DE602005026300D1 - Plasmadüsengruppe zur bereitstellung einer gleichf - Google Patents

Plasmadüsengruppe zur bereitstellung einer gleichf

Info

Publication number
DE602005026300D1
DE602005026300D1 DE602005026300T DE602005026300T DE602005026300D1 DE 602005026300 D1 DE602005026300 D1 DE 602005026300D1 DE 602005026300 T DE602005026300 T DE 602005026300T DE 602005026300 T DE602005026300 T DE 602005026300T DE 602005026300 D1 DE602005026300 D1 DE 602005026300D1
Authority
DE
Germany
Prior art keywords
plasmaster
equal
providing
group
plasmaster group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005026300T
Other languages
English (en)
Inventor
Sang Hun Lee
Jay Joongsoo Kim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SAIAN CORP
Amarante Technologies Inc
Original Assignee
SAIAN CORP
Amarante Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SAIAN CORP, Amarante Technologies Inc filed Critical SAIAN CORP
Publication of DE602005026300D1 publication Critical patent/DE602005026300D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/461—Microwave discharges
    • H05H1/4622—Microwave discharges using waveguides
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/02—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using physical phenomena
    • A61L2/14—Plasma, i.e. ionised gases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H01J37/32229—Waveguides
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
DE602005026300T 2004-07-30 2005-07-21 Plasmadüsengruppe zur bereitstellung einer gleichf Active DE602005026300D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/902,435 US7806077B2 (en) 2004-07-30 2004-07-30 Plasma nozzle array for providing uniform scalable microwave plasma generation
PCT/US2005/026280 WO2006014862A2 (en) 2004-07-30 2005-07-21 Plasma nozzle array for providing uniform scalable microwave plasma generation

Publications (1)

Publication Number Publication Date
DE602005026300D1 true DE602005026300D1 (de) 2011-03-24

Family

ID=35197707

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005026300T Active DE602005026300D1 (de) 2004-07-30 2005-07-21 Plasmadüsengruppe zur bereitstellung einer gleichf

Country Status (10)

Country Link
US (2) US7806077B2 (de)
EP (1) EP1790201B1 (de)
JP (1) JP4896880B2 (de)
KR (1) KR100871475B1 (de)
CN (1) CN101066000B (de)
AU (1) AU2005269581B2 (de)
CA (1) CA2574114A1 (de)
DE (1) DE602005026300D1 (de)
RU (1) RU2342734C2 (de)
WO (1) WO2006014862A2 (de)

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* Cited by examiner, † Cited by third party
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US20080073202A1 (en) 2008-03-27
JP4896880B2 (ja) 2012-03-14
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RU2342734C2 (ru) 2008-12-27
US7806077B2 (en) 2010-10-05
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AU2005269581B2 (en) 2009-07-16
CA2574114A1 (en) 2006-02-09
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KR100871475B1 (ko) 2008-12-05
WO2006014862A3 (en) 2007-01-18
RU2007107371A (ru) 2008-09-10
EP1790201B1 (de) 2011-02-09
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CN101066000B (zh) 2010-12-08
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