CN108502543B - 一种基板传输装置及方法 - Google Patents

一种基板传输装置及方法 Download PDF

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CN108502543B
CN108502543B CN201710115101.7A CN201710115101A CN108502543B CN 108502543 B CN108502543 B CN 108502543B CN 201710115101 A CN201710115101 A CN 201710115101A CN 108502543 B CN108502543 B CN 108502543B
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CN108502543A (zh
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梁校
李洋
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Shanghai Micro Electronics Equipment Co Ltd
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Priority to JP2018026871A priority patent/JP6484734B2/ja
Priority to TW107106001A priority patent/TWI667554B/zh
Priority to KR1020180021989A priority patent/KR102048627B1/ko
Priority to US15/906,478 priority patent/US10529610B2/en
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Abstract

本发明公开了一种基板传输装置及方法，包括依次设于机械手和工件台之间的基板传送台和基板过渡气浮组件，所述基板传送台包括沿X向平行设置的基板上板传送台和基板下板传送台，所述基板上板传送台和基板下板传送台靠近所述机械手的一侧分别设有基板传送组件。通过设置基板传送台和基板过渡气浮组件，在基板传送台与工件台进行工件交接的过程中，通过使用过渡气浮组件与导向辊轮的配合，实现了基板在机械手和工件台之间高效安全地传输，并且极大降低了传送分系统的成本。

Description

一种基板传输装置及方法
技术领域
本发明涉及光刻机技术领域，具体涉及一种基板传输装置及方法。
背景技术
作为光刻机中的一个重要组成部分，基板传送台的安全传输对提高光刻机的生产效率起着至关重要的作用。基板传送一般通过辊轮台或者气浮台来实现玻璃基板在工件台和机械手之间的交接。随着集成电路制造行业的高速发展，要传输的基板越来越大，这就对传送台传输速度和安全性能有了更高的要求。目前使用的辊轮台和气浮台存在一些不足，其中采用单一的辊轮传送台无法保证基板传输过程中的顺利交接；而采用单一的气浮工件台成本太高，不利于其大规模推广使用。
发明内容
本发明提供了一种基板传输装置及方法，以解决现有技术中存在的问题。
为了解决上述技术问题，本发明的技术方案是：一种基板传输装置，包括依次设于机械手和工件台之间的基板传送台和基板过渡气浮组件，所述基板传送台包括沿X向平行设置的基板上板传送台和基板下板传送台，所述基板上板传送台和基板下板传送台靠近所述机械手的一侧设有基板传送组件。
进一步的，还包括整体框架，所述基板上板传送台和所述基板下板传送台二者相对位置不变，作为一个整体平行于所述整体框架且与所述整体框架滑动连接；所述基板过渡气浮组件固定连接于所述整体框架。
进一步的，所述基板传送组件包括运动模组和设于所述运动模组上的若干吸盘。
进一步的，所述基板过渡气浮组件位于基板与工件台的交接位，与所述基板传送台与所述工件台对应的一侧相接。
进一步的，所述基板传送台滑动设于整体框架上。
进一步的，所述基板上板传送台和基板下板传送台分别包括沿X向依次设置且高度相同的基板导向组件和前端气浮组件。
进一步的，所述基板导向组件包括平行设置的若干导向辊轮排，每个所述导向辊轮排包括沿X向间隔设置的若干导向辊轮。
进一步的，所述基板上板传送台和基板下板传送台还分别包括与所述基板导向组件间隔分布的基板位置调节组件。
进一步的，所述基板位置调节组件包括若干与所述导向辊轮排间隔分布的万向滚珠组，每个所述万向滚珠组包括若干沿X向间隔设置的若干万向滚珠单元。
进一步的，每个所述万向滚珠单元包括支架、设于所述支架上的若干万向滚珠和带动所述支架上下运动的气缸。
进一步的，所述基板上板传送台和基板下板传送台还分别包括沿X向设置于所述基板导向组件两侧的边缘保护组件。
进一步的，所述边缘保护组件包括沿X向设置于所述基板导向组件两侧的若干T型支柱。
本发明还提供一种基板传输装置的传输方法，包括以下步骤：
S1：机械手将基板置于基板传送台上；
S2：设于基板传送台上的基板传送组件吸附所述基板并带动所述基板向工件台方向运动；
S3：当所述基板运动至所述基板传送台靠近所述工件台一侧时，基板过渡气浮组件产生空气膜，将基板顶起并送至所述工件台。
进一步的，所述步骤S2中，所述基板传送组件中的吸盘吸附所述基板，接着运动模组带动所述基板向工件台一侧运动，所述基板的运动带动导向辊轮滚动，对基板的移动进行导向。
进一步的，所述步骤S2中，还包括首先万向滚珠单元中的气缸带动支架上升，使基板置于万向滚珠的平面上，实现位置调整，接着气缸带动支架下降，将基板重新置于基板传送台上，然后所述基板传送组件中的吸盘吸附所述基板，接着运动模组带动其向工件台一侧运动，同时给导向辊轮施加力，使其滚动，对基板的移动进行导向。
本发明提供的基板传输装置及方法，包括依次设于机械手和工件台之间的基板传送台和基板过渡气浮组件，所述基板传送台包括沿X向平行设置的基板上板传送台和基板下板传送台，所述基板上板传送台和基板下板传送台靠近所述机械手的一侧分别设有基板传送组件。通过设置基板传送台和基板过渡气浮组件，在基板传送台与工件台进行工件交接的过程中，通过使用过渡气浮组件与导向辊轮的配合，实现了基板在机械手和工件台之间高效安全地传输，并且极大降低了传送分系统的成本。
附图说明
图1是本发明实施例1中基板传输装置的结构示意图；
图2是本发明实施例1中基板上板传送台的主视图；
图3是本发明实施例1中基板上板传送台的侧视图；
图4a-4b是本发明实施例1中基板靠近工件台时的状态示意图；
图5是本发明实施例2中基板上板传送台的主视图；
图6是本发明实施例2中基板上板传送台的侧视图；
图7a-7b分别是本发明实施例2中万向滚珠单元上升和下降时的状态示意图。
图中所示：1、机械手；2、工件台；3、基板传送台；4、基板过渡气浮组件；5、基板上板传送台；6、基板下板传送台；7、基板；8、整体框架；9、基板导向组件；91、导向辊轮；10、前端气浮组件；11、T型支柱；12、万向滚珠单元；13、支架；14、万向滚珠。
具体实施方式
下面结合附图对本发明作详细描述。
实施例1
如图1-5所示，本发明提供了一种基板传输装置，包括依次设于机械手1和工件台2之间的基板传送台3和基板过渡气浮组件4，所述基板传送台3包括沿X向平行设置的基板上板传送台5和基板下板传送台6，所述基板上板传送台5和基板下板传送台6靠近所述机械手1的一侧分别设有基板传送组件(图中未标出)。具体的，所述基板上板传送台5和基板下板传送台6二者相对位置不变，作为一个整体平行于整体框架8，且与整体框架8滑动连接；所述基板上板传送台5和基板下板传送台6可沿X向移动，基板上板传送台5用于将机械手1上的基板7传送至工件台2，基板下板传送台6则用于将工件台2上的基板7传送至机械手1。所述基板过渡气浮组件4固定连接于整体框架8上。通过设置基板传送台3和基板过渡气浮组件4，实现了基板7在机械手1和工件台2之间高效安全地传输，并且极大降低了传送分系统的成本。
基板上板传送台5与基板下板传送台6的结构相同，当需要将机械手1上的基板7传送至工件台2时，基板上板传送台5和基板下板传送台6整体进行滑动，使基板上板传送台5滑动到与基板过渡气浮组件4对应的位置进行工作；当需要将工件台2上的基板7传送至机械手1上时，基板上板传送台5和基板下板传送台6整体进行滑动，使基板下板传送台6滑动到与基板过渡气浮组件4对应的位置进行工作。
基板上板传送台5和基板下板传送台6可以通过固定在一个框架上作为一个整体，也可以简单地通过某杆状物直接连接，只要二者相对位置不变即可，本发明不对二者的具体连接方式作出限定。
因基板上板传送台5和基板下板传送台6的结构一样，而工作过程是逆过程。以下仅以基板上板传送台5的工作过程为例。
优选的，所述基板传送组件包括运动模组和设于所述运动模组上的若干吸盘，当机械手1将基板置于基板上板传送台5上时，基板传送组件通过吸盘对其进行吸附，接着运动模组带动其向工件台2一侧运动。
如图4a-4b所示，所述基板过渡气浮组件4位于基板7与工件台2的交接位，与所述基板上板传送台与所述工件台2对应的一侧相接，当基板7运动至基板上板传送台靠近工件台2一侧但未达到工件台2时，基板过渡气浮组件4产生空气膜，使基板上浮，以便顺利交接至工件台2上。
如图2-3所示，所述基板传送台3滑动设于整体框架8上，通过整体框架8进行支撑，整体框架8上沿X向设有滑轨，基板传送台3底部设有与所述滑轨对应的滑槽，根据上下板的需要，基板传送台3相对整体框架8沿X向移动，使其中的基板上板传送台5或基板下板传送台6位于机械手1和工件台2之间，且与基板过渡气浮组件4对应的位置。所述基板上板传送台5和基板下板传送台6分别包括沿X向依次设置且高度相同的基板导向组件9和前端气浮组件10，其中基板导向组件9平行设置的若干导向辊轮排，每个所述导向辊轮排包括沿X向间隔设置的若干导向辊轮91，具体的，机械手1将基板7置于导向辊轮91上方，此时基板传送组件中的吸盘对其进行吸附，接着运动模组带动其向工件台2一侧运动，基板的运动带动导向辊轮91转动，使其沿顺时针方向滚动，对基板7的传输起到导向的作用，导向辊轮91良好的导向性能使得基板7顺利沿Y方向运动，并且避免了其沿X方向移动，从而提高了传送精度。
请继续参照图2-3，所述基板上板传送台5和基板下板传送台6还分别包括沿X向设置于所述基板导向组件9两侧的边缘保护组件，所述边缘保护组件包括沿X向设置于所述基板导向组件9两侧的若干T型支柱11，即T型支柱11设有两行，沿X向分设于基板导向组件9的两侧，每行T型支柱11沿Y向间隔排列，T型支柱11的上端高出基板导向组件9，对传输中的基板7进行保护，避免其在X方向发生偏移，进一步提高了传输安全性。
本发明提供的基板传输装置的传输方法，包括以下步骤：
S1：机械手1将基板7置于基板传送台3上，具体的，本实施例主要针对上板过程，此时基板7置于基板传送台3上的基板上板传送台5上，与基板上板传送台5上的导向辊轮91接触。
S2：基板传送组件吸附所述基板7并带动所述基板7沿工件台2方向运动；具体的，所述基板传送组件中的吸盘吸附所述基板7，接着运动模组带动其向工件台2一侧运动，基板7的运动同时给导向辊轮91施加力，使其沿顺时针方向滚动，对基板7的传输起到导向的作用，导向辊轮91良好的导向性能使得基板7顺利沿Y方向运动，并且避免了其沿X方向移动，从而提高了传送精度，在整个过程中，基板导向组件9沿X向设置于基板导向组件两侧的边缘保护组件对其基板进行保护，避免其在X向发生偏移。
S3：当所述基板7运动至所述基板传送台3靠近所述工件台2一侧时，基板过渡气浮组件4产生空气膜，将基板7顶起并送至所述工件台2。需要说明的是，在基板7靠近基板传送台3靠近所述工件台2一侧时，首先前端气浮组件10产生空气膜，将基板7顶起并送至基板过渡气浮组件4上方，接着基板过渡气浮组件4产生空气膜，将基板7顶起并送至工件台2上。
实施例2
与实施例1不同的是，如图5-6所示，所述基板上板传送台5和基板下板传送台6还包括与所述基板导向组件9间隔分布的基板位置调节组件。具体的，所述基板位置调节组件包括若干与所述导向辊轮排间隔分布的万向滚珠组，每个所述万向滚珠组包括若干沿X向间隔设置的若干万向滚珠单元12，其可实现基板在水平方向上的360度调节。每个所述万向滚珠单元12包括支架13、设于所述支架13上的若干万向滚珠14和带动所述支架13上下运动的气缸(图中未标出)。具体的，支架13固定于整体框架8上，当机械手1将基板7置于基板传送台3上时，首先万向滚珠单元12中的气缸带动支架13上升，使基板置于万向滚珠12的平面上，实现位置调整，如图7a所示，由于万向滚珠良好的特性，避免了在调整过程中，划伤基板。待完成基板7的位置调节后，气缸带动支架13下降，如图7b所示，将基板7重新置于基板传送台3上导向辊轮91的位置，此时基板传送组件中的吸盘对其进行吸附，接着运动模组带动其向工件台2一侧运动，同时基板的运动给导向辊轮91施加力，使其沿顺时针方向滚动，对基板7的传输起到导向的作用，导向辊轮91良好的导向性能使得基板7顺利沿Y方向运动，并且避免了其沿X方向移动，从而提高了传送精度。
综上所述，本发明提供的基板传输装置及方法，包括依次设于机械手1和工件台2之间的基板传送台3和基板过渡气浮组件4，所述基板传送台3包括沿X向平行设置的基板上板传送台5和基板下板传送台6，所述基板上板传送台5和基板下板传送台6靠近所述机械手1的一侧分别设有基板传送组件。通过设置基板传送台3和基板过渡气浮组件4，在基板传送台3与工件台2进行工件交接的过程中，通过使用过渡气浮组件4与导向辊轮91的配合，实现了基板7在机械手1和工件台2之间高效安全地传输，并且极大降低了传送分系统的成本。
虽然说明书中对本发明的实施方式进行了说明，但这些实施方式只是作为提示，不应限定本发明的保护范围。在不脱离本发明宗旨的范围内进行各种省略、置换和变更均应包含在本发明的保护范围内。

Claims (15)

1.一种基板传输装置，其特征在于，包括依次设于机械手和工件台之间的基板传送台和基板过渡气浮组件，所述基板传送台包括沿X向平行设置的基板上板传送台和基板下板传送台，所述基板上板传送台和基板下板传送台靠近所述机械手的一侧分别设有基板传送组件，其中，基板上板时，所述基板依次通过所述机械手、所述基板上板传送台、所述基板过渡气浮组件向所述工件台传输，基板下板时，所述基板依次通过所述工件台、所述基板过渡气浮组件、所述基板下板传送台向所述机械手传输，所述X向垂直于所述基板传输方向，所述基板上板传送台和基板下板传送台可沿X向滑动。
2.根据权利要求1所述的基板传输装置，其特征在于，还包括整体框架，所述基板上板传送台和所述基板下板传送台二者相对位置不变，作为一个整体平行于所述整体框架且与所述整体框架滑动连接；所述基板过渡气浮组件固定连接于所述整体框架。
3.根据权利要求1所述的基板传输装置，其特征在于，所述基板传送组件包括运动模组和设于所述运动模组上的若干吸盘。
4.根据权利要求1所述的基板传输装置，其特征在于，所述基板过渡气浮组件位于基板与工件台的交接位，与所述基板传送台与所述工件台对应的一侧相接。
5.根据权利要求1所述的基板传输装置，其特征在于，所述基板传送台滑动设于整体框架上。
6.根据权利要求1所述的基板传输装置，其特征在于，所述基板上板传送台和基板下板传送台分别包括沿X向依次设置且高度相同的基板导向组件和前端气浮组件。
7.根据权利要求6所述的基板传输装置，其特征在于，所述基板导向组件包括平行设置的若干导向辊轮排，每个所述导向辊轮排包括沿X向间隔设置的若干导向辊轮。
8.根据权利要求6所述的基板传输装置，其特征在于，所述基板上板传送台和基板下板传送台还分别包括与所述基板导向组件间隔分布的基板位置调节组件。
9.根据权利要求8所述的基板传输装置，其特征在于，所述基板导向组件包括平行设置的若干导向辊轮排，所述基板位置调节组件包括若干与所述导向辊轮排间隔分布的万向滚珠组，每个所述万向滚珠组包括若干沿X向间隔设置的若干万向滚珠单元。
10.根据权利要求9所述的基板传输装置，其特征在于，每个所述万向滚珠单元包括支架、设于所述支架上的若干万向滚珠和带动所述支架上下运动的气缸。
11.根据权利要求6所述的基板传输装置，其特征在于，所述基板上板传送台和基板下板传送台还分别包括沿X向设置于所述基板导向组件两侧的边缘保护组件。
12.根据权利要求11所述的基板传输装置，其特征在于，所述边缘保护组件包括沿X向设置于所述基板导向组件两侧的若干T型支柱。
13.一种基板传输装置的传输方法，其特征在于，包括以下步骤：
S1：机械手将基板置于基板传送台上；
S2：设于基板传送台上的基板传送组件吸附所述基板并带动所述基板向工件台方向运动；
S3：当所述基板运动至所述基板传送台靠近所述工件台一侧时，基板过渡气浮组件产生空气膜，将基板顶起并送至所述工件台。
14.根据权利要求13所述的传输方法，其特征在于，所述基板传送组件包括运动模组和设于所述运动模组上的若干吸盘，所述基板传送台包括基板上板传送台和基板下板传送台，所述基板上板传送台和基板下板传送台分别包括沿X向依次设置且高度相同的基板导向组件和前端气浮组件，所述基板导向组件包括平行设置的若干导向辊轮排，每个所述导向辊轮排包括沿X向间隔设置的若干导向辊轮，在所述步骤S2中，所述基板传送组件中的吸盘吸附所述基板，接着运动模组带动所述基板向工件台一侧运动，所述基板的运动带动导向辊轮滚动，对基板的移动进行导向。
15.根据权利要求13所述的传输方法，其特征在于，所述基板传送组件包括运动模组和设于所述运动模组上的若干吸盘，所述基板传送台包括基板上板传送台和基板下板传送台，所述基板上板传送台和基板下板传送台分别包括沿X向依次设置且高度相同的基板导向组件和前端气浮组件，所述基板导向组件包括平行设置的若干导向辊轮排，每个所述导向辊轮排包括沿X向间隔设置的若干导向辊轮，所述基板上板传送台和基板下板传送台还分别包括与所述基板导向组件间隔分布的基板位置调节组件，所述基板位置调节组件包括若干与所述导向辊轮排间隔分布的万向滚珠组，每个所述万向滚珠组包括若干沿X向间隔设置的若干万向滚珠单元，每个所述万向滚珠单元包括支架、设于所述支架上的若干万向滚珠和带动所述支架上下运动的气缸，在所述步骤S2中，还包括首先万向滚珠单元中的气缸带动支架上升，使基板置于万向滚珠的平面上，实现位置调整，接着气缸带动支架下降，将基板重新置于基板传送台上，然后所述基板传送组件中的吸盘吸附所述基板，接着运动模组带动其向工件台一侧运动，同时给导向辊轮施加力，使其滚动，对基板的移动进行导向。
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