IN2012DN03820A - - Google Patents
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- Publication number
- IN2012DN03820A IN2012DN03820A IN3820DEN2012A IN2012DN03820A IN 2012DN03820 A IN2012DN03820 A IN 2012DN03820A IN 3820DEN2012 A IN3820DEN2012 A IN 3820DEN2012A IN 2012DN03820 A IN2012DN03820 A IN 2012DN03820A
- Authority
- IN
- India
- Prior art keywords
- powder
- sputtering target
- naf
- contained
- molded article
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/12—Both compacting and sintering
- B22F3/14—Both compacting and sintering simultaneously
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C9/00—Alloys based on copper
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/12—Active materials
- H10F77/126—Active materials comprising only Group I-III-VI chalcopyrite materials, e.g. CuInSe2, CuGaSe2 or CuInGaSe2 [CIGS]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/541—CuInSe2 material PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Physical Vapour Deposition (AREA)
- Photovoltaic Devices (AREA)
- Powder Metallurgy (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009255540 | 2009-11-06 | ||
| JP2010241749A JP4793504B2 (ja) | 2009-11-06 | 2010-10-28 | スパッタリングターゲット及びその製造方法 |
| PCT/JP2010/006481 WO2011055537A1 (ja) | 2009-11-06 | 2010-11-04 | スパッタリングターゲット及びその製造方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IN2012DN03820A true IN2012DN03820A (enExample) | 2015-08-28 |
Family
ID=43969780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IN3820DEN2012 IN2012DN03820A (enExample) | 2009-11-06 | 2010-11-04 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US8795489B2 (enExample) |
| EP (1) | EP2402482B1 (enExample) |
| JP (1) | JP4793504B2 (enExample) |
| KR (1) | KR101099416B1 (enExample) |
| CN (1) | CN102395702B (enExample) |
| IN (1) | IN2012DN03820A (enExample) |
| TW (1) | TW201126002A (enExample) |
| WO (1) | WO2011055537A1 (enExample) |
Families Citing this family (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5877510B2 (ja) * | 2010-01-07 | 2016-03-08 | Jx金属株式会社 | Cu−Ga系スパッタリングターゲット、同ターゲットの製造方法、光吸収層及び該光吸収層を用いた太陽電池 |
| JP4831258B2 (ja) * | 2010-03-18 | 2011-12-07 | 三菱マテリアル株式会社 | スパッタリングターゲット及びその製造方法 |
| JP5418463B2 (ja) * | 2010-10-14 | 2014-02-19 | 住友金属鉱山株式会社 | Cu−Ga合金スパッタリングターゲットの製造方法 |
| JP5153911B2 (ja) * | 2011-04-22 | 2013-02-27 | 三菱マテリアル株式会社 | スパッタリングターゲット及びその製造方法 |
| JP5725610B2 (ja) * | 2011-04-29 | 2015-05-27 | 三菱マテリアル株式会社 | スパッタリングターゲット及びその製造方法 |
| WO2012165092A1 (ja) * | 2011-06-03 | 2012-12-06 | 日東電工株式会社 | 太陽電池の製造方法 |
| JP5795898B2 (ja) * | 2011-07-28 | 2015-10-14 | 株式会社アルバック | CuGaNa系スパッタリング用ターゲット |
| JP5795897B2 (ja) * | 2011-07-28 | 2015-10-14 | 株式会社アルバック | CuGaNa系スパッタリング用ターゲット |
| JP5165100B1 (ja) | 2011-11-01 | 2013-03-21 | 三菱マテリアル株式会社 | スパッタリングターゲット及びその製造方法 |
| JP5919738B2 (ja) * | 2011-11-10 | 2016-05-18 | 三菱マテリアル株式会社 | スパッタリングターゲットおよびその製造方法 |
| JP5999357B2 (ja) | 2012-02-24 | 2016-09-28 | 三菱マテリアル株式会社 | スパッタリングターゲット及びその製造方法 |
| US8586457B1 (en) * | 2012-05-17 | 2013-11-19 | Intermolecular, Inc. | Method of fabricating high efficiency CIGS solar cells |
| CN102751388B (zh) * | 2012-07-18 | 2015-03-11 | 林刘毓 | 一种铜铟镓硒薄膜太阳能电池的制备方法 |
| JP5907428B2 (ja) * | 2012-07-23 | 2016-04-26 | 三菱マテリアル株式会社 | スパッタリングターゲット及びその製造方法 |
| JP2014037556A (ja) * | 2012-08-10 | 2014-02-27 | Mitsubishi Materials Corp | スパッタリングターゲット及びその製造方法 |
| JP6311912B2 (ja) * | 2012-10-17 | 2018-04-18 | 三菱マテリアル株式会社 | Cu−Ga二元系スパッタリングターゲット及びその製造方法 |
| AT13564U1 (de) | 2013-01-31 | 2014-03-15 | Plansee Se | CU-GA-IN-NA Target |
| JP6365922B2 (ja) | 2013-04-15 | 2018-08-01 | 三菱マテリアル株式会社 | スパッタリングターゲット及びその製造方法 |
| CN103255367B (zh) * | 2013-04-28 | 2015-07-29 | 柳州百韧特先进材料有限公司 | 太阳能电池cigs吸收层靶材的制备方法 |
| JP6120076B2 (ja) * | 2013-08-01 | 2017-04-26 | 三菱マテリアル株式会社 | Cu−Ga合金スパッタリングターゲット及びその製造方法 |
| JP5733357B2 (ja) * | 2013-08-02 | 2015-06-10 | 住友金属鉱山株式会社 | Cu−Ga合金スパッタリングターゲット |
| WO2015042622A1 (de) * | 2013-09-27 | 2015-04-02 | Plansee Se | Kupfer-gallium sputtering target |
| JP2015086434A (ja) * | 2013-10-30 | 2015-05-07 | 住友金属鉱山株式会社 | Cu−Ga合金スパッタリングターゲットの製造方法 |
| JP6665428B2 (ja) * | 2014-07-08 | 2020-03-13 | 三菱マテリアル株式会社 | Cu−Ga合金スパッタリングターゲット及びその製造方法 |
| JP5973041B2 (ja) * | 2014-08-28 | 2016-08-17 | 三菱マテリアル株式会社 | Cu−Gaスパッタリングターゲット及びCu−Gaスパッタリングターゲットの製造方法 |
| WO2016047556A1 (ja) * | 2014-09-22 | 2016-03-31 | 三菱マテリアル株式会社 | スパッタリングターゲット及びその製造方法 |
| JP6634750B2 (ja) * | 2014-09-22 | 2020-01-22 | 三菱マテリアル株式会社 | スパッタリングターゲット及びその製造方法 |
| US9947531B2 (en) | 2015-01-12 | 2018-04-17 | NuvoSun, Inc. | High rate sputter deposition of alkali metal-containing precursor films useful to fabricate chalcogenide semiconductors |
| TWI551704B (zh) * | 2015-05-21 | 2016-10-01 | China Steel Corp | Copper gallium alloy composite sodium element target manufacturing method |
| JP6794850B2 (ja) * | 2016-02-08 | 2020-12-02 | 三菱マテリアル株式会社 | スパッタリングターゲット及びスパッタリングターゲットの製造方法 |
| WO2017147037A1 (en) | 2016-02-26 | 2017-08-31 | Dow Global Technologies Llc | Method for improving stability of photovoltaic articles incorporating chalcogenide semiconductors |
| JP2018024933A (ja) * | 2016-07-29 | 2018-02-15 | 三菱マテリアル株式会社 | Cu−Gaスパッタリングターゲット及びCu−Gaスパッタリングターゲットの製造方法 |
| WO2018021105A1 (ja) | 2016-07-29 | 2018-02-01 | 三菱マテリアル株式会社 | Cu-Gaスパッタリングターゲット及びCu-Gaスパッタリングターゲットの製造方法 |
| KR102026458B1 (ko) * | 2017-05-12 | 2019-09-27 | 서울대학교산학협력단 | 금속 소결체의 제조방법 |
| JP2019112671A (ja) * | 2017-12-22 | 2019-07-11 | 三菱マテリアル株式会社 | Cu−Ga合金スパッタリングターゲット、及び、Cu−Ga合金スパッタリングターゲットの製造方法 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE68916988T2 (de) * | 1988-03-16 | 1995-03-16 | Mitsui Toatsu Chemicals | Verfahren zur Herstellung von gasförmigen Fluoriden. |
| JPH08253826A (ja) * | 1994-10-19 | 1996-10-01 | Sumitomo Electric Ind Ltd | 焼結摩擦材およびそれに用いられる複合銅合金粉末とそれらの製造方法 |
| JPH08195501A (ja) * | 1995-01-18 | 1996-07-30 | Shin Etsu Chem Co Ltd | Ib−IIIb−VIb族化合物半導体 |
| JP3249408B2 (ja) | 1996-10-25 | 2002-01-21 | 昭和シェル石油株式会社 | 薄膜太陽電池の薄膜光吸収層の製造方法及び製造装置 |
| JP4766441B2 (ja) * | 2003-09-17 | 2011-09-07 | 三菱マテリアル株式会社 | 半導体不揮発メモリー用相変化膜およびこの相変化膜を形成するためのスパッタリングターゲット |
| JP4907259B2 (ja) * | 2006-08-16 | 2012-03-28 | 山陽特殊製鋼株式会社 | Crを添加したFeCoB系ターゲット材 |
| JP4811660B2 (ja) * | 2006-11-30 | 2011-11-09 | 三菱マテリアル株式会社 | 高Ga含有Cu−Ga二元系合金スパッタリングターゲットおよびその製造方法 |
| US9279178B2 (en) | 2007-04-27 | 2016-03-08 | Honeywell International Inc. | Manufacturing design and processing methods and apparatus for sputtering targets |
| JP2009267336A (ja) | 2007-09-28 | 2009-11-12 | Fujifilm Corp | 太陽電池用基板および太陽電池 |
| CN101260513B (zh) | 2008-04-23 | 2011-04-06 | 王东生 | 太阳能电池铜铟镓硒薄膜关键靶材的制备方法 |
| CN101397647B (zh) * | 2008-11-03 | 2011-08-17 | 清华大学 | 铜铟镓硒或铜铟铝硒太阳能电池吸收层靶材及其制备方法 |
| US20100116341A1 (en) * | 2008-11-12 | 2010-05-13 | Solar Applied Materials Technology Corp. | Copper-gallium allay sputtering target, method for fabricating the same and related applications |
| JP2010225883A (ja) * | 2009-03-24 | 2010-10-07 | Honda Motor Co Ltd | 薄膜太陽電池の製造方法 |
| US9284639B2 (en) * | 2009-07-30 | 2016-03-15 | Apollo Precision Kunming Yuanhong Limited | Method for alkali doping of thin film photovoltaic materials |
-
2010
- 2010-10-28 JP JP2010241749A patent/JP4793504B2/ja not_active Expired - Fee Related
- 2010-11-04 IN IN3820DEN2012 patent/IN2012DN03820A/en unknown
- 2010-11-04 EP EP10828098.3A patent/EP2402482B1/en active Active
- 2010-11-04 US US13/262,540 patent/US8795489B2/en active Active
- 2010-11-04 WO PCT/JP2010/006481 patent/WO2011055537A1/ja not_active Ceased
- 2010-11-04 CN CN201080017285XA patent/CN102395702B/zh not_active Expired - Fee Related
- 2010-11-04 KR KR1020117022659A patent/KR101099416B1/ko not_active Expired - Fee Related
- 2010-11-05 TW TW099138182A patent/TW201126002A/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| EP2402482B1 (en) | 2014-07-02 |
| CN102395702B (zh) | 2013-04-10 |
| US20120217157A1 (en) | 2012-08-30 |
| JP4793504B2 (ja) | 2011-10-12 |
| KR101099416B1 (ko) | 2011-12-27 |
| WO2011055537A1 (ja) | 2011-05-12 |
| EP2402482A1 (en) | 2012-01-04 |
| KR20110113213A (ko) | 2011-10-14 |
| US8795489B2 (en) | 2014-08-05 |
| EP2402482A4 (en) | 2012-03-28 |
| CN102395702A (zh) | 2012-03-28 |
| JP2011117077A (ja) | 2011-06-16 |
| TW201126002A (en) | 2011-08-01 |
| TWI360583B (enExample) | 2012-03-21 |
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