CA2476389A1 - Test probe alignment apparatus - Google Patents
Test probe alignment apparatus Download PDFInfo
- Publication number
- CA2476389A1 CA2476389A1 CA002476389A CA2476389A CA2476389A1 CA 2476389 A1 CA2476389 A1 CA 2476389A1 CA 002476389 A CA002476389 A CA 002476389A CA 2476389 A CA2476389 A CA 2476389A CA 2476389 A1 CA2476389 A1 CA 2476389A1
- Authority
- CA
- Canada
- Prior art keywords
- stage
- alignment apparatus
- movement
- probe alignment
- rotatable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000000523 sample Substances 0.000 title claims abstract description 109
- 238000012360 testing method Methods 0.000 title claims abstract description 76
- 239000013598 vector Substances 0.000 claims abstract description 11
- 230000009466 transformation Effects 0.000 claims abstract description 6
- 238000000844 transformation Methods 0.000 claims abstract description 5
- 239000000758 substrate Substances 0.000 claims description 42
- 230000007246 mechanism Effects 0.000 claims description 32
- 238000013500 data storage Methods 0.000 claims description 11
- 238000013519 translation Methods 0.000 claims description 6
- 238000004891 communication Methods 0.000 claims description 5
- 230000000694 effects Effects 0.000 claims description 2
- 230000002401 inhibitory effect Effects 0.000 abstract description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 14
- 238000009966 trimming Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 230000004044 response Effects 0.000 description 4
- 238000005553 drilling Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000036316 preload Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
- G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
- Tests Of Electronic Circuits (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US36691202P | 2002-03-22 | 2002-03-22 | |
| US60/366,912 | 2002-03-22 | ||
| PCT/US2003/008913 WO2003083494A1 (en) | 2002-03-22 | 2003-03-21 | Test probe alignment apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2476389A1 true CA2476389A1 (en) | 2003-10-09 |
Family
ID=28675301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002476389A Abandoned CA2476389A1 (en) | 2002-03-22 | 2003-03-21 | Test probe alignment apparatus |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US7119566B2 (enExample) |
| JP (1) | JP4803959B2 (enExample) |
| KR (1) | KR101163972B1 (enExample) |
| CN (1) | CN100430735C (enExample) |
| AU (1) | AU2003218348A1 (enExample) |
| CA (1) | CA2476389A1 (enExample) |
| DE (1) | DE10392404T5 (enExample) |
| GB (1) | GB2400447B (enExample) |
| TW (1) | TWI272392B (enExample) |
| WO (1) | WO2003083494A1 (enExample) |
Families Citing this family (118)
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-
2003
- 2003-03-21 DE DE10392404T patent/DE10392404T5/de not_active Withdrawn
- 2003-03-21 GB GB0416819A patent/GB2400447B/en not_active Expired - Fee Related
- 2003-03-21 US US10/393,955 patent/US7119566B2/en not_active Expired - Lifetime
- 2003-03-21 CN CNB038047314A patent/CN100430735C/zh not_active Expired - Fee Related
- 2003-03-21 TW TW092106285A patent/TWI272392B/zh active
- 2003-03-21 JP JP2003580875A patent/JP4803959B2/ja not_active Expired - Fee Related
- 2003-03-21 WO PCT/US2003/008913 patent/WO2003083494A1/en not_active Ceased
- 2003-03-21 CA CA002476389A patent/CA2476389A1/en not_active Abandoned
- 2003-03-21 AU AU2003218348A patent/AU2003218348A1/en not_active Abandoned
- 2003-03-21 KR KR1020047014885A patent/KR101163972B1/ko not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| AU2003218348A1 (en) | 2003-10-13 |
| US20030178988A1 (en) | 2003-09-25 |
| KR20040105785A (ko) | 2004-12-16 |
| US7119566B2 (en) | 2006-10-10 |
| GB2400447A (en) | 2004-10-13 |
| JP4803959B2 (ja) | 2011-10-26 |
| GB0416819D0 (en) | 2004-09-01 |
| GB2400447B (en) | 2005-10-12 |
| TWI272392B (en) | 2007-02-01 |
| CN1639577A (zh) | 2005-07-13 |
| TW200304545A (en) | 2003-10-01 |
| KR101163972B1 (ko) | 2012-07-09 |
| WO2003083494A1 (en) | 2003-10-09 |
| CN100430735C (zh) | 2008-11-05 |
| DE10392404T5 (de) | 2005-04-14 |
| JP2005521066A (ja) | 2005-07-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| FZDE | Discontinued |