IT1400493B1 - Dispositivo e metodo per il posizionamento preciso di un pezzo miniaturizzato in una sede di posizionamento. - Google Patents

Dispositivo e metodo per il posizionamento preciso di un pezzo miniaturizzato in una sede di posizionamento.

Info

Publication number
IT1400493B1
IT1400493B1 ITMI2010A001024A ITMI20101024A IT1400493B1 IT 1400493 B1 IT1400493 B1 IT 1400493B1 IT MI2010A001024 A ITMI2010A001024 A IT MI2010A001024A IT MI20101024 A ITMI20101024 A IT MI20101024A IT 1400493 B1 IT1400493 B1 IT 1400493B1
Authority
IT
Italy
Prior art keywords
positioning
precisely
positioning seat
miniaturized piece
miniaturized
Prior art date
Application number
ITMI2010A001024A
Other languages
English (en)
Inventor
Danilo Cambiaghi
Gianluigi Frigerio
Original Assignee
Mec Di Prec E G3 Di Gamba Walter & C S N C Off
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mec Di Prec E G3 Di Gamba Walter & C S N C Off filed Critical Mec Di Prec E G3 Di Gamba Walter & C S N C Off
Priority to ITMI2010A001024A priority Critical patent/IT1400493B1/it
Publication of ITMI20101024A1 publication Critical patent/ITMI20101024A1/it
Application granted granted Critical
Publication of IT1400493B1 publication Critical patent/IT1400493B1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H01L21/67787—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks with angular orientation of the workpieces

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automobile Manufacture Line, Endless Track Vehicle, Trailer (AREA)
ITMI2010A001024A 2010-06-09 2010-06-09 Dispositivo e metodo per il posizionamento preciso di un pezzo miniaturizzato in una sede di posizionamento. IT1400493B1 (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
ITMI2010A001024A IT1400493B1 (it) 2010-06-09 2010-06-09 Dispositivo e metodo per il posizionamento preciso di un pezzo miniaturizzato in una sede di posizionamento.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITMI2010A001024A IT1400493B1 (it) 2010-06-09 2010-06-09 Dispositivo e metodo per il posizionamento preciso di un pezzo miniaturizzato in una sede di posizionamento.

Publications (2)

Publication Number Publication Date
ITMI20101024A1 ITMI20101024A1 (it) 2011-12-10
IT1400493B1 true IT1400493B1 (it) 2013-06-11

Family

ID=43587096

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI2010A001024A IT1400493B1 (it) 2010-06-09 2010-06-09 Dispositivo e metodo per il posizionamento preciso di un pezzo miniaturizzato in una sede di posizionamento.

Country Status (1)

Country Link
IT (1) IT1400493B1 (it)

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3160443A (en) * 1962-10-23 1964-12-08 Western Electric Co Apparatus for pneumatically conveying articles
JPS57139937A (en) * 1981-02-23 1982-08-30 Fujitsu Ltd Alignment device for discoid body with orientation flat section
JPS5884311A (ja) * 1981-11-12 1983-05-20 Seiko Instr & Electronics Ltd 矩形板片の位置決め装置
JPS5957448A (ja) * 1982-09-27 1984-04-03 Fujitsu Ltd 半導体装置の製造機器
JPS59121226A (ja) * 1982-12-27 1984-07-13 Fujitsu Ltd エアベアリング
US4543970A (en) * 1983-02-21 1985-10-01 Tokyo Shibaura Denki Kabushiki Kaisha Automatic set-up system
US4573830A (en) * 1984-06-21 1986-03-04 International Business Machines Corporation Chip decelerator
US4676699A (en) * 1985-04-11 1987-06-30 Intel Corporation Semiconductor wafer guides
US6781684B1 (en) * 2000-11-07 2004-08-24 Donald L. Ekhoff Workpiece levitation using alternating positive and negative pressure flows
TWI222423B (en) * 2001-12-27 2004-10-21 Orbotech Ltd System and methods for conveying and transporting levitated articles
US7513716B2 (en) * 2006-03-09 2009-04-07 Seiko Epson Corporation Workpiece conveyor and method of conveying workpiece
WO2008062831A1 (fr) * 2006-11-22 2008-05-29 Sinfonia Technology Co., Ltd. Dispositif de transport par aéroflottaison et procédé de transport à l'aide de l'air
US7764076B2 (en) * 2007-02-20 2010-07-27 Centipede Systems, Inc. Method and apparatus for aligning and/or leveling a test head

Also Published As

Publication number Publication date
ITMI20101024A1 (it) 2011-12-10

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