. Method of manufacturing semiconductor device
US8993055B2 (en) 2005-10-27 2015-03-31 Asm International N.V. Enhanced thin film deposition
KR101019293B1 (ko) * 2005-11-04 2011-03-07 어플라이드 머티어리얼스, 인코포레이티드 플라즈마-강화 원자층 증착 장치 및 방법
JP2007194468A (ja) * 2006-01-20 2007-08-02 Renesas Technology Corp 半導体装置およびその製造方法
US7951669B2 (en) 2006-04-13 2011-05-31 Sandisk Corporation Methods of making flash memory cell arrays having dual control gates per memory cell charge storage element
WO2008005892A2 (en) * 2006-06-30 2008-01-10 Applied Materials, Inc. Nanocrystal formation
US8268409B2 (en) * 2006-10-25 2012-09-18 Asm America, Inc. Plasma-enhanced deposition of metal carbide films
US7611751B2 (en) 2006-11-01 2009-11-03 Asm America, Inc. Vapor deposition of metal carbide films
US8821637B2 (en) * 2007-01-29 2014-09-02 Applied Materials, Inc. Temperature controlled lid assembly for tungsten nitride deposition
US8287647B2 (en) * 2007-04-17 2012-10-16 Lam Research Corporation Apparatus and method for atomic layer deposition
US7713874B2 (en) 2007-05-02 2010-05-11 Asm America, Inc. Periodic plasma annealing in an ALD-type process
US20080273410A1 (en) * 2007-05-04 2008-11-06 Jaydeb Goswami Tungsten digitlines
TWI493058B (zh) * 2007-05-15 2015-07-21 應用材料股份有限公司 鎢材料的原子層沈積法
US7655567B1 (en) 2007-07-24 2010-02-02 Novellus Systems, Inc. Methods for improving uniformity and resistivity of thin tungsten films
US8049178B2 (en) * 2007-08-30 2011-11-01 Washington State University Research Foundation Semiconductive materials and associated uses thereof
US20090087550A1 (en) * 2007-09-27 2009-04-02 Tokyo Electron Limited Sequential flow deposition of a tungsten silicide gate electrode film
US7772114B2 (en) * 2007-12-05 2010-08-10 Novellus Systems, Inc. Method for improving uniformity and adhesion of low resistivity tungsten film
US8053365B2 (en) 2007-12-21 2011-11-08 Novellus Systems, Inc. Methods for forming all tungsten contacts and lines
US8062977B1 (en) 2008-01-31 2011-11-22 Novellus Systems, Inc. Ternary tungsten-containing resistive thin films
WO2009129332A2 (en) * 2008-04-16 2009-10-22 Asm America, Inc. Atomic layer deposition of metal carbide films using aluminum hydrocarbon compounds
US7666474B2 (en) 2008-05-07 2010-02-23 Asm America, Inc. Plasma-enhanced pulsed deposition of metal carbide films
US8058170B2 (en) 2008-06-12 2011-11-15 Novellus Systems, Inc. Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristics
US8551885B2 (en) * 2008-08-29 2013-10-08 Novellus Systems, Inc. Method for reducing tungsten roughness and improving reflectivity
KR101485506B1 (ko) 2008-11-19 2015-01-28 주식회사 원익아이피에스 박막 증착방법
KR101462154B1 (ko) 2008-12-15 2014-11-14 주식회사 원익아이피에스 텅스텐 박막 증착방법
KR101263856B1 (ko) * 2008-12-31 2013-05-13 어플라이드 머티어리얼스, 인코포레이티드 비저항이 감소되고 표면 형태가 개선된 텅스텐 필름을 증착하는 방법
US20100267230A1 (en) * 2009-04-16 2010-10-21 Anand Chandrashekar Method for forming tungsten contacts and interconnects with small critical dimensions
US9159571B2 (en) 2009-04-16 2015-10-13 Lam Research Corporation Tungsten deposition process using germanium-containing reducing agent
JPWO2011013811A1 (ja) * 2009-07-31 2013-01-10 株式会社アルバック 半導体装置の製造装置及び半導体装置の製造方法
US9653353B2 (en) 2009-08-04 2017-05-16 Novellus Systems, Inc. Tungsten feature fill
US10256142B2 (en) 2009-08-04 2019-04-09 Novellus Systems, Inc. Tungsten feature fill with nucleation inhibition
US12444651B2 (en) 2009-08-04 2025-10-14 Novellus Systems, Inc. Tungsten feature fill with nucleation inhibition
US8207062B2 (en) * 2009-09-09 2012-06-26 Novellus Systems, Inc. Method for improving adhesion of low resistivity tungsten/tungsten nitride layers
KR101712040B1 (ko) 2009-10-20 2017-03-03 에이에스엠 인터내셔널 엔.브이. 유전체 막들의 부동태화를 위한 공정들
US8709948B2 (en) 2010-03-12 2014-04-29 Novellus Systems, Inc. Tungsten barrier and seed for copper filled TSV
US8633109B2 (en) * 2010-08-04 2014-01-21 Taiwan Semiconductor Manufacturing Company, Ltd. Soft error rate (SER) reduction in advanced silicon processes
US8734514B2 (en) 2011-06-16 2014-05-27 Zimmer, Inc. Micro-alloyed porous metal having optimized chemical composition and method of manufacturing the same
US8956683B2 (en) 2011-06-16 2015-02-17 Zimmer, Inc. Chemical vapor infiltration apparatus and process
US20130224948A1 (en) * 2012-02-28 2013-08-29 Globalfoundries Inc. Methods for deposition of tungsten in the fabrication of an integrated circuit
KR101435100B1 (ko) * 2012-06-20 2014-08-29 주식회사 엠티에스나노테크 원자층 증착 장치
US9034760B2 (en) 2012-06-29 2015-05-19 Novellus Systems, Inc. Methods of forming tensile tungsten films and compressive tungsten films
US8975184B2 (en) 2012-07-27 2015-03-10 Novellus Systems, Inc. Methods of improving tungsten contact resistance in small critical dimension features
US8853080B2 (en) 2012-09-09 2014-10-07 Novellus Systems, Inc. Method for depositing tungsten film with low roughness and low resistivity
US9169556B2 (en) * 2012-10-11 2015-10-27 Applied Materials, Inc. Tungsten growth modulation by controlling surface composition
US9546419B2 (en) * 2012-11-26 2017-01-17 Applied Materials, Inc. Method of reducing tungsten film roughness and resistivity
KR101971547B1 (ko) * 2013-01-03 2019-04-24 주식회사 원익아이피에스 반도체 소자의 금속층 형성 방법
US9412602B2 (en) 2013-03-13 2016-08-09 Asm Ip Holding B.V. Deposition of smooth metal nitride films
US8841182B1 (en) 2013-03-14 2014-09-23 Asm Ip Holding B.V. Silane and borane treatments for titanium carbide films
US8846550B1 (en) 2013-03-14 2014-09-30 Asm Ip Holding B.V. Silane or borane treatment of metal thin films
US9153486B2 (en) 2013-04-12 2015-10-06 Lam Research Corporation CVD based metal/semiconductor OHMIC contact for high volume manufacturing applications
US9589808B2 (en) 2013-12-19 2017-03-07 Lam Research Corporation Method for depositing extremely low resistivity tungsten
US9394609B2 (en) 2014-02-13 2016-07-19 Asm Ip Holding B.V. Atomic layer deposition of aluminum fluoride thin films
US10643925B2 (en) 2014-04-17 2020-05-05 Asm Ip Holding B.V. Fluorine-containing conductive films
WO2016011352A1 (en) 2014-07-17 2016-01-21 Applied Materials, Inc. Methods and apparatus for depositing a cobalt layer using a carousel batch deposition reactor
US10094023B2 (en) 2014-08-01 2018-10-09 Applied Materials, Inc. Methods and apparatus for chemical vapor deposition of a cobalt layer
WO2016046909A1 (ja) * 2014-09-24 2016-03-31 株式会社日立国際電気 半導体装置の製造方法、基板処理装置、半導体装置およびプログラム
US9997405B2 (en) 2014-09-30 2018-06-12 Lam Research Corporation Feature fill with nucleation inhibition
US10002936B2 (en) 2014-10-23 2018-06-19 Asm Ip Holding B.V. Titanium aluminum and tantalum aluminum thin films
US9953984B2 (en) 2015-02-11 2018-04-24 Lam Research Corporation Tungsten for wordline applications
US9613818B2 (en) 2015-05-27 2017-04-04 Lam Research Corporation Deposition of low fluorine tungsten by sequential CVD process
US9754824B2 (en) 2015-05-27 2017-09-05 Lam Research Corporation Tungsten films having low fluorine content
KR102397797B1 (ko) * 2015-05-27 2022-05-12 램 리써치 코포레이션 순차적인 cvd 프로세스에 의한 저 불소 텅스텐의 증착
US9978605B2 (en) 2015-05-27 2018-05-22 Lam Research Corporation Method of forming low resistivity fluorine free tungsten film without nucleation
US9941425B2 (en) 2015-10-16 2018-04-10 Asm Ip Holdings B.V. Photoactive devices and materials
WO2017070634A1 (en) * 2015-10-23 2017-04-27 Applied Materials, Inc. Methods for spatial metal atomic layer deposition
US9786492B2 (en) 2015-11-12 2017-10-10 Asm Ip Holding B.V. Formation of SiOCN thin films
US9786491B2 (en) 2015-11-12 2017-10-10 Asm Ip Holding B.V. Formation of SiOCN thin films
US9972968B2 (en) * 2016-04-20 2018-05-15 Trumpf Photonics, Inc. Passivation of laser facets and systems for performing the same
KR20170120443A (ko) * 2016-04-21 2017-10-31 삼성전자주식회사 텅스텐 박막의 형성 방법 및 이를 이용한 반도체 소자의 제조 방법
KR102378021B1 (ko) 2016-05-06 2022-03-23 에이에스엠 아이피 홀딩 비.브이. SiOC 박막의 형성
US10573522B2 (en) 2016-08-16 2020-02-25 Lam Research Corporation Method for preventing line bending during metal fill process
US10186420B2 (en) 2016-11-29 2019-01-22 Asm Ip Holding B.V. Formation of silicon-containing thin films
US10847529B2 (en) 2017-04-13 2020-11-24 Asm Ip Holding B.V. Substrate processing method and device manufactured by the same
US10504901B2 (en) 2017-04-26 2019-12-10 Asm Ip Holding B.V. Substrate processing method and device manufactured using the same
CN110546302B (zh) 2017-05-05 2022-05-27 Asm Ip 控股有限公司 用于受控形成含氧薄膜的等离子体增强沉积方法
US10622214B2 (en) 2017-05-25 2020-04-14 Applied Materials, Inc. Tungsten defluorination by high pressure treatment
US10199267B2 (en) 2017-06-30 2019-02-05 Lam Research Corporation Tungsten nitride barrier layer deposition
JP7609636B2 (ja) 2017-08-14 2025-01-07 ラム リサーチ コーポレーション ３次元垂直ｎａｎｄワード線用の金属充填プロセス
US10276411B2 (en) 2017-08-18 2019-04-30 Applied Materials, Inc. High pressure and high temperature anneal chamber
US10991573B2 (en) 2017-12-04 2021-04-27 Asm Ip Holding B.V. Uniform deposition of SiOC on dielectric and metal surfaces
US11028480B2 (en) 2018-03-19 2021-06-08 Applied Materials, Inc. Methods of protecting metallic components against corrosion using chromium-containing thin films
US11201227B2 (en) * 2018-04-27 2021-12-14 Taiwan Semiconductor Manufacturing Co., Ltd. Gate structure with barrier layer and method for forming the same
US11015252B2 (en) 2018-04-27 2021-05-25 Applied Materials, Inc. Protection of components from corrosion
JP2021523292A (ja) 2018-05-03 2021-09-02 ラム リサーチ コーポレーションＬａｍ Ｒｅｓｅａｒｃｈ Ｃｏｒｐｏｒａｔｉｏｎ ３ｄ ｎａｎｄ構造内にタングステンおよび他の金属を堆積させる方法
US12014928B2 (en) 2018-07-31 2024-06-18 Lam Research Corporation Multi-layer feature fill
US11009339B2 (en) 2018-08-23 2021-05-18 Applied Materials, Inc. Measurement of thickness of thermal barrier coatings using 3D imaging and surface subtraction methods for objects with complex geometries
KR20210081436A (ko) 2018-11-19 2021-07-01 램 리써치 코포레이션 텅스텐을 위한 몰리브덴 템플릿들
US10636705B1 (en) 2018-11-29 2020-04-28 Applied Materials, Inc. High pressure annealing of metal gate structures
US11972952B2 (en) 2018-12-14 2024-04-30 Lam Research Corporation Atomic layer deposition on 3D NAND structures
SG11202108217UA (en) 2019-01-28 2021-08-30 Lam Res Corp Deposition of metal films
US12359315B2 (en) 2019-02-14 2025-07-15 Asm Ip Holding B.V. Deposition of oxides and nitrides
WO2020185618A1 (en) 2019-03-11 2020-09-17 Lam Research Corporation Precursors for deposition of molybdenum-containing films
JP2022522226A (ja) * 2019-04-11 2022-04-14 ラム リサーチ コーポレーション 高ステップカバレッジのタングステン堆積
WO2020219332A1 (en) 2019-04-26 2020-10-29 Applied Materials, Inc. Methods of protecting aerospace components against corrosion and oxidation
US11794382B2 (en) 2019-05-16 2023-10-24 Applied Materials, Inc. Methods for depositing anti-coking protective coatings on aerospace components
KR20210158419A (ko) 2019-05-22 2021-12-30 램 리써치 코포레이션 핵생성-프리 텅스텐 증착
US11697879B2 (en) 2019-06-14 2023-07-11 Applied Materials, Inc. Methods for depositing sacrificial coatings on aerospace components
US12077858B2 (en) 2019-08-12 2024-09-03 Lam Research Corporation Tungsten deposition
WO2021046058A1 (en) 2019-09-03 2021-03-11 Lam Research Corporation Molybdenum deposition
US11466364B2 (en) 2019-09-06 2022-10-11 Applied Materials, Inc. Methods for forming protective coatings containing crystallized aluminum oxide
CN114667600A (zh) 2019-10-15 2022-06-24 朗姆研究公司 钼填充
US12341005B2 (en) 2020-01-17 2025-06-24 Asm Ip Holding B.V. Formation of SiCN thin films
US12142479B2 (en) 2020-01-17 2024-11-12 Asm Ip Holding B.V. Formation of SiOCN thin films
US11519066B2 (en) 2020-05-21 2022-12-06 Applied Materials, Inc. Nitride protective coatings on aerospace components and methods for making the same
KR102953798B1 (ko) 2020-06-24 2026-04-15 에이에스엠 아이피 홀딩 비.브이. 몰리브덴을 포함하는 막의 기상 증착
US11739429B2 (en) 2020-07-03 2023-08-29 Applied Materials, Inc. Methods for refurbishing aerospace components
CN112201748B (zh) * 2020-09-27 2024-04-16 昕原半导体(上海)有限公司 阻变存储器的钨薄膜制备方法
US11976002B2 (en) 2021-01-05 2024-05-07 Applied Materials, Inc. Methods for encapsulating silver mirrors on optical structures
JP7686761B2 (ja) 2021-02-23 2025-06-02 ラム リサーチ コーポレーション ３ｄ－ｎａｎｄ用の酸化物表面上へのモリブデン膜の堆積
WO2022221210A1 (en) 2021-04-14 2022-10-20 Lam Research Corporation Deposition of molybdenum
US12588475B2 (en) 2021-05-14 2026-03-24 Lam Research Corporation High selectivity doped hardmask films
US11939668B2 (en) * 2022-04-26 2024-03-26 Applied Materials, Inc. Gas delivery for tungsten-containing layer
CN115011947A (zh) * 2022-06-30 2022-09-06 厦门韫茂科技有限公司 一种沉积钨的金刚石粉以及复合铜粉的材料及其制备方法

Family Cites Families (122)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2002008A (en) * 1933-05-25 1935-05-21 Benjamin Howard Benson Apparatus for blood transfusion
FI118158B (sv) 1999-10-15 2007-07-31 Asm Int Förfarande för modifiering av utgångsämneskemikalierna i en ALD-prosess
FI117944B (fi) 1999-10-15 2007-04-30 Asm Int Menetelmä siirtymämetallinitridiohutkalvojen kasvattamiseksi
JPS6065004A (ja) * 1983-09-20 1985-04-13 Hiroaki Egawa キレ−ト樹脂及びその製造法
US5028565A (en) * 1989-08-25 1991-07-02 Applied Materials, Inc. Process for CVD deposition of tungsten layer on semiconductor wafer
JPH05206081A (ja) * 1992-01-28 1993-08-13 Sony Corp ドライエッチング方法
US5306666A (en) 1992-07-24 1994-04-26 Nippon Steel Corporation Process for forming a thin metal film by chemical vapor deposition
JP3415207B2 (ja) * 1992-07-24 2003-06-09 東京エレクトロン株式会社 化学気相成長による金属薄膜形成方法
JPH0794727A (ja) * 1993-09-21 1995-04-07 Toshiba Corp 半導体装置の製造方法
JPH0794425A (ja) * 1993-09-24 1995-04-07 Toshiba Corp 金属薄膜の形成方法および金属薄膜の形成装置
JP3358328B2 (ja) * 1994-10-27 2002-12-16 ソニー株式会社 高融点金属膜の成膜方法
US5804488A (en) * 1995-08-24 1998-09-08 Taiwan Semiconductor Manufacturing Company, Ltd. Method of forming a tungsten silicide capacitor having a high breakdown voltage
US6342277B1 (en) 1996-08-16 2002-01-29 Licensee For Microelectronics: Asm America, Inc. Sequential chemical vapor deposition
US5916365A (en) 1996-08-16 1999-06-29 Sherman; Arthur Sequential chemical vapor deposition
US6335280B1 (en) * 1997-01-13 2002-01-01 Asm America, Inc. Tungsten silicide deposition process
TW417249B (en) * 1997-05-14 2001-01-01 Applied Materials Inc Reliability barrier integration for cu application
US6156382A (en) 1997-05-16 2000-12-05 Applied Materials, Inc. Chemical vapor deposition process for depositing tungsten
US6162715A (en) * 1997-06-30 2000-12-19 Applied Materials, Inc. Method of forming gate electrode connection structure by in situ chemical vapor deposition of tungsten and tungsten nitride
KR100385946B1 (ko) 1999-12-08 2003-06-02 삼성전자주식회사 원자층 증착법을 이용한 금속층 형성방법 및 그 금속층을장벽금속층, 커패시터의 상부전극, 또는 하부전극으로구비한 반도체 소자
US6287965B1 (en) 1997-07-28 2001-09-11 Samsung Electronics Co, Ltd. Method of forming metal layer using atomic layer deposition and semiconductor device having the metal layer as barrier metal layer or upper or lower electrode of capacitor
JP4097747B2 (ja) * 1997-08-07 2008-06-11 株式会社アルバック バリア膜形成方法
KR100261017B1 (ko) 1997-08-19 2000-08-01 윤종용 반도체 장치의 금속 배선층을 형성하는 방법
KR100274603B1 (ko) 1997-10-01 2001-01-15 윤종용 반도체장치의제조방법및그의제조장치
US6099904A (en) * 1997-12-02 2000-08-08 Applied Materials, Inc. Low resistivity W using B2 H6 nucleation step
WO2000067936A1 (en) 1998-05-06 2000-11-16 H.C. Starck, Inc. Metal powders produced by the reduction of the oxides with gaseous magnesium
KR100319888B1 (ko) 1998-06-16 2002-01-10 윤종용 선택적 금속층 형성방법, 이를 이용한 커패시터 형성 및 콘택홀 매립방법
KR100278657B1 (ko) 1998-06-24 2001-02-01 윤종용 반도체장치의금속배선구조및그제조방법
KR100275738B1 (ko) 1998-08-07 2000-12-15 윤종용 원자층 증착법을 이용한 박막 제조방법
KR100287180B1 (ko) 1998-09-17 2001-04-16 윤종용 계면 조절층을 이용하여 금속 배선층을 형성하는 반도체 소자의 제조 방법
DE19847012A1 (de) 1998-10-13 2000-04-20 Starck H C Gmbh Co Kg Niobpulver und Verfahren zu dessen Herstellung
KR100327328B1 (ko) 1998-10-13 2002-05-09 윤종용 부분적으로다른두께를갖는커패시터의유전막형성방버뵤
JP3580159B2 (ja) 1998-12-18 2004-10-20 東京エレクトロン株式会社 タングステン膜の成膜方法
US6200893B1 (en) 1999-03-11 2001-03-13 Genus, Inc Radical-assisted sequential CVD
US6540838B2 (en) 2000-11-29 2003-04-01 Genus, Inc. Apparatus and concept for minimizing parasitic chemical vapor deposition during atomic layer deposition
US6305314B1 (en) 1999-03-11 2001-10-23 Genvs, Inc. Apparatus and concept for minimizing parasitic chemical vapor deposition during atomic layer deposition
KR100347379B1 (ko) 1999-05-01 2002-08-07 주식회사 피케이엘 복수매 기판의 박막 증착 공정이 가능한 원자층 증착장치
FI118342B (fi) 1999-05-10 2007-10-15 Asm Int Laite ohutkalvojen valmistamiseksi
US6218298B1 (en) * 1999-05-19 2001-04-17 Infineon Technologies North America Corp. Tungsten-filled deep trenches
US6064847A (en) 1999-06-21 2000-05-16 Sharp Kabushiki Kaisha Developing device
US6524952B1 (en) * 1999-06-25 2003-02-25 Applied Materials, Inc. Method of forming a titanium silicide layer on a substrate
KR20010017820A (ko) 1999-08-14 2001-03-05 윤종용 반도체 소자 및 그 제조방법
US6391785B1 (en) 1999-08-24 2002-05-21 Interuniversitair Microelektronica Centrum (Imec) Method for bottomless deposition of barrier layers in integrated circuit metallization schemes
AU1208201A (en) 1999-10-15 2001-04-30 Asm America, Inc. Method for depositing nanolaminate thin films on sensitive surfaces
US6475276B1 (en) 1999-10-15 2002-11-05 Asm Microchemistry Oy Production of elemental thin films using a boron-containing reducing agent
WO2001029891A1 (en) 1999-10-15 2001-04-26 Asm America, Inc. Conformal lining layers for damascene metallization
KR100737901B1 (ko) 1999-10-15 2007-07-10 에이에스엠 인터내셔널 엔.브이. 민감한 표면에 나노적층박막을 증착하는 방법
US6203613B1 (en) 1999-10-19 2001-03-20 International Business Machines Corporation Atomic layer deposition with nitrate containing precursors
US6534404B1 (en) * 1999-11-24 2003-03-18 Novellus Systems, Inc. Method of depositing diffusion barrier for copper interconnect in integrated circuit
US6780704B1 (en) 1999-12-03 2004-08-24 Asm International Nv Conformal thin films over textured capacitor electrodes
KR100330163B1 (ko) * 2000-01-06 2002-03-28 윤종용 반도체 장치의 텅스텐 콘택 플러그 형성 방법
FI20000099A0 (fi) 2000-01-18 2000-01-18 Asm Microchemistry Ltd Menetelmä metalliohutkalvojen kasvattamiseksi
US6601126B1 (en) * 2000-01-20 2003-07-29 Palmchip Corporation Chip-core framework for systems-on-a-chip
KR100803770B1 (ko) * 2000-03-07 2008-02-15 에이에스엠 인터내셔널 엔.브이. 구배（ｇｒａｄｅｄ）박막
US6274484B1 (en) * 2000-03-17 2001-08-14 Taiwan Semiconductor Manufacturing Company Fabrication process for low resistivity tungsten layer with good adhesion to insulator layers
KR100363088B1 (ko) 2000-04-20 2002-12-02 삼성전자 주식회사 원자층 증착방법을 이용한 장벽 금속막의 제조방법
US6482733B2 (en) * 2000-05-15 2002-11-19 Asm Microchemistry Oy Protective layers prior to alternating layer deposition
US6759325B2 (en) * 2000-05-15 2004-07-06 Asm Microchemistry Oy Sealing porous structures
US6921712B2 (en) 2000-05-15 2005-07-26 Asm International Nv Process for producing integrated circuits including reduction using gaseous organic compounds
KR100403611B1 (ko) 2000-06-07 2003-11-01 삼성전자주식회사 금속-절연체-금속 구조의 커패시터 및 그 제조방법
US7253076B1 (en) 2000-06-08 2007-08-07 Micron Technologies, Inc. Methods for forming and integrated circuit structures containing ruthenium and tungsten containing layers
JP3687651B2 (ja) * 2000-06-08 2005-08-24 ジニテック インク． 薄膜形成方法
KR100387255B1 (ko) 2000-06-20 2003-06-11 주식회사 하이닉스반도체 반도체 소자의 금속 배선 형성 방법
KR100332313B1 (ko) 2000-06-24 2002-04-12 서성기 Ａｌｄ 박막증착장치 및 증착방법
US6620723B1 (en) * 2000-06-27 2003-09-16 Applied Materials, Inc. Formation of boride barrier layers using chemisorption techniques
US7101795B1 (en) * 2000-06-28 2006-09-05 Applied Materials, Inc. Method and apparatus for depositing refractory metal layers employing sequential deposition techniques to form a nucleation layer
US6551929B1 (en) * 2000-06-28 2003-04-22 Applied Materials, Inc. Bifurcated deposition process for depositing refractory metal layers employing atomic layer deposition and chemical vapor deposition techniques
US6936538B2 (en) * 2001-07-16 2005-08-30 Applied Materials, Inc. Method and apparatus for depositing tungsten after surface treatment to improve film characteristics
KR100444149B1 (ko) 2000-07-22 2004-08-09 주식회사 아이피에스 Ald 박막증착설비용 클리닝방법
US6368954B1 (en) 2000-07-28 2002-04-09 Advanced Micro Devices, Inc. Method of copper interconnect formation using atomic layer copper deposition
KR100630666B1 (ko) 2000-08-09 2006-10-02 삼성전자주식회사 금속 콘택 및 커패시터를 포함하는 반도체 소자 제조방법
US6903005B1 (en) 2000-08-30 2005-06-07 Micron Technology, Inc. Method for the formation of RuSixOy-containing barrier layers for high-k dielectrics
US6376346B1 (en) * 2000-09-28 2002-04-23 Fabtech, Inc. High voltage device and method for making the same
US6355561B1 (en) 2000-11-21 2002-03-12 Micron Technology, Inc. ALD method to improve surface coverage
JP4333900B2 (ja) 2000-11-30 2009-09-16 エーエスエム インターナショナル エヌ．ヴェー． 磁気メモリセル、磁気構造体及び磁気素子の製造方法、並びに磁気構造体用金属層の成長方法
US20020104481A1 (en) * 2000-12-06 2002-08-08 Chiang Tony P. System and method for modulated ion-induced atomic layer deposition (MII-ALD)
US6949450B2 (en) * 2000-12-06 2005-09-27 Novellus Systems, Inc. Method for integrated in-situ cleaning and subsequent atomic layer deposition within a single processing chamber
KR100385947B1 (ko) 2000-12-06 2003-06-02 삼성전자주식회사 원자층 증착 방법에 의한 박막 형성 방법
US6416822B1 (en) * 2000-12-06 2002-07-09 Angstrom Systems, Inc. Continuous method for depositing a film by modulated ion-induced atomic layer deposition (MII-ALD)
US6428859B1 (en) * 2000-12-06 2002-08-06 Angstron Systems, Inc. Sequential method for depositing a film by modulated ion-induced atomic layer deposition (MII-ALD)
KR100386034B1 (ko) 2000-12-06 2003-06-02 에이에스엠 마이크로케미스트리 리미티드 확산 방지막의 결정립계를 금속산화물로 충진한 구리 배선구조의 반도체 소자 제조 방법
US20020076507A1 (en) 2000-12-15 2002-06-20 Chiang Tony P. Process sequence for atomic layer deposition
US6630201B2 (en) * 2001-04-05 2003-10-07 Angstron Systems, Inc. Adsorption process for atomic layer deposition
US20020073924A1 (en) * 2000-12-15 2002-06-20 Chiang Tony P. Gas introduction system for a reactor
US20020076481A1 (en) * 2000-12-15 2002-06-20 Chiang Tony P. Chamber pressure state-based control for a reactor
KR20020056260A (ko) 2000-12-29 2002-07-10 박종섭 반도체 소자의 금속 게이트 형성방법
US20020086111A1 (en) * 2001-01-03 2002-07-04 Byun Jeong Soo Method of forming refractory metal nitride layers using chemisorption techniques
US6951804B2 (en) 2001-02-02 2005-10-04 Applied Materials, Inc. Formation of a tantalum-nitride layer
KR100400033B1 (ko) 2001-02-08 2003-09-29 삼성전자주식회사 다층 배선 구조를 갖는 반도체 소자 및 그의 제조방법
KR100395766B1 (ko) 2001-02-12 2003-08-25 삼성전자주식회사 강유전체 기억 소자 및 그 형성 방법
US20020117399A1 (en) 2001-02-23 2002-08-29 Applied Materials, Inc. Atomically thin highly resistive barrier layer in a copper via
US6660126B2 (en) * 2001-03-02 2003-12-09 Applied Materials, Inc. Lid assembly for a processing system to facilitate sequential deposition techniques
US20020121241A1 (en) * 2001-03-02 2002-09-05 Nguyen Anh N. Processing chamber and method of distributing process fluids therein to facilitate sequential deposition of films
FI109770B (fi) 2001-03-16 2002-10-15 Asm Microchemistry Oy Menetelmä metallinitridiohutkalvojen valmistamiseksi
US6369430B1 (en) 2001-04-02 2002-04-09 Motorola, Inc. Method of preventing two neighboring contacts from a short-circuit caused by a void between them and device having the same
US6420189B1 (en) 2001-04-27 2002-07-16 Advanced Micro Devices, Inc. Superconducting damascene interconnected for integrated circuit
US6447933B1 (en) 2001-04-30 2002-09-10 Advanced Micro Devices, Inc. Formation of alloy material using alternating depositions of alloy doping element and bulk material
US6828218B2 (en) 2001-05-31 2004-12-07 Samsung Electronics Co., Ltd. Method of forming a thin film using atomic layer deposition
TW581822B (en) * 2001-07-16 2004-04-01 Applied Materials Inc Formation of composite tungsten films
US6548906B2 (en) * 2001-08-22 2003-04-15 Agere Systems Inc. Method for reducing a metal seam in an interconnect structure and a device manufactured thereby
US6806145B2 (en) 2001-08-31 2004-10-19 Asm International, N.V. Low temperature method of forming a gate stack with a high k layer deposited over an interfacial oxide layer
US6718126B2 (en) * 2001-09-14 2004-04-06 Applied Materials, Inc. Apparatus and method for vaporizing solid precursor for CVD or atomic layer deposition
AU2002333601A1 (en) * 2001-09-14 2003-04-01 Asm America, Inc. Metal nitride deposition by ald using gettering reactant
US20030049931A1 (en) * 2001-09-19 2003-03-13 Applied Materials, Inc. Formation of refractory metal nitrides using chemisorption techniques
KR20030025494A (ko) * 2001-09-21 2003-03-29 삼성전자주식회사 루테늄막과 금속층간의 콘택을 포함하는 반도체 장치 및그의 제조 방법
US6607976B2 (en) * 2001-09-25 2003-08-19 Applied Materials, Inc. Copper interconnect barrier layer structure and formation method
US6960537B2 (en) 2001-10-02 2005-11-01 Asm America, Inc. Incorporation of nitrogen into high k dielectric film
TW589684B (en) * 2001-10-10 2004-06-01 Applied Materials Inc Method for depositing refractory metal layers employing sequential deposition techniques
US6916398B2 (en) * 2001-10-26 2005-07-12 Applied Materials, Inc. Gas delivery apparatus and method for atomic layer deposition
US6423619B1 (en) 2001-11-30 2002-07-23 Motorola, Inc. Transistor metal gate structure that minimizes non-planarity effects and method of formation
US20030116087A1 (en) * 2001-12-21 2003-06-26 Nguyen Anh N. Chamber hardware design for titanium nitride atomic layer deposition
US20030123216A1 (en) * 2001-12-27 2003-07-03 Yoon Hyungsuk A. Deposition of tungsten for the formation of conformal tungsten silicide
US6998014B2 (en) * 2002-01-26 2006-02-14 Applied Materials, Inc. Apparatus and method for plasma assisted deposition
US6827978B2 (en) * 2002-02-11 2004-12-07 Applied Materials, Inc. Deposition of tungsten films
US6833161B2 (en) * 2002-02-26 2004-12-21 Applied Materials, Inc. Cyclical deposition of tungsten nitride for metal oxide gate electrode
KR100476926B1 (ko) * 2002-07-02 2005-03-17 삼성전자주식회사 반도체 소자의 듀얼 게이트 형성방법
US6838125B2 (en) * 2002-07-10 2005-01-04 Applied Materials, Inc. Method of film deposition using activated precursor gases
US7186385B2 (en) * 2002-07-17 2007-03-06 Applied Materials, Inc. Apparatus for providing gas to a processing chamber
US6955211B2 (en) * 2002-07-17 2005-10-18 Applied Materials, Inc. Method and apparatus for gas temperature control in a semiconductor processing system
US6772072B2 (en) * 2002-07-22 2004-08-03 Applied Materials, Inc. Method and apparatus for monitoring solid precursor delivery
WO2004009011A1 (en) * 2002-07-23 2004-01-29 Healthsouth Corporation Improved powered gait orthosis and method of utilizing same
US7300038B2 (en) * 2002-07-23 2007-11-27 Advanced Technology Materials, Inc. Method and apparatus to help promote contact of gas with vaporized material
JP4188033B2 (ja) * 2002-08-30 2008-11-26 本田技研工業株式会社 油圧緩衝機の取付構造

Similar Documents

Publication Publication Date Title
JP2005505690A5 (https=)
WO2003031679B1 (en) Method for depositing metal layers employing sequential deposition techniques
JP2004536225A5 (https=)
CN101308794B (zh) 钨材料的原子层沉积
US7208427B2 (en) Precursor compositions and processes for MOCVD of barrier materials in semiconductor manufacturing
US7585762B2 (en) Vapor deposition processes for tantalum carbide nitride materials
US7691742B2 (en) Atomic layer deposition of tantalum-containing materials using the tantalum precursor TAIMATA
US7524533B2 (en) Diffusion barrier layers and processes for depositing metal films thereupon by CVD or ALD processes
KR100530805B1 (ko) 표면 커버리지를 개선하기 위한 원자층 증착 방법
JP2005518088A5 (https=)
US20100102417A1 (en) Vapor deposition method for ternary compounds
CN100576474C (zh) 以钽前驱物taimata进行含钽材料的原子层沉积
KR910005397A (ko) 반도체 웨이퍼 상에 텅스텐 층을 cvd 증착시키는 방법
KR20180015305A (ko) Nmos 금속 게이트 물질들, 그 제조 방법들, 및 금속계 전구체들을 사용하는 cvd 및 ald 프로세스들 장비
JP4001509B2 (ja) 半導体素子の拡散防止膜形成方法
KR101157701B1 (ko) 원자층 증착에 의한 확산층으로의 금속 필름의 증착법 및 이를 위한 유기금속 전구체 착물
JP2019062190A5 (https=)
US7989339B2 (en) Vapor deposition processes for tantalum carbide nitride materials
CN111162039A (zh) 金属导电结构及半导体器件的制备方法
US7358188B2 (en) Method of forming conductive metal silicides by reaction of metal with silicon
JP2023036583A (ja) バリア層なしのタングステン堆積物
JP4261417B2 (ja) 拡散バリア層表面に金属膜を形成する方法
KR20210058289A (ko) 텅스텐 전구체, 이의 제조방법 및 이를 이용한 텅스텐 함유 박막 및 이의 제조방법
JPH0920980A (ja) 白金膜の製造方法
CN120965596A (zh) 一种小分子抑制剂及其形成含氮薄膜的方法