CN1276471C - 薄膜半导体器件及其制造方法 - Google Patents
薄膜半导体器件及其制造方法 Download PDFInfo
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- CN1276471C CN1276471C CNB028022637A CN02802263A CN1276471C CN 1276471 C CN1276471 C CN 1276471C CN B028022637 A CNB028022637 A CN B028022637A CN 02802263 A CN02802263 A CN 02802263A CN 1276471 C CN1276471 C CN 1276471C
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- semiconductor device
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1218—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition or structure of the substrate
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
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Abstract
Description
Claims (7)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001218370A JP4784955B2 (ja) | 2001-07-18 | 2001-07-18 | 薄膜半導体装置の製造方法 |
JP218370/2001 | 2001-07-18 | ||
JP218370/01 | 2001-07-18 | ||
PCT/JP2002/006981 WO2003009351A1 (fr) | 2001-07-18 | 2002-07-10 | Dispositif semi-conducteur a film mince et son procede de production |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2006100594857A Division CN100468765C (zh) | 2001-07-18 | 2002-07-10 | 薄膜半导体器件 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1465092A CN1465092A (zh) | 2003-12-31 |
CN1276471C true CN1276471C (zh) | 2006-09-20 |
Family
ID=19052554
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2006100594857A Expired - Fee Related CN100468765C (zh) | 2001-07-18 | 2002-07-10 | 薄膜半导体器件 |
CNB028022637A Expired - Fee Related CN1276471C (zh) | 2001-07-18 | 2002-07-10 | 薄膜半导体器件及其制造方法 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2006100594857A Expired - Fee Related CN100468765C (zh) | 2001-07-18 | 2002-07-10 | 薄膜半导体器件 |
Country Status (7)
Country | Link |
---|---|
US (2) | US6828178B2 (zh) |
EP (1) | EP1416522A4 (zh) |
JP (1) | JP4784955B2 (zh) |
KR (1) | KR100792323B1 (zh) |
CN (2) | CN100468765C (zh) |
TW (1) | TW558838B (zh) |
WO (1) | WO2003009351A1 (zh) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4310076B2 (ja) * | 2001-05-31 | 2009-08-05 | キヤノン株式会社 | 結晶性薄膜の製造方法 |
JP4813743B2 (ja) * | 2002-07-24 | 2011-11-09 | 株式会社 日立ディスプレイズ | 画像表示装置の製造方法 |
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-
2001
- 2001-07-18 JP JP2001218370A patent/JP4784955B2/ja not_active Expired - Fee Related
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2002
- 2002-07-04 TW TW091114798A patent/TW558838B/zh not_active IP Right Cessation
- 2002-07-10 KR KR1020037003842A patent/KR100792323B1/ko not_active IP Right Cessation
- 2002-07-10 CN CNB2006100594857A patent/CN100468765C/zh not_active Expired - Fee Related
- 2002-07-10 EP EP20020745896 patent/EP1416522A4/en not_active Withdrawn
- 2002-07-10 CN CNB028022637A patent/CN1276471C/zh not_active Expired - Fee Related
- 2002-07-10 WO PCT/JP2002/006981 patent/WO2003009351A1/ja active Application Filing
- 2002-07-11 US US10/192,850 patent/US6828178B2/en not_active Expired - Fee Related
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2004
- 2004-10-29 US US10/975,845 patent/US20050085002A1/en not_active Abandoned
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EP1416522A4 (en) | 2005-09-21 |
TW558838B (en) | 2003-10-21 |
EP1416522A8 (en) | 2004-08-04 |
US20030027410A1 (en) | 2003-02-06 |
WO2003009351A1 (fr) | 2003-01-30 |
CN1465092A (zh) | 2003-12-31 |
US6828178B2 (en) | 2004-12-07 |
KR20040028613A (ko) | 2004-04-03 |
CN100468765C (zh) | 2009-03-11 |
CN1841765A (zh) | 2006-10-04 |
KR100792323B1 (ko) | 2008-01-07 |
JP4784955B2 (ja) | 2011-10-05 |
JP2003031497A (ja) | 2003-01-31 |
US20050085002A1 (en) | 2005-04-21 |
EP1416522A1 (en) | 2004-05-06 |
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