DE60236106D1 - Kontaktlose luftkissenplatform - Google Patents

Kontaktlose luftkissenplatform

Info

Publication number
DE60236106D1
DE60236106D1 DE60236106T DE60236106T DE60236106D1 DE 60236106 D1 DE60236106 D1 DE 60236106D1 DE 60236106 T DE60236106 T DE 60236106T DE 60236106 T DE60236106 T DE 60236106T DE 60236106 D1 DE60236106 D1 DE 60236106D1
Authority
DE
Germany
Prior art keywords
pressure
air
outlets
support
evacuation channels
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60236106T
Other languages
English (en)
Inventor
Yuval Yassour
Hillel Reichman
Daniel Levin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coreflow Scientific Solutions Ltd
Original Assignee
Coreflow Scientific Solutions Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=23341559&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE60236106(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Coreflow Scientific Solutions Ltd filed Critical Coreflow Scientific Solutions Ltd
Application granted granted Critical
Publication of DE60236106D1 publication Critical patent/DE60236106D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/02—Conveying systems characterised by their application for specified purposes not otherwise provided for for conveying workpieces through baths of liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/02—Feeding of components

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Chain Conveyers (AREA)
  • Ship Loading And Unloading (AREA)
  • Control Of Conveyors (AREA)
  • Attitude Control For Articles On Conveyors (AREA)
  • Knitting Of Fabric (AREA)
  • Vibration Dampers (AREA)
  • Invalid Beds And Related Equipment (AREA)
DE60236106T 2001-12-27 2002-12-27 Kontaktlose luftkissenplatform Expired - Lifetime DE60236106D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US34237401P 2001-12-27 2001-12-27
PCT/IL2002/001045 WO2003060961A1 (en) 2001-12-27 2002-12-27 High-performance non-contact support platforms

Publications (1)

Publication Number Publication Date
DE60236106D1 true DE60236106D1 (de) 2010-06-02

Family

ID=23341559

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60236106T Expired - Lifetime DE60236106D1 (de) 2001-12-27 2002-12-27 Kontaktlose luftkissenplatform

Country Status (12)

Country Link
US (3) US6810297B2 (de)
EP (1) EP1461826B1 (de)
JP (1) JP2005528586A (de)
KR (2) KR100738143B1 (de)
CN (3) CN101024451A (de)
AT (1) ATE465509T1 (de)
AU (2) AU2002361485A1 (de)
CA (1) CA2473766C (de)
DE (1) DE60236106D1 (de)
IL (1) IL162389A0 (de)
TW (1) TWI222423B (de)
WO (2) WO2003061354A2 (de)

Families Citing this family (191)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI222423B (en) * 2001-12-27 2004-10-21 Orbotech Ltd System and methods for conveying and transporting levitated articles
GB2400063B (en) * 2003-04-03 2006-02-15 Exitech Ltd Positioning method and apparatus and a product thereof
US7371287B2 (en) * 2003-05-29 2008-05-13 Perkinelmer, Inc. Substrate handling system
US7077019B2 (en) * 2003-08-08 2006-07-18 Photon Dynamics, Inc. High precision gas bearing split-axis stage for transport and constraint of large flat flexible media during processing
EP1710833A4 (de) * 2004-01-30 2011-05-25 Sharp Kk Halbleiterherstellvorrichtung und diese verwendendes halbleiterherstellverfahren
KR20070006768A (ko) 2004-03-17 2007-01-11 코레플로우 사이언티픽 솔루션스 리미티드 비접촉 열 플랫폼
KR101195628B1 (ko) 2004-04-14 2012-10-30 코레플로우 사이언티픽 솔루션스 리미티드 편평한 물체의 대향면상에 광학 장치를 포커싱하는 방법
FR2869202B1 (fr) * 2004-04-23 2009-04-10 Jean Fachaux Dispositif de separation d'objets
WO2006003876A1 (ja) * 2004-06-30 2006-01-12 Hirata Corporation 基板塗布装置
KR20070037741A (ko) * 2004-07-09 2007-04-06 오씨 외를리콘 발처스 악티엔게젤샤프트 가스 베어링 기판-로딩 기구 프로세스
WO2006023595A2 (en) * 2004-08-18 2006-03-02 New Way Machine Components, Inc. Moving vacuum chamber stage with air bearing and differentially pumped grooves
JP2006083883A (ja) * 2004-09-14 2006-03-30 Fujikura Rubber Ltd 除振台装置
WO2006052919A1 (en) * 2004-11-08 2006-05-18 New Way Machine Components, Inc. Non-contact porous air bearing and glass flattening device
US8986780B2 (en) 2004-11-19 2015-03-24 Massachusetts Institute Of Technology Method and apparatus for depositing LED organic film
US8128753B2 (en) 2004-11-19 2012-03-06 Massachusetts Institute Of Technology Method and apparatus for depositing LED organic film
US20080308037A1 (en) * 2007-06-14 2008-12-18 Massachusetts Institute Of Technology Method and apparatus for thermal jet printing
AT501192B1 (de) * 2004-12-23 2007-04-15 Lisec Peter Vorrichtung zum transportieren und stützen tafelförmiger gegenstände, insbesondere glastafeln
KR100704177B1 (ko) * 2005-01-21 2007-04-06 (주)멕스코리아아이엔씨 기판반송장치 및 그를 이용한 방법
KR100698825B1 (ko) * 2005-01-21 2007-03-23 (주)멕스코리아아이엔씨 기판반송장치 및 그를 이용한 방법
JP4413789B2 (ja) * 2005-01-24 2010-02-10 東京エレクトロン株式会社 ステージ装置および塗布処理装置
JP4554397B2 (ja) 2005-02-23 2010-09-29 東京エレクトロン株式会社 ステージ装置および塗布処理装置
JP4664117B2 (ja) * 2005-03-03 2011-04-06 住友重機械工業株式会社 搬送物浮上ユニット、搬送物浮上装置、及びステージ装置
JP2006242860A (ja) * 2005-03-04 2006-09-14 Oht Inc 検査装置および検査方法
JP4519705B2 (ja) * 2005-04-26 2010-08-04 株式会社堀場製作所 パネル部材検査装置及びそれに適用される位置情報補正プログラム
JP4830339B2 (ja) * 2005-04-27 2011-12-07 株式会社Ｉｈｉ 搬送装置
US7738081B2 (en) * 2005-05-06 2010-06-15 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing a flat panel display handler with conveyor device and substrate handler
KR101234442B1 (ko) * 2005-06-20 2013-02-18 엘지디스플레이 주식회사 비접촉 반송 장치에서의 지지플랫폼
KR101234475B1 (ko) * 2005-06-20 2013-02-18 엘지디스플레이 주식회사 비접촉 반송 장치에서의 지지플랫폼
WO2007016688A1 (en) 2005-08-02 2007-02-08 New Way Machine Components, Inc. A method and a device for depositing a film of material or otherwise processing or inspecting, a substrate as it passes through a vacuum environment guided by a plurality of opposing and balanced air bearing lands and sealed by differentially pumped groves and sealing lands in a non-contact manner
US7764407B2 (en) * 2005-08-08 2010-07-27 Marvell International Technology Ltd. Flatbed image system having magnetically levitated carriage
JP4917780B2 (ja) * 2005-09-08 2012-04-18 住友化学株式会社 露光装置
KR20080059207A (ko) 2005-09-15 2008-06-26 코레플로우 사이언티픽 솔루션스 리미티드 컨베이어의 컨베잉 성능을 향상시키는 기구 및 방법
KR100746833B1 (ko) 2005-11-23 2007-08-07 주식회사 엔씨비네트웍스 비접촉 반송플레이트
US20070151296A1 (en) * 2005-12-22 2007-07-05 Photon Dynamics, Inc. Method and apparatus for handling and aligning glass substrates
US7391510B2 (en) * 2006-01-26 2008-06-24 Orbotech Ltd System and method for inspecting patterned devices having microscopic conductors
JP4841376B2 (ja) 2006-02-07 2011-12-21 大日本スクリーン製造株式会社 基板処理装置
US20070194511A1 (en) * 2006-02-17 2007-08-23 Dana Neer Water-tight seal and attachment apparatus
JP2007248291A (ja) * 2006-03-16 2007-09-27 Olympus Corp 基板検査装置
US20070289843A1 (en) * 2006-04-18 2007-12-20 Barry Kitazumi Conveyor System Including Offset Section
DE102006033296A1 (de) * 2006-07-17 2008-01-31 Manz Automation Ag Anlage zur Strukturierung von Solarmodulen
JP4884871B2 (ja) * 2006-07-27 2012-02-29 東京エレクトロン株式会社 塗布方法及び塗布装置
US20080050208A1 (en) * 2006-08-25 2008-02-28 Barry Kitazumi High speed transporter including horizontal belt
WO2008035324A2 (en) * 2006-09-19 2008-03-27 Coreflow Scientific Solutions Ltd Apparatus for fluid treatment
JP2008082704A (ja) * 2006-09-25 2008-04-10 Olympus Corp 基板検査装置および基板検査方法
DE102006045866B4 (de) 2006-09-28 2010-08-12 Nanophotonics Ag Halte- und Drehvorrichtung für berührungsempfindliche ebene Objekte
DE102006054088A1 (de) * 2006-11-16 2008-05-21 Siemens Ag Messvorrichtung und Messverfahren zum Inspizieren einer Oberfläche eines Substrates
US7722256B2 (en) * 2006-11-17 2010-05-25 Corning Incorporated Flat surface air bearing assembly
US20080223294A1 (en) * 2007-03-14 2008-09-18 Applied Materials, Inc. Flooding Chamber For Coating Installations
KR20100022491A (ko) * 2007-05-25 2010-03-02 코닝 인코포레이티드 유리 시트를 취급하기 위한 장치
US8556389B2 (en) 2011-02-04 2013-10-15 Kateeva, Inc. Low-profile MEMS thermal printhead die having backside electrical connections
FI20070654A0 (fi) * 2007-08-29 2007-08-29 Raute Oyj Laitteisto levymäisten esineiden siirtämiseksi
JP5325406B2 (ja) * 2007-10-10 2013-10-23 オリンパス株式会社 基板検査装置
DE102007052530A1 (de) * 2007-11-01 2009-05-14 Zimmermann & Schilp Handhabungstechnik Gmbh Vorrichtungen zur Inspektion und Bestrahlung von flächigen Materialien
IL188825A0 (en) * 2008-01-16 2008-11-03 Orbotech Ltd Inspection of a substrate using multiple cameras
WO2009113066A2 (en) 2008-03-11 2009-09-17 Coreflow Ltd. Method and system for locally controlling support of a flat object
KR101634825B1 (ko) 2008-06-09 2016-06-29 케이엘에이-텐코어 코오포레이션 참조 검사 디바이스
US9604245B2 (en) 2008-06-13 2017-03-28 Kateeva, Inc. Gas enclosure systems and methods utilizing an auxiliary enclosure
US12018857B2 (en) 2008-06-13 2024-06-25 Kateeva, Inc. Gas enclosure assembly and system
US9048344B2 (en) 2008-06-13 2015-06-02 Kateeva, Inc. Gas enclosure assembly and system
US10442226B2 (en) 2008-06-13 2019-10-15 Kateeva, Inc. Gas enclosure assembly and system
US8899171B2 (en) 2008-06-13 2014-12-02 Kateeva, Inc. Gas enclosure assembly and system
US10434804B2 (en) 2008-06-13 2019-10-08 Kateeva, Inc. Low particle gas enclosure systems and methods
US11975546B2 (en) 2008-06-13 2024-05-07 Kateeva, Inc. Gas enclosure assembly and system
US8383202B2 (en) 2008-06-13 2013-02-26 Kateeva, Inc. Method and apparatus for load-locked printing
CN101620335B (zh) * 2008-07-04 2011-03-16 东捷科技股份有限公司 铝挤型的气浮条
US8047354B2 (en) * 2008-09-26 2011-11-01 Corning Incorporated Liquid-ejecting bearings for transport of glass sheets
DE102008057389B4 (de) * 2008-11-14 2011-03-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Transport eines Objekts über eine Oberfläche
JP5223615B2 (ja) * 2008-11-20 2013-06-26 株式会社Ｉｈｉ 薄板の浮上搬送状態検出方法及びその装置
US8511461B2 (en) 2008-11-25 2013-08-20 Corning Incorporated Gas-ejecting bearings for transport of glass sheets
JP2010143733A (ja) * 2008-12-19 2010-07-01 Sumitomo Heavy Ind Ltd 基板ハンドリングシステム及び基板ハンドリング方法
US20100188457A1 (en) * 2009-01-05 2010-07-29 Madigan Connor F Method and apparatus for controlling the temperature of an electrically-heated discharge nozzle
EP2425470A2 (de) * 2009-05-01 2012-03-07 Kateeva, Inc. Verfahren und vorrichtung für organischen dampfstrahldruck
EP2456694A2 (de) 2009-07-22 2012-05-30 Zimmermann & Schilp Handhabungstechnik GmbH Vakuum-greifer
WO2011009447A2 (de) * 2009-07-22 2011-01-27 Zimmermann & Schilp Handhabungstechnik Gmbh Vorrichtung zum aufnehmen und abtransportieren flacher werkstücke
EP2281921A1 (de) * 2009-07-30 2011-02-09 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Vorrichtung und Verfahren zur Atomlagenabscheidung
US8699001B2 (en) * 2009-08-20 2014-04-15 Nikon Corporation Object moving apparatus, object processing apparatus, exposure apparatus, object inspecting apparatus and device manufacturing method
US20110042874A1 (en) * 2009-08-20 2011-02-24 Nikon Corporation Object processing apparatus, exposure apparatus and exposure method, and device manufacturing method
CN102483580B (zh) * 2009-08-20 2015-04-01 株式会社尼康 物体处理装置、曝光装置及曝光方法、以及元件制造方法
TWI503206B (zh) * 2009-08-27 2015-10-11 Corning Inc 用以精確修整邊緣的設備及方法
WO2012119034A2 (en) * 2011-03-02 2012-09-07 Game Changers, Llc Method and apparatus for a dynamic air cushion transport system
JP4919115B2 (ja) * 2009-09-24 2012-04-18 横河電機株式会社 放射線検査装置
US20110140726A1 (en) * 2009-11-23 2011-06-16 Applied Materials, Inc. Apparatus and Methods for Measuring Solar Cell Module Performance
US9035673B2 (en) 2010-01-25 2015-05-19 Palo Alto Research Center Incorporated Method of in-process intralayer yield detection, interlayer shunt detection and correction
NL2004177C2 (en) * 2010-02-01 2011-08-03 Levitech B V Dynamic fluid valve and method for establishing the same.
CN102892693B (zh) * 2010-04-14 2014-09-10 翁令司工业股份有限公司 旋流形成体及非接触式运送装置
IT1400493B1 (it) * 2010-06-09 2013-06-11 Mec Di Prec E G3 Di Gamba Walter & C S N C Off Dispositivo e metodo per il posizionamento preciso di un pezzo miniaturizzato in una sede di posizionamento.
DE102010024263A1 (de) * 2010-06-18 2011-12-22 Festo Ag & Co. Kg Luftlagereinrichtung
US8598538B2 (en) 2010-09-07 2013-12-03 Nikon Corporation Movable body apparatus, object processing device, exposure apparatus, flat-panel display manufacturing method, and device manufacturing method
JP2012076877A (ja) * 2010-10-01 2012-04-19 Nitto Denko Corp ワーク搬送方法およびワーク搬送装置
US8834073B2 (en) * 2010-10-29 2014-09-16 Corning Incorporated Transport apparatus having a measuring system and methods therefor
JP5877954B2 (ja) * 2011-03-07 2016-03-08 株式会社ゼビオス 非接触浮上搬送機能を有する基板処理装置
CN103229325B (zh) 2011-04-08 2018-02-16 卡帝瓦公司 用于利用面式滚筒印制的方法和设备
CA3074816C (en) * 2011-06-03 2022-05-24 Durr Systems, Inc. Web lifter/stabilizer and method
KR102016871B1 (ko) 2011-08-09 2019-08-30 카티바, 인크. 하향 인쇄 장치 및 방법
US9120344B2 (en) 2011-08-09 2015-09-01 Kateeva, Inc. Apparatus and method for control of print gap
JP5912642B2 (ja) * 2012-02-20 2016-04-27 日本電気硝子株式会社 ガラス板の搬送装置及びその搬送方法
JP5998086B2 (ja) * 2012-04-03 2016-09-28 オイレス工業株式会社 浮上用エアプレート
JP5852508B2 (ja) * 2012-05-24 2016-02-03 成香 吉本 ワーク浮上装置
US9090095B2 (en) 2012-06-04 2015-07-28 Micronic Mydata AB Optical writer for flexible foils
JP2014031865A (ja) * 2012-08-06 2014-02-20 Oiles Ind Co Ltd エアベアリング装置及び塗布装置
CN103846956A (zh) * 2012-11-28 2014-06-11 均豪精密工业股份有限公司 整平气垫夹爪模块
DE102012111869A1 (de) * 2012-12-06 2014-06-12 Aixtron Se Vakuumgreifvorrichtung
US9484283B2 (en) 2013-01-04 2016-11-01 Toyota Motor Engineering & Manufacturing North America Inc. Modular jet impingement cooling apparatuses with exchangeable jet plates
US8643173B1 (en) 2013-01-04 2014-02-04 Toyota Motor Engineering & Manufacturing North America, Inc. Cooling apparatuses and power electronics modules with single-phase and two-phase surface enhancement features
US9460985B2 (en) 2013-01-04 2016-10-04 Toyota Motor Engineering & Manufacturing North America, Inc. Cooling apparatuses having a jet orifice surface with alternating vapor guide channels
JP5996447B2 (ja) * 2013-01-30 2016-09-21 アンリツインフィビス株式会社 Ｘ線検査装置
EP2765218A1 (de) * 2013-02-07 2014-08-13 Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO Verfahren und Vorrichtung zur Ablagerung atomarer Schichten auf einem Substrat
US9272301B2 (en) 2013-03-01 2016-03-01 S. Dana Seccombe Apparatus and method for non-contact manipulation, conditioning, shaping and drying of surfaces
EP3474317B1 (de) * 2013-03-13 2022-06-22 Kateeva, Inc. Gasgehäusesysteme und verfahren mit einem hilfsgehäuse
NL2010471C2 (en) * 2013-03-18 2014-09-24 Levitech B V Substrate processing apparatus.
US8981556B2 (en) 2013-03-19 2015-03-17 Toyota Motor Engineering & Manufacturing North America, Inc. Jet impingement cooling apparatuses having non-uniform jet orifice sizes
ITTO20130324A1 (it) * 2013-04-22 2014-10-23 St Microelectronics Srl Dispositivo vibrante per il posizionamento di un pezzo miniaturizzato in una sede di test, e metodo di posizionamento
US10943037B2 (en) * 2013-04-30 2021-03-09 Dassault Systemes Simulia Corp. Generating a CAD model from a finite element mesh
CN103317510A (zh) * 2013-05-09 2013-09-25 京东方科技集团股份有限公司 一种机械手设备
US9247679B2 (en) 2013-05-24 2016-01-26 Toyota Motor Engineering & Manufacturing North America, Inc. Jet impingement coolers and power electronics modules comprising the same
US9257365B2 (en) 2013-07-05 2016-02-09 Toyota Motor Engineering & Manufacturing North America, Inc. Cooling assemblies and power electronics modules having multiple-porosity structures
US9803938B2 (en) 2013-07-05 2017-10-31 Toyota Motor Engineering & Manufacturing North America, Inc. Cooling assemblies having porous three dimensional surfaces
US9131631B2 (en) 2013-08-08 2015-09-08 Toyota Motor Engineering & Manufacturing North America, Inc. Jet impingement cooling apparatuses having enhanced heat transfer assemblies
US9653338B2 (en) * 2013-12-23 2017-05-16 Kla-Tencor Corporation System and method for non-contact wafer chucking
CN103708713A (zh) * 2013-12-26 2014-04-09 深圳市华星光电技术有限公司 夹持机构、液晶面板切割机以及液晶面板切割工艺
KR101878084B1 (ko) 2013-12-26 2018-07-12 카티바, 인크. 전자 장치의 열 처리를 위한 장치 및 기술
US20150197034A1 (en) 2014-01-13 2015-07-16 Saint-Gobain Placo Sas Apparatus and Method for Constructing Building Boards Using Low Friction Surfaces
DE102014100351B4 (de) * 2014-01-14 2022-10-06 Johannes Herrmann e. K. Luftgelagertes Auflageelement insbesondere für Kraftfahrzeuge
EP3975229A1 (de) 2014-01-21 2022-03-30 Kateeva, Inc. Verfahren zur verkapselung einer elektronischen vorrichtung
CN103771133A (zh) * 2014-01-23 2014-05-07 南通剑桥输送设备有限公司 一种可调节高度的气动传输装置
CN103824792A (zh) * 2014-02-28 2014-05-28 上海和辉光电有限公司 一种储藏柜及控制方法
US10858202B1 (en) 2014-04-14 2020-12-08 Amazon Technologies, Inc. Air cushioned materials handling system
CN110265326B (zh) 2014-04-30 2024-03-08 科迪华公司 用于衬底涂覆的气垫设备和技术
JP6691488B2 (ja) 2014-06-17 2020-04-28 カティーバ， インコーポレイテッド 印刷システムアセンブリおよび方法
CN104020138B (zh) * 2014-06-24 2016-05-18 吉林大学 车身外覆盖件视觉检测自动定位装置
EP2960059B1 (de) 2014-06-25 2018-10-24 Universal Display Corporation Systeme und verfahren zur modulation des durchflusses während der dampfstrahlabscheidung von organischen materialien
US11267012B2 (en) 2014-06-25 2022-03-08 Universal Display Corporation Spatial control of vapor condensation using convection
US11220737B2 (en) * 2014-06-25 2022-01-11 Universal Display Corporation Systems and methods of modulating flow during vapor jet deposition of organic materials
US11097974B2 (en) 2014-07-31 2021-08-24 Corning Incorporated Thermally strengthened consumer electronic glass and related systems and methods
US20160031752A1 (en) 2014-07-31 2016-02-04 Corning Incorporated Glass or glass-ceramic for windows, countertops, and other applications
US10611664B2 (en) 2014-07-31 2020-04-07 Corning Incorporated Thermally strengthened architectural glass and related systems and methods
JP6570147B2 (ja) 2014-11-26 2019-09-04 カティーバ， インコーポレイテッド 環境的に制御されたコーティングシステム
CN104914113B (zh) * 2015-05-18 2019-03-08 东莞市威力固电路板设备有限公司 印刷电路板自动光学检测方法
KR20180057691A (ko) * 2015-09-24 2018-05-30 카티바, 인크. 프린팅 시스템 조립체 및 방법
US10566534B2 (en) 2015-10-12 2020-02-18 Universal Display Corporation Apparatus and method to deliver organic material via organic vapor-jet printing (OVJP)
KR102427159B1 (ko) 2015-11-11 2022-08-01 삼성전자주식회사 테이프 필름의 라미네이션 장치 및 그를 포함하는 반도체 소자의 제조 설비
CN105565018A (zh) * 2016-01-11 2016-05-11 京东方科技集团股份有限公司 薄膜供给装置及其控制方法
KR102492060B1 (ko) 2016-01-12 2023-01-26 코닝 인코포레이티드 얇은, 열적 및 화학적으로 강화된 유리-계 제품
US11795102B2 (en) 2016-01-26 2023-10-24 Corning Incorporated Non-contact coated glass and related coating system and method
CN105700299A (zh) * 2016-03-09 2016-06-22 深圳盟星科技有限公司 双面曝光的装置
CN106144559A (zh) * 2016-03-09 2016-11-23 深圳盟星科技有限公司 双面气浮输送台
US9776809B1 (en) * 2016-03-31 2017-10-03 Core Flow Ltd. Conveying system with vacuum wheel
CN107285029B (zh) * 2016-03-31 2019-09-17 上海微电子装备（集团）股份有限公司 气浮传输装置及传输方法和应用
US10689209B2 (en) 2016-06-21 2020-06-23 Core Flow Ltd. Noncontact support platform with edge lifting
US10074554B2 (en) * 2016-06-27 2018-09-11 Tel Nexx, Inc. Workpiece loader for a wet processing system
EP3479173A1 (de) * 2016-07-01 2019-05-08 ASML Netherlands B.V. Stufensystem, lithografische vorrichtung, verfahren zur positionierung und vorrichtungsherstellungsverfahren
CN106081627B (zh) * 2016-07-26 2019-07-02 中导光电设备股份有限公司 一种高速气浮板的使用方法
JP6456904B2 (ja) * 2016-12-07 2019-01-23 株式会社日本製鋼所 ガス浮上ワーク支持装置
CN108249159B (zh) * 2016-12-28 2020-02-14 芝浦机械电子株式会社 浮起搬运装置以及基板处理装置
US10584413B2 (en) * 2017-03-14 2020-03-10 Eastman Kodak Company Vertical system with vacuum pre-loaded deposition head
US9889995B1 (en) * 2017-03-15 2018-02-13 Core Flow Ltd. Noncontact support platform with blockage detection
WO2019000295A1 (zh) * 2017-06-29 2019-01-03 深圳市汇顶科技股份有限公司 芯片拾取装置
CN109283135B (zh) * 2017-07-21 2021-06-08 合肥欣奕华智能机器有限公司 一种显示面板检测装置
CN111065609A (zh) 2017-08-24 2020-04-24 康宁股份有限公司 具有改进的回火能力的玻璃
CN111051226B (zh) 2017-08-31 2022-10-04 金伯利-克拉克环球有限公司 空气辅助颗粒输送系统
CN107450284B (zh) * 2017-09-27 2019-06-07 武汉华星光电技术有限公司 曝光设备及透明基板的曝光方法
US10513011B2 (en) * 2017-11-08 2019-12-24 Core Flow Ltd. Layered noncontact support platform
US10804133B2 (en) * 2017-11-21 2020-10-13 Taiwan Semiconductor Manufacturing Co., Ltd. Article transferring method in semiconductor fabrication
TWI785156B (zh) 2017-11-30 2022-12-01 美商康寧公司 具有高熱膨脹係數及對於熱回火之優先破裂行為的非離子交換玻璃
CN110153551A (zh) * 2018-02-14 2019-08-23 镭射沃激光科技(深圳)有限公司 激光加工装置及利用此的激光加工方法
JP7178177B2 (ja) * 2018-03-22 2022-11-25 東京エレクトロン株式会社 基板処理装置
CN108657821A (zh) * 2018-05-03 2018-10-16 拓卡奔马机电科技有限公司 裁片气浮输送装置
CN109065487B (zh) * 2018-05-28 2020-10-23 中国电子科技集团公司第四十八研究所 一种真空传输装置
CN112236379B (zh) * 2018-06-10 2022-10-11 科福罗有限公司 开环控制的无接触支撑平台
TW202323068A (zh) 2018-12-05 2023-06-16 美商凱特伊夫公司 基板固持器總成以及具有基板高度位置控制的噴墨印表機
CN109342698B (zh) * 2018-12-20 2024-01-26 中国矿业大学(北京) 一种盾构隧道上覆土体沉降模拟试验平台及试验方法
US11260679B2 (en) * 2018-12-21 2022-03-01 Kateeva, Inc. Gripping for print substrates
CN114514115B (zh) 2019-08-06 2023-09-01 康宁股份有限公司 具有用于阻止裂纹的埋入式应力尖峰的玻璃层压体及其制造方法
CN110441233B (zh) * 2019-08-08 2020-10-30 上海御微半导体技术有限公司 一种磁悬浮工件台和缺陷检测装置
US11753257B2 (en) 2019-12-16 2023-09-12 AMP Robotics Corporation Bidirectional air conveyor device for material sorting and other applications
WO2021126879A1 (en) 2019-12-16 2021-06-24 AMP Robotics Corporation A suction gripper cluster device for material sorting and other applications
US11465858B2 (en) 2019-12-16 2022-10-11 AMP Robotics Corporation Actuated air conveyor device for material sorting and other applications
CN111252558B (zh) * 2020-02-11 2020-09-15 江苏科技大学 一种无接触倾角可控式输运平台及控制方法
JP7437187B2 (ja) * 2020-02-26 2024-02-22 Ｊｓｗアクティナシステム株式会社 浮上搬送装置、及びレーザ処理装置
CN111924541B (zh) * 2020-07-01 2021-12-07 山东聊城华阳医药辅料有限公司 一种基于光敏电阻值特性的气动管道输送装置
CN111900119A (zh) * 2020-07-31 2020-11-06 上海华力集成电路制造有限公司 减少接触摩擦的承载装置及利用该承载装置的传输方法
US20220139755A1 (en) * 2020-10-30 2022-05-05 Samsung Electronics Co., Ltd. Semiconductor manufacturing apparatus and chip handling method
CN112631084A (zh) * 2020-12-30 2021-04-09 安徽地势坤光电科技有限公司 一种自动化激光直写装置
CN113108715B (zh) * 2021-04-13 2024-01-23 南京中安半导体设备有限责任公司 悬浮物的测量装置和气浮卡盘
CN113291825A (zh) * 2021-05-20 2021-08-24 哈尔滨工业大学 一种精密气浮平台
US20230062686A1 (en) * 2021-08-27 2023-03-02 Kateeva, Inc. Substrate holder with linear slide mechanism
IL309613A (en) * 2021-11-25 2024-02-01 Orbotech Ltd Improving the processing of a flexible circuit board (CB) using a vacuum plate adapted to the design of the CB
CN114951481B (zh) * 2022-04-02 2023-04-14 广州优得佳模具科技有限公司 后副车架后梁前后片成对冲压自动化生产线及其生产方法
FR3139869A1 (fr) * 2022-09-16 2024-03-22 Micro-Contrôle - Spectra-Physics Appareil pour la réduction des vibrations dans un système de régulation de mouvement à coussin d’air
DE102023103520B3 (de) 2023-02-14 2024-03-21 Isra Vision Gmbh Vorrichtung und Verfahren zur Inspektion eines plattenförmigen oder bahnförmigen Objekts
CN117554021A (zh) * 2024-01-12 2024-02-13 哈尔滨工业大学 一种基于真空预压空气轴承的移动带地板吸浮冷却装置

Family Cites Families (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2848820A (en) * 1952-10-08 1958-08-26 Svenska Flaektfabriken Ab Method and apparatus for supporting and conveying web-like material
BE639667A (de) 1962-11-07
FR1342552A (fr) 1962-12-20 1963-11-08 Ass Elect Ind Dispositif de convoyage de matériau en feuille
NL137693C (de) 1964-03-25
US3318640A (en) 1965-04-23 1967-05-09 Pitney Bowes Inc Pneumatic sheet handling apparatus and method of making same
FR1477171A (fr) 1965-04-23 1967-04-14 Pitney Bowes Inc Appareil pneumatique de manipulation de feuilles et procédé pour sa fabrication
US4092366A (en) * 1975-04-10 1978-05-30 Scm Corporation Synthesis of Vitamin A, intermediates and conversion thereof to Vitamin A
EP0035838B1 (de) * 1980-03-10 1985-02-06 Rolls-Royce Plc Diffusor
US4362461A (en) * 1980-05-27 1982-12-07 Ppg Industries, Inc. Selective vacuum lifting device
US4784218A (en) * 1982-11-01 1988-11-15 Holl Richard A Fluid handling apparatus
US4627362A (en) * 1983-06-28 1986-12-09 Kabushiki Kaisha Myotoku Air sliding device for work pallets or the like
IL70646A (en) * 1984-01-09 1990-07-26 Naan Mech Works Vortex labyrinth insert particularly for drip irrigation pipes
US4712784A (en) * 1985-05-31 1987-12-15 Rca Corporation Adjustable vacuum pad
GB8516344D0 (en) * 1985-06-28 1985-07-31 Brunold C R Mixing apparatus & processes
JPH0421206Y2 (de) * 1989-09-08 1992-05-14
JP2501366B2 (ja) * 1990-05-17 1996-05-29 株式会社 エフエスケー 物体の保持装置
JP3148353B2 (ja) * 1991-05-30 2001-03-19 ケーエルエー・インストルメンツ・コーポレーション 電子ビーム検査方法とそのシステム
US5156680A (en) * 1991-07-30 1992-10-20 Rockwell International Corporation Flow restrictor for a fluid
US5207386A (en) * 1991-10-01 1993-05-04 Hydro-Plan Engineering Ltd. Flow emitter units moulds for use in the manufacture thereof
US5207553A (en) * 1992-02-26 1993-05-04 Haruo Konagai Suction lifting device for flat workpieces
JP3128709B2 (ja) * 1992-08-04 2001-01-29 株式会社新川 非接触型移動テーブル
GB9226129D0 (en) * 1992-12-15 1993-02-10 Baker Salah A A process vessel
DE4314507C1 (de) * 1993-05-03 1994-06-23 Voith Gmbh J M Injektor für Flotationseinrichtungen
US5603599A (en) * 1994-09-28 1997-02-18 Tetra Laval Holdings & Finance S.A. Vacuum system
DE69606633T2 (de) * 1995-05-09 2000-06-08 Labatt Brewing Co Ltd Statische vorrichtung zur strömungsdurchmischung von fluiden
DE19544816A1 (de) * 1995-12-01 1997-06-05 Abb Research Ltd Mischvorrichtung
DE19611713A1 (de) * 1996-03-25 1997-10-16 Giesecke & Devrient Gmbh Vorrichtung zum Bearbeiten von flachen Werkstücken, wie z. B. Karten oder Buchdokumenten
JP3688806B2 (ja) * 1996-05-14 2005-08-31 彦六 杉浦 スタティックミキサー
US5839828A (en) * 1996-05-20 1998-11-24 Glanville; Robert W. Static mixer
US5830515A (en) * 1996-09-18 1998-11-03 Pleasant Precision, Inc. Mold insert
KR100270519B1 (ko) * 1997-08-21 2001-01-15 구자홍 인쇄회로기판 검사 장치
KR100343216B1 (ko) * 1997-09-12 2002-08-22 삼성전자 주식회사 주자석내부에서양방향이동이가능한자기공명영상장치의환자이송테이블
EP0965546A1 (de) * 1998-06-17 1999-12-22 E.I. Du Pont De Nemours And Company System zum Transport von Bahnen
JP2000036488A (ja) * 1998-07-21 2000-02-02 Speedfam-Ipec Co Ltd ウエハ平坦化方法及びそのシステム
US5967658A (en) * 1998-07-28 1999-10-19 Kam Controls Incorporated Static mixing apparatus and method
US6252412B1 (en) * 1999-01-08 2001-06-26 Schlumberger Technologies, Inc. Method of detecting defects in patterned substrates
IL131589A (en) 1999-08-25 2007-05-15 Yuval Yassour Device for creating forces by injecting liquid
IL131590A0 (en) 1999-08-25 2001-01-28 Technion Res & Dev Foundation Self-adaptive segmented orifice device and method
IL131591A (en) 1999-08-25 2008-03-20 Yuval Yassour Adaptive vacuum grip system
US6583413B1 (en) * 1999-09-01 2003-06-24 Hitachi, Ltd. Method of inspecting a circuit pattern and inspecting instrument
TWI222423B (en) * 2001-12-27 2004-10-21 Orbotech Ltd System and methods for conveying and transporting levitated articles
DE102004014779A1 (de) * 2004-03-26 2005-10-13 Grenzebach Maschinenbau Gmbh Berührungsfreier Plattenförderer, insbesondere für Glasplatten

Also Published As

Publication number Publication date
EP1461826B1 (de) 2010-04-21
US20030169524A1 (en) 2003-09-11
ATE465509T1 (de) 2010-05-15
KR20040073508A (ko) 2004-08-19
CA2473766C (en) 2010-12-21
WO2003061354A3 (en) 2005-08-18
TWI222423B (en) 2004-10-21
CA2473766A1 (en) 2003-07-24
IL162389A0 (en) 2005-11-20
AU2002361485A1 (en) 2003-07-30
EP1461826A1 (de) 2004-09-29
JP2005528586A (ja) 2005-09-22
WO2003061354A2 (en) 2003-07-24
US7530778B2 (en) 2009-05-12
US20050015170A1 (en) 2005-01-20
CN1631064A (zh) 2005-06-22
AU2002367070A1 (en) 2003-07-30
WO2003060961A1 (en) 2003-07-24
US6810297B2 (en) 2004-10-26
CN100466159C (zh) 2009-03-04
KR20050046824A (ko) 2005-05-18
US20060054774A1 (en) 2006-03-16
CN1623219A (zh) 2005-06-01
KR100553805B1 (ko) 2006-02-22
AU2002367070A8 (en) 2003-07-30
KR100738143B1 (ko) 2007-07-10
CN101024451A (zh) 2007-08-29

Similar Documents

Publication Publication Date Title
DE60236106D1 (de) Kontaktlose luftkissenplatform
WO2005086588A3 (en) Non-contact thermal platforms
WO2005099350A3 (en) Non-contact support platforms for distance adjustment
US3513934A (en) Air bearing devices
CA2599568A1 (en) Apparatus and method for the transfer of a fluid to a moving web material
SE461171C (sv) Press med laangt nyp foer pappers- eller kartongmaskiner
KR940006245A (ko) 비접촉형 이동테이블
ATE463721T1 (de) Gaspolster-mikrodosiersystem
GB2333341B (en) Surface-traversing vehicle
DE69117673D1 (de) Hochgeschwindigkeitsdreiwegeventil für Fluidum unter Druck zum Beispiel Druckluftkranläufe
DK1594766T3 (da) Trykemballagesystem
JPH0241486A (ja) 広いニップをもつプレス
ATE381490T1 (de) Behälter aus thermoplastischem material
CA2428854A1 (en) Non-contact floating device for turning a floating web
SI1652615T1 (sl) Vpenjalna naprava za distanäśne laserske varilne naprave s posameznimi s hidravliäśno tekoäśino pod pritiskom aktiviranimi stojkami
CN104684697A (zh) 具有至少一个可控变形弹性元件的操作装置
GB2461005A (en) Valve arrangement
DE60219080D1 (de) Luftablassvorrichtung für aufblasbare Gegenstände mit starren Oberflächen
WO2008035324A3 (en) Apparatus for fluid treatment
CN101447445B (zh) 工件支承装置
DE50203200D1 (de) Ventil
JP4049152B2 (ja) エアベアリング装置
JP2006029412A (ja) 静圧形直動案内ユニット
ITVI970191A0 (it) Gruppo valvola per la regolazione del flusso di fluidi in pressione.
TW200510234A (en) Pressing unit for separating the diecut blanks of a sheet

Legal Events

Date Code Title Description
8364 No opposition during term of opposition