WO2008062831A1 - Dispositif de transport par aéroflottaison et procédé de transport à l'aide de l'air - Google Patents

Dispositif de transport par aéroflottaison et procédé de transport à l'aide de l'air Download PDF

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Publication number
WO2008062831A1
WO2008062831A1 PCT/JP2007/072549 JP2007072549W WO2008062831A1 WO 2008062831 A1 WO2008062831 A1 WO 2008062831A1 JP 2007072549 W JP2007072549 W JP 2007072549W WO 2008062831 A1 WO2008062831 A1 WO 2008062831A1
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WO
WIPO (PCT)
Prior art keywords
air
air levitation
unit
downstream
transport
Prior art date
Application number
PCT/JP2007/072549
Other languages
English (en)
Japanese (ja)
Inventor
Yasuyoshi Kitazawa
Yoshimasa Suda
Original Assignee
Sinfonia Technology Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2006315498A external-priority patent/JP2008130892A/ja
Priority claimed from JP2007210201A external-priority patent/JP5119561B2/ja
Application filed by Sinfonia Technology Co., Ltd. filed Critical Sinfonia Technology Co., Ltd.
Publication of WO2008062831A1 publication Critical patent/WO2008062831A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Definitions

  • the present invention relates to a transport device for a planar substrate such as a semiconductor substrate or a liquid crystal substrate, and in particular, an air levitation transport device that can be transported stably without being damaged or damaged by being levitated by air. And an air conveying method.
  • a floater 101 shown in FIGS. 8A and 8B is provided with a pair of inward slit nozzles 102 at its end, and ejects fluid in a direction parallel to the moving direction of the steel strip 103 to float the steel strip 103.
  • the fluid ejected from the slit nozzle 102 changes its direction on the lower surface of the strip steel 103 and generates a static pressure due to a change in momentum when it flows out, so that the strip steel 103 floats.
  • the end of the transported object does not cross (over) the floater 101.
  • the end of the substrate needs to climb over the floater 101 sequentially, and the substrate swells up and down between the floaters 101, causing vibration. Or the edge of the substrate collides with the floater.
  • Patent Document 1 JP-A-2005-159141
  • Non-patent document 1 Takahara, Hirai, Tanizaki, Kanda, Tachihara, “Practical application of steel strip floating equipment for steelmaking process line”, Mitsubishi Heavy Industries Technical Review, Vol. 29, No. l (1992-1), p36— 41
  • various transport devices that can be transported without being damaged or scratched by being levitated by air have been proposed.
  • liquid crystal substrates and the like have been increased in size, and it has been difficult to say that it is sufficient as an air levitation transfer device that can stably transfer the liquid crystal substrate.
  • the above-described conventional technique is such that the forward end (downstream end) of the object to be transported passes the downstream end in the transport direction of the air levitation unit and then squeezes downward to form an air levitation unit or the like ahead. This prevents interference.
  • the air levitation transfer device is formed by arranging a plurality of air levitation units below the transfer surface, and the specifications enable the specification to be easily and flexibly set according to the size and weight of the object to be transferred.
  • the distance between the air levitation units may increase, so that the flying height of the conveyed object near the downstream end of the air levitation unit in the transfer direction is further increased.
  • a configuration is desired.
  • an air levitation transport apparatus includes a plurality of air levitation units that form a transport path for a planar substrate, and ejects air from the air levitation unit.
  • An air levitation transport apparatus for levitating and transporting the planar substrate wherein a plurality of air levitation unit rows in which the air levitation units are arranged in a line in the transport direction of the planar substrate are arranged in parallel.
  • the air levitation unit includes a mechanism for ejecting air from both side directions orthogonal to the transport direction of the planar substrate toward the lower surface of the planar substrate.
  • a plurality of rows of air levitation units are arranged in parallel, and in each air levitation unit, air is ejected from both sides orthogonal to the plane substrate transport direction toward the lower surface of the plane substrate.
  • the plane substrate can be stably conveyed by selecting the number and arrangement of the air levitation units according to the size and weight of the plane substrate such as a liquid crystal substrate.
  • the air levitation transport device can be configured flexibly.
  • the air levitation units are arranged in the form of two rails, so that the plane substrate can be stably levitated.
  • the air levitation unit includes a mechanism for ejecting air from the downstream side in the transport direction of the planar substrate toward the lower surface of the planar substrate. Say it.
  • the air levitation transport apparatus of the present invention is characterized in that the air levitation unit includes a mechanism for ejecting air from the downstream side and the upstream side in the transport direction of the planar substrate toward the lower surface.
  • the air levitation unit includes a back plate that faces the lower surface of the flat substrate and forms a transport path of the flat substrate, and a transport path direction of the back plate. It is located on both sides of the parallel side, and blows out air toward the upper center of the back plate And a pair of air supply pipes each having an inclined nozzle.
  • the air supply pipes are arranged on both sides of the back plate forming the conveyance path of the planar substrate, and air is ejected upward from the inclined nozzle provided in the air supply pipe toward the center of the back plate.
  • the air levitation unit is located on the side surface on the downstream side orthogonal to the transport path direction of the back plate, and is directed upward or above the center portion of the back plate.
  • An air supply pipe having a nozzle for ejecting air is further provided.
  • an air supply pipe is disposed on the downstream side of the back plate, and air is ejected from an inclined nozzle provided in the air supply pipe toward the upper side of the back plate or the upper center portion. For this reason, it is possible to prevent the front end portion from interfering with the air levitation unit when the planar substrate changes over the air levitation unit with a simple configuration using the air supply pipe.
  • the air transfer method of the present invention is composed of a plurality of air levitation units that form a transfer path for a flat substrate, and air levitation transfer that blows air from the air levitation unit to float the flat substrate for transfer.
  • An air transfer method in an apparatus comprising: arranging a plurality of rows of air levitation units in which the air levitation units are arranged in a line in the direction of conveyance of the planar substrate in parallel; and And a procedure of ejecting air from both sides perpendicular to the transport direction of the planar substrate toward the lower surface of the planar substrate.
  • each air levitation unit ejects air from both sides orthogonal to the plane substrate transport direction toward the lower surface of the plane substrate.
  • the plane substrate can be stably conveyed by selecting the number and arrangement of the air levitation units according to the size and weight of the plane substrate such as a liquid crystal substrate.
  • the air levitation transport device can be configured flexibly.
  • the air levitation unit disposed below includes side ejection portions that eject air to the center side in the unit width direction on both sides of the unit width direction orthogonal to the conveyance direction of the object to be conveyed, and the conveyance
  • a downstream jetting portion that jets air to the upstream side in the transport direction at the downstream end in the transport direction, and the side jetting portion in the vicinity of the downstream end in the transport direction is the central side in the unit width direction and the It is characterized by jetting air diagonally downstream in the transport direction.
  • the present invention is directed to an air levitation conveyance device that conveys a sheet-like object to be conveyed on a conveyance surface while being levitated from the conveyance surface by air, and is a single unit disposed below the conveyance surface.
  • the air levitation unit includes side jetting portions that jet air to the center side in the unit width direction on both sides in the unit width direction orthogonal to the transport direction of the transported object, and a downstream end in the transport direction. And a downstream jetting part for jetting air to the upstream side in the transport direction.
  • At least one of the side portion jetting portion and the downstream side jetting portion is inclined upwardly toward the lower surface of the transported object. It is characterized by ejecting.
  • the present invention provides that at least one of the side part jetting part and the downstream jetting part is either the both sides in the unit width direction or the downstream end in the transporting direction.
  • a notch that opens from the position corresponding to the air outlet provided in the jet base toward the air jet direction in the side jet part or the downstream jet part is provided, and the notch is provided in the jet base and the second jet part.
  • the present invention is the air levitation transport device according to claim 4, wherein the ejection base is provided integrally with a unit main body of the air levitation unit, and the air is passed through the unit main body.
  • a passage is provided, and a through hole extending from an outer surface of the ejection base to the air passage is used as an air ejection port of the ejection base.
  • the present invention is the air levitation transport apparatus according to claim 5, wherein an outer surface of the ejection base portion that opens the air ejection port is provided to be inclined with respect to the transport surface.
  • the present invention provides an air levitation unit used in an air levitation conveyance device that conveys a sheet-like object to be conveyed on a conveyance surface while floating from the conveyance surface with air.
  • On both sides of the unit width direction orthogonal to each other there are provided side jetting portions for jetting air to the center side in the unit width direction, and air is jetted to the upstream end in the transport direction at the downstream end in the transport direction.
  • a downstream jet section, and at least one of the side jet section and the downstream jet section overlaps with the jet base provided on both sides of the unit width direction or the downstream end in the transport direction, and the jet base.
  • Said A notch that opens toward the air ejection direction at the partial ejection part or the downstream ejection part is provided, and the notch is sandwiched between the ejection base and the second plate, so that the side ejection part or the downstream ejection part is An air ejection path is formed.
  • the present invention provides an air levitation transport method for transporting a sheet-like object to be conveyed on a conveyance surface while floating from the conveyance surface by air, in a unit width direction orthogonal to the conveyance direction of the object to be conveyed. Air is ejected from both sides to the center side in the unit width direction, and air is ejected from the downstream end in the transport direction to the upstream side in the transport direction, and the unit width direction in the vicinity of the downstream end in the transport direction From both sides, air is jetted obliquely toward the center in the unit width direction and downstream in the transport direction.
  • the air levitation transport device of the present invention can be flexibly selected by selecting the number and arrangement of air levitation units according to the size and weight of a flat substrate such as a liquid crystal substrate.
  • the flat substrate can be transported in a stable state.
  • an air levitation unit with a simple configuration can be used, the manufacturing cost of the air levitation transfer device can be reduced. Reduce with force S
  • air is ejected from both sides of the air levitation unit in the unit width direction to the center side in the unit width direction so that the air collides with each other on the center side in the unit width direction and is conveyed.
  • An air pool in which the pressure is increased with respect to the outside air is generated between the object and the conveying surface. Since the pressure in this air pool acts on a relatively large area of the object to be conveyed, the amount of air jetted is smaller than when air is blown upward and the object to be conveyed is lifted only by the local pressure.
  • the conveyed object can be efficiently levitated by (air consumption).
  • air is ejected from both sides of the unit width direction to the center side in the unit width direction, and also from the downstream end of the transport direction in the transport direction upstream.
  • air is ejected from both sides of the unit width direction to the center side in the unit width direction, and also from the downstream end of the transport direction in the transport direction upstream.
  • air is obliquely ejected from both sides in the unit width direction toward the center in the unit width direction and downstream in the transport direction,
  • the air pressure is increased by colliding with the air ejected from the downstream end in the transport direction, and the escape of the air in the air pool generated at the relevant part to the upstream side in the transport direction is also suppressed, so that the air pressure at the relevant part is efficiently increased. It is possible to increase the floating amount of the conveyed object with low air consumption.
  • the transported object By increasing the flying height of the transported object in the vicinity of the downstream end of the air levitation unit in the transport direction, the transported object can easily get over the gap portion between the air levitation units. In addition to widening the set width of the gap, the allowable range of positional deviation in the height direction between the air levitation units is also widened, and the degree of freedom in designing the air levitation transport device can be increased.
  • the side ejection section and the downstream ejection section attach the first and second plates to the ejection base. If the notch force provided on the first plate is sandwiched between the jet base and the second plate to form an air jet path in the side jet part and the downstream jet part, By simply exchanging the plate and changing the notch, it is possible to easily and flexibly set the side jetting portion and the downstream jetting portion having a desired air jetting direction.
  • the side jet part and the downstream jet part have the jet base integrally provided in the unit main body, an air passage is provided in the unit main body, and the penetrating from the outer surface of the jet base to the air passage is provided. If the hole is used as the air outlet of the jet base, the configuration of the side jet portion and the downstream jet portion, and thus the configuration of the air levitation unit can be simplified.
  • the flat first and second plates can be attached to the outer surface by simply attaching the first and second plates. Air can be ejected obliquely upward toward the lower surface of the conveyed product.
  • FIG. 1A is a diagram showing a configuration example of a first embodiment of an air levitation transfer apparatus.
  • FIG. 1B is a diagram showing a configuration example of a first embodiment of an air levitation transfer apparatus.
  • FIG. 1C is a diagram showing a configuration example of a first embodiment of an air levitation transfer apparatus.
  • FIG. 2A is a diagram showing a configuration example of an air levitation unit in a second embodiment of an air levitation transport apparatus.
  • FIG. 2B is a diagram showing a configuration example of an air levitation unit in the second embodiment of the air levitation transport apparatus.
  • FIG. 2C is a diagram showing a configuration example of an air levitation unit in the second embodiment of the air levitation transport apparatus.
  • FIG. 3 is a diagram showing a configuration example of a second embodiment of an air levitation transfer apparatus.
  • FIG. 4A is a diagram showing a configuration example of an air levitation unit in a third embodiment of an air levitation transport apparatus.
  • FIG. 4B is a diagram showing a configuration example of an air levitation unit in the third embodiment of the air levitation transport apparatus.
  • FIG. 4C is a diagram showing a configuration example of an air levitation unit in the third embodiment of the air levitation transport apparatus.
  • FIG. 5 is a diagram showing a configuration example of a third embodiment of the air levitation transfer apparatus.
  • FIG. 6A is a diagram showing another configuration example of the air levitation unit.
  • FIG. 6B is a diagram showing another configuration example of the air levitation unit.
  • FIG. 7 is a diagram showing another configuration example of the air levitation unit.
  • FIG. 8A is a diagram showing a configuration of a prior art floater.
  • FIG. 8B is a diagram showing a configuration of a prior art floater.
  • FIG. 9 is a diagram showing a configuration of a conventional substrate transfer apparatus.
  • FIG. 10 is a perspective view of an air levitation transfer device according to a fourth embodiment of the present invention. 11] A plan view of the air levitation unit constituting the air levitation transport device.
  • FIG. 12 is a cross-sectional view taken along line AA in FIG.
  • FIG. 13 is a cross-sectional view taken along the line BB in FIG.
  • FIG. 15 is a plan view corresponding to FIG. 11 in which a part of the air levitation unit is disassembled. 16] A plan view corresponding to FIG. 15 in the fifth embodiment of the present invention. FIG. 17 is a cross-sectional view corresponding to FIG. 13, showing a modification of each of the above embodiments.
  • First plate in transport direction Second plate in transport direction: Air outlet
  • FIG. 1 is a diagram showing a configuration example of a first embodiment of an air levitation transport apparatus according to the present invention.
  • FIG. 1A is a diagram showing an example of an air levitation unit 1 which is a constituent unit of an air levitation transport apparatus of the present invention.
  • the air levitation unit 1 is configured by arranging a pair of air supply pipes 11 and 12 on both sides of a back plate 13. Compressed air is supplied to the air supply pipes 11 and 12.
  • the air supply pipes 11 and 12 are provided with inclined nozzles 21, and are configured to eject air toward the diagonally upper side of the back plate 13 as indicated by arrows.
  • FIG. 1C is a diagram showing a configuration example of the air levitation transport device of the present invention, in which the air levitation unit 1 is configured by arranging two rails in the transport direction A of the flat substrate 10. .
  • the force floating substrate 1 showing an example in which two rows of air levitation units 1 are arranged may be three or more rows according to the size and weight of the planar substrate 10.
  • the air levitation transport device 1 can be flexibly configured according to the size and weight of the flat substrate 10 by arranging the air levitation units 1 having a simple configuration in parallel.
  • each air levitation unit 1 has a simple configuration and can reduce the manufacturing cost of the air levitation transport device.
  • FIGS. 2 and 3 show a configuration example of the second embodiment of the air levitation transfer apparatus of the present invention. It is a figure.
  • FIG. 2A is a diagram showing a configuration example of the air levitation unit 2 in the second embodiment of the air levitation transport apparatus.
  • the air levitation unit 2 shown in FIG. 2A is obtained by adding an air supply pipe 31 to the front surface side (downstream side in the plane substrate transport direction) of the back plate 13 of the air levitation unit 1 shown in FIG. 1A.
  • the air supply pipe 31 is provided with an inclined nozzle 32.
  • FIG. 3 shows an example in which the air levitation unit 2 is configured by arranging the air levitation units 2 in a rail shape toward the conveyance direction A of the flat substrate 10.
  • the air levitation unit 2 is set to 3 IJ or more in accordance with the force S shown in the example in which two rows of air levitation units 2 are arranged, the size and weight of the flat substrate 10.
  • the air levitation transfer device can be configured flexibly according to the size and weight of the planar substrate 10.
  • FIGS. 4 and 5 are diagrams showing a configuration example of the third embodiment of the air levitation transfer apparatus of the present invention.
  • FIG. 4A is a diagram showing a configuration example of the air levitation unit 2 in the third embodiment of the air levitation transport apparatus.
  • the air levitation unit 2 shown in FIG. 4A has an air supply pipe 31 on the front side and the rear side (downstream side and upstream side in the plane substrate transfer direction) of the back plate 13 of the air levitation unit 1 shown in FIG. 1A. And 31—1 are added.
  • the air supply pipes 31 and 31-1 are provided with inclined nozzles 32 and 32-1, and the rigidity of the flat substrate 10 is small as shown in FIG. 4B. When the tip sagging portion 10a of the flat substrate 10 is generated, air is blown upward from the inclined nozzle 32-1 toward the upper side of the back plate 13 to lift the tip sacrificial portion 10a of the flat substrate 10 upward.
  • FIG. 5 shows an example in which the air levitation unit 2 is configured by arranging the air levitation units 2 in a rail shape toward the conveyance direction A of the flat substrate 10.
  • the air levitation unit 2 is set to 3 IJ or more in accordance with the force S shown in the example in which two rows of air levitation units 2 are arranged, the size and weight of the flat substrate 10.
  • the air levitation transfer device can be flexibly configured according to the size and weight of the planar substrate 10.
  • the air levitation unit 1 shown in FIG. 1A can be configured as shown in FIGS. 6A and 6B.
  • the air levitation unit 3 shown in FIG. 6A has an air supply path 41 and an inclined nozzle 42 formed in the back plate 13. As a result, it is possible to omit the air supply pipes 11 and 12 shown in FIG. 1A.
  • FIG. 6B shows a cross-sectional view in the AA ′ direction of FIG. 6A.
  • the air supply pipe 31 and the inclined nozzle 32 shown in FIG. 2 can also be formed in the back plate 13.
  • the air supply pipes 31 and 31-1 and the inclined nozzles 32 and 32-1 shown in FIG. 4 can also be formed in the back plate 13.
  • the air levitation unit 4 shown in FIG. 7 has a configuration in which the air levitation unit 3 shown in FIGS. 6A and 6B is a basic configuration, and an inclined nozzle 43 is added to the air supply path 41.
  • the force described in the embodiment of the present invention is not limited to the above-described illustrated examples.
  • the air levitation transport apparatus of the present invention is not limited to the above-described examples. Of course, various changes can be made.
  • An air levitation transfer device 51 shown in FIG. 10 floats a plane substrate 53 such as a flat substrate along the surface from a substantially horizontal transfer surface 52 (see FIGS. 12 and 13) by air, and in this state is not shown in the figure. It is transported in one direction along the transport surface 52 by a feeding mechanism. Below the transfer surface 52, a plurality of air levitation units 55 are arranged in a grid pattern with a predetermined interval, and air is appropriately ejected from each of the air levitation units 55, so that the plane substrate is transferred from the transfer surface 52. 53 is raised. The transport direction of the flat substrate 53 is indicated by an arrow F in the figure.
  • the flat substrate 53 has, for example, a rectangular shape in plan view, and the flat substrate 53 is sequentially transported at a predetermined interval.
  • the front end portion 53a (downstream end portion) of the planar substrate 53 in the transport direction sequentially passes above the gap between the air levitation units 55.
  • the air levitation units 55 are arranged in a plurality of rows IJ (two rows in FIG. 10) along the conveyance direction, and the flat substrate 53 is levitated and conveyed on the conveyance surface 52 in a state straddling the plurality of rows.
  • FIG. 10 shows an example in which the air levitation units 55 are arranged in two rows.
  • the air levitation units 55 are arranged in a row or in accordance with the size and weight of the planar substrate 53 and the scale of the transfer line. They may be arranged in three or more rows and the number and arrangement thereof may be changed as appropriate. That is, the air levitation transport device 51 is configured by appropriately arranging a plurality of air levitation units 55, so that the specifications can be set easily and flexibly according to the size, weight, etc. of the flat substrate 53, and the safety of the flat substrate 53 can be reduced. Enables the specified transport.
  • the air levitation unit 55 has a long rectangular shape in the transport direction in a plan view of the transport surface 52, and is a substantially horizontal thick plate-like unit that forms the appearance thereof.
  • Main body 56, side jet parts 57 provided on both sides in the unit width direction orthogonal to the transport direction, and downstream jet parts 58 provided at the downstream end in the transport direction are mainly used.
  • the upper surface of the unit body 56 is disposed on the same plane as the transfer surface 52.
  • the side ejection section 57 ejects air toward the center in the unit width direction, and the downstream ejection section 58 ejects air upstream in the transport direction.
  • each of the ejection parts 7 and 8 is indicated by arrow H in the figure, and the center line in the unit width direction is indicated by symbol C.
  • the air ejection direction of each ejection part 57, 58 is directed obliquely upward so as to be directed toward the lower surface of the flat substrate 53 passing therethrough (see FIGS. 12 and 13).
  • the air levitation unit 55 is provided in a rectangular shape that is long in the transport direction, a plurality of (three in this embodiment) side erection units 57 are provided in the transport direction. It is provided separately.
  • the side jetting portion 57 located closest to the downstream side in the transport direction (positioned in the vicinity of the downstream end in the transport direction) in the air levitation unit 55 may be denoted by reference numeral 57 ′.
  • the side jetting portion 57 ′ located on the most downstream side in the transport direction jets air obliquely in a plan view of the transport surface 52 toward the center side in the unit width direction and the downstream side in the transport direction.
  • air is further ejected from the downstream end in the transport direction to the upstream side in the transport direction, thereby causing an air reservoir (indicated by reference numeral 59 in the figure) that occurs in that portion.
  • an air reservoir indicated by reference numeral 59 in the figure
  • each ejection portion 57, 58 ejects air obliquely upward toward the lower surface of the flat substrate 53, so that the planar substrate 53 is also levitated by the upward component of the ejection pressure of the air.
  • both sides of the unit width direction force are blown obliquely toward the center side in the unit width direction and the downstream side in the conveyance direction, thereby efficiently increasing the air pressure at the corresponding part.
  • the flying height of the flat substrate 53 is increased.
  • the unit main body 56 of the air floating unit 55 is hollow, and its internal space is an air passage 56a to which compressed air from an air supply device (not shown) is supplied.
  • the upper surface sides of both side portions of the main body 56 in the unit width direction are inclined so as to be located downward toward the outer side in the unit width direction, and this portion constitutes the ejection base 61 in the side ejection portion 57.
  • the upper surface side of the downstream end portion of the unit body 56 in the transport direction is inclined so as to be positioned lower toward the downstream side in the transport direction, and this portion constitutes the ejection base portion 66 in the downstream ejection portion 58.
  • the inclined outer surfaces (upper surfaces) of the ejection bases 61 and 66 are denoted by reference numerals 6 la and 66a in the figure.
  • the side ejection part 57 includes the ejection base part 61, a first plate 62 in the transport direction attached so as to overlap the ejection base part 61, and the first plate 62. And a second plate 63 in the transport direction attached so as to overlap.
  • the downstream-side ejection part 58 has the ejection base part 66, a first plate 67 attached so as to overlap the ejection base part 66, and a second plate 68 attached so as to overlap the first plate 67. It becomes.
  • the ejection base 61 of the side ejection section 57 is provided with a plurality of air ejection ports 64 arranged in the transport direction.
  • the jet base 66 of the downstream jet part 58 is provided with a plurality of air jets 69 arranged in the unit width direction.
  • the air outlets 64 and 69 are through holes extending from the outer surfaces 61a and 66a of the jet bases 61 and 66 to the air passage 56a in the unit body 56, and the compressed air supplied into the air passage 56a is externally supplied. It can be ejected.
  • the first plate 62 in the conveying direction of the side ejection part 57 has a notch 62a that opens from the position facing each air ejection port 64 of the ejection base 61 toward the air ejection direction in the side ejection part 57.
  • the first plate 62 in the transport direction of the side jet part 57 ′ located on the most downstream side in the transport direction is the unit from the position facing each air jet port 64.
  • a notch 12a that opens toward the center in the width direction and toward the downstream side in the transport direction by being inclined with respect to the unit width direction and the transport direction in plan view of the transport surface 52 (see FIG.
  • the first plate 62 in the transport direction of the other side ejection portions 57 except for the side ejection portion 57 ′ is provided from a position facing each air ejection port 64.
  • a notch 62a that opens along the unit width direction in a plan view of the conveyance surface 52 is provided toward the center side in the unit width direction.
  • the first plate 67 of the downstream ejection portion 58 has a notch 17a that opens from the position facing each air ejection port 69 of the ejection base 66 toward the air ejection direction in the downstream ejection portion 58.
  • the first plate 67 of the downstream-side ejection portion 58 has a notch that opens along the conveyance direction in a plan view of the conveyance surface 52 from the position facing each air ejection port 69 toward the upstream side in the conveyance direction. 17a is provided.
  • the second plate 63 in the transport direction of each of the ejection portions 7 and 8, and the downstream 68 in the transport direction are flat plate-shaped cover members having no notches, and the second plate 63 in the transport direction.
  • the downstream 68 in the transport direction is overlapped with the corresponding first plate 62 in the transport direction and 67 on the downstream in the transport direction so as to cover the outside of the notches 62a and 67a, and these are fixed to the corresponding ejection bases 61 and 66.
  • each of the plates 61, 63, 67, 68 (especially the first plate 62 in the transport direction, downstream of the transport direction) with respect to the ejection bases 61, 66 fixedly provided in the unit body 56 It is possible to easily and flexibly set the air ejection direction of each ejection part 57, 58 only by replacing 67).
  • the outer surface 61a of the ejection base 61 of the side ejection section 57 is inclined so that it is positioned downward toward the outside in the unit width direction (that is, positioned upward toward the center side in the unit width direction).
  • the outer surface 66a of the ejection base 66 of the downstream ejection portion 58 is inclined so that the outer surface 66a is positioned downward toward the downstream side in the transport direction (i.e., upward toward the upstream side in the transport direction).
  • the air levitation transport device 51 in the fourth embodiment transports the sheet-like flat substrate 53 on the transport surface 52 while floating from the transport surface 52 with air.
  • the air levitation unit 55 disposed below the transport surface 52 ejects air toward the center side in the unit width direction on both sides of the unit width direction orthogonal to the transport direction of the flat substrate 53.
  • the ejection part 57 ejects air obliquely toward the center in the unit width direction and downstream in the transport direction.
  • air is ejected from both sides of the air floating unit 55 in the unit width direction to the center side in the unit width direction, so that the air collides with each other on the center side in the unit width direction.
  • an air reservoir is formed between the flat substrate 53 and the transfer surface 52 with increased pressure against the outside air. Since the pressure of the air pool acts on a relatively large area of the flat substrate 53, the amount of air blown out is smaller than when air is blown upward and the flat substrate 53 is levitated only by the local pressure.
  • the force S can efficiently lift the flat substrate 53 by air consumption.
  • the flat substrate 53 rides on the gap portion between the air levitation units 55. This increases the range of clearance between the air levitation units 55 and increases the allowable range of displacement in the height direction between the air levitation units 55. This increases the design flexibility of the air levitation transport device 51. Can be increased.
  • the side jetting part 57 and the downstream jetting part 58 jet the air obliquely upward toward the lower surface of the flat substrate 53, so that the air The upward component of the ejection pressure can directly act on the floating of the flat substrate 53.
  • the side ejection portion 57 and the downstream ejection portion 58 are formed by attaching plates 62, 63, 67, 68 to the ejection base 66, and The provided notches 62a and 67a are sandwiched between the ejection bases 61 and 66 and the plates 63 and 68 to form an air ejection path in the side ejection part 57 and the downstream ejection part 58, thereby By simply replacing the first plate 62 and the first plate 67 downstream in the conveying direction and changing the notches 62a and 67a, the side ejection part 57 and the downstream ejection part 58 having the desired air ejection direction can be easily and It can be set flexibly.
  • the side jet part 57 and the downstream jet part 58 are integrally provided with the jet bases 61 and 66 in the unit main body 56, and in the unit main body 56.
  • the configuration of the upstream ejection portion 58 and the configuration of the air levitation unit 55 can be simplified.
  • the outer surfaces 61a and 66a that open the air outlets 64 and 69 in the ejection bases 61 and 66 are provided so as to be inclined with respect to the transport surface 52.
  • the air levitation transfer device 71 of the fifth embodiment is different from that of the fourth embodiment in that the side jetting portion 77 in the vicinity of the downstream end in the transfer direction of the air levitation unit 75 has other
  • the main difference is that the air ejection volume is increased with respect to the side ejection section 57. Therefore, the same parts as those in the fourth embodiment are denoted by the same reference numerals, and the description thereof is omitted.
  • the side ejection part 77 has a notch that is wider than the first plate 62 in that it is the same as the other side ejection part 57 in that air is ejected obliquely upward to the center side in the unit width direction.
  • the air ejection amount is increased with respect to the other side ejection portions 57.
  • the side ejection part 77 ejects air along the unit width direction toward the center side in the unit width direction, but the unit width direction center side and downstream in the transport direction as in the fourth embodiment. Air may be ejected obliquely toward the side. Further, the air ejection direction of the side ejection section 77 is directed obliquely upward so as to face the lower surface of the flat substrate 53 as in the fourth embodiment.
  • the plane substrate 53 can be efficiently levitated with a small air ejection amount (air consumption), and the air levitating unit 5 5
  • the flying height of the flat substrate 53 in the vicinity of the downstream end in the transport direction can be increased efficiently, and the degree of freedom in designing the air levitation transport device 51 can be increased.
  • a concave portion 95a is provided at the center side in the unit width direction on the upper surface side of the air levitation unit 95, The air reservoir may be easily secured.
  • a trapezoidal convex portion 95b may be provided in the concave portion 95a to guide the air from the side jetting portion 97 obliquely upward.
  • the side ejection part 97 shown in FIGS. 17 and 18 is a force provided integrally (fixed) to the unit main body 96. This is fixed to the unit main body 96 as in the above embodiments.
  • It may be configured by a jet base portion provided separately and a separate plate member attached to the jet base portion.
  • it may be a structure provided separately from at least one force unit main body 56 of the side portions and the downstream-side jetting portions 57, 58 of each of the above embodiments.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)

Abstract

Cette invention concerne un dispositif de transport par aéroflottaison dans lequel des rangées d'unités d'aéroflottaison (1) forment une voie de transport pour des substrats plans (10), et les rangées sont disposées en lignes dans la direction du transport des substrats plans de façon à être parallèles les unes aux autres. Chaque unité de flottaison (1) est construite à partir d'une plaque arrière (13) formant une voie de transport pour des substrats plans (10) et à partir d'une paire de tuyaux d'alimentation en air (11, 12) situés sur les deux côtés et en parallèle à la voie de transport et munis de buses inclinées (21) pour faire jaillir de l'air au-dessus du centre de la plaque arrière (13). L'unité d'aéroflottaison peut être formée de façon flexible selon la dimension et le poids des substrats plans, tels que des substrats de cristaux liquides, et les substrats plans peuvent être transportés de façon stable.
PCT/JP2007/072549 2006-11-22 2007-11-21 Dispositif de transport par aéroflottaison et procédé de transport à l'aide de l'air WO2008062831A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2006315498A JP2008130892A (ja) 2006-11-22 2006-11-22 エア浮上搬送装置、およびエア搬送方法
JP2006-315498 2006-11-22
JP2007-210201 2007-08-10
JP2007210201A JP5119561B2 (ja) 2007-08-10 2007-08-10 エア浮上搬送装置、エア浮上ユニット、エア浮上搬送方法

Publications (1)

Publication Number Publication Date
WO2008062831A1 true WO2008062831A1 (fr) 2008-05-29

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PCT/JP2007/072549 WO2008062831A1 (fr) 2006-11-22 2007-11-21 Dispositif de transport par aéroflottaison et procédé de transport à l'aide de l'air

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Country Link
KR (1) KR101470660B1 (fr)
CN (1) CN102267630B (fr)
HK (1) HK1161580A1 (fr)
TW (1) TWI458036B (fr)
WO (1) WO2008062831A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010067896A (ja) * 2008-09-12 2010-03-25 Tokyo Electron Ltd 基板処理装置
JP2010120759A (ja) * 2008-11-20 2010-06-03 Ihi Corp 浮上搬送装置及び浮上ユニット
ITMI20101024A1 (it) * 2010-06-09 2011-12-10 Off Mec Di Prec E G3 Di Gamba Walter Dispositivo e metodo per il posizionamento preciso di un pezzo miniaturizzato in una sede di posizionamento

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5870548A (ja) * 1981-10-22 1983-04-27 Fujitsu Ltd 基板搬送装置
JP2001010724A (ja) * 1999-06-28 2001-01-16 Watanabe Shoko:Kk 浮上搬送装置
JP2006182563A (ja) * 2004-12-01 2006-07-13 Ishikawajima Harima Heavy Ind Co Ltd 浮上装置および搬送装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4171293B2 (ja) * 2002-12-16 2008-10-22 株式会社日本設計工業 薄板状材の搬送方法及び装置
TWI327128B (en) * 2003-07-08 2010-07-11 Daifuku Kk Plate-shaped work piece transporting apparatus
JP4501713B2 (ja) * 2005-02-09 2010-07-14 シンフォニアテクノロジー株式会社 エア浮上搬送装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5870548A (ja) * 1981-10-22 1983-04-27 Fujitsu Ltd 基板搬送装置
JP2001010724A (ja) * 1999-06-28 2001-01-16 Watanabe Shoko:Kk 浮上搬送装置
JP2006182563A (ja) * 2004-12-01 2006-07-13 Ishikawajima Harima Heavy Ind Co Ltd 浮上装置および搬送装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010067896A (ja) * 2008-09-12 2010-03-25 Tokyo Electron Ltd 基板処理装置
JP2010120759A (ja) * 2008-11-20 2010-06-03 Ihi Corp 浮上搬送装置及び浮上ユニット
ITMI20101024A1 (it) * 2010-06-09 2011-12-10 Off Mec Di Prec E G3 Di Gamba Walter Dispositivo e metodo per il posizionamento preciso di un pezzo miniaturizzato in una sede di posizionamento

Also Published As

Publication number Publication date
KR20090094083A (ko) 2009-09-03
KR101470660B1 (ko) 2014-12-09
CN102267630A (zh) 2011-12-07
TWI458036B (zh) 2014-10-21
TW200832593A (en) 2008-08-01
HK1161580A1 (en) 2012-07-27
CN102267630B (zh) 2013-12-25

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