JP2000022004A5 - - Google Patents

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Publication number
JP2000022004A5
JP2000022004A5 JP1998161365A JP16136598A JP2000022004A5 JP 2000022004 A5 JP2000022004 A5 JP 2000022004A5 JP 1998161365 A JP1998161365 A JP 1998161365A JP 16136598 A JP16136598 A JP 16136598A JP 2000022004 A5 JP2000022004 A5 JP 2000022004A5
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JP
Japan
Prior art keywords
gate electrode
floating gate
active layer
semiconductor active
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998161365A
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English (en)
Japanese (ja)
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JP3980178B2 (ja
JP2000022004A (ja
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Publication date
Priority claimed from JP16136598A external-priority patent/JP3980178B2/ja
Priority to JP16136598A priority Critical patent/JP3980178B2/ja
Application filed filed Critical
Priority to US09/138,691 priority patent/US6323515B1/en
Priority to KR1019980035081A priority patent/KR100500301B1/ko
Publication of JP2000022004A publication Critical patent/JP2000022004A/ja
Priority to US09/970,719 priority patent/US6597034B2/en
Priority to US10/424,575 priority patent/US6900499B2/en
Priority to US11/129,795 priority patent/US7495278B2/en
Publication of JP2000022004A5 publication Critical patent/JP2000022004A5/ja
Publication of JP3980178B2 publication Critical patent/JP3980178B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP16136598A 1997-08-29 1998-05-25 不揮発性メモリおよび半導体装置 Expired - Fee Related JP3980178B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP16136598A JP3980178B2 (ja) 1997-08-29 1998-05-25 不揮発性メモリおよび半導体装置
US09/138,691 US6323515B1 (en) 1997-08-29 1998-08-24 Non-volatile memory and semiconductor device
KR1019980035081A KR100500301B1 (ko) 1997-08-29 1998-08-28 비휘발성메모리및반도체장치
US09/970,719 US6597034B2 (en) 1997-08-29 2001-10-04 Non-volatile memory and semiconductor device
US10/424,575 US6900499B2 (en) 1997-08-29 2003-04-28 Non-volatile memory and semiconductor device
US11/129,795 US7495278B2 (en) 1997-08-29 2005-05-16 Non-volatile memory and semiconductor device

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP24981897 1997-08-29
JP9-249818 1997-08-29
JP10-132750 1998-04-27
JP13275098 1998-04-27
JP16136598A JP3980178B2 (ja) 1997-08-29 1998-05-25 不揮発性メモリおよび半導体装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2007075099A Division JP5041839B2 (ja) 1997-08-29 2007-03-22 半導体装置

Publications (3)

Publication Number Publication Date
JP2000022004A JP2000022004A (ja) 2000-01-21
JP2000022004A5 true JP2000022004A5 (enExample) 2005-08-04
JP3980178B2 JP3980178B2 (ja) 2007-09-26

Family

ID=27316575

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16136598A Expired - Fee Related JP3980178B2 (ja) 1997-08-29 1998-05-25 不揮発性メモリおよび半導体装置

Country Status (3)

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US (4) US6323515B1 (enExample)
JP (1) JP3980178B2 (enExample)
KR (1) KR100500301B1 (enExample)

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